CN112853307A

CN112853307A - Film coating device, film coating system and using method thereof

Info

Publication number: CN112853307A
Application number: CN202110222582.8A
Authority: CN
Inventors: 翁勇新; 张万财
Original assignee: Xiamen Haichen New Energy Technology Co Ltd
Current assignee: Xiamen Haichen New Energy Technology Co Ltd
Priority date: 2021-02-25
Filing date: 2021-02-25
Publication date: 2021-05-28

Abstract

The application provides a coating device, a coating system and a using method thereof, and belongs to the technical field of coating. The coating device comprises a blowing device and an evaporation device which are sequentially arranged along a conveying path of the polymer base film. The gas blowing device is configured to provide gas and make the gas adhere to the macromolecule basal membrane, and the evaporation device is configured to provide metal atoms, so that the metal atoms react with the gas on the macromolecule basal membrane to obtain the metal compound layer. The coating device can make the texture of the metal compound layer more uniform, thereby improving the performance of the film.

Description

Film coating device, film coating system and using method thereof

Technical Field

The application relates to the technical field of coating, in particular to a coating device, a coating system and a using method thereof.

Background

A metal layer is formed on the surface of the polymer base film by vapor deposition, thereby obtaining a conductive film. In order to improve the performance of the film, a metal oxide layer structure may be formed between the polymer base film and the metal layer, for example: an aluminum oxide layer is formed between the polymer base film and the metal aluminum layer, so that the binding force between the polymer base film and the metal aluminum layer can be improved; a metal oxide layer structure may also be formed on the surface of the metal layer of the conductive film, for example: an aluminum oxide layer is formed on the surface of the metal aluminum layer of the conductive film, so that the barrier property of the film is improved, and the service life of the film is prolonged.

However, in the prior art, the alumina layer is generally poor in uniformity, and the performance of the film is affected.

Disclosure of Invention

In the prior art, in order to form an alumina layer structure on a polymer base film, oxygen is generally introduced into an evaporation boat, and metal aluminum atoms are evaporated and simultaneously the evaporated metal aluminum atoms are mixed with the introduced oxygen to react to form the alumina layer structure. The inventors have found that the uniformity of the aluminum oxide layer is poor because a chemical reaction occurs during the mixing of the metal aluminum atoms with oxygen, and the reaction proceeds both during the raising of the metal aluminum atoms to the polymer base film (the metal aluminum atoms and oxygen do not contact the polymer base film and undergo an oxidation reaction to produce aluminum oxide) and after the raising to the polymer base film (the metal aluminum atoms and oxygen contact the polymer base film and undergo an oxidation reaction to produce aluminum oxide).

The application aims to provide a coating device, a coating system and a using method thereof, which can improve the uniformity of a film.

In a first aspect, the present application provides a coating apparatus comprising: the air blowing device and the evaporation device are sequentially arranged along the conveying path of the polymer base film. The gas blowing device is configured to provide gas and make the gas adhere to the macromolecule basal membrane, and the evaporation device is configured to provide metal atoms, so that the metal atoms react with the gas on the macromolecule basal membrane to obtain the metal compound layer.

Set up gas blowing device at evaporation device's front end earlier, gas blowing device's gas port is towards the polymer base film, blow to the direction of polymer base film through gas blowing device, can make gas evenly adhere to the surface at the polymer base film (the polymer base film has certain adsorption effect to gas), then make the metal atom that the evaporation device provided and the gas contact on the polymer base film and take place the reaction and obtain the metallic compound layer, because the metallic compound layer takes place chemical reaction and obtains after gas and metal atom and the contact of polymer base film, can make the texture on metallic compound layer more even, thereby improve the performance of film.

In one possible embodiment, the evaporation apparatus further includes a first roller and a second roller for conveying the polymer base film. The air blowing device is located below the first roller, and the air blowing device is configured to be located below the polymer base film close to the first roller. The evaporation device is positioned between the first roller and the second roller, and the evaporation device is arranged below the polymer base film between the first roller and the second roller.

Gas blowing device sets up the below at first roller, it is close to the coating by vaporization device, the gas that gas blowing device produced can not be taken away by negative pressure device at once, can have more gas absorption on the surface of polymer base film, and the polymer base film does not have other roller structures from between first roller and the coating by vaporization device, the in-process that can avoid the gas on the absorption to run off at the transport, then provide the metal atom through the mode of suspension coating by vaporization, when the metal atom rises to the polymer base film, the metal atom can be by the gas absorption on the polymer base film and take place chemical reaction with gas, can make the metal compound layer that obtains comparatively even and fine and close.

