CN112822351B - Imaging device and imaging method based on DMD and AlGaN base multielement ultraviolet detector - Google Patents
Imaging device and imaging method based on DMD and AlGaN base multielement ultraviolet detector Download PDFInfo
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- 238000003384 imaging method Methods 0.000 title claims abstract description 93
- 229910002704 AlGaN Inorganic materials 0.000 title claims abstract description 58
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 238000005259 measurement Methods 0.000 claims description 33
- 239000011159 matrix material Substances 0.000 claims description 24
- 230000007306 turnover Effects 0.000 claims description 14
- 239000013598 vector Substances 0.000 claims description 9
- 238000002834 transmittance Methods 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 4
- 238000005070 sampling Methods 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000000825 ultraviolet detection Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000007123 defense Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003331 infrared imaging Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910002058 ternary alloy Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0437—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
Abstract
The invention provides an imaging device based on a DMD and AlGaN-based multi-element ultraviolet detector, which belongs to the technical field of semiconductors and comprises an ultraviolet optical lens, a DMD control module, an AlGaN-based multi-element ultraviolet detector, a signal processing module, a data acquisition module and an image reconstruction module; the DMD control module is electrically connected with the DMD, the signal processing module and the data acquisition module, and the data acquisition module is also electrically connected with the image reconstruction module. The invention also provides an imaging method based on the DMD and AlGaN multi-element ultraviolet detector. The imaging device and the imaging method based on the DMD and AlGaN-based multi-element ultraviolet detector realize high-resolution ultraviolet imaging by using the DMD and the multi-element AlGaN-based ultraviolet detector in a combined manner, solve the problem of high blind pixel rate of the traditional AlGaN area array high-resolution imaging by using a DMD imaging mechanism, and solve the problem of long imaging time in single-tube high-resolution imaging by using the multi-element AlGaN detector.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to an imaging device and an imaging method based on a DMD and AlGaN multi-element ultraviolet detector.
Background
The ultraviolet imaging system has very wide application prospect in the fields of national defense construction, national major engineering projects and the like. Along with the improvement of requirements of electronic warfare on equipment such as anti-interference, accurate positioning, accurate striking, quick response and the like, a single infrared detection system is increasingly difficult to meet the requirements of modern national defense, and an ultraviolet imaging system can realize high anti-interference performance, high flexibility and high response speed and is bound to become the inevitable choice of national defense equipment.
The wide bandgap AlGaN semiconductor material is a ternary alloy of GaN and AlN, has a plurality of excellent characteristics, such as high breakdown electric field, high voltage resistance, high temperature resistance, radiation resistance, good thermal stability and chemical stability, and the like, and simultaneously has an intrinsic working wavelength which is continuously adjustable between 365nm and 200nm, is an ideal material for preparing an ultraviolet detector, particularly a solar blind ultraviolet detector, and is considered to be a wide bandgap semiconductor detector which is most expected to replace Si and an ultraviolet photomultiplier. However, due to the lack of a homogeneous substrate, an AlGaN material generally grows on a sapphire substrate and the like, and due to large lattice mismatch and thermal mismatch, the AlGaN material has a high-density defect, so that problems of low pixel yield, poor uniformity and the like exist in AlGaN-based ultraviolet detection high-resolution imaging. Therefore, although the AlGaN-based solar blind ultraviolet detector is an ideal ultraviolet detection and imaging choice, the AlGaN-based solar blind ultraviolet detector is not widely applied to ultraviolet band detection instead of a photomultiplier and other detectors at present. Therefore, breaking through the traditional ultraviolet imaging mode is the key to realizing the ultraviolet imaging application.
Digital micro-mirrors (DMDs) are emerging optical modulation devices that integrate thousands of regularly arrayed square precision micro-mirror plates on their surface. Each micromirror is an aluminum flat mirror with high reflectivity. Each micromirror unit can be rotated around its diagonal to + -10 deg. or + -12 deg.. DMD has three states, an on state (+10 or + 12), an off state (-10 or-12), and a flat state (0). The flat state is the initial state of no power on, in the on state, the micromirror is turned to the illumination direction to reflect the incident light to the detector, and in the off state, the micromirror is reflected to a dark field and is limited to the black level background of the image. The DMD and the single tube detector can theoretically image, and the imaging based on this method has been applied to infrared imaging. However, in the imaging process of the single tube detector based on the DMD, the pixel resolution of the imaging is interdependent with the imaging time, and the imaging speed is reduced to realize high-pixel imaging.
