CN112857208A - Single-beam three-degree-of-freedom laser interferometer based on high-speed camera - Google Patents
Single-beam three-degree-of-freedom laser interferometer based on high-speed camera Download PDFInfo
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Abstract
A single-beam three-degree-of-freedom laser interferometer based on a high-speed camera belongs to the technical field of laser application; the method comprises the steps of inputting a laser beam with a single frequency into a Michelson interference structure, enabling a measuring beam and a reference beam to be in non-coaxial interference and forming a single-beam spatial interference fringe image by setting the angle of a reference plane reflector, selecting a high-speed camera with the resolution ratio higher than 300K and the frame rate higher than 10K to effectively receive the single-beam spatial interference fringe image, and finally achieving three-degree-of-freedom signal linear decoupling on each frame of the single-beam spatial interference fringe image through a three-degree-of-freedom decoupling method. The laser interferometer of the invention has no angle decoupling nonlinearity, obviously reduces the periodic nonlinear error, has the advantages of high speed measurement, simple structure, large angle measurement range and easy integration compared with other existing three-degree-of-freedom laser interferometers, and meets the high-precision requirements of the three-degree-of-freedom laser interferometer on displacement and angle measurement.
Description
Technical Field
The invention belongs to the technical field of laser application, and mainly relates to a single-beam three-degree-of-freedom laser interferometer based on a high-speed camera.
Background
The laser interferometry is a basic core technology in precision engineering and plays an important role in the fields of precision metering, high-end equipment manufacturing, large scientific devices and the like. With the rapid development of the above fields in recent years, not only the precision of displacement measurement needs to be improved from nanometer level to sub-nanometer or even picometer level, but also the form of displacement measurement needs to be changed from single-axis displacement measurement to multi-axis/angular displacement three-degree-of-freedom composite measurement.
Currently, the most widely used in the field of multi-axis laser interferometry is a laser interferometer based on parallel beam measurement. The laser interferometer based on the parallel beam measurement can be divided into homodyne/heterodyne laser interferometry according to the principle, different parts of a measured target are measured simultaneously by measuring beams which are parallel to each other in three axes (or multiple axes), the measuring beam of each axis realizes uniaxial displacement measurement, and measuring light spots are arranged on the surface of the measured target according to a mode of Chinese character pin shape or L shape and the like. The three-degree-of-freedom information of the measured target, including displacement, yaw angle and pitch angle, can be solved according to the displacement result obtained by each measuring shaft.
Among a plurality of error sources of the laser interferometer, the periodic nonlinear error is a main bottleneck for limiting the laser interferometer to break through nanometer precision. The Heydemann ellipse Fitting correction method can inhibit the periodic nonlinear error of the zero-difference laser interferometer to a sub-nanometer level (Collett M.J., Tee G.J.Ellipse Fitting for interference method, part 1: Static Methods [ J.]J Opt Soc Am A Opt Image Sci Vis,2014,31(12): 2573-. The non-common-path Heterodyne interference structure for eliminating optical aliasing can restrain the Periodic nonlinear error of the Heterodyne laser Interferometer to a deep sub-nanometer level, wherein the Periodic nonlinear error is restrained to be about 10pm, and the non-common-path Heterodyne interference structure (J J.H., Wu G., Hu P., et al. high Thermal-Stable Heterodyne Interferometer with Minimized Periodic nonlinear analysis) is proposed by Hupengcheng et al of Harbin Industrial university]Appl Opt,2018,57(6):1463-,
P.,
R.,et al.A Heterodyne Interferometer with Periodic Nonlinearities Smaller Than±10pm[J]measurementcience and Technology,2012,23(9):094005), but the non-common-path heterodyne interference structure has a complex composition of elements, the principle of which results in an input beam number one more than that of the conventional common-path heterodyne interference structureIn the multi-axis displacement and angle measurement, the periodic nonlinear errors of the measurement axes are coupled and superposed, so that the method is only applied to single-axis measurement at present.