In one possible embodiment, the upper or lower circumferential surface of the first roller is flush with the upper or lower circumferential surface of the second roller, and the first roller and the second roller are arranged such that the polymer base film between the first roller and the second roller is horizontally disposed. The air blowing device is configured to be located below a region of the polymer base film between the first roller and the second roller, the region being close to the first roller.

The blowing device is arranged below the horizontal polymer base film, so that gas provided by the blowing device can be more uniformly attached to the polymer base film, and generally, a layer of oxygen is attached to the polymer base film and is reacted with metal atoms later, so that the subsequently formed layer structure is more uniform, thinner and easy to control.

In a possible embodiment, the air blowing device comprises an air blowing pipeline, the air blowing pipeline is arranged below the first roller, the extending direction of the air blowing pipeline is consistent with the extending direction of the first roller, and a plurality of spaced air holes are formed in the pipe wall of the air blowing pipeline, which is close to the first roller.

In the process of polymer base film conveying, the blowing pipeline uniformly provides gas to the width direction of the polymer base film, so that the gas can be uniformly attached to the polymer base film in the conveying process, and a uniform layer structure can be obtained.

In a possible embodiment, the diameter of the air holes is 0.2-0.8 times the inner diameter of the air blowing pipe, and the distance between two adjacent air holes is 0.5-2 times the air blowing pipe.

Constantly provide gas in the gas blowing pipeline, gaseous behind the gas pocket, because the effect of air current, can the upward movement, and gaseous have certain diffusion, set up above-mentioned parameter, can make the gas after rising can be for adsorbing the surface at the polymer base film uniformly more, can reduce the gaseous blank region on the polymer base film (reduce the region of not adsorbing gas on the polymer base film).

In a possible embodiment, the distance between the axis of the blow pipe and the axis of the first roller is 3-6 times the inner diameter of the blow pipe. The surface of the macromolecule basal membrane can basically adsorb the gas in the process that the gas rises under the action of the gas flow.

In a possible embodiment, the length of the blow duct is 0.8-1.2 times the length of the first roller. The gas can be adsorbed in the width direction of the polymer base film in the process that the gas rises under the action of the gas flow.

In one possible embodiment, a main cooling roller is disposed at a rear end of the second roller along a conveying path of the polymer base film, and the main cooling roller is configured to cool the coated polymer base film.

After evaporation, the main cold roll is used for cooling, so that the layer structure on the polymer base film is compact, and the layer structure is prevented from being damaged in the conveying process.

In a second aspect, the present application provides a coating system, comprising a chamber capable of being evacuated and the above-mentioned coating device disposed in the chamber.

In a third aspect, the present application provides a method for using the above coating system, including: the polymer base film is arranged in the film coating device, so that the blowing device and the evaporation device are both positioned on the same side of the polymer base film. Vacuumizing the cavity, starting a blowing device, and blowing the polymer base film by the blowing device to enable the surface of the polymer base film to be attached with gas. And starting the evaporation device, wherein the evaporation device provides metal atoms for the polymer base film, and the metal atoms and the gas on the polymer base film are subjected to chemical reaction to form a metal compound layer on the surface of the polymer base film.

The texture of the metal compound layer can be made more uniform, thereby improving the properties of the film.

Optionally, the vacuum in the chamber is maintained at 9.0 × 10^-1-1.0×10^-2Within the range of Pa; the width of the polymer base film is 1.2-1.65m, and the gas flow is 100-1500 sccm. The wider the breadth of the polymer base film, the larger the gas flow, and the better the film coating effect.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments are briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive efforts and also belong to the protection scope of the present application.

FIG. 1 is a schematic view of a first structure of a coating apparatus provided herein;

fig. 2 is a schematic view of a position structure of an air blowing device and a polymer base film according to an embodiment of the present disclosure;

FIG. 3 is a second structural diagram of the coating device provided in the present application;

FIG. 4 is a schematic structural view of a coating apparatus according to a comparative example of the present application.

Icon: 110-unwinding roller; 121-a third roller; 122-a fourth roller; 123-a fifth roller; 124-a first roller; 125-a second roller; 130-main chill roll; 141-a sixth roller; 142-a seventh roller; 143-eighth roll; 144-a ninth roller; 150-a wind-up roll; 200-a polymer-based film; 160-evaporation device; 170-a blowing device; 171-a blow pipe; 172-vent; 161-evaporation tank; 180-a wire feeder; 181-wire feeding transmission shaft; 182-an aluminum wire disc; 310-gas port.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.

The application provides a coating system, including the cavity and set up the coating device in the cavity. Before the coating film, set up the polymer base film on coating film device along transport path (when the polymer base film is fixed on coating film device, can be that the first surface of polymer base film pastes the roller with coating film device or the second surface of polymer base film pastes the roller with coating film device), then use the vacuum pump to take out the gas in the cavity, be in vacuum state in making the cavity, provide vacuum environment for coating film device to carry out evaporation coating to the polymer base film. Wherein, the vacuum degree in the cavity can be controlled through the amount of gas pumped out by the vacuum pump, and can be adjusted according to requirements.

