CN1128570C - Surface plasma source for atmospheric discharge - Google Patents
Surface plasma source for atmospheric discharge Download PDFInfo
- Publication number
- CN1128570C CN1128570C CN 01109211 CN01109211A CN1128570C CN 1128570 C CN1128570 C CN 1128570C CN 01109211 CN01109211 CN 01109211 CN 01109211 A CN01109211 A CN 01109211A CN 1128570 C CN1128570 C CN 1128570C
- Authority
- CN
- China
- Prior art keywords
- electrode
- plasma
- surface plasma
- present
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The present invention relates to a surface plasma source for atmospheric discharge. The present invention belongs to the scientific technical field of plasma. The present invention is provided with a pulse power supply (1), a plate-shaped electrode (2), electric media (3) coated on the plate-shaped electrode (2), and another electrode whose space distances are mutually divided, wherein working gas (5) exists in space between the electric media (3) and another electrode. The present invention is characterized in that another electrode is a bare net-shaped electrode (4). The present invention has the advantages that stable uniform surface plasma (8) can be generated on the outer lateral surface of the bare net-shaped electrode (4); the shape of the surface plasma (8) can be changed by following the shape of the electrode; the range of application of the plasma technology is further widened; the application effect is increased.
Description
Technical field
The invention belongs to the plasma sciemtifec and technical sphere, relate to a kind of surface plasma source for atmospheric discharge.
Background technology
Discharge plasma source has been said two classes on the whole: the one, and the vacuum discharge class, as: glow discharge, microwave discharge etc.; The 2nd, the atmospheric discharge class, as: corona discharge, dielectric barrier discharge etc.; Also have other sorting techniques: it is cold and hot to press working gas, is divided into hot and cold plasma; Press the plasma electron temperature height, be divided into the high and low temperature plasma, and have different characteristics and performance respectively, application also has nothing in common with each other; With regard to the atmospheric discharge plasma, mainly contain two kinds in the prior art: a kind of is the dielectric barrier discharge plasma source, its electric discharge device is: two plate electrodes with certain space spacing, and it is topped to have at least an electrode to need by dielectric institute, inhomogeneous, the unsettled plasma of its discharge generation, and only be confined in two spaces between the plate electrode, can not form the surface plasma that exposes in the electrode outside, so its application have certain limitation; Another kind is an airglow discharging surface plasma, its electric discharge device is: a plate electrode is arranged, topped dielectric on it, other have one in groups strip shaped electric poles paste on the dielectric another side of, two electrodes are the boundary with the dielectric, there is not spatial separation, its discharge generation plasma, occur over just the strip shaped electric poles both sides, and form the uneven surfaces plasma, but the surface plasma that this device produces is background with the dielectric, extinguish because of the collision dielectric easily, therefore, the increase of its surface plasma volume density is restricted, and it is used also bigger limitation.
Summary of the invention
The technical problem that solves:
The objective of the invention is to: a kind of surface plasma source for atmospheric discharge is provided, do not allow by the lateral surface of the topped mesh electrode of dielectric at it, produce stable, uniform surface plasma, it is inhomogeneous that it can overcome the plasma that corona discharge plasma source (having wire electrode) and dielectric barrier discharge plasma source exist, density is low, and occur over just two defectives in the space between the electrode, also can overcome inhomogeneous that airglow discharging surface plasma source exists, defective at the bottom of the degree of ionization, can further widen the plasma technique range of application, improve its effect.
The technical scheme that adopts:
Concrete scheme of the present invention is as follows:
A kind of surface plasma source for atmospheric discharge, has the pulse power 1, plate electrode 2 and topped on it dielectric 3 and have spatial separation another electrode spaced apart from each other, in the space between two electrodes working gas 5 is arranged, it is characterized in that: another electrode is exposed mesh electrode 4, have on the mesh electrode 4 and evenly gather and the identical mesh 7 in aperture, in the space between dielectric 3 and mesh electrode 4 plasma 6 is arranged, lateral surface at mesh electrode 4 has uniform surface plasma 8, and the shape of surface plasma 8 can change with electrode shape.