Therefore, a method capable of simultaneously realizing high resolution and fast imaging of DMD detector imaging is urgently needed to be researched, and application of the AlGaN-based ultraviolet detector in ultraviolet detection imaging is realized.
Disclosure of Invention
The invention aims to provide an imaging device and an imaging method based on a DMD and AlGaN-based multi-element ultraviolet detector, aiming at the defects in the prior art, the DMD and the multi-element AlGaN-based ultraviolet detector are combined for use to realize high-resolution ultraviolet imaging, the problem of high blind pixel rate of the traditional AlGaN area array high-resolution imaging is solved by utilizing a DMD imaging mechanism, and the problem of long imaging time in single-tube high-resolution imaging is solved by utilizing the multi-element AlGaN detector.
The object of the invention can be achieved by the following technical measures:
the invention provides an imaging device based on a DMD and AlGaN base multi-element ultraviolet detector, which comprises an ultraviolet optical lens, a DMD control module, an AlGaN base multi-element ultraviolet detector, a signal processing module, a data acquisition module and an image reconstruction module, wherein the DMD and AlGaN base multi-element ultraviolet detector are arranged on the upper surface of the DMD; the DMD control module is electrically connected with the DMD, the signal processing module and the data acquisition module, and the data acquisition module is also electrically connected with the image reconstruction module;
the DMD is used as a spatial light modulator, the number of micro mirrors of the DMD determines the resolution of an imaged image, each micro mirror is independently driven and controlled, and the DMD comprises a plurality of sub DMDs; the AlGaN-based multielement ultraviolet detector comprises a plurality of photosensitive surfaces, wherein each photosensitive surface corresponds to one sub DMD and also corresponds to one part of a scene, and the number of the photosensitive surfaces is consistent; the number of the sub DMDs, the number of the photosensitive surfaces and the number of the data acquisition channels are the same;
the ultraviolet optical lens is used for collimating and focusing the scene radiation light so as to enable the light to be incident on the DMD; the DMD overturns each sub DMD according to the loaded mask measurement matrix to realize the deterministic modulation of light, and the AlGaN-based multielement ultraviolet detector is used for detecting the light modulated by the DMD and converting the detected light signals into current signals; the signal processing module converts the current signal into a voltage signal, amplifies the voltage signal and transmits the signal to the image reconstruction module through the data acquisition module; the image reconstruction module adopts an algorithm to enable the obtained measured values to form measurement vectors, and corresponding operation is carried out on the measurement vectors and the mask measurement matrix according to different algorithms to obtain an image; the DMD control module is used for storing and loading a mask measurement matrix, controlling the sampling of the data acquisition module and controlling the turnover and turnover delay time of the DMD.
Furthermore, each micro-reflector of the DMD is provided with a layer of ultraviolet antireflection film for improving the transmittance of the micro-reflector to ultraviolet light.
Further, the algorithm adopted by the image reconstruction module is a correlation algorithm or an orthogonal matching tracking algorithm in compressed sensing imaging.
Further, the data acquisition module comprises a data acquisition card, and the current signal is converted into a voltage signal by the transimpedance amplifier and transmitted to the image reconstruction module through the data acquisition card.
Further, the image reconstruction module is a boarding station.
The invention also provides an imaging method for ultraviolet imaging by adopting the imaging device, which comprises the following steps:
step S1: the DMD control module controls loading of a mask measurement matrix onto the DMD and sends out a turnover trigger signal;
step S2: the DMD receives the turnover trigger signal, and completes the turnover and locking state of each sub DMD according to the loaded mask measurement matrix;
step S3: each photosensitive surface of the AlGaN multi-element ultraviolet detector detects light modulated by each sub DMD and converts detected sub light signals into sub current signals;
step S4: the signal processing module converts each sub-current signal into a voltage signal below 10V;
step S5: the data acquisition module starts to sample signals, transmits the acquired signals to the image reconstruction module and stores the acquired signals in the image reconstruction module;
step S6: repeating the steps S1-S5, repeating P times, namely overturning the DMD for P times, wherein the overturning state of the DMD is different every time, namely the loaded mask measurement matrix is different in each overturning of each DMD, and the number of the sub DMDs and the number of the light-sensitive surfaces are N multiplied by N, and each sub DMD corresponds to one light-sensitive surface of the detector;
step S7: the image reconstruction module carries out algorithm operation on each measurement vector and the mask measurement matrix to reconstruct a sub-graph, and then reconstructs an overall image according to a corresponding sequence to realize imaging.
