CN112799287A - LED lamp and light source for exposure device using the same - Google Patents
LED lamp and light source for exposure device using the same Download PDFInfo
- Publication number
- CN112799287A CN112799287A CN202011174700.4A CN202011174700A CN112799287A CN 112799287 A CN112799287 A CN 112799287A CN 202011174700 A CN202011174700 A CN 202011174700A CN 112799287 A CN112799287 A CN 112799287A
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- Prior art keywords
- led
- light
- optical axis
- dichroic mirror
- led lamp
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
Abstract
Provided is an LED lamp, which can easily add the light quantity of a specific wavelength and can minimize the increase degree of the opening size even if adding. An LED lamp (10) is configured from a first LED (14), a second LED (16), a third LED (18), a condensing lens (20), and a dichroic mirror (22). A condenser lens (20) is disposed on the optical axis (LL1) of the first LED (14). A dichroic mirror (22) is disposed between the first LED (14) and the condenser lens (20) on the same optical axis (LL 1). The second LED (16) is disposed at a position where the optical axis (LL2) intersects the optical axis (LL 1). A dichroic mirror (22) is set to transmit light (L1) from the first LED (14) and reflect light (L2) from the second LED (16) substantially parallel to the optical axis (LL 1). The third LED (18) is disposed so that the same optical axis (LL3) and the optical axis (LL1) are substantially parallel to each other. Light (L3) from the third LED (18) is directed into the condenser lens (20).
Description
Technical Field
The present invention relates to an LED lamp, and more particularly to an LED lamp that emits broad-band light in a wide wavelength range and a light source for an exposure apparatus using the LED lamp.
Background
As consumer awareness of environmental protection increases, a light emitting diode (hereinafter, referred to as "LED") having advantages of low power consumption and long life as compared with a conventional incandescent lamp (for example, a halogen lamp) has been rapidly expanded in its range of use as one of energy saving measures, and in particular, there is a high demand for replacing an incandescent lamp or a discharge lamp with an LED.
On the other hand, since LEDs have a problem that the average light amount per LED is small compared to incandescent lamps and discharge lamps and a problem that the wavelength range of light emitted from LEDs is narrow (narrow band), in order to compensate for this, a light emitting diode lamp capable of emitting a large amount of light and emitting broad band light having a wide wavelength range by providing a plurality of LEDs has been developed (for example, patent document 1).
The LED lamp disclosed in patent document 1 is used as a light source of an exposure apparatus instead of a mercury lamp (discharge lamp). Conventionally, for example, mercury lamps which strongly emit spectral lines of 436nm (g line), 405nm (h line), and 365nm (i line) have been used in accordance with sensitivity characteristics of photosensitive materials used for forming wiring patterns of printed boards and forming solder resist films. Here, if the LED lamp is used instead of the mercury lamp, there are problems such as a small amount of light and a narrow wavelength range of light, which makes it impossible to emit light that matches the sensitivity characteristics of the photosensitive material, as described above.
For this reason, in the LED lamp of patent document 1, light emitted from a plurality of LEDs is combined by using a dichroic mirror and is imaged on an incident surface of an integrator. By setting the wavelengths of light emitted from the LEDs to be different from each other in accordance with the sensitivity characteristics of the photosensitive material, the LED lamp can be used instead of the mercury lamp.
Prior art documents
Patent document
Patent document 1: JP 2012-63390A
Disclosure of Invention
(problems to be solved by the invention)
However, the LED lamp disclosed in patent document 1 also has a problem.
For example, when light is transmitted or reflected by a dichroic mirror, the light is attenuated by several degrees, and therefore, it is necessary to add a light amount of a specific wavelength as necessary.
Further, if another LED lamp for emitting light of a specific wavelength is arranged to add a light amount of the wavelength, the opening size of 1 set of LED lamps is increased, and a large number of LED lamps are arranged to be used as a light source for an exposure apparatus to realize a large light amount, which causes a problem of an arrangement space.
The present invention has been made in view of the above problems, and an object of the present invention is to provide an LED lamp and a light source for an exposure apparatus using the LED lamp, which can easily add a light amount of a specific wavelength and can minimize an increase in an opening size even if the light amount is added.
