CN112838022A

CN112838022A - Stripping device

Info

Publication number: CN112838022A
Application number: CN201911157279.3A
Authority: CN
Inventors: 林雅雯; 李威震
Original assignee: Scientech Corp
Current assignee: Scientech Corp
Priority date: 2019-11-22
Filing date: 2019-11-22
Publication date: 2021-05-25

Abstract

A peeling device suitable for separating a protective sheet and a substrate from each other, the peeling device comprising an adsorption mechanism and a drive mechanism. The adsorption mechanism comprises a bearing module, a first suction module and a second suction module. The bearing module is provided with a bearing seat and a connecting piece. The first suction module is arranged on the carrier seat and close to the connecting piece and is used for vacuum suction on the edge of the protection sheet. The second suction module is spaced apart from the first suction module and is further away from the connecting piece. The driving mechanism comprises a base, a linear moving element and a linkage piece. The linear moving element is arranged on the base and extends in an inclined direction. The linkage piece is fixedly connected with the connecting piece and can be driven by the linear moving element to reciprocate along the inclined direction, and the adsorption mechanism is driven to move along the inclined direction, so that the protection sheet can be gradually separated from the substrate from the edge, and the risks of breakage of the protection sheet and damage of the substrate can be greatly reduced.

Description

Stripping device

Technical Field

The present invention relates to a stripping apparatus, and more particularly, to a stripping apparatus used in a semiconductor manufacturing process.

Background

In semiconductor manufacturing, a protective glass sheet is attached to the back surface of some substrates to strengthen the substrates and prevent the substrates from being broken. The protective sheet and the substrate need to be peeled off after the process is completed.

However, since the protective sheet is made of glass and is a fragile material, the protective sheet is often broken and not easily separated from the substrate or the substrate is broken in the process of peeling the protective sheet from the substrate, and the substrate having been processed is discarded regardless of the breakage of the protective sheet or the breakage of the substrate, which results in a waste of cost.

Disclosure of Invention

One of the objects of the present invention is to provide a peeling apparatus capable of reducing the risk of damage to a substrate during peeling.

In some embodiments, the peeling apparatus of the present invention is suitable for separating a protective sheet and a substrate from each other, and includes an adsorption mechanism and a driving mechanism. The adsorption mechanism comprises a bearing module, a first suction module and a second suction module. The bearing module is provided with a bearing seat and a connecting piece, the bearing seat is horizontally arranged and provided with an end part, and the connecting piece is connected to the upper surface of the end part. The first suction module is arranged on the carrying seat and close to the connecting piece, and is provided with a first suction disc assembly located below the carrying seat, and the first suction disc assembly is used for vacuum adsorption on the edge close to the protection sheet. The second suction module is arranged on the carrier seat, is spaced from the first suction module and is far away from the connecting piece, and is provided with a second suction disc assembly located below the carrier seat, and the second suction disc assembly and the first suction disc assembly are jointly subjected to vacuum adsorption on the protection sheet. The driving mechanism comprises a machine base, a linear moving element and a linkage piece. The stand is operable to move in an up-and-down direction. The linear moving element is arranged on the base and extends in an inclined direction inclined relative to the vertical direction. The linkage piece is fixedly connected with the connecting piece and can be driven by the linear moving element to reciprocate along the inclined direction, and the adsorption mechanism is driven to move along the inclined direction.

In some embodiments, the first suction module further has a supporting component disposed on the carrier, the supporting component extends along the up-down direction and has a bottom end connected to the first suction disc assembly, the supporting component is connected to the first suction disc assembly by a ball-and-socket joint structure so that the first suction disc assembly can slightly swing, and the second suction module has the same structure as the first suction module.

In some implementation aspects, the first chuck assembly has a chuck base and an inner chuck body located in the chuck base to define a gas flowing space together, the chuck base has a mounting groove extending downwards from an upper surface of the chuck base and gradually expanding into a hemispherical shape, the supporting assembly has a supporting member located at a bottom end, the supporting member is arranged in the mounting groove in a penetrating manner and has an arc surface matched with an arc wall surface defining the mounting groove, and the supporting member and the chuck base form a ball-and-socket joint structure together.

In some embodiments, the supporting component further includes a bushing fixed to the carrier, a main rod slidably disposed through the bushing in the up-down direction, a pressing cover clamped between the bottom end of the main rod and the top end of the supporting member, and an elastic member sleeved on the main rod and abutting against the bushing and the pressing cover.

