CN112816110B - Conductive composition, conductive elastomer film, and flexible pressure sensor - Google Patents
Conductive composition, conductive elastomer film, and flexible pressure sensor Download PDFInfo
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- C08J2383/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
- C08J2383/04—Polysiloxanes
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Abstract
An embodiment of the present invention provides a conductive composition, a conductive elastomer film, and a flexible pressure sensor, the conductive composition including an elastomer material, a carbon-based powder, and a conductive ink. The conductive elastomer film prepared from the conductive composition of the embodiment of the invention is used for a flexible pressure sensor and has the characteristics of simple process, low cost, high sensitivity and wide range of detection force values.
Description
Technical Field
The invention relates to a conductive composition, in particular to a conductive composition which can be used for a flexible pressure sensor.
Background
As flexible pressure sensors have been studied extensively, their critical application in the fields of artificial skin, wearable electronics, health monitoring, etc. has attracted considerable attention. The pressure sensor is classified into a capacitive type, a piezoelectric type and a resistive type according to a sensing principle, wherein the resistive type pressure sensor is widely used due to advantages of simple manufacturing process, convenience in signal acquisition and the like.
At present, flexible pressure sensors are mostly realized by using flexible silica gel as a base material, and sensing principles of resistive pressure sensors are generally divided into two types: firstly, the piezoresistive effect of the material is utilized, namely, the resistance change is caused by the change of the number of conductive paths in the material along with the increase of external pressure; and secondly, the contact area of the electrode and the surface pattern of the pressure sensitive layer is changed along with the increase of the external pressure of the sensor, so that the change of resistance is caused.
The surface of the patterned silica gel film substrate prepared from the conductive material is used as a sensitive layer, and when pressure is applied, the corresponding pattern deformation causes the change of the contact area with the electrode, and then causes the change of resistance, so that the pressure sensing is realized. But the measurement range of the pressure sensor is limited due to the limited deformation of the pattern during the application of the external force. In addition, the sensitivity is high in the low pressure range, and decreases rapidly with increasing pressure. Therefore, this type of sensor has the characteristics of high sensitivity and narrow measurement range.
While the former sensitive layer is typically a conductive elastomer, the piezoresistive material is obtained by incorporating a conductive material into a non-conductive silicone, and the number of conductive pathways inside the sensor sensitive layer is changed by applying pressure, thereby changing the conductivity. The piezoresistive material is prepared by doping Carbon Nanotubes (CNTs), graphene (graphene), silver nanowires (AgNWs) or conductive carbon black serving as conductive fillers into a silica gel material to obtain a conductor. The conductive filler is dispersed in the matrix to form a conductive network, when external force is applied, the conductive material is pressed, the space between the conductive fillers in the conductive material is reduced, and the conductive paths are increased, so that the output resistance of the sensor is reduced, and the piezoresistive performance is realized.
The sensor using the piezoresistive effect widens the measurement range but reduces the sensitivity compared to the second device using the deformation of the surface pattern of the force sensitive layer to effect the sensing. The conductive elastomer piezoresistive material obtained by adding the filler has low conductivity and limited contact points of conductive particles in unit volume. The number of conductive paths increases more slowly when less pressure is applied, affecting the sensor sensitivity, and with increasing pressure, the compressibility of the elastomeric material can still increase the conductive paths within the material, but its sensitivity continues to decrease over a larger pressure range. In addition, most of the above fillers are materials with high manufacturing cost, which limits the possibility of mass production. Therefore, the flexible pressure sensor with low cost, simple manufacturing process, low detection limit, high sensitivity and wide measurement range is prepared and is a research target of researchers.
Disclosure of Invention
The invention mainly aims to provide a conductive composition with high conductivity and force sensitivity, which comprises an elastomer material, carbon-based powder and conductive ink, wherein a multistage conductive network is formed in the elastomer material by utilizing conductive fillers with different dimensions, the conductivity of the material is improved, and the conductive composition can be used as a force sensitive layer of a pressure sensor to realize the excellent characteristics of low detection limit, wide test pressure range, high sensitivity and the like.
According to an embodiment of the present invention, the conductive composition includes 6 to 18 parts by mass of the carbon-based powder, 49 to 60 parts by mass of the elastomer material, and 31 to 35 parts by mass of the conductive ink.