(means for solving the problems)
According to an aspect of the present invention, there is provided an LED lamp including: the light source device includes a first LED, a second LED, a third LED, a condensing lens, and a dichroic mirror, the condensing lens being disposed on an optical axis of the first LED, the dichroic mirror being disposed on the optical axis of the first LED and between the first LED and the condensing lens, the second LED being disposed at a position where the optical axis of the second LED intersects the optical axis of the first LED, the dichroic mirror transmitting light from the first LED and reflecting light from the second LED substantially parallel to the optical axis of the first LED, the third LED being disposed at a position where the optical axis of the third LED substantially parallel to the optical axis of the first LED, and light from the third LED directly entering the condensing lens without transmitting the dichroic mirror or being reflected by the dichroic mirror.
Preferably, the first LED, the second LED, and the third LED respectively emit lights having peak wavelengths different from each other.
According to another aspect of the present invention, there is provided a light source for an exposure apparatus, comprising: a plurality of the above-mentioned LED lamps; and a frame for arranging the plurality of LED lamps.
(effect of the invention)
According to the LED lamp of the present invention, the light from the first LED and the light from the second LED are combined by the dichroic mirror to form combined light, and the light from the third LED enters the condenser lens directly in the same manner as the combined light, so that the light from the third LED and the combined light are further combined at the irradiation target.
In this way, the amount of light having a specific wavelength can be easily adjusted by adding the light from the third LED directly entering the condenser lens, and the same condenser lens is used for the combined light and the light from the third LED, so that the increase in the size of the opening as the LED lamp can be minimized as compared with the case where the opening for the combined light and the opening for the light from the third LED are separately provided.
Drawings
Fig. 1 is a diagram showing an LED lamp 10 according to an embodiment to which the present invention is applied.
Fig. 2 is a diagram illustrating the light source 100 for an exposure apparatus according to the embodiment.
Fig. 3 is a diagram showing the light source 100 for an exposure apparatus that irradiates the irradiation target S with a plurality of LED lamps 10.
Detailed Description
(constitution of LED Lamp 10)
The structure of the LED lamp 10 according to the present invention will be described below with reference to the drawings.
As shown in fig. 1, the LED lamp 10 roughly includes: a lamp body 12, a first LED14, a second LED16, a third LED18, a condenser lens 20, a dichroic mirror 22, a first parallelizing lens 24, a second parallelizing lens 26, and a fly eye lens 28.
The lamp body 12 is configured by a main member 34 having a bottomed cylindrical shape or a bottomed angular cylindrical shape and an auxiliary member 40 having a bottomed cylindrical shape or a bottomed angular cylindrical shape, the main member 34 having an internal space 30, an opening 31, and a base portion 32 provided in a bottom portion, and the auxiliary member 40 being formed to have a diameter slightly smaller than that of the main member 34 and similarly having an internal space 36, an opening 37, and a base portion 38 provided in a bottom portion.
A connection hole 41 for connecting the attachment member 40 is formed in the side surface center portion of the main member 34, and the attachment member 40 is connected to the connection hole 41, whereby the internal space 30 of the main member 34 and the internal space 36 of the attachment member 40 communicate with each other.
The first LED14 is an LED that emits first light L1 having a peak wavelength of 405nm, for example, and is attached to the surface of the base portion 32 of the main member 34.
The optical axis LL1 of the first LED14 is set substantially parallel to the longitudinal direction of the main member 34 toward the opening 31 of the main member 34.
In addition, 3 first LEDs 14 are depicted in fig. 1, but the number of first LEDs 14 is not limited thereto, and may be 2 or less, or 4 or more.
The second LED16 is an LED that emits second light L2 having a peak wavelength of 365nm, for example, and is attached to the surface of the base portion 38 of the attachment member 40.
The optical axis LL2 of the second LED16 is set substantially parallel to the longitudinal direction of the attachment member 40 toward the opening 37 of the attachment member 40. In the case of the present embodiment, the optical axis LL2 of the second LED16 is substantially orthogonal to the optical axis LL1 of the first LED 14. Thus, the second light L2 exiting the accessory member 40 from the opening 37 enters the interior space 30 of the main member 34 in a substantially orthogonal orientation relative to the optical axis LL1 of the first LED 14. Of course, the angle formed by the optical axis LL1 and the optical axis LL2 is not limited to a right angle, and other angles can be selected as needed.