In some embodiments, the supporting assembly further has a resilient gasket sleeved on the supporting member and clamped between the pressing cover and the suction cup seat.

In some embodiments, the supporting assembly further has a sensing head connected to the top end of the main rod, the sensing head has a small diameter portion and a large diameter portion protruding laterally from the small diameter portion, the first attraction module further has a position detector disposed on the carrier and located at a side of the sensing head, and the position detector has a detection position and is configured to determine which of the small diameter portion and the large diameter portion is located at the detection position.

In some embodiments, the first chuck assembly further comprises an airtight gasket disposed on the bottom surface of the chuck base.

In some implementations, the second attraction module, the first attraction module, and the center of the protective sheet are collinear.

In some embodiments, the second attraction module is located at a position corresponding to the center of the protective sheet.

The invention has at least the following effects: through the drive of the linear moving element, the whole adsorption mechanism can move obliquely upwards at a uniform speed and apply force to the protection plate obliquely by the first suction disc component and the second suction disc component, so that the protection plate can be gradually peeled off from the edge, and the risks of the fragmentation of the protection plate and the damage of the substrate can be greatly reduced.

Drawings

Other features and effects of the present invention will become apparent from the following detailed description of the embodiments with reference to the accompanying drawings, in which:

FIG. 1 is a schematic cross-sectional view of an exemplary peeling apparatus of the present invention, showing an initial position of a protective sheet and a substrate to be peeled;

FIG. 2 is a schematic view of the relative positions of the two chuck assemblies of this embodiment with the protective sheet and the base plate;

fig. 3 is a schematic cross-sectional view of the first suction module of this embodiment;

FIG. 4 is a schematic sectional view illustrating a state of being pressed against the protective sheet when the peeling process is performed in the embodiment;

FIG. 5 is a schematic sectional view illustrating a state where the protective sheet is peeled off by being obliquely moved when the peeling process is performed in the embodiment; and

fig. 6 is a schematic sectional view illustrating slight oscillation of the first suction module during peeling of the protective sheet.

Detailed Description

Referring to fig. 1 to 3, the peeling apparatus 100 according to the embodiment of the present invention is suitable for separating a protection sheet 6 and a substrate 7 from each other, and the peeling apparatus 100 includes an adsorption mechanism 10 and a driving mechanism 5.

The suction mechanism 10 includes a carrying module 1, a first suction module 2 and a second suction module 3. The carrier module 1 has a carrier 11 and a connecting member 12, the carrier 11 is horizontally disposed above the protection sheet 6 in a working state and has an end 111 corresponding to the edge of the protection sheet 6, and the connecting member 12 is connected to the upper surface of the end 111. The first suction module 2 is disposed on the carrier 11 and near the connecting member 12, and has a first suction pad assembly 21 disposed under the carrier 11, wherein the first suction pad assembly 21 is used for vacuum-sucking on the near edge of the protection sheet 6. The second suction module 3 is disposed on the carrier 11 and spaced apart from the first suction module 2 to be further away from the connecting member 12, and has a second suction cup assembly 31 located under the carrier 11, wherein the second suction cup assembly 31 and the first suction cup assembly 21 are commonly vacuum-absorbed on the protection sheet 6. Preferably, in the working state, the second suction module 3, the first suction module 2 and the center of the protection sheet 6 are collinear. In this embodiment, the base plate 7 and the protection sheet 6 are circular, as shown in fig. 2, in the working state, an imaginary line passing through the second suction module 3 and the first suction module 2 passes through the center of the protection sheet 6, and in this embodiment, the second suction module 3 is located at a position corresponding to the center of the protection sheet 6. Similarly, if the substrate 7 and the protective sheet 6 are square, the first suction module 2 and the second suction module 3 can be provided in the same manner.

In the present embodiment, the structure of the second suction module 3 is the same as that of the first suction module 2, so the following description will only take the first suction module 2 as an example, and the structure of the second suction module 3 is referred to the first suction module 2 and will not be repeated.