Furthermore, each micro-reflector of the DMD is provided with a layer of ultraviolet antireflection film for improving the transmittance of the micro-reflector to ultraviolet light.
Further, the algorithm adopted by the image reconstruction module is a correlation algorithm or an orthogonal matching tracking algorithm in compressed sensing imaging.
Further, the data acquisition module comprises a data acquisition card, and the current signal is converted into a voltage signal and then transmitted to the image reconstruction module through the data acquisition card.
Further, the image reconstruction module is a boarding station.
The imaging device and the imaging method based on the DMD and AlGaN-based multi-element ultraviolet detector realize high-resolution ultraviolet imaging by using the DMD and the multi-element AlGaN-based ultraviolet detector in a combined manner, can realize wide application of the AlGaN-based ultraviolet detector in ultraviolet detection imaging, solve the problem of high blind pixel rate of high-resolution imaging of a traditional AlGaN area array by using a DMD imaging mechanism, and solve the problem of long imaging time in single-tube high-resolution imaging by using the multi-element AlGaN detector.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of the imaging principle of the DMD and AlGaN based multielement ultraviolet detector of the present invention;
fig. 2 is a schematic structural framework diagram of an imaging device based on a DMD and AlGaN based multielement ultraviolet detector of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
In order to make the description of the present disclosure more complete and complete, the following description is given for illustrative purposes with respect to the embodiments and examples of the present invention; it is not intended to be the only form in which the embodiments of the invention may be practiced or utilized. The embodiments are intended to cover the features of the various embodiments as well as the method steps and sequences for constructing and operating the embodiments. However, other embodiments may be utilized to achieve the same or equivalent functions and step sequences.
The traditional single-pixel imaging based on the DMD adopts a single-tube photoelectric detector, in order to realize high-resolution and high-speed reconstruction of an image, the required DMD array size is larger, the number of pixels is more, the storage capacity of corresponding image data is increased dramatically, the cost is increased, and the reconstruction speed is slowed down on the contrary.
The invention provides an imaging device and an imaging method based on a DMD and an AlGaN multi-element ultraviolet detector, wherein the imaging principle schematic diagram is shown in figure 1, the DMD comprises N multiplied by N (2 multiplied by 2 in the figure) sub-DMDs, each sub-DMD is a basic coding unit, M multiplied by M (3 multiplied by 3 in the figure) digital micro-mirrors are arranged in each basic coding unit, each sub-DMD corresponds to a photosensitive surface of the AlGaN multi-element ultraviolet detector, a mask measurement matrix loaded on each sub-DMD is associated with the corresponding photosensitive surface to reconstruct a part of an image of a corresponding object, and finally all sub-images are combined according to a certain sequence to complete image reconstruction.
As shown in fig. 2, the invention provides an imaging device based on a DMD and an AlGaN-based multi-element ultraviolet detector, which comprises an ultraviolet optical lens, a DMD control module, an AlGaN-based multi-element ultraviolet detector, a signal processing module, a data acquisition module and an image reconstruction module; the DMD control module is electrically connected with the DMD, the signal processing module and the data acquisition module, and the data acquisition module is also electrically connected with the image reconstruction module.
The DMD is used as a spatial light modulator, the number of micro mirrors of the DMD determines the resolution of an imaged image, each micro mirror is independently driven and controlled, and the DMD comprises a plurality of sub DMDs; the AlGaN-based multielement ultraviolet detector comprises a plurality of photosensitive surfaces, wherein each photosensitive surface corresponds to one sub DMD and also corresponds to one part of a scene, and the number of the photosensitive surfaces is consistent; the data acquisition module comprises a data acquisition card; the number of the sub DMDs, the number of the photosensitive surfaces and the number of the data acquisition channels are the same;
the ultraviolet optical lens is used for collimating and focusing the scene radiation light so as to enable the light to be incident on the DMD; the DMD overturns each sub DMD according to the loaded mask measurement matrix to realize the deterministic modulation of light, and the AlGaN-based multielement ultraviolet detector is used for detecting the light modulated by the DMD and converting the detected light signals into current signals; the signal processing module converts the current signal into a voltage signal, amplifies the voltage signal and transmits the signal to the image reconstruction module through the data acquisition module; the image reconstruction module adopts an algorithm to enable the obtained measured values to form measurement vectors, and corresponding operation is carried out on the measurement vectors and the mask measurement matrix according to different algorithms to obtain an image; the DMD control module is used for storing and loading a mask measurement matrix, controlling sampling of an A/D sampling chip and controlling overturning and overturning delay time of the DMD.