In addition, the laser interferometer based on the parallel beams generally adopts the traditional prism group to split light step by step, the design and processing difficulty is extremely high, and the parallelism error in the splitting process can be accumulated along with the increase of the number of incident beams. Few laser interferometer leading enterprises such as Keysight (original Agilent), Zygo and the like master a high-precision parallel beam splitting technology realized by using a prism group to split beams step by step, and develop a single multi-axis interference lens group on the basis. The parallelism of the optical axis of the single three-axis interference lens group of Keysight company is as high as 25 mu rad, but the parallelism of the optical axis of the single five-axis interference lens group is reduced to 100 mu rad. In addition, when the measuring distance is large, turbulence in the air can cause different disturbance to each axis of measuring light beams, and the measuring stability of displacement and angle is affected.
Another representative technology capable of realizing precise multi-axis laser interferometry is a differential wavefront laser interferometer based on single beam measurement, an included angle exists between wavefronts of two beams of light forming interference in the differential wavefront interferometer, the phase difference of a reference interference signal and a measurement interference signal in each quadrant on a four-quadrant detector is different, the sum of alternating current signals of four quadrants can be used for calculating displacement, the signals of the left two quadrants and the right two quadrants are subjected to difference to calculate a yaw angle, and the signals of the upper two quadrants and the lower two quadrants are subjected to difference to calculate a pitch angle. Representative are the compact Differential Wavefront interferometers (Yu x., Gillmer s.r., els j.d. beam Geometry, Alignment, and wave front interference Effects on interference Differential Measurement Sensing [ J ] Measurement Science and Technology,2015,26(12):125203) proposed by Gillmer et al, the american scholars, but they suffer from the principle errors of angular decoupling nonlinearity and directly limit the angular Measurement accuracy and range, resulting in a smaller range of angular Measurement than conventional heterodyne laser interferometers, typically on the order of 0.1mrad or less.
In summary, the existing laser interferometer based on parallel beam measurement has the problems of complex structure, great processing difficulty and multi-axis periodic nonlinear coupling, and the differential wavefront interferometer based on single beam measurement has the problems of nonlinear angle coupling and small angle measurement range, thus the improvement of three-degree-of-freedom measurement capability of the laser interferometer is severely limited.
Disclosure of Invention
Aiming at the defects of the existing three-degree-of-freedom laser interferometer, the invention provides a single-beam three-degree-of-freedom laser interferometer based on a high-speed camera, so as to achieve the purpose of comprehensively improving the measurement precision and the angle range of the three-degree-of-freedom laser interferometer.
The purpose of the invention is realized by the following technical scheme:
(1) a single-beam three-degree-of-freedom laser interferometer based on a high-speed camera comprises: the device comprises a first input light beam with single frequency, a Michelson interference structure and a high-speed detection and image decoupling module;
the Michelson interference structure comprises a fixed reference plane reflector and a movable target plane reflector; the first input beam is incident on the Michelson interference structure and then is split into a first measuring beam and a first reference beam; the first measuring beam is reflected at least once by the target plane mirror and the first reference beam is reflected at least once by the reference plane mirror; and at least a portion of the first measuring beam and the first reference beam in the output travel path coincide and form a first single-beam spatial interference fringe image.
(2) The fixed reference plane mirror has a reflective surface that is non-perpendicular to the first reference beam such that the first measurement beam and the first reference beam travel non-coaxially in the output travel path.
(3) The high-speed detection and image decoupling module comprises a high-speed camera with the resolution ratio higher than 300K and the frame rate higher than 10K, and a detection surface of the high-speed detection and image decoupling module can effectively receive a first single-beam spatial interference fringe image formed by a first measuring beam and a first reference beam on an output path.