Beneficial effect:
Usefulness of the present invention is: can overcome the deficiencies in the prior art, do not allow by the lateral surface of the topped mesh electrode 4 of dielectric at it, produce stable, uniform surface plasma 8, and the shape of surface plasma 8 can change with electrode shape, can further widen the range of application of plasma technique, improve its effect.
Description of drawings
Accompanying drawing 1, plasma source structural representation of the present invention;
Accompanying drawing 2, the curved structural representation of plasma source electrode of the present invention;
Accompanying drawing 3, plasma source electrode of the present invention structural representation in wave shape;
Accompanying drawing 4, dielectric barrier discharge plasma source structure schematic diagram;
Accompanying drawing 5, airglow discharging surface plasma source structural representation;
Embodiment
Embodiment: further specify as follows in conjunction with the accompanying drawings:
Shown in accompanying drawing 1,2 and 3, plate electrode 2 and corresponding dielectric 3 and mesh electrode 4 can be planar shaped, arc or waveform.Have even, densely covered and the identical mesh 7 in aperture on the mesh electrode 4, the aperture is more little, hole density is high more, then helps increasing density, uniformity and the stability of surface plasma 8 more.When the pulse power 1 imposes on voltage on two electrodes, under its residing discharging condition (electrode spacing and air pressure), when formed electric field strength is higher than breakdown field strength under the corresponding air pressure conditions, discharge then takes place in the space between dielectric 3 and mesh electrode 4 and produce uneven plasma 6, meanwhile, because the existence of mesh 7, lateral surface at mesh electrode 4, owing to induction field forms one deck plasma, outer surface along mesh electrode 4 evenly distributes, according to different discharge parameters, its thickness is 2-4mm, is surface plasma 8.
As shown in Figure 4, in two electrodes in dielectric barrier discharge plasma source, another is not by topped plate electrode 9 by the topped plate electrode 2 of dielectric 3 one, and plasma 6 produces and only limits in the space between dielectric 3 and another plate electrode 9.
As shown in Figure 5, two electrodes of airglow discharging surface plasma source, have one by the topped plate electrode 2 of dielectric 3, another is the strip shaped electric poles in groups 10 that is attached on the another side of dielectric 3, and plasma 11 is created in the both sides of strip shaped electric poles 10.
Application example of the present invention: for conductive powder, as carbon black, carbon black is a main material of manufacturing printing ink, in the black process of system, carbon black dispersiveness in link stuff is good more, and ink quality is high more, and improving its dispersed key factor is the quantity that improves the carbon blacksurface oxy radical.With chemical method its surperficial oxy radical of increase is handled in its modification, complex process and difficulty are big; With glow discharge plasma technical finesse cost height, and it is very long to take time, and reaches 4-5 hour, and efficient is too low, is difficult to industrializing implementation; Handle with dielectric barrier discharge plasma technique, inhomogeneous, unstable because of the plasma of discharge generation between its electrode, cause hydrocarbon black powder to fly around, so that damage electrode, thereby can't carry out; Only need to take carbon black with the plane formula conveyer belt with the present invention's processing and pass through along surface plasma 8 constant speed, handled through 2-3 minute, its surperficial oxy radical significantly increases, and pH value descends at double, improves greatly with its ink quality of manufacturing.With the made printing ink of the carbon black after the plasma treatment, to compare with using printing ink without the carbon black system of plasma treatment, its fluidity brings up to 35 by 33.3, improves 4.5%; Gloss brings up to 56 by 48.65, improves 11%; Density brings up to 1.87 by 1.74, improves 7.4%; Tinting strength, tinting power brings up to 110 by 100, improves 10%.
Claims (2)
1, a kind of surface plasma source for atmospheric discharge, has the pulse power (1), plate electrode (2) and topped on it dielectric (3) and have spatial separation another electrode spaced apart from each other, in the space between two electrodes working gas (5) is arranged, it is characterized in that: another electrode is exposed mesh electrode (4), have on the mesh electrode (4) and evenly gather and the identical mesh (7) in aperture, in the space between dielectric (3) and mesh electrode (4) plasma (6) is arranged, lateral surface at mesh electrode (4) has uniform surface plasma (8), and the shape of surface plasma (8) can change with electrode shape.