Fig. 1 is a schematic view of a first structure of a coating device provided in the present application. Referring to fig. 1, in the embodiment of the present application, the coating apparatus includes an unwinding roller 110, a plurality of rollers (a third roller 121, a fourth roller 122, a fifth roller 123, a first roller 124, and a second roller 125 are respectively disposed along a conveying path of a polymer base film 200, the number of the rollers is not limited, and can be modified according to actual requirements, and the five rollers are only an example, and the type of the rollers is not limited, and can be a through roller, an arc roller, etc., as long as the polymer base film 200 can be flattened, for example, the third roller 121 is a through roller, the fourth roller 122 is an arc roller, the fifth roller 123 and the first roller 124 are through rollers, the second roller 125 is an arc roller, the main cooling roller 130, and the plurality of rollers (the conveying paths are respectively a sixth roller 141, a seventh roller 142, an eighth roller 143, and a ninth roller 144, the number of the rollers is not limited, and can be modified according to actual requirements, the four rollers are only one example; the type of the roller is not limited, and the roller can be a roller, an additional roller, an arc roller, or the like, as long as the polymer base film 200 can be flattened; for example: sixth roller 141 is a passing roller, seventh roller 142 is an auxiliary roller, eighth roller 143 and ninth roller 144 are passing rollers), and wind-up roller 150.

The polymer base film 200 is conveyed by the above-described roller structure, the vapor deposition device 160 is provided between the first roller 124 and the second roller 125, and metal atoms are supplied to the polymer base film 200 by the vapor deposition device 160 to coat the polymer base film 200 (in this embodiment, the vapor deposition device 160 is provided between the first roller 124 and the second roller 125, is positioned at the tip of the main cooling roller 130, and coats the film by the suspension vapor deposition method). A gas blowing device 170 is provided at the front end of the vapor deposition device 160, and gas can be supplied to the vapor deposition device 170 and can be attached to the polymer base film 200.

When the coating system is used, the gas provided by the gas blowing device 170 is attached to the polymer base film 200, so that the gas can be uniformly attached to the surface of the polymer base film 200, and then the metal atoms provided by the evaporation device 160 are contacted with the gas on the polymer base film 200 and react to obtain the metal compound layer.

In the present application, the gas supplied from the gas blowing device 170 may be oxygen or ozone, and the metal atoms supplied from the vapor deposition device 160 may be metal aluminum atoms, metal copper atoms, or the like, but the present application is not limited thereto as long as the gas and the metal atoms can react with each other to form a metal compound layer structure. The following description will specifically take an example in which the gas is oxygen and the metal atom is a metal aluminum atom.

In this application, the surface tension of the polymer base film 200 is large, and air is easily adsorbed. The polymer base film 200 may be one selected from an OPP (O-phenylphenol) film, a PET (Polyethylene terephthalate) film, a PI (Polyimide) film, a PS (polystyrene), a poly (styrene) film, a PPS (polyphenylene sulfide) film, a CPP (cast Polypropylene) film, a PEN (Polyethylene naphthalate) film, a PVC (Polyvinyl chloride) film, a BOPP (Biaxially Oriented Polypropylene) film, and a PE (Polyethylene terephthalate) film. The present application is not limited thereto, and the polymer base film 200 that can be coated by the above coating system is within the protection scope of the present application.

Alternatively, the air blowing device 170 is positioned below the first roller 124, and the air blowing device 170 is configured to be positioned below the polymer base film 200 adjacent to the first roller 124. The tension of the polymer base film 200 is larger at the position close to the first roller 124 and the second roller 125, the air blowing device 170 is disposed below the polymer base film 200 and close to the first roller 124, and the oxygen supplied by the air blowing device 170 is attached to the polymer base film 200 with a better tension degree, so that the oxygen can be adsorbed more uniformly. Then, metal aluminum atoms are provided in a suspension evaporation mode, and when the metal aluminum atoms rise to the polymer base film 200, the metal aluminum atoms are adsorbed by oxygen on the polymer base film 200 and chemically react with the oxygen, so that the obtained aluminum oxide layer is uniform and compact.

In the present application, the upper circumferential surface or the lower circumferential surface of the first roller 124 is flush with the upper circumferential surface or the lower circumferential surface of the second roller 125, the polymer base film 200 is completely set, the polymer base film 200 disposed between the first roller 124 and the second roller 125 is in a substantially horizontal state, and the evaporation device 160 is disposed below the polymer base film 200 at this position to uniformly coat the polymer base film 200.