The first attraction module 2 further has a supporting component 22 and a position detector 23 disposed on the carrier 11. The supporting component 22 extends along an up-down direction D1 and has a bottom end connected to the first chuck assembly 21, and the supporting component 22 is connected to the first chuck assembly 21 by a ball-and-socket joint structure so that the first chuck assembly 21 can slightly swing. Specifically, the supporting component 22 has a bushing 221 fixed on the pedestal 11, a main rod 222 slidably passing through the bushing 221 in the vertical direction D1, a supporting member 223 connected to the bottom end of the main rod 222, a pressing cover 224 sandwiched between the bottom end of the main rod 222 and the top end of the supporting member 223, an elastic member 225 sleeved on the main rod 222 and abutting against between the bushing 221 and the pressing cover 224, an elastic washer 226 sleeved on the supporting member 223 and sandwiched between the pressing cover 224 and the first chuck assembly 21, and a sensing head 227 connected to the top end of the main rod 222. The support member 223 is fixed to the main body 222 by a bolt 228.

The first chuck assembly 21 has a chuck base 211 and an inner disk 212 positioned in the chuck base 211 to define a gas flow space 213. The suction cup holder 211 has a mounting groove 211b, and the mounting groove 211b extends downward from the upper surface of the suction cup holder 211 and gradually expands to be hemispherical. The supporting member 223 penetrates through the mounting groove 211b and has an arc surface matching with the arc wall defining the mounting groove 211b, so that the supporting member 223 and the suction cup holder 211 together form a ball joint structure. In addition, the first chuck assembly 21 further has an airtight gasket 214 disposed on the bottom surface of the chuck base 211 to prevent external air from entering the air flowing space 213 during vacuum suction.

The position detector 23 is disposed on the carrier 11 and located beside the sensing head 227, and has a detecting position. The sensing head 227 has a small diameter portion 227a and a large diameter portion 227b protruding from the small diameter portion 227a, when the small diameter portion 227a is located at the detection position of the position detector 23, the distance between the small diameter portion 227a and the position detector 23 is greater than the distance between the large diameter portion 227b and the position detector 23 when the large diameter portion 227b is located at the detection position, and the difference between the distances between the small diameter portion 227a and the large diameter portion 227b and the position detector 23 when the small diameter portion 227a and the large diameter portion 227b are located at the detection position is used to determine which one is located at the detection position, so as to determine whether the first chuck assembly 21 is positioned. The specific operation of which will be described in detail below.

In this embodiment, the elastic member 225 is a compression spring for assisting the first chuck assembly 21 to adhere to the protection sheet 6; the elastic washer 226 is made of Polyurethane (PU), sleeved on the supporting member 223 and clamped between the pressing cover 224 and the suction cup holder 211; the airtight gasket 214 is made of fluororubber.

The driving mechanism 5 includes a base 51, a linear moving element 52 and a linking member 53. The base 51 is operatively movable in the up-down direction D1, and in the present embodiment, the base 51 is driven by a pneumatic cylinder (not shown). The linear moving element 52 is provided on the base 51 and extends in an inclined direction D2 inclined with respect to the up-down direction D1. The linking member 53 is fixedly connected to the connecting member 12 of the carrier module 1 and can be driven by the linear moving element 52 to reciprocate along the inclined direction D2, and drives the adsorbing mechanism 10 to move along the inclined direction D2. In the present embodiment, the linear moving element 52 is a lead screw and is driven by a motor (not shown), when the linear moving element 52 rotates forward, the linking element 53 is driven, so that the linking element 53 moves obliquely upward along the inclined direction D2, and the whole adsorption mechanism 10 moves obliquely upward along the inclined direction D2 with the linking element 53. On the contrary, when the linear moving element 52 rotates reversely, the linking member 53 is driven, so that the linking member 53 moves obliquely downward along the inclined direction D2 to return to the original position, and the whole adsorption mechanism 10 moves obliquely downward along the inclined direction D2 with the linking member 53.