According to an embodiment of the invention, the elastomeric material comprises rubber.
According to an embodiment of the present invention, the carbon-based powder is one or more selected from carbon fiber powder, biomass charcoal, conductive carbon black, and graphite powder.
According to an embodiment of the invention, the conductive ink comprises a conductive carbon ink and/or the elastomeric material comprises polydimethylsiloxane.
An embodiment of the present invention provides a conductive elastomer film made from the above conductive composition.
An embodiment of the present invention provides a method for preparing the above conductive elastomer film, including:
preparing the carbon-based powder and the elastomer material into carbon-based powder-elastomer material composite slurry;
mixing the conductive ink with the composite slurry to obtain conductive elastomer slurry; and
and coating the conductive elastomer slurry on a substrate, and curing to obtain the conductive elastomer film.
An embodiment of the present invention provides a flexible pressure sensor, including the above conductive elastomer film or the conductive elastomer film manufactured by the above conductive elastomer film manufacturing method.
According to an embodiment of the invention, the flexible pressure sensor comprises a force sensitive layer comprising the conductive elastomeric film.
An embodiment of the present invention provides an electrode including the above conductive elastomer film or the conductive elastomer film manufactured by the above conductive elastomer film manufacturing method.
The conductive elastomer prepared from the conductive composition of the embodiment of the invention is used for a flexible pressure sensor and has the characteristics of simple process, low cost, high sensitivity and wide detection force range.
Drawings
FIG. 1 is a schematic diagram of a conductive composition according to an embodiment of the present invention;
FIG. 2 is a flow chart of the preparation of a planar conductive elastomer film according to an embodiment of the present invention;
FIG. 3 is a flow chart of the preparation of a patterned conductive elastomer film according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a flexible pressure sensor according to an embodiment of the present invention;
FIG. 5a is a graph showing the pressure test of the pressure sensor according to example 1 of the present invention;
FIG. 5b is a graph showing the pressure test of the pressure sensor according to example 2 of the present invention;
FIG. 6 is a view showing the detection limits of the pressure sensor assembled from the optimally proportioned conductive elastomer film prepared in example 2 of the present invention;
FIG. 7 is a graph showing the performance of the pressure sensor according to example 3 of the present invention.
Detailed Description
Exemplary embodiments that embody features and advantages of the present invention will be described in detail in the following description. It will be understood that the invention is capable of various modifications in various embodiments, all without departing from the scope of the invention, and that the description and illustrations herein are intended to be by way of illustration only and not to be construed as limiting the invention.
An embodiment of the present invention provides a conductive composition including an elastomeric material, a carbon-based powder, and a conductive ink.
In one embodiment, the elastomeric material may be rubber.
In one embodiment, the rubber may be silicone rubber, which may be ecoflex, polydimethylsiloxane (PDMS).
In one embodiment, the carbon-based powder may be a powder based on carbon elements, in particular a powder of elemental carbon, such as one or more of carbon fiber powder, biomass carbon, conductive carbon black, graphite powder, which reduces the cost of the conductive elastomer produced due to the lower price of the carbon-based powder.
In one embodiment, the conductive ink may be a conductive carbon ink.
In one embodiment, the conductive composition includes 13 parts by mass of a carbon-based powder, 52 parts by mass of an elastomer material, and 35 parts by mass of a conductive ink.
In one embodiment, the carbon-based powder comprises 6 to 18wt%, e.g., 8%, 10%, 12%, 13%, 14%, 15%, 17%, etc., of the total mass of the conductive composition. The content of the carbon-based powder is within the mass range, so that slurry formed in the preparation process is uniformly dispersed, and a product with good mechanical property and stable electrical property is obtained.
In one embodiment, the carbon fiber powder may have a fiber diameter of 5 to 10 μm, for example 8 μm; the length may be 10 to 100. Mu.m, for example 20. Mu.m, 30. Mu.m, 50. Mu.m, 80. Mu.m, etc.
In one embodiment, the elastomeric material comprises 49 to 60wt%, e.g., 50%, 52%, 55%, 58%, etc., of the total mass of the conductive composition.
In one embodiment, the conductive ink comprises 31 to 35wt%, e.g., 32%, 33%, 34%, etc., of the total mass of the conductive composition.
In one embodiment, the carbon particles in the conductive carbon ink may have a particle size of 40nm.