(4) The laser interferometer adopts a three-degree-of-freedom decoupling method, and can realize three-degree-of-freedom signal linear decoupling on each frame of the first single-beam spatial interference fringe image;
the three-degree-of-freedom decoupling method comprises the following steps:
firstly, respectively selecting a row and a column passing through the center of a space interference fringe image as a horizontal independent component and a vertical independent component in the space interference fringe image detected by a high-speed camera;
secondly, the yaw and the pitch angle of the target plane reflector relative to the reference plane reflector respectively represent a proportional rule with the spatial frequency of the horizontal independent component and the vertical independent component of the spatial interference fringe image, the spatial frequency of each independent component can be obtained in a signal amplitude spectrum after the discrete Fourier transform is carried out on the horizontal independent component and the vertical independent component of the spatial interference fringe image respectively, and the yaw angle and the pitch angle of the target plane reflector relative to the reference plane reflector can be respectively calculated through the spatial frequency of the horizontal independent component and the spatial frequency of the vertical independent component;
and step three, the displacement of the target plane reflector relative to the reference plane reflector and the phase of the horizontal independent component or the vertical independent component of the spatial interference fringe image present a proportional rule, after the discrete Fourier transform is respectively carried out on the horizontal independent component and the vertical independent component of the spatial interference fringe image, the phase values of the horizontal independent component and the vertical independent component can be respectively obtained on corresponding frequency components in the signal phase spectrum, and the displacement of the target plane reflector relative to the reference plane reflector can be solved by any phase value.
The invention has the following characteristics and advantages:
(1) in the invention, the laser interferometer provided realizes the linear decoupling of three-degree-of-freedom signals for the single-beam space interference fringe image.
(2) In the invention, the provided laser interferometer has few period nonlinear error sources, only comes from multiple reflections, and does not use an orthogonal detector, so that the problems of non-uniform amplitude of alternating current signals, direct current bias, non-orthogonal signals and the like in orthogonal detection are solved.
(3) In the invention, the angle measurement range of the proposed laser interferometer is large and can reach 10 mrad. Firstly, the invention has no angle decoupling nonlinearity problem, and the angle measurement range is not limited by the decoupling linearity interval. Secondly, the spatial fringes generated by the angular deflection can reduce the contrast of interference signals in the traditional method, and the angle measurement range is improved in principle by utilizing the fringes to carry out angle measurement.
(4) In the invention, the detection and image decoupling module of the laser interferometer is a high-speed camera, so that high-speed measurement can be realized.
(5) The laser interferometer provided by the invention has the characteristics of simple optical path, few components, no use of a polarizing device and the like, is beneficial to implementation in engineering, and has advantages in the aspects of difficulty in implementation, integration, cost performance and the like.
Drawings
FIG. 1 is a schematic diagram of a laser interferometer measurement system according to the present invention;
description of part numbers in fig. 1: the device comprises a laser light source 1, an upper computer 2, a high-speed camera 3, a fixed reference plane reflector 4, a first light splitting surface 5 and a movable target plane reflector 6.
Detailed Description
The following describes an example of a laser interferometer according to the present invention in detail with reference to the accompanying drawings.
The single-beam three-degree-of-freedom laser interferometer based on the high-speed camera shown in fig. 1 comprises a laser light source 1, an upper computer 2, a high-speed camera 3, a fixed reference plane reflector 4, a first light splitting surface 5 plated with a non-polarization light splitting film and a movable target plane reflector 6; wherein the laser light source 1 provides a first input light beam; the fixed reference plane reflector 4, the first light splitting surface 5 and the movable target plane reflector 6 form a Michelson interference structure; the upper computer 2 and the high-speed camera 3 form a high-speed detection and image decoupling module; the reflecting surface of the fixed reference plane mirror 4 is made non-perpendicular to the first reference beam so that the first measuring beam and the first reference beam travel non-coaxially in the output travel path and is at a slight angle, typically in the order of milliradians, to the dashed reference plane as shown in figure 1.