The AlGaN-based multielement ultraviolet detector does not have imaging spatial resolution, a DMD is required to be used as a spatial light modulator to realize spatial modulation of light, and each micro-reflector (pixel) in the DMD can be independently driven and controlled, so that deterministic modulation of light can be realized, and spatial distribution of the light beam on an object plane can be obtained by calculating the light beam emitted or reflected by the DMD. In the invention, because the DMD is applied to the field of ultraviolet imaging, each micro-reflector of the DMD is provided with a layer of ultraviolet antireflection film for improving the transmittance of the micro-reflector to ultraviolet light. The number of the micro-reflectors of the DMD determines the resolution of an imaged image, and the overturning state of the DMD determines the light intensity value of the light incident to the photosensitive surface of the AlGaN-based multielement ultraviolet detector, so that the DMD plays a role in light intensity modulation.
The image reconstruction module adopts an algorithm which is a correlation algorithm or an orthogonal matching tracking algorithm in compressed sensing imaging. The data acquisition module comprises a data acquisition card, and the current signal is converted into a voltage signal to be amplified and transmitted to the image reconstruction module through the data acquisition card. The image reconstruction module can be an upper machine position, and the mask measurement matrix can be transmitted to the DMD control module through the upper machine position.
The invention also provides an imaging method for ultraviolet imaging by adopting the imaging device, which comprises the following steps:
step S1: the DMD control module controls loading of a mask measurement matrix onto the DMD and sends out a turnover trigger signal;
step S2: the DMD receives the turnover trigger signal, and completes the turnover and locking state of each sub DMD according to the loaded mask measurement matrix;
step S3: each photosensitive surface of the AlGaN multi-element ultraviolet detector detects light modulated by each sub DMD and converts detected sub light signals into sub current signals;
step S4: the signal processing module converts each sub-current signal into a voltage signal below 10V;
step S5: the data acquisition module starts to sample signals, transmits the acquired signals to the image reconstruction module and stores the acquired signals in the image reconstruction module;
step S6: repeating the steps S1-S5, repeating P times, namely overturning the DMD for P times, wherein the overturning state of the DMD is different every time, namely the loaded mask measurement matrix is different in each overturning of each DMD, and the number of the sub DMDs and the number of the light-sensitive surfaces are N multiplied by N, and each sub DMD corresponds to one light-sensitive surface of the detector; step S7: the image reconstruction module carries out algorithm operation on each measurement vector and the mask measurement matrix to reconstruct a sub-graph, and then reconstructs an overall image according to a corresponding sequence to realize imaging.
Specifically, in step S6, each sub-DMD corresponds to a different part of the scene, and each sub-DMD loads a different mask measurement matrix during each flipping, and after each loading, the whole DMD performs full-frame flipping under the control of the flipping control signal, and at this time, each photosensitive surface of the AlGaN-based multielement ultraviolet detector correspondingly receives different incident light intensities.
According to the invention, the AlGaN-based multi-element ultraviolet detector is adopted, and compared with other ultraviolet detectors, the AlGaN-based multi-element ultraviolet detector has higher sensitivity and larger bandwidth, and can adapt to the rapid turnover of DMD and realize the instant response to the light intensity change. And the multi-element ultraviolet detector module greatly improves the imaging speed and solves the problem of long imaging time in single-tube high-resolution imaging. The algorithm adopted by the image reconstruction module in the invention can be a correlation algorithm or an Orthogonal Matching Pursuit (OMP) algorithm in compressed sensing imaging.