In addition, although 4 second LEDs 16 are depicted in fig. 1, the number of first LEDs 14 is not limited thereto, and may be 3 or less, or 5 or more.
The third LED18 is, for example, an LED that emits third light L3 having a peak wavelength of 385nm, and is attached to the surface of the base portion 32 of the main member 34 at a position different from the first LED 14.
The optical axis LL3 of the third LED18 is set substantially parallel to the longitudinal direction of the main member 34 toward the opening 31 of the main member 34. In other words, the optical axis LL3 of the third LED18 is also substantially parallel to the optical axis LL1 of the first LED 14.
In addition, in fig. 1, 2 third LEDs 18 are depicted, but the number of the third LEDs 18 is not limited thereto, and may be 1, or 3 or more.
The condenser lens 20 is a convex lens disposed on the optical axis LL1 of the first LED14 and in the opening 31 of the main member 34. As described later, the lights L1, L2, and L3 emitted from the LEDs 14, 16, and 18 enter the condenser lens 20 as parallel lights. Therefore, the lights L1, L2, and L3 refracted by passing through the condenser lens 20 are condensed toward the irradiation subject S placed at the focal position F of the condenser lens 20.
The dichroic mirror 22 is a member having a property of reflecting light having a specific wavelength and transmitting light having another wavelength. In the present embodiment, the dichroic mirror 22 is disposed on the optical axis LL1 of the first LED14 in the internal space 30 of the main member 34, and between the first LED14 and the condenser lens 20. The dichroic mirror 22 is disposed at a position where the optical axis LL2 of the second LED16 intersects the optical axis LL1 of the first LED 14. Further, the dichroic mirror 22 in the present embodiment is set to reflect the light L2 from the second LED16 and transmit light of other wavelengths.
The angle of the dichroic mirror 22 is set so that the light L2 reflected by the dichroic mirror 22 is directed substantially parallel to the light L1 transmitted through the dichroic mirror 22, and the light L2 from the second LED16 and the light L1 from the first LED14 are combined to form the combined light LG.
In fig. 1, 2 dichroic mirrors 22 are depicted, but the number of dichroic mirrors 22 is not limited to this, and may be 1, or 3 or more.
The first parallelizing lens 24 is a convex lens disposed in the vicinity of the light exit surface of each of the LEDs 14, 16, 18, and is a member for converging the lights L1, L2, L3 emitted from the LEDs 14, 16, 18 at a predetermined opening angle at a predetermined angle. The first parallelizing lens 24 is not an essential component of the present invention. Therefore, the first parallelizing lens 24 can be omitted to form the LED lamp 10.
The second parallelizing lens 26 is a member for further condensing the lights L1, L2, and L3 transmitted through the first parallelizing lens 24, and is disposed on the optical axes LL1, LL2, and LL3 of the LEDs 14, 16, and 18. Like the first parallelizing lens 24, the second parallelizing lens 26 is not an essential component of the present invention. Therefore, the LED lamp 10 can be configured without the second parallelizing lens 26.
Fly-eye lens 28 is a lens having a function of uniformizing light entering from incident surface 42 and emitting the light from emission surface 44.
In the present embodiment, 2 fly-eye lenses 28 are arranged in parallel with each other in the internal space 30 of the main member 34 on the first LED14 and third LED18 side of the condenser lens 20, and the lights L1, L2, and L3 from the LEDs 14, 16, and 18 pass through the fly-eye lenses 28.
Further, the fly-eye lens 28 is not an essential component of the present invention. Therefore, the fly-eye lens 28 can be omitted to constitute the LED lamp 10. The number of fly-eye lenses 28 may be 1, or 3 or more.
(configuration of light Source 100 for Exposure apparatus)
Next, a light source 100 for an exposure apparatus configured by using a plurality of the above-described LED lamps 10 will be briefly described.
As shown in fig. 2, the light source 100 for an exposure apparatus includes a plurality of LED lamps 10 and a frame 102 for arranging the plurality of LED lamps 10 in a row, and irradiates, for example, a DMD (Digital micro mirror Device) provided in the exposure apparatus.
The frame 102 is formed with a recess 104 into which a front end portion (an end portion on the opening 31 side of the main member 34) of the lamp body 12 of each LED lamp 10 can be fitted. The light source 100 for an exposure apparatus is configured by fitting and mounting the LED lamps 10 in the recesses 104.
(features of LED Lamp 10)
According to the LED lamp 10 of the above embodiment, the light L1 from the first LED14 and the light L2 from the second LED16 are combined by the dichroic mirror 22 to form the combined light LG, and the light L3 from the third LED18 enters the condenser lens 20 directly in the same manner as the combined light LG enters, so that the light L3 from the third LED18 and the combined light LG are further combined in the irradiation object S.
In this way, the amount of light having a specific wavelength can be easily adjusted additionally by the light L3 from the third LED18 directly entering the condenser lens 20, and since the same condenser lens 20 is used for the combined light LG and the light L3 from the third LED18, the increase in the size of the opening 31 as the LED lamp 10 can be minimized as compared with the case where the opening for the combined light LG and the opening for the light L3 from the third LED18 are separately provided.
Further, by minimizing the increase in the size of the opening 31, the plurality of LED lamps 10 can be arranged in a narrow angle range like the light source 100 for an exposure apparatus. As a result, as shown in fig. 3, the irradiation angle θ with respect to the irradiation target S can be made close to a right angle, and therefore, the efficiency of irradiating the irradiation target S with light from each LED lamp 10 can be improved.
(modification 1)
Although the LED lamp 10 is used as the light source 100 for the exposure apparatus in the above embodiment, the use of the LED lamp 10 is not limited thereto, and may be used for other uses. In addition, the LED lamps 10 are not limited to being used in combination, and 1 LED lamp 10 may be used alone.
(modification 2)
Although 3 kinds of LEDs, i.e., the LEDs 14, 16, 18, are used in the above embodiment, the kinds of LEDs are not limited to 3, and 4 or more kinds of LEDs may be used. For example, it is conceivable to further provide a dichroic mirror 22 that is disposed adjacent to the second LED16 for the 4 th LED and reflects light from the 4 th LED. Of course, other types of LEDs may be arranged in parallel with the first LED14 and the third LED 18.
(modification 3)
Although the fly-eye lens 28 is used to homogenize the light beams L1, L2, and L3 from the LEDs 14, 16, and 18 in the above embodiment, rod lenses may be used instead to homogenize the light beams L1, L2, and L3.
The embodiments disclosed herein are merely exemplary in all respects, and should not be construed as being limiting. The scope of the present invention is defined not by the above description but by the claims, and is intended to include all modifications within the scope and meaning equivalent to the claims.
(description of reference numerals)
10 … LED lamp, 12 … lamp body, 14 … first LED, 16 … second LED, 18 … third LED, 20 … condenser lens, 22 … dichroic mirror, 24 … first parallelizing lens, 26 … second parallelizing lens, 28 … fly eye lens, 30 … (internal space of main member 34), 31 … (opening of main member 34), 32 … (base portion of main member 34), 34 … main member, 36 … (internal space of auxiliary member 40), 37 … (opening of auxiliary member 40), 38 … (base portion of auxiliary member 40), 40 … auxiliary member, 41 … connecting hole, 42 … (incident surface of fly eye lens 28), 44 … (exit surface of fly eye lens 28)
100 … light source for exposure device, 102 … frame, 104 … recess
L1 … first light (from first LED 14), LL1 … optical axis (of first LED 14), L2 … second light, LL2 … optical axis (of second LED 16), L3 … third light, LL3 … optical axis (of third LED 18)
S … irradiates the object and LG … synthesizes light.