In one embodiment, the upper circumferential surface of the first roller 124 is flush with the upper circumferential surface of the second roller 125, and the polymer base film 200 is conveyed around the upper circumferential surface of the first roller 124 and the upper circumferential surface of the second roller 125, so that the polymer base film 200 between the first roller 124 and the second roller 125 is in a horizontal state.

In another embodiment, the upper circumferential surface of the first roller 124 is flush with the lower circumferential surface of the second roller 125, and the polymer base film 200 is conveyed around the upper circumferential surface of the first roller 124 and the lower circumferential surface of the second roller 125, so that the polymer base film 200 between the first roller 124 and the second roller 125 is in a horizontal state.

In another embodiment, the lower circumferential surface of the first roller 124 is flush with the lower circumferential surface of the second roller 125 (see fig. 1), and the polymer base film 200 is conveyed around the lower circumferential surfaces of the first roller 124 and the second roller 125, so that the polymer base film 200 between the first roller 124 and the second roller 125 is in a horizontal state.

In another embodiment, the lower circumferential surface of the first roller 124 is flush with the upper circumferential surface of the second roller 125 (see fig. 3), and the polymer base film 200 is conveyed around the lower circumferential surface of the first roller 124 and the upper circumferential surface of the second roller 125, so that the polymer base film 200 between the first roller 124 and the second roller 125 is in a horizontal state.

In the present application, the air blowing device 170 is disposed below a region of the polymer base film 200 between the first roller 124 and the second roller 125, the region being close to the first roller 124. The air blowing unit 170 is disposed below the horizontal polymer base film 200, so that oxygen supplied from the air blowing unit 170 is more uniformly attached to the polymer base film 200, so that the subsequently formed aluminum oxide layer is more uniformly formed.

Fig. 2 is a schematic diagram of a position structure of the blowing device 170 and the polymer base film 200 according to an embodiment of the present disclosure. Referring to fig. 1 and 2, in the embodiment of the present application, the air blowing device 170 includes an air blowing pipe 171, an air hose (not shown), and an air pump (not shown), the air blowing pipe 171 is disposed below the first roller 124, one end of the air blowing pipe 171 is a closed end, the other end is communicated with the air hose, and the air pump is disposed on the air hose, and oxygen is supplied to the air blowing pipe 171 through the air pump.

The extending direction of the air blowing duct 171 is the same as the extending direction of the first roller 124 (optionally, the air blowing duct 171 and the first roller 124 are horizontally arranged), and a plurality of spaced air holes 172 are formed on the wall of the air blowing duct 171 close to the first roller 124. In the process of carrying polymer base film 200, constantly provide gas in the gas blowing pipeline 171, after gas process gas pocket 172, because the effect of air current, can upward movement, and gas has certain diffusion to evenly provide oxygen to the width direction of polymer base film 200, can make polymer base film 200 evenly adhere to oxygen at the in-process of carrying, so that obtain even aluminium oxide layer.

Alternatively, the air blowing duct 171 is located right below the first roller 124, and the air blowing duct 171 is located on the horizontal polymer base film 200 (as shown in fig. 1, the polymer base film 200 is located close to the first roller 124, and the end of the horizontal polymer base film 200 substantially contacts the first roller 124), so that the tension of the polymer base film 200 at the location is large, the transportation of the polymer base film 200 is smoother (the polymer base film 200 is substantially free from wrinkles during transportation), and the attached oxygen is more uniform.

Further, the horizontal distance between the air blowing duct 171 and the evaporation groove 161 of the evaporation apparatus 160 is 300-500 mm. A certain distance is reserved between the evaporation tank 161 and the air blowing pipeline 171, metal aluminum atoms are basically not evaporated onto the air blowing pipeline 171, alumina and aluminum slag are basically not generated on the air blowing pipeline 171, the air blowing pipeline 171 does not need to be cleaned regularly, and the problem that aluminum splashing is generated because an evaporation area of the air blowing pipeline 171, which falls into the evaporation tank, falls into the evaporation area of the evaporation tank 161 is solved.

In this application, the aperture of the air hole 172 is 0.2-0.8 times the inner diameter of the air blowing pipe 171, and the distance between two adjacent air holes 172 is 0.5-2 times the air blowing pipe 171. By setting the above parameters, the raised gas can be uniformly adsorbed on the surface of the polymer base film 200, and the gas blank area on the polymer base film 200 can be reduced or even eliminated (the area on the polymer base film 200 not adsorbed with gas is reduced or even eliminated).