When the protective sheet 6 and the substrate 7 are to be peeled off, as shown in fig. 1, the substrate 7 and the protective sheet 6 which are attached to each other are firstly placed at a predetermined position below the adsorption mechanism 10, so that the center of the protective sheet 6 is correspondingly located below the second chuck assembly 31, and the edge of the protective sheet 6 which is close to the second chuck assembly is located below the first chuck assembly 21, and at this time, a certain distance is kept between the bottom surfaces of the first chuck assembly 21 and the second chuck assembly 31 and the surface of the protective sheet 6. Next, as shown in fig. 4, the base 51 moves downward and drives the whole adsorption mechanism 10 to move downward through the linkage 53, so that the bottom surfaces of the first suction cup assembly 21 and the second suction cup assembly 31 are pressed against the surface of the protection sheet 6, when the bottom surfaces of the first suction cup assembly 21 and the second suction cup assembly 31 contact the surface of the protection sheet 6, the base 51 still drives the whole adsorption mechanism 10 to move downward together, and the base 51 stops moving downward until the position detector 23 detects that the small diameter portion 227a moves to the detection position. That is, when the suction mechanism 10 is driven by the base 51 to move downwards continuously, the main rod 222 of the first suction module 2 is pushed by the first suction disc assembly 21 to move upwards relative to the bushing 221, and the sensing probe 227 also moves upwards relative to the position detector 23, when the detection position of the sensing probe 227 changes from the position where the large-diameter portion 227b is located in the position detector 23 to the height where the small-diameter portion 227a moves upwards to the detection position where the position detector 23 detects, the distance between the sensing probe 23 and the small-diameter portion 227a is greater than the distance between the sensing probe and the large-diameter portion 227b, so as to confirm that the first suction disc assembly 21 has been pressed against the surface of the protection sheet 6. Moreover, when the position detector 23 detects a distance change, which means that the main rod 222 moves at the same height as the sensing head 227, the distance between the bottom end of the bushing 221 and the pressing cover 224 is shortened due to the upward movement of the main rod 222 relative to the bushing 221, so that the elastic member 225 is compressed and accumulates elastic restoring force to press the pressing cover 224, and the pressure can be transmitted to the first sucking disc assembly 21, thereby increasing the adhesion between the first sucking disc assembly 21 and the protecting sheet 6. In addition, when the position detector 23 detects the small diameter portion 227a, it is not only determined that the first chuck assembly 21 reaches the position to stop the downward movement of the base 51, but also further generates a start signal to start the linear moving element 52 to perform the peeling process.

The second suction module 3 operates in the same manner as the first suction module 2, and when the first chuck assembly 21 and the second chuck assembly 31 are pressed against the surface of the protection sheet 6, the gas flowing space 213 in the first chuck assembly 21 and the second chuck assembly 31 is evacuated, so that the first chuck assembly 21 and the second chuck assembly 31 vacuum-adsorb the protection sheet 6.

As shown in fig. 5, after the first chuck assembly 21 and the second chuck assembly 31 vacuum-adsorb the protection sheet 6, the linear moving element 52 is activated, the linear moving element 52 rotates uniformly to drive the linking member 53 to move obliquely upward along the inclined direction D2 toward the upper side of the protection sheet 6, and the linking member 53 simultaneously drives the adsorbing mechanism 10 to move obliquely upward along the inclined direction D2. In the moving process, since the first attraction module 2 is close to the connection element 12, i.e. the position of the attraction mechanism 10 under the thrust of the linkage element 53, is pushed by the force to move the first attraction module 2 obliquely upward compared with the second attraction module 3. With reference to fig. 6, when the first suction module 2 moves upward, the first suction disc assembly 21 can swing slightly during the peeling process of the protection sheet 6, in this embodiment, the maximum amplitude of the swing of the first suction disc assembly 21 is 3.5 degrees, because the bonding force between the edge of the protection sheet 6 and the substrate 7 is weak, so that the protection sheet 6 can be peeled from the substrate 7 at the edge first, and then the protection sheet 6 is gradually peeled from the substrate 7 by maintaining the oblique force. That is, the linear moving element 52 drives the linking member 53 to move upward and obliquely along the oblique direction D2 toward the top of the protection sheet 6 at an even speed, so that the first suction cup assembly 21 can first peel the protection sheet 6 from the edge away from the substrate 7, and as the linking member 53 continues to move upward obliquely, the first suction cup assembly 21 adsorbs the protection sheet 6 to gradually peel the protection sheet 6 from the edge toward the center, and the second suction cup assembly 31 adsorbs the protection sheet 6 together to gradually and completely peel the protection sheet 6 from the substrate 7. In other words, compared to the way of integrally applying force to the protection sheet 6 in the vertical direction, the protection sheet 6 is gradually peeled from the substrate 7 from the edge to the center and then from the edge by applying force obliquely, so that the force applied to the protection sheet 6 can be reduced, and the protection sheet 6 is easily peeled from the substrate 7, thereby reducing the risk that the protection sheet 6 made of glass is broken and the substrate 7 is damaged.

When the protection sheet 6 is completely peeled off from the substrate 7, the oblique force applied to the first chuck assembly 21 by the attraction of the protection sheet 6 is removed, and the first chuck assembly 21 can be restored by the restoring force of the elastic washer 226 after the elastic deformation.