In one embodiment, the conductive composition includes 52wt% of an elastomeric material, 13wt% of a carbon-based powder, and 35wt% of a conductive ink.
In one embodiment, the preparation of the conductive elastomer paste includes:
adding carbon-based powder into PDMS main agent, uniformly dispersing through planets, then adding curing agent, uniformly stirring, preparing PDMS through the reaction of the main agent and the curing agent, and dispersing the carbon-based powder into the PDMS to obtain carbon-based powder-PDMS composite slurry;
and adding conductive ink into the carbon-based powder-PDMS composite slurry, and mechanically stirring uniformly to obtain the conductive elastomer slurry.
Only carbon-based powder is added into the PDMS bulk phase, and the obtained slurry is poor in conductivity after solidification and is insufficient to become a conductor. According to the embodiment of the invention, the conductive ink is added into the carbon-based powder-PDMS composite slurry system, so that the conductive performance is improved, and the curing of PDMS is not affected.
In one embodiment, the nano carbon particles in the conductive ink can be uniformly dispersed in the bulk phase of the carbon-based powder and the PDMS, and the dispersion gaps of the carbon-based powder of the first conductive filler in the PDMS matrix are filled to conduct the conductive paths of the carbon-based powder, the conductive ink and the PDMS, so that the carbon-based powder, the conductive ink and the PDMS three-phase conductive elastomer are obtained.
In one embodiment, the mass of the carbon-based powder is 10-25% of the total mass of the carbon-based powder-PDMS composite slurry, e.g., 12%, 15%, 18%, 20%, 22%, 24%, etc.
In one embodiment, the mass of the conductive ink is 31-35%, such as 32%, 33%, 34%, etc., of the total mass of the carbon-based powder-conductive ink-PDMS conductive elastomer slurry.
In one embodiment, the percolation threshold of the conductive carbon ink decreases as the content of the carbon-based powder increases, and the sheet resistance decreases rapidly as the content of the conductive carbon ink increases.
Referring to fig. 1, the conductive elastomer according to an embodiment of the present invention includes a carbon-based powder material, PDMS, and a conductive carbon ink.
According to the invention, the carbon-based powder with low price is used as the first conductive filler to be added into PDMS, the carbon ink with low price is used as the second conductive filler, and the carbon ink conductive particles can be filled into network gaps of the carbon-based powder material to form a conductive path, so that the elastomer is conductive and has high conductivity.
The conductive elastomer of the embodiment of the invention has higher conductivity and can be used as an electrode.
The preparation method of the conductive elastomer can effectively reduce the manufacturing cost, simplify the manufacturing steps and save the working time and the manpower.
Referring to fig. 2, in one embodiment, a conductive elastomer paste is coated on a substrate 10, the substrate 10 coated with the paste is placed in a vacuum drying oven, vacuum is pumped at room temperature to remove bubbles, and a paste film of a preset thickness is scraped with a scraper 20; then, the substrate 10 after the blade coating was put into a blow drying oven at 80 ℃ for curing, and after holding for 2 hours, taken out, cooled at room temperature, and peeled off to obtain a planar conductive elastomer film 31.
Referring to fig. 3, in one embodiment, a template 11 having a predetermined pattern is obtained by laser engraving a substrate; pouring the conductive elastomer slurry onto the template 11, and vacuumizing to form bubbles; thereafter, the template 11 was solidified in an air-drying oven at 80 ℃ for 2 hours, and then taken out, cooled at room temperature, and peeled off to obtain a conductive elastomer film 32 having a predetermined pattern on one side surface.
In one embodiment, the substrate may be a patterned or unpatterned glass plate, quartz plate, or silicon wafer. The conductive elastomer film in one embodiment of the invention can be folded at will and has certain stretchability, so that the conductive elastomer film can be used for flexible pressure sensors and can be attached to any curved surface for pressure monitoring.
As shown in fig. 4, an embodiment of the present invention provides a flexible pressure sensor, which includes an electrode layer 41, a conductive elastomer film 30, and an electrode layer 42 stacked in this order, and leads 411 and 421 are connected to the electrode layer 41 and the electrode layer 42, respectively. Wherein the conductive elastomeric film 30 is a force sensitive layer.
In one embodiment, the conductive elastomer film 30 may be a planar conductive elastomer film without a pattern or a patterned conductive elastomer film.