Illustratively, the diameter of the air hole 172 is 0.2 times, 0.4 times, 0.6 times, or 0.8 times the inner diameter of the air blowing duct 171, and the distance between two adjacent air holes 172 is 0.5 times, 1 times, 1.5 times, or 2 times the air blowing duct 171.

For example: the inner diameter of the air blowing pipeline 171 is 10mm, the aperture of the air hole 172 is 2mm, 4mm, 6mm or 8mm, and the distance between two connected air holes 172 is 5mm, 10mm, 15mm or 20 mm; or the inner diameter of the air blowing pipe 171 is 20mm, the aperture of the air hole 172 is 4mm, 7mm, 10mm or 16mm, and the distance between two connected air holes 172 is 10mm, 14mm, 31mm or 40mm, etc. It should be noted that the distances between the plurality of air holes 172 provided in the air blowing duct 171 may be the same or different.

Alternatively, the distance between the axis of the air blowing duct 171 and the axis of the first roller 124 is 3 to 6 times the inner diameter of the air blowing duct 171. The gas can be adsorbed on the surface of the polymer base film 200 substantially in the process of gas rising under the action of the gas flow.

Illustratively, the distance between the axis of the air blowing duct 171 and the axis of the first roller 124 is 3 times, 4 times, 5 times, or 6 times the inner diameter of the air blowing duct 171. For example: the inner diameter of the air blowing duct 171 is 10mm, and the distance between the axis of the air blowing duct 171 and the axis of the first roller 124 is 30mm, 40mm, 50mm, or 60 mm; or the inner diameter of the air blowing duct 171 is 20mm, and the distance between the axis of the air blowing duct 171 and the axis of the first roller 124 is 60mm, 80mm, 100mm, or 120 mm.

Further, the width of the polymer base film 200 is 1.2 to 1.65m, the polymer base film 200 is disposed on the first roller 124, the length of the roller surface of the first roller 124 is greater than the width of the polymer base film 200, and the length of the roller surface of the first roller 124 is approximately 1.3 to 1.8 m. The length of the air blowing duct 171 is 0.8 to 1.2 times the length of the first roller 124. In the process that the gas rises under the action of the gas flow, the gas is adsorbed in the width direction of the polymer base film 200.

Illustratively, the length of the air blowing duct 171 is 0.8 times, 0.9 times, 1.0 times, 1.1 times, or 1.2 times the length of the first roller 124 (the length here refers to the roller surface length of the first roller 124). For example: if the roll surface length of the first roll 124 is 1.5m, the length of the air blowing duct 171 is 1.2m, 1.4m, 1.6m, or 1.8 m; or the roll surface length of the first roll 124 is 1.8m, the length of the air blowing duct 171 is 1.4m, 1.6m, 1.8m, 2.0m, or 2.2 m.

In one embodiment, the evaporation source of the evaporation apparatus 160 is an aluminum evaporation source, and if the evaporation apparatus 160 is resistance evaporation, aluminum wires are used as the aluminum evaporation source, and the aluminum wires are continuously fed by the wire feeding mechanism 180. The wire feeding mechanism 180 includes a wire feeding transmission shaft 181 and an aluminum wire tray 182, and continuously conveys the aluminum wires on the aluminum wire tray 182 into the evaporation tank 161 (the evaporation tank 161 is an evaporation boat of boron nitride or molybdenum nitride) through the wire feeding transmission shaft 181, so that the aluminum wires are subjected to high temperature for evaporation.

In another embodiment, if the evaporation apparatus 160 is a high-frequency induction evaporation apparatus, an aluminum ingot is placed in the evaporation tank 161 of the evaporation apparatus 160 (the evaporation tank 161 is a graphite crucible), an induction coil is arranged around the graphite crucible, and the aluminum ingot is heated after being energized to reach a vaporization temperature so as to be evaporated onto the surface of the polymer base film 200.

With continued reference to fig. 1 and 2, the method of using the coating system includes: the polymer base film 200 is placed in a coating apparatus, that is, the polymer base film 200 is unwound by an unwinding roller 110, and then sequentially conveyed by a third roller 121 (e.g., a through roller), a fourth roller 122 (e.g., a curved roller), a fifth roller 123 (e.g., a through roller), a first roller 124 (e.g., a through roller), a second roller 125 (e.g., a curved roller), a main cooling roller 130, a sixth roller 141 (e.g., a through roller), a seventh roller 142 (e.g., an additional roller), an eighth roller 143 (e.g., a through roller), and a ninth roller 144 (e.g., a through roller), and wound by a winding roller 150.

After the polymer base film 200 is mounted, the blowing device 170 and the evaporation device 160 are located on the same side of the polymer base film 200. The air blowing device 170 and the evaporation device 160 are both positioned below the polymer base film 200, an air blowing pipe 171 of the air blowing device 170 is positioned below the first roller 124, and the axial direction of the air blowing pipe 171 is consistent with the width direction of the polymer base film 200; the evaporation apparatus 160 is located below the polymer base film 200 horizontally disposed between the first roller 124 and the second roller 125, so as to perform a coating by a levitation type evaporation method.