After the protection sheet 6 is completely peeled off, the base 51 moves upward and drives the whole adsorption mechanism 10 to move upward, the linear moving element 52 drives the linkage 53 to move downward and return to the original position, and the adsorption mechanism 10 returns to the initial position to prepare for the next peeling process of the protection sheet 6.

In summary, the linear moving element 52 drives the whole sucking mechanism 10 to move upward and obliquely with the first chuck assembly 21 and the second chuck assembly 31 to apply force to the protection sheet 6, so that the protection sheet 6 can be gradually peeled off from the edge, thereby greatly reducing the risk of the breakage of the protection sheet 6 and the damage of the substrate 7.

The above description is only an example of the present invention, and the scope of the present invention should not be limited thereby, and the invention is still within the scope of the present invention by simple equivalent changes and modifications made according to the claims and the contents of the specification.

Claims

1. A peeling device is suitable for separating a protective sheet and a substrate which are to be bonded, and is characterized in that: the peeling apparatus includes:

an adsorption mechanism comprising

A bearing module, which is provided with a bearing seat and a connecting piece, wherein the bearing seat is horizontally arranged and is provided with an end part, the connecting piece is connected with the upper surface of the end part,

a first suction module disposed on the carrier and near the connecting member and having a first suction pad assembly disposed below the carrier for vacuum adsorption on the edge of the protection sheet, and

the second suction module is arranged on the carrier seat, is spaced from the first suction module and is far away from the connecting piece, and is provided with a second sucker component positioned below the carrier seat, and the second sucker component and the first sucker component are jointly vacuum-adsorbed on the protection sheet; and

a drive mechanism comprising

A base which can be operated to move up and down,

a linearly moving element provided in the base and extending in an inclined direction inclined with respect to the up-down direction, an

And the linkage piece is fixedly connected with the connecting piece and can be driven by the linear moving element to reciprocate along the inclined direction, and drives the adsorption mechanism to move along the inclined direction.

2. The peeling apparatus as claimed in claim 1, wherein: the first suction module is also provided with a supporting component arranged on the carrier seat, the supporting component extends along the up-down direction, the bottom end of the supporting component is connected with the first suction disc component, the supporting component is connected with the first suction disc component through a ball joint structure, so that the first suction disc component can slightly swing, and the structure of the second suction module is the same as that of the first suction module.

3. The peeling apparatus as claimed in claim 2, wherein: this first sucking disc subassembly has the sucking disc seat and is located the interior disk body of this sucking disc seat in order to delimit gas flow space jointly, and this sucking disc seat has the mounting groove, and this mounting groove is from the upper surface of this sucking disc seat down extension and enlarge gradually and be hemispherical, and this supporting component has the supporting piece that is located the bottom, and this supporting piece wears to locate this mounting groove and has and defines the arc surface of the arc wall matched with of this mounting groove, and makes this supporting piece and this sucking disc seat form ball and socket joint structure jointly.

4. The peeling apparatus as claimed in claim 3, wherein: the supporting component is also provided with a lining fixed on the carrying seat, a main rod body which can be slidably arranged through the lining in the up-down direction, a gland clamped between the bottom end of the main rod body and the top end of the bearing piece, and an elastic piece which is sleeved on the main rod body and is propped against between the lining and the gland.

5. The peeling apparatus as claimed in claim 4, wherein: the supporting component is also provided with an elastic gasket which is sleeved on the supporting piece and clamped between the gland and the sucker seat.

6. The peeling apparatus as claimed in claim 4, wherein: the supporting assembly is further provided with a sensing head connected to the top end of the main rod body, the sensing head is provided with a small diameter portion and a large diameter portion protruding from the side of the small diameter portion, the first attraction module is further provided with a position detector arranged on the carrying seat and located on the side of the sensing head, and the position detector is provided with a detection position and used for judging which of the small diameter portion and the large diameter portion is located at the detection position.

7. The peeling apparatus as claimed in claim 3, wherein: the first sucker component is also provided with an airtight gasket arranged on the bottom surface of the sucker seat.

8. The peeling apparatus as claimed in claim 1, wherein: the second attraction module, the first attraction module and the center of the protection sheet are collinear.

9. The peeling apparatus as claimed in claim 1, wherein: the second suction module is located at a position corresponding to the center of the protective sheet.