In one embodiment, the conductive wires 411 and 421 are adhered to the electrode layers 41 and 42 respectively by conductive silver paste or conductive carbon paste.
In one embodiment, the electrode layers 41 and 42 may be conductive layers such as ITO/PET film, copper-clad plate, copper foil, aluminum foil, etc.
In one embodiment, the conductive elastomer has excellent piezoresistive properties, and has the advantages of high sensitivity, low detection limit and wide test range as a pressure sensor sensitive layer, for example, the detection limit can be 2.5Pa, and the sensitivity can be up to 43.15kPa -1 The detection range is 0-800 kPa.
According to the embodiment of the invention, the patterning conductive elastomer can be prepared by utilizing the molding property of PDMS, the response state of the material to force can be changed by surface patterning, so that the sensor has higher linearity in a wide range of 0-800 kPa, and the sensitivity can reach 17.49kPa -1 Has excellent sensing performance in practical potential application.
The pressure sensor of the embodiment of the invention has simple preparation process, can prepare various patterns according to the template design, and can also prepare the sensor with any shape and any size according to the design, thereby carrying out mass production.
The pressure sensor of the embodiment of the invention can be used for pressure monitoring scenes such as force distribution testing, anti-fall alarming, weight measurement and automobile tire pressure testing, and has wide application prospects in the fields of health monitoring, intelligent wearable and other industrial application.
The pressure sensor of the embodiment of the invention is suitable for miniaturized and integrated equipment, can test palm pressing pressure distribution, plantar pressure distribution, weight and the like, and is used for manufacturing wearable equipment with monitoring function.
The preparation of the pressure sensor according to an embodiment of the present invention will be further described with reference to the accompanying drawings and specific examples. The carbon fiber powder, the conductive carbon ink, the PDMS main agent and the curing agent are all purchased in the market, wherein the fiber diameter of the carbon fiber powder is 8 mu m, and the length range is 10-100 mu m; the particle size of the carbon particles in the conductive carbon ink was about 40nm. The tests involved included limit of detection tests and sensor performance tests, where the limit of detection is shown in FIG. 5a, the pressure sensor consisting of a planar conductive elastomeric film as the force sensitive layer can sense the weight of one rice grain; the sensor performance consisting of the planar and patterned conductive elastomer films was tested in fig. 5b and 6, respectively, and the test equipment was a MTS mechanical tester, from which the test range and sensitivity distribution of the sensor can be seen.
Example 1
Preparation of conductive elastomer film
Adding 4 parts of carbon fiber powder with different qualities into a main agent of PDMS respectively, uniformly dispersing through planets, then adding a curing agent and uniformly stirring to obtain 4 parts of carbon fiber powder-PDMS composite slurry; the mass fractions of the carbon fiber powder in the 4 parts of composite slurry are respectively 10%, 15%, 20% and 25%;
respectively adding conductive carbon ink into the 4 parts of carbon fiber powder-PDMS composite slurry, and mechanically stirring uniformly to prepare 4 parts of conductive elastomer slurry; the mass fraction of the conductive carbon ink in the 4 parts of conductive elastomer slurry is 34%;
the 4 parts of conductive elastomer slurry are respectively coated on a glass plate, after the bubbles are removed in vacuum, an adjustable scraper is used for scraping and coating the conductive elastomer slurry to a preset thickness, then the conductive elastomer slurry is placed in a blast drying oven for curing for 2 hours at 80 ℃, and stripping is carried out, so that 4 planar conductive elastomer films are obtained, and the surface resistance of each film is reduced along with the increase of the content of carbon fiber powder and is 4200, 168, 73 and 50Ω/sq respectively.
Preparation of pressure sensor
And respectively taking the two cut copper-clad plates as two electrode layers, and overlapping the two electrode layers with the planar conductive elastomer film to form a sandwich structure, respectively leading out two wires from the two electrode layers, and adhering the wires to the electrode layers by adopting conductive silver paste to prepare the pressure sensor.
Fig. 5a shows the sensitivity of a pressure sensor assembled with 4 planar conductive elastomer films prepared in example 1 as a pressure sensitive layer, and shows that the sensitivity is in an overall rising state in the test range of 0 to 800kPa when the mass fraction of the conductive ink is 34% and the content of the carbon fiber powder is gradually increased.