When the film coating is needed, the vacuum pump is used for pumping out the gas in the chamber to keep the vacuum degree in the chamber at 9.0 multiplied by 10^-1-1.0×10^-2Pa (i.e. coating environment of 9.0X 10)^-1-1.0×10^-2Pa, for example: the coating environment is 9.0 multiplied by 10^-1Pa、5.0×10^-1Pa、1.0×10^-1Pa、5.0×10^-2Pa or 1.0X 10-2 Pa). If the preparation of the metal aluminum layer is performed, the blowing device 170 does not work, the evaporation device 160 works, the aluminum wire is conveyed into the evaporation tank 161 through the wire feeding transmission shaft 181, the aluminum wire is subjected to high temperature for evaporation, and the metal aluminum atoms rise to the polymer base film 200 to perform the metal aluminum layer.

If the preparation of the aluminum oxide layer is performed, the blowing device 170 is operated, the air pump delivers oxygen to the blowing pipe 171 through the air hose, the oxygen flows to the direction of the polymer base film 200 through the air hole 172, so that the oxygen is attached to the surface of the polymer base film 200, and then the evaporation device 160 provides metal aluminum atoms to the polymer base film 200, so that the metal aluminum atoms and the oxygen on the polymer base film 200 are chemically reacted to form the aluminum oxide layer on the surface of the polymer base film 200.

Optionally, the gas flow rate is 100-. Illustratively, the gas flow rate is 100sccm, 300sccm, 500sccm, 1000sccm, or 1500 sccm.

Fig. 3 is a second structural schematic diagram of the coating device provided in the present application. Referring to fig. 3, in the present application, in addition to the levitation type vapor deposition shown in fig. 1, the roll type vapor deposition shown in fig. 3 may be selected, and in this case, the vapor deposition device 160 is installed at the lower end of the main cold roll 130, and the coating layer is cooled by the main cold roll 130 while the coating layer is vapor deposited by the vapor deposition device 160. The air blowing device 170 is still disposed at the front end of the evaporation device 160, for example: is disposed between first roller 124 and main cooling roller 130 and is located on a side adjacent to first roller 124.

With continued reference to fig. 2 and 3, the method of using the coating system includes: the polymer base film 200 is placed in a coating apparatus, that is, the polymer base film 200 is unwound by an unwinding roller 110, and then sequentially conveyed by a third roller 121 (e.g., a through roller), a fourth roller 122 (e.g., a curved roller), a fifth roller 123 (e.g., a through roller), a first roller 124 (e.g., a through roller), a main cooling roller 130, a seventh roller 142 (e.g., an additional roller), an eighth roller 143 (e.g., a through roller), and a ninth roller 144 (e.g., a through roller), and wound by a winding roller 150.

After the polymer base film 200 is mounted, the blowing device 170 and the evaporation device 160 are located on the same side of the polymer base film 200. The air blowing device 170 and the evaporation device 160 are both positioned below the polymer base film 200, an air blowing pipe 171 of the air blowing device 170 is positioned below the first roller 124, and the axial direction of the air blowing pipe 171 is consistent with the width direction of the polymer base film 200; the deposition device 160 is positioned below the main cooling roller 130 to perform deposition by roll deposition.

The application provides a coating system adopts above-mentioned coating mode, can be that the formation of aluminium oxide layer is more even, improves the performance of film.

Example 1

Referring to fig. 1, a PET polymer base film 200 having a width of 1.65m is unwound by an unwinding roller 110, and then sequentially conveyed by a third roller 121 (passing roller), a fourth roller 122 (passing roller), a fifth roller 123 (passing roller), a first roller 124 (passing roller), a second roller 125 (passing roller), a main cooling roller 130, a sixth roller 141 (passing roller), a seventh roller 142 (attached roller), an eighth roller 143 (passing roller), and a ninth roller 144 (passing roller), and wound by a winding roller 150. After the polymer base film 200 is mounted, the air blowing duct 171 of the air blowing device 170 is positioned below the first roller 124, and the axial direction of the air blowing duct 171 is consistent with the width direction of the polymer base film 200; the evaporation tank 161 of the evaporation apparatus 160 is located below the polymer base film 200 horizontally disposed between the first roller 124 and the second roller 125.