As shown in fig. 1, the laser interferometer operates as follows: the first input beam enters the first light splitting surface 5, then the reflected beam forms a first measuring beam, and the transmitted beam forms a first reference beam; wherein the first measuring beam is reflected after contacting the movable target plane reflector 6 and is transmitted and output after passing through the first light splitting surface 5; meanwhile, the first reference beam is reflected by the fixed reference plane reflector 4 and is reflected and output after passing through the first light splitting surface 5; at least one part of the output first measuring beam and the second reference beam are coincided in an output travelling path and form a first single-beam space interference fringe image; the high-speed camera 3 receives a first single-beam spatial interference fringe image; the upper computer 2 can realize three-degree-of-freedom signal linear decoupling on each frame of the first single-beam spatial interference fringe image through the three-degree-of-freedom decoupling method so as to obtain the yaw angle, the pitch angle and the displacement information of the target plane reflecting mirror 6 relative to the reference plane reflecting mirror 4, and the three-degree-of-freedom decoupling method comprises the following steps:
firstly, respectively selecting a row and a column passing through the center of a space interference fringe image as a horizontal independent component and a vertical independent component in the space interference fringe image detected by a high-speed camera 3;
secondly, the yaw and pitch angles of the target plane reflector 6 relative to the reference plane reflector 4 respectively represent a proportional rule with the spatial frequencies of the horizontal independent component and the vertical independent component of the spatial interference fringe image, after discrete Fourier transform is carried out on the horizontal independent component and the vertical independent component of the spatial interference fringe image respectively, the spatial frequencies of the independent components can be obtained in a signal amplitude spectrum, and the yaw angle and the pitch angle of the target plane reflector 6 relative to the reference plane reflector 4 can be respectively calculated through the spatial frequencies of the horizontal independent component and the vertical independent component;
and step three, the displacement of the target plane reflector 6 relative to the reference plane reflector 4 and the phase of the horizontal independent component or the vertical independent component of the spatial interference fringe image present a proportional rule, after the discrete Fourier transform is respectively carried out on the horizontal independent component and the vertical independent component of the spatial interference fringe image, the phase values of the horizontal independent component and the vertical independent component can be respectively obtained on corresponding frequency components in a signal phase spectrum, and the displacement of the target plane reflector 6 relative to the reference plane reflector 4 can be solved by any phase value.
Claims (4)
1. A single-beam three-degree-of-freedom laser interferometer based on a high-speed camera comprises: the device comprises a first input light beam with single frequency, a Michelson interference structure and a high-speed detection and image decoupling module;
the method is characterized in that: the Michelson interference structure comprises a fixed reference plane reflector and a movable target plane reflector; the first input beam is incident on the Michelson interference structure and then is split into a first measuring beam and a first reference beam; the first measuring beam is reflected at least once by the target plane mirror and the first reference beam is reflected at least once by the reference plane mirror; and at least a portion of the first measuring beam and the first reference beam in the output travel path coincide and form a first single-beam spatial interference fringe image.
2. The fixed reference plane mirror of claim 1, wherein: the reflecting surface of the fixed reference plane mirror is non-perpendicular to the first reference beam such that the first measurement beam and the first reference beam travel non-coaxially in the output travel path.
3. The high speed detection and image decoupling module of claim 1, comprising a high speed camera with a resolution higher than 300K and a frame rate higher than 10K, and having a detection surface effective to receive a first single beam spatial interference fringe image formed on an output path by the first measurement beam and the first reference beam.
4. The laser interferometer of claim 1, wherein the three-degree-of-freedom decoupling method is capable of achieving three-degree-of-freedom signal linear decoupling for each frame of the first single-beam spatial interference fringe image;
the three-degree-of-freedom decoupling method is characterized by comprising the following steps:
firstly, respectively selecting a row and a column passing through the center of a space interference fringe image as a horizontal independent component and a vertical independent component in the space interference fringe image detected by a high-speed camera;
secondly, the yaw and the pitch angle of the target plane reflector relative to the reference plane reflector respectively represent a proportional rule with the spatial frequency of the horizontal independent component and the vertical independent component of the spatial interference fringe image, the spatial frequency of each independent component can be obtained in a signal amplitude spectrum after the discrete Fourier transform is carried out on the horizontal independent component and the vertical independent component of the spatial interference fringe image respectively, and the yaw angle and the pitch angle of the target plane reflector relative to the reference plane reflector can be respectively calculated through the spatial frequency of the horizontal independent component and the spatial frequency of the vertical independent component;
and step three, the displacement of the target plane reflector relative to the reference plane reflector and the phase of the horizontal independent component or the vertical independent component of the spatial interference fringe image present a proportional rule, after the discrete Fourier transform is respectively carried out on the horizontal independent component and the vertical independent component of the spatial interference fringe image, the phase values of the horizontal independent component and the vertical independent component can be respectively obtained on corresponding frequency components in the signal phase spectrum, and the displacement of the target plane reflector relative to the reference plane reflector can be solved by any phase value.
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