Claims (3)
1. An LED lamp is characterized by comprising:
a first LED, a second LED, a third LED, a condensing lens, and a dichroic mirror,
the condenser lens is disposed on an optical axis of the first LED,
the dichroic mirror is disposed on an optical axis of the first LED and between the first LED and the condenser lens,
the second LED is disposed at a position where an optical axis of the second LED intersects with an optical axis of the first LED,
the dichroic mirror transmits light from the first LED and reflects light from the second LED substantially parallel to an optical axis of the first LED,
the third LED is disposed at a position where an optical axis of the third LED is substantially parallel to an optical axis of the first LED,
the light from the third LED directly enters the condenser lens without passing through or being reflected by the dichroic mirror.
2. The LED lamp of claim 1,
the first LED, the second LED, and the third LED emit light having peak wavelengths different from each other.
3. A light source for an exposure apparatus includes:
a plurality of LED lamps of claim 1; and
a frame for arranging a plurality of the LED lamps.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019-205164 | 2019-11-13 | ||
| JP2019205164A JP7154603B2 (en) | 2019-11-13 | 2019-11-13 | Light source for exposure equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112799287A true CN112799287A (en) | 2021-05-14 |
Family
ID=75807393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011174700.4A Pending CN112799287A (en) | 2019-11-13 | 2020-10-28 | LED lamp and light source for exposure device using the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7154603B2 (en) |
| KR (1) | KR20210058665A (en) |
| CN (1) | CN112799287A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102402130A (en) * | 2010-09-14 | 2012-04-04 | 大日本网屏制造株式会社 | Exposure device and light source device |
| CN102483587A (en) * | 2010-07-22 | 2012-05-30 | 恩斯克科技有限公司 | Light irradiation device for exposure apparatus, method for controlling light irradiation device, exposure apparatus, and exposure method |
| CN102734659A (en) * | 2011-10-17 | 2012-10-17 | 深圳市绎立锐光科技开发有限公司 | Light source and display system |
| CN104820335A (en) * | 2014-02-03 | 2015-08-05 | 佳能株式会社 | Light source optical system, light source apparatus using the same, and image display apparatus |
| CN205691928U (en) * | 2016-06-17 | 2016-11-16 | 广景视睿科技（深圳）有限公司 | A kind of projection lighting optical path |
| CN106997142A (en) * | 2015-12-18 | 2017-08-01 | 卡西欧计算机株式会社 | Light supply apparatus and projection arrangement |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004335949A (en) * | 2002-11-29 | 2004-11-25 | Nikon Corp | Aligner and exposure method |
| US10585293B2 (en) * | 2011-10-17 | 2020-03-10 | Appotronics Corporation Limited | Light source and display system |
| JP6199591B2 (en) * | 2013-04-12 | 2017-09-20 | 株式会社オーク製作所 | Light source apparatus and exposure apparatus |
-
2019
- 2019-11-13 JP JP2019205164A patent/JP7154603B2/en active Active
-
2020
- 2020-10-28 CN CN202011174700.4A patent/CN112799287A/en active Pending
- 2020-10-29 KR KR1020200142068A patent/KR20210058665A/en active Search and Examination
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102483587A (en) * | 2010-07-22 | 2012-05-30 | 恩斯克科技有限公司 | Light irradiation device for exposure apparatus, method for controlling light irradiation device, exposure apparatus, and exposure method |
| CN102402130A (en) * | 2010-09-14 | 2012-04-04 | 大日本网屏制造株式会社 | Exposure device and light source device |
| CN102734659A (en) * | 2011-10-17 | 2012-10-17 | 深圳市绎立锐光科技开发有限公司 | Light source and display system |
| CN104820335A (en) * | 2014-02-03 | 2015-08-05 | 佳能株式会社 | Light source optical system, light source apparatus using the same, and image display apparatus |
| CN106997142A (en) * | 2015-12-18 | 2017-08-01 | 卡西欧计算机株式会社 | Light supply apparatus and projection arrangement |
| CN205691928U (en) * | 2016-06-17 | 2016-11-16 | 广景视睿科技（深圳）有限公司 | A kind of projection lighting optical path |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2021076787A (en) | 2021-05-20 |
| TW202118972A (en) | 2021-05-16 |
| KR20210058665A (en) | 2021-05-24 |
| JP7154603B2 (en) | 2022-10-18 |
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