Example 2
Preparation of conductive elastomer film
According to the results of example 1, the content of fixed carbon fiber powder was continuously examined, and the effect on the performance of the pressure sensor assembled as a force sensitive layer of the produced conductive elastomer film was increased as the content of conductive carbon ink was increased.
Adding carbon fiber powder into a PDMS main agent, uniformly dispersing through planets, then adding a curing agent, and uniformly stirring to obtain carbon fiber powder-PDMS composite slurry; the mass fraction of the carbon fiber powder in the composite slurry is 20%;
taking 5 parts of carbon fiber powder-PDMS composite slurry with the same mass, respectively adding conductive carbon inks with different masses into the carbon fiber powder-PDMS composite slurry, and mechanically stirring the carbon fiber powder-PDMS composite slurry uniformly to prepare 5 parts of conductive elastomer slurry; the mass percentages of the conductive carbon ink in the 5 parts of conductive elastomer slurry are 31%, 32%, 33%, 34% and 35% respectively;
and respectively coating 5 parts of the conductive elastomer slurry on a glass plate, removing bubbles in vacuum, then scraping the glass plate by using an adjustable scraper to preset thickness, then placing the glass plate in a blast drying oven for curing for 2 hours at 80 ℃, and stripping to obtain 5 planar conductive elastomer films, wherein the resistance of each film surface is reduced along with the increase of the content of the conductive carbon ink and is 4400, 246, 108, 73 and 44 omega/sq respectively.
Preparation of pressure sensor
And respectively taking the two cut copper-clad plates as two electrode layers, and superposing the two electrode layers with the planar conductive elastomer film, respectively leading out two wires from the two electrode layers, and adhering the wires to the electrode layers by adopting conductive silver paste to prepare the pressure sensor.
Fig. 5b is a graph showing the sensitivity of a pressure sensor assembled by using the 5 planar conductive elastomer films prepared in example 2 as a pressure sensitive layer, wherein the sensitivity is in an overall rising state when the mass fraction of carbon fiber powder in the carbon fiber powder-PDMS composite slurry is maintained at 20% and the content of conductive ink is gradually increased within a test range of 0 to 800kPa.
From the comprehensive results of fig. 5a and 5b, it is seen that when the mass fraction of the carbon fiber powder in the carbon fiber powder-PDMS composite slurry is 20% and the mass fraction of the conductive ink is 35%, the pressure sensor assembled by using the prepared planar conductive elastomer film as the pressure sensitive layer has sensitivity better than that of the materials prepared by other proportions in the measurement range of 0-800 kPa. FIG. 5b shows that the sensitivities are divided into three sections of 0 to 200kPa, 200 to 500kPa and 500 to 800kPa, respectively, corresponding sensitivities are 43.15, 13.69 and 7.28kPa, respectively -1 . Therefore, the ratio is selected as the optimal material ratio.
FIG. 6 is a graph showing the detection limit of a pressure sensor assembled by using a planar conductive elastomer film prepared by optimal proportioning as a pressure sensitive layer, wherein the graph shows that the planar conductive elastomer film has good response under the pressure of 2.5 Pa.
Example 3
Preparation of conductive elastomer film
The optimal proportion in the embodiment 2 is adopted, namely carbon fiber powder is added into PDMS main agent, uniformly dispersed through planets, and then curing agent is added and uniformly stirred, so as to obtain carbon fiber powder-PDMS composite slurry; the mass fraction of the carbon fiber powder in the composite slurry is 20%;
adding conductive carbon ink into the carbon fiber powder-PDMS composite slurry, and mechanically stirring uniformly to prepare conductive elastomer slurry; the mass fraction of the conductive carbon ink in the conductive elastomer slurry is 35%;
and (3) coating the conductive elastomer slurry on a glass plate of a square conical matrix with the bottom edge of 0.2mm and the interval of 0.2mm by laser engraving, scraping and coating a preset thickness by using an adjustable scraper after removing bubbles in vacuum, then placing the glass plate in a blast drying oven for curing for 2 hours at 80 ℃, and stripping to obtain the conductive elastomer film with one side surface patterned.
Preparation of pressure sensor
And respectively taking the two ITO/PET composite films as two electrode layers, and superposing the two electrode layers and the patterned conductive elastomer film together, respectively leading out two wires from the two electrode layers, and adhering the wires to the electrode layers by adopting conductive silver paste to prepare the pressure sensor.