The imaging device and the imaging method based on the DMD and AlGaN-based multi-element ultraviolet detector realize high-resolution ultraviolet imaging by using the DMD and the multi-element AlGaN-based ultraviolet detector in a combined manner, can realize wide application of the AlGaN-based ultraviolet detector in ultraviolet detection imaging, solve the problem of high blind pixel rate of high-resolution imaging of a traditional AlGaN area array by using a DMD imaging mechanism, and solve the problem of long imaging time in single-tube high-resolution imaging by using the multi-element AlGaN detector.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. An imaging device based on a DMD and AlGaN-based multi-element ultraviolet detector is characterized by comprising an ultraviolet optical lens, the DMD, a DMD control module, the AlGaN-based multi-element ultraviolet detector, a signal processing module, a data acquisition module and an image reconstruction module; the DMD control module is electrically connected with the DMD, the signal processing module and the data acquisition module, and the data acquisition module is also electrically connected with the image reconstruction module;
the DMD is used as a spatial light modulator, the number of micro mirrors of the DMD determines the resolution of an imaged image, each micro mirror is independently driven and controlled, and the DMD comprises a plurality of sub DMDs; the AlGaN-based multielement ultraviolet detector comprises a plurality of photosensitive surfaces, wherein each photosensitive surface corresponds to one sub DMD and also corresponds to one part of a scene, and the number of the photosensitive surfaces is consistent; the number of the sub DMDs, the number of the photosensitive surfaces and the number of the data acquisition channels are the same;
the ultraviolet optical lens is used for collimating and focusing the scene radiation light so as to enable the light to be incident on the DMD; the DMD overturns each sub DMD according to the loaded mask measurement matrix to realize the deterministic modulation of light, and the AlGaN-based multielement ultraviolet detector is used for detecting the light modulated by the DMD and converting the detected light signals into current signals; the signal processing module converts the current signal into a voltage signal, amplifies the voltage signal and transmits the signal to the image reconstruction module through the data acquisition module; the image reconstruction module adopts an algorithm to enable the obtained measured values to form measurement vectors, and corresponding operation is carried out on the measurement vectors and the mask measurement matrix according to different algorithms to obtain an image; the DMD control module is used for storing and loading a mask measurement matrix, is used for sampling by the data acquisition module, and is used for controlling the turnover and turnover delay time of the DMD.
2. The imaging device according to claim 1, wherein each micromirror of the DMD is provided with an ultraviolet antireflection film for improving the transmittance of the micromirror to ultraviolet light.
3. The imaging device based on the DMD-AlGaN-based multielement ultraviolet detector according to claim 1, wherein an algorithm adopted by the image reconstruction module is a correlation algorithm or an orthogonal matching pursuit algorithm in compressed sensing imaging.
4. The imaging device according to claim 1, wherein the data acquisition module comprises a data acquisition card, and the current signal is converted into a voltage signal by a trans-group amplifier and transmitted to the image reconstruction module through the data acquisition card.
5. The imaging device based on the DMD-AlGaN-based multielement ultraviolet detector according to claim 1, wherein the image reconstruction module is a set-up position.
6. An imaging method for ultraviolet imaging using the imaging apparatus of claim 1, comprising the steps of:
step S1: the DMD control module controls loading of a mask measurement matrix onto the DMD and sends out a turnover trigger signal;
step S2: the DMD receives the turnover trigger signal, and completes the turnover and locking state of each sub DMD according to the loaded mask measurement matrix;
step S3: each photosensitive surface of the AlGaN multi-element ultraviolet detector detects light modulated by each sub DMD and converts detected sub light signals into sub current signals;
step S4: the signal processing module converts each sub-current signal into a voltage signal below 10V;
step S5: the data acquisition module starts to sample signals, transmits the acquired signals to the image reconstruction module and stores the acquired signals in the image reconstruction module;
step S6: repeating the steps S1-S5, repeating P times, namely overturning the DMD for P times, wherein the overturning state of the DMD is different every time, namely the loaded mask measurement matrix is different in each overturning of each sub-DMD, the number of the sub-DMD and the number of the light-sensitive surfaces are N multiplied by N, and each sub-DMD corresponds to one light-sensitive surface of the detector;
step S7: the image reconstruction module carries out algorithm operation on each measurement vector and the mask measurement matrix to reconstruct a sub-graph, and then reconstructs an overall image according to a corresponding sequence to realize imaging.
7. The imaging method according to claim 6, wherein each micro-mirror of the DMD is provided with an ultraviolet antireflection film for improving the transmittance of the micro-mirror to ultraviolet light.
8. The imaging method according to claim 6, wherein the algorithm adopted by the image reconstruction module is a correlation algorithm or an orthogonal matching pursuit algorithm in compressed sensing imaging.
9. The imaging method of claim 6, wherein the data acquisition module comprises a data acquisition card, and the current signal is converted into a voltage signal and transmitted to the image reconstruction module via the data acquisition card.
10. The imaging method of claim 6, wherein the image reconstruction module is a boarding station.
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