The vacuum pump is used to pump out the gas in the chamber and maintain the vacuum degree in the chamber at 4.0X 10^-2-2.0×10^-2In the Pa range. The blowing device 170 works, the air pump delivers oxygen to the blowing pipeline 171 through the air hose (the air flow is 1000-. Then, the aluminum wire is conveyed to the evaporation tank 161 of the evaporation device 160 through the wire feeding transmission shaft 181, so that the aluminum wire is subjected to high temperature for evaporation, the metal aluminum atoms rise to the polymer base film 200, and the metal aluminum atoms and the oxygen on the polymer base film 200 undergo a chemical reaction to form an aluminum oxide layer on the surface of the polymer base film 200.

Then, the blowing device 170 does not work, and the aluminum wire is conveyed into the evaporation tank 161 of the evaporation device 160 through the wire feeding transmission shaft 181, so that the aluminum wire is subjected to high temperature for evaporation, and the metal aluminum atoms rise to the polymer base film 200 to form a metal aluminum layer. The deposition was repeated 30 times to form 30 metallic aluminum layers.

Then, the blowing device 170 operates, the air pump delivers oxygen to the blowing pipeline 171 through the air hose (the air flow is 1000-. Then, the aluminum wire is conveyed to the evaporation tank 161 of the evaporation device 160 through the wire feeding transmission shaft 181, so that the aluminum wire is subjected to high temperature for evaporation, the metal aluminum atoms rise to the polymer base film 200, and the metal aluminum atoms and the oxygen on the polymer base film 200 undergo a chemical reaction to form an aluminum oxide layer on the surface of the polymer base film 200, thereby obtaining the conductive film.

Comparative example 1

Referring to fig. 4, a PET polymer base film 200 having a width of 1.65m is unwound by an unwinding roller 110, and then sequentially conveyed by a third roller 121 (passing roller), a fourth roller 122 (passing roller), a fifth roller 123 (passing roller), a first roller 124 (passing roller), a second roller 125 (passing roller), a main cooling roller 130, a sixth roller 141 (passing roller), a seventh roller 142 (auxiliary roller), an eighth roller 143 (passing roller), and a ninth roller 144 (passing roller), and wound by a winding roller 150. After the polymer base film 200 is mounted, the evaporation tank 161 of the evaporation apparatus 160 is positioned below the horizontally disposed polymer base film 200 between the first roller 124 and the second roller 125, and the gas port 310 of the gas blowing apparatus is positioned at a side of the evaporation tank 161 to blow gas to an upper side of the evaporation tank 161.

The vacuum pump is used to pump out the gas in the chamber and maintain the vacuum degree in the chamber at 4.0X 10^-2-2.0×10^-2In the Pa range. The blowing device and the evaporation device 160 work simultaneously, the wire feeding transmission shaft 181 transmits the aluminum wire to the evaporation tank 161 of the evaporation device 160, so that the aluminum wire is subjected to high temperature for evaporation, the metal aluminum atoms rise, and the air pump transmits oxygen to the upper part of the evaporation tank 161 through the air port 310 through the air hose (the gas flow is 1000-1200 sccm). The oxygen and the metal aluminum atom are in contact with each other and simultaneously undergo a chemical reaction to generate aluminum oxide, and the aluminum oxide, the metal aluminum atom and the oxygen rise together onto the polymer base film 200 to form an aluminum oxide layer on the surface of the polymer base film 200.

Then, the blowing device does not work, and the aluminum wire is conveyed to the evaporation tank 161 of the evaporation device 160 through the wire feeding transmission shaft 181, so that the aluminum wire is subjected to high temperature for evaporation, and the metal aluminum atoms rise to the polymer base film 200 to form a metal aluminum layer. The deposition was repeated 30 times to form 30 metallic aluminum layers.

Then the blowing device and the evaporation device 160 work simultaneously, the wire feeding transmission shaft 181 transmits the aluminum wire to the evaporation tank 161 of the evaporation device 160, so that the aluminum wire is subjected to high temperature for evaporation, the metal aluminum atoms rise, and the air pump transmits oxygen to the upper part of the evaporation tank 161 through the air port 310 through the air hose (the gas flow is 1000-1200 sccm). The oxygen and the metal aluminum atom are in contact and simultaneously generate chemical reaction to generate aluminum oxide, the metal aluminum atom and the oxygen rise to the polymer base film 200 together, and an aluminum oxide layer is formed on the surface of the polymer base film 200 to obtain the conductive film.

During the preparation of the conductive film, observation was made through the window to find that: in the apparatus of example 1, alumina and aluminum dross were not substantially generated on the blowing pipe of the blowing apparatus (metallic aluminum atoms were not substantially evaporated on the blowing pipe) due to the front end of the blowing apparatus (the blowing apparatus was not in contact with the evaporation tank). In comparative example 1, since the air duct of the air blowing device was located on the side of the evaporation tank (the air blowing device was in substantial contact with the evaporation tank), alumina and aluminum dross were easily produced on the air duct of the air blowing device, which was not easily cleaned, and could fall into the evaporation zone of the evaporation tank, thereby causing the problem of aluminum splashing.

Experimental example 1

The adhesion and resistivity of the conductive films provided in example 1 and comparative example 1 were measured as shown in table 1. Wherein, the test mode of cohesive force is: (1) 3M adhesive tape with fixed model, wherein the fixed pinch roller is pressed firmly against the surface of the film; (2) on a tensile machine, at an angle of 180 ° antiparallel. In the adhesion force data, different pulling speeds are tested, and the higher the speed is, the better the adhesion force is on the premise that the surface layer is not peeled.

The method for detecting the resistivity of the conductive film comprises the following steps: and testing the sheet resistance of the conductive film by adopting a four-probe method to obtain the sheet resistance Rs with the unit of omega. The thickness d of the conductive film functional layer is the difference between the total thickness of the conductive film and the thickness of the polymer base film 200, and the resistivity ρ ═ Rs × d, in Ω · m.

TABLE 1 Properties of conductive films

	Adhesion/mm/min	Resistivity/omega. m
			Example 1	3000	8.5×10^-8Ω.m
Comparative example 1	500	5×10^-8Ω.m

As can be seen from table 1, the device provided by the present application can make the adhesion of the conductive film stronger and the resistivity difference small when the conductive film is prepared. The device provided by the application can prepare the alumina layer (the influence of the adhesive force is mainly related to the uniformity and compactness of the alumina layer contacting the macromolecule basal membrane), so that the uniformity and compactness of the alumina layer can be better.

The above description is only a few examples of the present application and is not intended to limit the present application, and various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A plating device, characterized by comprising: the air blowing device and the evaporation device are sequentially arranged along the conveying path of the polymer base film;

the gas blowing device is configured to provide gas and make the gas adhere to the macromolecule basal membrane, and the evaporation device is configured to provide metal atoms so that the metal atoms react with the gas on the macromolecule basal membrane to obtain the metal compound layer.

2. The coating device according to claim 1, further comprising a first roller and a second roller for conveying the polymer base film;

the air blowing device is positioned below the first roller, and the air blowing device is configured to be positioned below the polymer base film close to the first roller;

the evaporation device is located between the first roller and the second roller, and the evaporation device is configured to be located below a polymer base film between the first roller and the second roller.

3. The plating device according to claim 2, wherein an upper circumferential surface or a lower circumferential surface of the first roller is flush with an upper circumferential surface or a lower circumferential surface of the second roller, and the first roller and the second roller are arranged such that the polymer base film between the first roller and the second roller is horizontally disposed;

the air blowing device is configured to be located below a region of the polymer base film between the first roller and the second roller, the region being close to the first roller.

4. The coating device according to claim 2 or 3, wherein the blowing device comprises a blowing pipe, the blowing pipe is arranged below the first roller, the extending direction of the blowing pipe is consistent with the extending direction of the first roller, and a plurality of air holes are formed in the pipe wall of the blowing pipe, which is close to the first roller.

5. The plating device according to claim 4, wherein the diameter of the air hole is 0.2 to 0.8 times the inner diameter of the air blowing pipe, and the distance between two adjacent air holes is 0.5 to 2 times the inner diameter of the air blowing pipe.

6. The plating device according to claim 5, wherein a distance between an axis of the air-blowing duct and an axis of the first roller is 3 to 6 times an inner diameter of the air-blowing duct.

7. The plating device according to claim 4, wherein the length of the air blowing duct is 0.8 to 1.2 times the length of the first roller.

8. The coating device according to claim 2 or 3, wherein a main cooling roller is provided at a rear end of the second roller along a transport path of the polymer base film, the main cooling roller being configured to cool the coated polymer base film.

9. A coating system comprising a chamber capable of being evacuated and the coating device of any one of claims 1 to 8 disposed in the chamber.

10. The method of using the coating system of claim 9, comprising:

arranging the polymer base film on the film coating device, and enabling the air blowing device and the evaporation device to be positioned on the same side of the polymer base film;

vacuumizing the cavity, starting the blowing device, and blowing air to the polymer base film by the blowing device to enable the surface of the polymer base film to be attached with air; starting the evaporation device, wherein the evaporation device provides metal atoms to the polymer base film, and the metal atoms and the gas on the polymer base film are subjected to chemical reaction to form a metal compound layer on the surface of the polymer base film;

optionally, the vacuum degree in the chamber is maintained at 9.0 × 10^-1-1.0×10^-2Within the range of Pa; the width of the polymer base film is 1.2-1.65m, and the gas flow is 100-1500 sccm.