FIG. 7 shows a performance display of a pressure sensor assembled as a pressure sensitive layer with the patterned conductive elastomer film prepared in example 3, showing a sensitivity in the range of 0-800 kPa, with a linear uniformity of 17.47kPa -1 Goodness of fit R 2 0.995.
Comparative example
The conductive carbon material-carbonized lignin is also added into PDMS matrix as conductive filler to obtain conductive composition, which is used as force sensitive layer to assemble pressure sensor, and the pressure sensor has detection pressure range of 0-130 kPa, and sensitivity of 57kPa at 0-0.5 kPa -1 As the pressure increases to about 8kPa, the sensitivity thereof decreases to 1.08kPa -1 。
From the sensitivity point of view, the sensor of the planar sensitive layer of embodiment 2 of the present invention can have 43.15kPa in the range of 0 to 200kPa -1 Is kept at 7.28kPa at 500-800 kPa -1 The method comprises the steps of carrying out a first treatment on the surface of the Example 3 patterned sensitive layer assembled sensor can have 17.47kPa over such a wide range of 0-800 kPa -1 Is provided. As can be seen from the above data, the pressure sensor according to the embodiment of the present invention has the characteristics of high sensitivity and wide range of detection force values compared with the pressure sensor according to the comparative example.
Unless otherwise defined, all terms used herein are intended to have the meanings commonly understood by those skilled in the art.
The described embodiments of the present invention are intended to be illustrative only and not to limit the scope of the invention, and various other alternatives, modifications, and improvements may be made by those skilled in the art within the scope of the invention, and therefore the invention is not limited to the above embodiments but only by the claims.
Claims (7)
1. A conductive composition comprising an elastomeric material, a carbon-based powder, and a conductive ink; wherein the conductive ink comprises 6 to 18 mass parts of the carbon-based powder, 49 to 60 mass parts of the elastomer material and 31 to 35 mass parts of the conductive ink; the mass of the carbon-based powder accounts for 10-25% of the total mass of the carbon-based powder-PDMS composite slurry; the mass of the conductive ink accounts for 31-35% of the total mass of the carbon-based powder-conductive ink-PDMS conductive elastomer slurry;
the elastomeric material is Polydimethylsiloxane (PDMS);
the method for preparing the conductive elastomer slurry by adopting the elastomer material, the carbon-based powder and the conductive ink comprises the following steps:
adding the carbon-based powder into a PDMS main agent, uniformly dispersing through planets, then adding a curing agent, uniformly stirring, preparing PDMS through the reaction of the main agent and the curing agent, and simultaneously dispersing the carbon-based powder into the PDMS to obtain carbon-PDMS composite slurry;
adding the conductive ink into the carbon-based powder-PDMS composite slurry, and mechanically stirring uniformly to obtain the conductive elastomer slurry; the nanometer carbon particles in the conductive ink can be uniformly dispersed in the bulk phase of the carbon-based powder and the PDMS, and the dispersion gaps of the carbon-based powder of the first conductive filler in the PDMS matrix are filled, so that the conductive paths of the carbon-based powder, the conductive ink and the PDMS are conducted, and the carbon-based powder, the conductive ink and the PDMS three-phase conductive elastomer are obtained.
2. The conductive composition of claim 1, wherein the carbon-based powder is selected from one or more of carbon fiber powder, biomass charcoal, conductive carbon black, graphite powder.
3. An electrically conductive elastomeric film made from the electrically conductive composition of any one of claims 1 to 2.
4. A method of making the conductive elastomeric film of claim 3, comprising:
preparing the carbon-based powder and the elastomer material into carbon-based powder-elastomer material composite slurry;
mixing the conductive ink with the composite slurry to obtain conductive elastomer slurry; and
and coating the conductive elastomer slurry on a substrate, and curing to obtain the conductive elastomer film.
5. A flexible pressure sensor comprising the conductive elastomer film of claim 3 or the conductive elastomer film produced by the method of producing a conductive elastomer film of claim 4.
6. The flexible pressure sensor of claim 5 comprising a force sensitive layer comprising the conductive elastomeric film.
7. An electrode comprising the conductive elastomer film according to claim 3 or the conductive elastomer film produced by the method for producing a conductive elastomer film according to claim 4.
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