2, a kind of surface plasma source for atmospheric discharge according to claim 1 is characterized in that: plate electrode (2) and corresponding dielectric (3) and mesh electrode (4) can be planar shaped, arc or waveform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01109211 CN1128570C (en) | 2001-02-28 | 2001-02-28 | Surface plasma source for atmospheric discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01109211 CN1128570C (en) | 2001-02-28 | 2001-02-28 | Surface plasma source for atmospheric discharge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1306384A CN1306384A (en) | 2001-08-01 |
| CN1128570C true CN1128570C (en) | 2003-11-19 |
Family
ID=4657786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01109211 Expired - Fee Related CN1128570C (en) | 2001-02-28 | 2001-02-28 | Surface plasma source for atmospheric discharge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1128570C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107029271A (en) * | 2015-12-28 | 2017-08-11 | 光云大学校产学协力团 | Utilize the vehicle or room sterilizer of plasma |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102361531B (en) * | 2011-10-26 | 2013-07-03 | 西安电子科技大学 | Device and method for generating large-area, uniform and non-magnetized plasmas |
| CN109475037B (en) * | 2018-12-14 | 2021-07-23 | 华中科技大学 | Plasma activity enhancement method and generating device |
| CN114205984A (en) * | 2021-11-24 | 2022-03-18 | 广州大学 | Atmospheric pressure low temperature plasma jet processing device with adjustable mesh number of screen mesh electrodes |
-
2001
- 2001-02-28 CN CN 01109211 patent/CN1128570C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107029271A (en) * | 2015-12-28 | 2017-08-11 | 光云大学校产学协力团 | Utilize the vehicle or room sterilizer of plasma |
| CN107029271B (en) * | 2015-12-28 | 2020-02-18 | 光云大学校产学协力团 | Vehicle or indoor sterilizer using plasma |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1306384A (en) | 2001-08-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1165939C (en) | Plasma displaying device and method for making dielectric layer having concentrated electric field region | |
| CN1585081A (en) | Ion trap quality analyzer constructed with printed circuit board | |
| CN209676564U (en) | A kind of radio frequency induction coupled linear ion source | |
| CN1308768A (en) | Capillary electrode discharge plasma display panel device and method of fabricating the same | |
| CN100468895C (en) | Method and apparatus for generating glow discharge plasma under atmospheric pressure in air | |
| CN1770950A (en) | Apparatus and methods for a low inductance plasma chamber | |
| CN110402007B (en) | Material surface treatment device based on air glow discharge plasma | |
| CN102427653B (en) | Atmospheric non-equilibrium plasma source for introducing mini-glow discharge mode | |
| CN100358198C (en) | Method for uniform glow discharge in atmosphere air | |
| CN1128570C (en) | Surface plasma source for atmospheric discharge | |
| CN1279574C (en) | Dimmable discharge lamp for dielectrically impeded discharges | |
| CN107979907B (en) | Atmospheric pressure dielectric barrier discharge enhanced DC alternating electrode low-temperature plasma jet array | |
| CN1838371B (en) | Non-perfect four-field quality analyzer device and working method thereof | |
| CN104302386B (en) | Multiple spark discharges generator and use its to manufacture the method for nanoparticle structure | |
| CN109841489B (en) | Device for reducing discrimination of transmission quality of radio frequency quadrupole rods | |
| CN215050684U (en) | Graphite boat carrier and deposition device | |
| CN1712138B (en) | Planar electric field generator of high voltage electrostatic cooker hood | |
| CN209798085U (en) | Plasma surface treatment device | |
| CN2849950Y (en) | Plasma display using high-frequency preheating | |
| CN106954332B (en) | Glow discharge plasma generating device | |
| CN1933085A (en) | Plasma display device utilizing high-frequency preheating and plasma body discharging method | |
| WO2012101850A1 (en) | Sputtering target | |
| CN1776875A (en) | Plasma display panel | |
| CN219832555U (en) | Electrode assembly and semiconductor device | |
| CN212696239U (en) | High-frequency dielectric heating output electrode arrangement structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |