CN112798590A - Detection equipment for chip production - Google Patents
Detection equipment for chip production Download PDFInfo
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- CN112798590A CN112798590A CN202011548672.8A CN202011548672A CN112798590A CN 112798590 A CN112798590 A CN 112798590A CN 202011548672 A CN202011548672 A CN 202011548672A CN 112798590 A CN112798590 A CN 112798590A
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- rod
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- fixedly connected
- placing box
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
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Abstract
The invention relates to a detection device for chip production, which comprises a base, a loading platform, a fixed rod, a support rod, an objective lens, an ocular lens, a protection mechanism and a cleaning mechanism, wherein the protection mechanism comprises a protection component, a placing box, two control components and a plurality of first springs, the cleaning mechanism comprises a cylinder, a pressing plate, an air bag, a fixed pipe, two hoses, two nozzles and a plurality of second springs, the detection device for chip production realizes the function of shielding the objective lens and the ocular lens through the protection mechanism, reduces the probability of scratching the objective lens and the ocular lens, reduces the probability of device damage, avoids the influence on detection work, improves the reliability of the device, realizes the function of removing dust from the chip through a dust removing mechanism, avoids the influence on a detection result caused by the fact that the chip is covered by dust, and improves the reliability of the device.
Description
Technical Field
The invention relates to the field of chip production, in particular to a detection device for chip production.
Background
The chip is a general name of semiconductor element products, the chip detection process is to place the packaged chip in various environments to test the electrical characteristics of the chip, such as power consumption, running speed, voltage endurance and the like, the detected chip is divided into different grades according to the electrical characteristics, the product which is generally qualified through test is attached with labels marked by specification, model, delivery date and the like and packaged to be delivered, and the chip which does not pass the test is used as a degraded product or a waste chip according to the reached parameter condition, so the detection equipment is one of essential equipment in chip manufacture, and a microscope is usually adopted to carry out appearance detection work on the chip.
When the existing microscope detects a chip, if the chip is covered by dust, the detection work is influenced, the detection result is influenced, and moreover, an eyepiece and an objective lens of the existing microscope are usually exposed outside, so that a mirror surface is easily scratched, the observation effect is influenced, and the reliability of the existing microscope is reduced.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, the detection equipment for chip production is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: the detection equipment for chip production comprises a base, a loading table, a fixed rod, a supporting rod, an objective lens and an eyepiece, wherein the loading table is arranged above the base, the fixed rod is vertically fixed on one side above the base, two ends of the supporting rod are respectively fixedly connected with the top end of the fixed rod and the objective lens, the supporting rod base is arranged in parallel, the eyepiece is arranged above the objective lens, the objective lens and the loading table are arranged just opposite, and a PLC is arranged in the base;
the protection mechanism comprises a protection component, a placing box, two control components and a plurality of first springs, wherein the protection component is arranged on a support rod, the placing box is horizontally arranged above the loading platform, the first springs are uniformly arranged between the loading platform and the placing box, two ends of each first spring are respectively connected with the lower part of the placing box and the upper part of the loading platform, the two control components are respectively connected with two sides of the lower part of the placing box, two notches are arranged on the loading platform, the notches correspond to the control components one to one, the control components are arranged inside the notches, blind holes are arranged at the bottoms of the notches, and the blind holes are communicated with the notches;
the control assembly comprises a moving rod, a fixing ring, a sealing ring, a guide rod, a control switch, a control rod, a piston, a limiting block, a connecting box, a connecting pipe, two branch pipes and a plurality of elastic ropes, wherein the periphery of the fixing ring and the inner wall of one end of a notch, which is close to the placing box, are fixedly connected, one end of the moving rod is fixedly connected with the lower part of the placing box, the other end of the moving rod penetrates through the annular hole of the sealing ring and is arranged in the notch, the inner ring of the sealing ring is abutted against the periphery of the moving rod, the other end of the moving rod is fixedly connected with the center of the guide rod, the inner walls of two sides of the notch are provided with grooves, two ends of the guide rod are respectively arranged in the two grooves, the guide rod is matched with the grooves, the guide rod is connected with the grooves in a sliding manner, the piston is arranged in the blind hole, the piston is matched with the blind hole, the periphery of the piston is in sealed sliding connection with the inner wall of the blind hole, the bottom in the blind hole is communicated with the inside of the base through a connecting pipe, the limiting block is fixed on the inner wall of the blind hole, which is close to one end of the notch, a through hole is formed in the limiting block, one end of the control rod is fixedly connected with the upper part of the piston, the other end of the control rod penetrates through the through hole to be fixedly connected with the control switch, the control rod is matched with the through hole, the control rod is in sliding connection with the limiting block, the elastic ropes are circumferentially and uniformly distributed above the piston, the two ends of the elastic ropes are respectively connected with the lower part of the limiting block and the upper part of the piston, the control switch and the guide rod are normally arranged, the connecting box is annular in shape and is fixed on the fixing ring, the connecting box is sleeved on the moving rod, the loading platform is provided with four through holes, the through holes correspond to the branch pipes one to one, one ends of the through holes are communicated with the bottoms in the blind holes, one ends of the branch pipes are fixedly connected with the inner walls of the other ends of the through holes, the other ends of the branch pipes are communicated with the connecting box, and the control switch is electrically connected with the PLC;
the protection assembly comprises a motor, a rotating shaft, a first protection unit, a second protection unit, two first bearings and two gears, one end of the supporting rod, which is close to the objective lens, is provided with a through hole, the outer rings of the two first bearings are respectively fixedly connected with the inner walls of the two ends of the through hole, the rotating shaft is fixedly connected with the inner ring of the first bearing, the motor is fixed on the supporting rod, the motor is connected with one gear in a transmission manner, the other gear is fixed on the rotating shaft, the two gears are meshed, the two ends of the rotating shaft are respectively connected with the two first protection units and the second protection unit, the first protection unit comprises a first connecting rod and a first protection plate, the first protection plate is fixedly connected with the rotating shaft through the first connecting rod, the first protection plate is abutted against one end, far away from the objective lens, of the eyepiece, and the second protection unit comprises a second connecting rod and, the second protection plate is fixedly connected with the rotating shaft through a second connecting rod and is abutted against one end, far away from the eyepiece, of the objective lens, and the motor is electrically connected with the PLC;
clean mechanism includes cylinder, clamp plate, gasbag, fixed pipe, two hoses, two nozzles and a plurality of second spring, the vertical bottom of fixing in the base of cylinder body of cylinder, the gas pole and the clamp plate fixed connection of cylinder, the top and the below of gasbag respectively with the top in the base and the top fixed connection of clamp plate, the second spring evenly sets up the inside at the gasbag, the both ends of second spring are connected with top and bottom in the gasbag respectively, one side and the fixed pipe intercommunication of gasbag, the both sides of gasbag respectively with the one end intercommunication of two hoses, two nozzles are fixed respectively on the inner wall of placing the both sides of box, the other end intercommunication of nozzle and hose, the cylinder is connected with the PLC electricity.
Preferably, a rubber pad is fixed to a side of the guide rod adjacent to the control switch in order to avoid damage to the control switch.
Preferably, the cross-sectional shape of the through-hole is square in order to limit the moving direction of the control lever.
Preferably, in order to prevent the guide bar from being separated from the groove, the groove is a dovetail groove.
Preferably, in order to make the guide bar move smoothly, the inner wall of the groove is coated with a lubricating oil.
Preferably, to reduce the clearance, the inner wall of the blind hole is coated with a sealing grease.
Preferably, the motor is a servo motor for precise and stable operation of the motor.
Preferably, in order to prevent corrosion, the surfaces of the first and second shield plates are coated with an anti-corrosion zinc coating layer.
Preferably, in order to make the control rod move smoothly, the outer circumference of the control rod is a mirror surface.
Preferably, for the purpose of skid resistance, the bottom in the placing box is provided with skid-proof grains.
The invention has the advantages that the detection device for chip production realizes the function of shielding the objective lens and the ocular lens through the protection mechanism, reduces the probability of scratching the objective lens and the ocular lens, thereby reducing the probability of equipment damage, avoiding influencing detection work, and improving the reliability of the device, compared with the prior protection mechanism, the protection mechanism can also carry out dust removal work on the moving rod, so that external dust can not be brought into the notch and the blind hole when the moving rod moves, thereby dust can not be adhered to the inner wall of the blind hole, and the influence on the movement of the piston in the blind hole can not be caused, thereby improving the fluency of the piston when the piston moves, having higher practicability, realizing the function of removing dust for the chip through the dust removal mechanism, avoiding the influence of the detection result caused by the chip being covered by the dust, improving the reliability of the device, compared with the prior dust removal mechanism, this dust removal mechanism simple structure, and through the hose that sets up, the flow of the air of being convenient for under the prerequisite that does not influence the removal of placing the box, the practicality is higher.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural view of a detecting apparatus for chip production according to the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1;
FIG. 3 is a schematic structural diagram of a control assembly of the inspection apparatus for chip production according to the present invention;
FIG. 4 is an enlarged view of portion B of FIG. 3;
in the figure: 1. the automatic lifting device comprises a base, 2 parts of a loading platform, 3 parts of a fixing rod, 4 parts of a support rod, 5 parts of an ocular lens, 6 parts of an objective lens, 7 parts of a motor, 8 parts of a gear, 9 parts of a rotating shaft, 10 parts of a first connecting rod, 11 parts of a first protection plate, 12 parts of a second connecting rod, 13 parts of a second protection plate, 14 parts of a first spring, 15 parts of a placing box, 16 parts of a moving rod, 17 parts of a guide rod, 18 parts of a control switch, 19 parts of a control rod, 20 parts of a piston, 21 parts of an elastic rope, 22 parts of a limiting block, 23 parts of a connecting pipe, 24 parts of a branch pipe, 25 parts of a connecting box, 26 parts of a rubber pad, 27 parts of a nozzle, 28 parts of a hose, 29 parts of an air bag.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1, a detection device for chip production, which comprises a base 1, a loading platform 2, a fixing rod 3, a supporting rod 4, an objective lens 6 and an ocular lens 5, wherein the loading platform 2 is arranged above the base 1, the fixing rod 3 is vertically fixed on one side above the base 1, two ends of the supporting rod 4 are respectively fixedly connected with the top end of the fixing rod 3 and the objective lens 6, the supporting rod 4 is arranged in parallel with the base 1, the ocular lens 5 is arranged above the objective lens 6, the objective lens 6 is arranged right opposite to the loading platform 2, and a PLC is arranged inside the base 1;
PLCs, i.e., programmable logic controllers, are generally used for the processing of data and the receipt and output of instructions for central control.
This a check out test set for chip production passes through protection machanism, has realized the function that shelters from objective 6 and eyepiece 5, reduces objective 6 and eyepiece 5 by the probability of fish tail to reduce the probability that equipment damaged, avoid causing the influence to the testing work, thereby improved the reliability of equipment, through dust removal mechanism, realized the function to the chip dust removal, avoid the chip to be covered by the dust and influence the testing result, improved the reliability of equipment.
As shown in fig. 1-4, the protection mechanism includes a protection component, a placing box 15, two control components and a plurality of first springs 14, the protection component is disposed on a support rod 4, the placing box 15 is horizontally disposed above the loading platform 2, the first springs 14 are uniformly disposed between the loading platform 2 and the placing box 15, two ends of the first springs 14 are respectively connected with the lower portion of the placing box 15 and the upper portion of the loading platform 2, the two control components are respectively connected with two sides of the lower portion of the placing box 15, two notches are disposed on the loading platform 2, the notches correspond to the control components one by one, the control components are disposed inside the notches, and blind holes are disposed at the bottoms of the notches and communicated with the notches;
the control assembly comprises a moving rod 16, a fixing ring, a sealing ring, a guide rod 17, a control switch 18, a control rod 19, a piston 20, a limiting block 22, a connecting box 25, a connecting pipe 23, two branch pipes 24 and a plurality of elastic ropes 21, the periphery of the fixing ring and the inner wall of the notch close to one end of the placing box 15 are fixedly connected, the periphery of the sealing ring and the inner wall of the annular hole of the fixing ring are fixedly connected, one end of the moving rod 16 is fixedly connected with the lower part of the placing box 15, the other end of the moving rod 16 penetrates through the annular hole of the sealing ring and is arranged in the notch, the inner ring of the sealing ring is abutted against the periphery of the moving rod 16, the other end of the moving rod 16 is fixedly connected with the center of the guide rod 17, the inner walls on two sides of the notch are provided with grooves, two ends of the guide rod 17 are respectively arranged in the two grooves, the guide rod 17 is connected with the groove in a sliding manner, the piston 20 is arranged inside the blind hole, the piston 20 is matched with the blind hole, the periphery of the piston 20 is connected with the inner wall of the blind hole in a sealing and sliding manner, the bottom inside the blind hole is communicated with the inside of the base 1 through a connecting pipe 23, the limiting block 22 is fixed on the inner wall of one end, close to the notch, of the blind hole, a through hole is formed in the limiting block 22, one end of the control rod 19 is fixedly connected with the upper portion of the piston 20, the other end of the control rod 19 penetrates through the through hole to be fixedly connected with the control switch 18, the control rod 19 is matched with the through hole, the control rod 19 is connected with the limiting block 22 in a sliding manner, the elastic ropes 21 are uniformly distributed above the piston 20 in the circumferential direction, two ends of the elastic ropes 21 are respectively connected with the lower portion of the limiting block, the connecting box 25 is annular, the connecting box 25 is fixed on the fixing ring, the connecting box 25 is sleeved on the moving rod 16, air outlet holes are uniformly formed in one side, close to the moving rod 16, of the connecting box 25, four through holes are formed in the loading platform 2, the through holes correspond to the branch pipes 24 one by one, one ends of the through holes are communicated with the bottoms in the blind holes, one ends of the branch pipes 24 are fixedly connected with the inner walls of the other ends of the through holes, the other ends of the branch pipes 24 are communicated with the connecting box 25, and the control switch 18 is electrically connected with the PLC;
the protection assembly comprises a motor 7, a rotating shaft 9, a first protection unit, a second protection unit, two first bearings and two gears 8, one end of the support rod 4, which is close to the objective lens 6, is provided with a through hole, the outer rings of the two first bearings are respectively fixedly connected with the inner walls of the two ends of the through hole, the rotating shaft 9 is fixedly connected with the inner ring of the first bearing, the motor 7 is fixed on the support rod 4, the motor 7 is in transmission connection with one gear 8, the other gear 8 is fixed on the rotating shaft 9, the two gears 8 are meshed, the two ends of the rotating shaft 9 are respectively connected with the two first protection units and the second protection unit, the first protection unit comprises a first connecting rod 10 and a first protection plate 11, the first protection plate 11 is fixedly connected with the rotating shaft 9 through the first connecting rod 10, the first protection plate 11 is abutted against one end of the eyepiece lens 5, which is far away from the, the second protection unit comprises a second connecting rod 12 and a second protection plate 13, the second protection plate 13 is fixedly connected with the rotating shaft 9 through the second connecting rod 12, the second protection plate 13 abuts against one end, far away from the ocular 5, of the objective lens 6, and the motor 7 is electrically connected with the PLC;
when a tester places a chip in the placing box 15, the weight in the placing box 15 is increased, so that the placing box 15 moves downwards, the first spring 14 is compressed, the guide rod 17 is driven to move downwards through the moving rod 16 and is abutted against the control switch 18, a signal is sent to the PLC, the PLC control motor 7 is started to drive the gear 8 connected with the motor 7 to rotate, the other gear 8 rotates through the meshing of the two gears 8, the rotating shaft 9 rotates, the first protection plate 11 and the second protection plate 13 both rotate towards the direction far away from the objective lens 6, so that the eyepiece 5 and the objective lens 6 are exposed, the tester can conveniently detect the chip through the eyepiece 5 and the objective lens 6, after the detection is finished, the tester takes out the chip, under the action of the restoring force of the first spring 14, the placing box 15 moves upwards, so that the guide rod 17 is separated from the control switch 18, thereby sending a signal to the PLC, the PLC controls the motor 7 to rotate reversely to drive the first protection plate 11 and the second protection plate 13 to rotate towards the direction close to the objective lens 6 and the eyepiece lens 5, so that the first protection plate 11 shields the eyepiece lens 5, the second protection plate 13 shields the objective lens 6, thereby realizing the function of protecting the objective lens 6 and the eyepiece lens 5, reducing the probability of scratching the objective lens 6 and the eyepiece lens 5, thereby reducing the probability of equipment damage, avoiding influencing detection work, thereby improving the reliability of the equipment, when the guide rod 17 moves downwards and drives the control switch 18 to move downwards, the control rod 19 drives the piston 20 to move downwards, the elastic rope 21 is stretched, so that air in a blind hole is guided into the branch pipe 24 through the through hole and then guided into the connecting box 25 and sprayed out from the air outlet, thereby blowing air to the surface of the moving rod 16, and dust can not adhere to the periphery of the moving rod 16, thereby, the moving rod 16 will not bring the external dust into the notch and blind hole when moving, so that the dust will not adhere to the inner wall of the blind hole, and will not affect the movement of the piston 20 in the blind hole, thereby improving the smoothness of the movement of the piston 20, the practicability is higher, when the guiding rod 17 moves upwards, under the restoring force of the elastic rope 21, the piston 20 moves upwards, so that the air in the base 1 is led into the blind hole through the connecting pipe 23, by arranging the sealing ring, the gap between the guiding rod 17 and the moving rod 16 is reduced, so that the external dust is not easy to enter the notch, and when the guiding rod 17 and the control switch 18 are abutted, the guiding rod 17 can still drive the control switch 18 to move, thereby when detecting chips with different quality, the protection mechanism will not be affected by the quality of the chip, so that no matter the weight of the chip placed in the placing box 15 is multiple, the protection mechanism can still work, thereby enlarging the application range of the equipment and having higher practicability.
As shown in fig. 1, the cleaning mechanism includes an air cylinder 33, a pressure plate 32, an air bag 29, a fixed pipe 31, two hoses 28, two nozzles 27 and a plurality of second springs 30, a cylinder body of the air cylinder 33 is vertically fixed at the bottom of the base 1, an air rod of the air cylinder 33 is fixedly connected with the pressure plate 32, the upper side and the lower side of the air bag 29 are respectively fixedly connected with the top of the base 1 and the upper side of the pressure plate 32, the second springs 30 are uniformly arranged inside the air bag 29, two ends of the second springs 30 are respectively connected with the top and the bottom of the air bag 29, one side of the air bag 29 is communicated with the fixed pipe 31, two sides of the air bag 29 are respectively communicated with one ends of the two hoses 28, the two nozzles 27 are respectively fixed on the inner walls of two sides of the placing box 15, the nozzles 27 are communicated with the other ends of the hoses 28, and the air cylinder 33.
When dust removal is carried out, the control cylinder 33 is started, the air rod is extended, the air bag 29 is extruded, the second spring 30 is compressed, air in the air bag 29 is led into the nozzle 27 through the hose 28, the air rod is retracted when the cylinder 33, the air bag 29 is not extruded, and under the action of the restoring force of the second spring 30, air in the base 1 can enter the air bag 29 through the fixing pipe 31, so that the air rod is retracted through the cylinder 33, continuous air is supplied to the nozzle 27, dust adhered to a chip is blown away, the function of removing dust of the chip is achieved, the dust adhered to the chip is prevented from influencing a detection result, and the reliability of equipment is improved.
Preferably, a rubber pad 26 is fixed to the side of the guide rod 17 adjacent to the control switch 18 in order to avoid damage to the control switch 18.
Preferably, the cross-sectional shape of the through-hole is square in order to limit the direction of movement of the control rod 19.
Through setting the perforation to the quad slit, make control lever 19 can not take place to rotate when moving along the perforation, thereby restricted control switch 18 and piston 20's moving direction, prevent control switch 18's skew and can't support with guide bar 17 and lean on, thereby can not influence protection machanism work, the phenomenon of slope appears when also preventing piston 20 from removing, thereby the phenomenon of gas leakage can not appear, thereby can not cause the influence to the dust removal of carriage release lever 16, thereby the practicality of equipment has been improved.
Preferably, the groove is a dovetail groove in order to prevent the guide bar 17 from being separated from the groove.
Preferably, in order to make the guide bar 17 move smoothly, the inner wall of the groove is coated with a lubricating oil.
Preferably, in order to reduce the gap, the inner wall of the blind hole is coated with sealing grease, and the gap between the blind hole and the piston 20 is reduced, so that the piston 20 does not leak air when moving in the blind hole, and the dust removing operation of the moving rod 16 is not affected. .
Preferably, the motor 7 is a servo motor in order to make the motor 7 work accurately and stably.
Preferably, in order to prevent corrosion, the surfaces of the first and second prevention plates 11 and 13 are coated with an anti-corrosion zinc coating layer.
Preferably, the outer circumference of the control rod 19 is a mirror surface in order to make the control rod 19 move smoothly.
By providing the outer periphery of the control rod 19 as a mirror surface, the frictional force when the control rod 19 moves within the perforation is reduced, thereby making the control rod 19 more fluid when moving along the perforation.
Preferably, the bottom of the placing box 15 is provided with anti-skid lines for anti-skid purpose.
Through setting up anti-skidding line, increased the frictional force of chip when placing in placing box 15 for the difficult emergence skew in position of chip, thereby avoid causing the influence to the testing work, thereby improved the reliability of equipment.
When a tester places a chip in the placing box 15, the weight in the placing box 15 is increased, so that the placing box 15 moves downwards, the first spring 14 is compressed, the guide rod 17 is driven to move downwards through the moving rod 16 and is abutted against the control switch 18, a signal is sent to the PLC, the PLC control motor 7 is started to drive the gear 8 connected with the motor 7 to rotate, the other gear 8 rotates through the meshing of the two gears 8, the rotating shaft 9 rotates, the first protection plate 11 and the second protection plate 13 both rotate towards the direction far away from the objective lens 6, so that the eyepiece 5 and the objective lens 6 are exposed, the tester can conveniently detect the chip through the eyepiece 5 and the objective lens 6, after the detection is finished, the tester takes out the chip, under the action of the restoring force of the first spring 14, the placing box 15 moves upwards, so that the guide rod 17 is separated from the control switch 18, thereby sending a signal to the PLC, the PLC controls the motor 7 to rotate reversely to drive the first protection plate 11 and the second protection plate 13 to rotate towards the direction close to the objective lens 6 and the eyepiece lens 5, so that the first protection plate 11 shields the eyepiece lens 5, the second protection plate 13 shields the objective lens 6, thereby realizing the function of protecting the objective lens 6 and the eyepiece lens 5, reducing the probability of scratching the objective lens 6 and the eyepiece lens 5, thereby reducing the probability of equipment damage, avoiding influencing detection work, thereby improving the reliability of the equipment, when the guide rod 17 moves downwards and drives the control switch 18 to move downwards, the control rod 19 drives the piston 20 to move downwards, the elastic rope 21 is stretched, so that air in a blind hole is guided into the branch pipe 24 through the through hole and then guided into the connecting box 25 and sprayed out from the air outlet, thereby blowing air to the surface of the moving rod 16, and dust can not adhere to the periphery of the moving rod 16, thereby can not bring external dust into in notch and the blind hole when making the carriage release lever 16 remove to make the dust can not the adhesion on the inner wall of blind hole, can not move in the blind hole to piston 20 and cause the influence, thereby improved the smoothness nature when piston 20 removes, the practicality is higher, when guide bar 17 rebound, under the effect of the restoring force of elasticity rope 21, make piston 20 rebound, thereby make the air in the base 1 lead to in the blind hole through connecting pipe 23. When dust removal is carried out, the control cylinder 33 is started, the air rod is extended, the air bag 29 is extruded, the second spring 30 is compressed, air in the air bag 29 is led into the nozzle 27 through the hose 28, the air rod is retracted when the cylinder 33, the air bag 29 is not extruded, and under the action of the restoring force of the second spring 30, air in the base 1 can enter the air bag 29 through the fixing pipe 31, so that the air rod is retracted through the cylinder 33, continuous air is supplied to the nozzle 27, dust adhered to a chip is blown away, the function of removing dust of the chip is achieved, the dust adhered to the chip is prevented from influencing a detection result, and the reliability of equipment is improved.
Compared with the prior art, the detection device for chip production realizes the function of shielding the objective lens 6 and the ocular lens 5 through the protection mechanism, reduces the probability of scratching the objective lens 6 and the ocular lens 5, thereby reducing the probability of equipment damage and avoiding influencing detection work, thereby improving the reliability of the equipment, compared with the prior protection mechanism, the protection mechanism can also carry out dust removal work on the moving rod 16, so that external dust cannot be brought into the notch and the blind hole when the moving rod 16 moves, thereby dust cannot be adhered to the inner wall of the blind hole and cannot influence the movement of the piston 20 in the blind hole, thereby improving the fluency of the movement of the piston 20, having higher practicability, realizing the function of removing dust of the chip through the dust removal mechanism, avoiding the chip from being covered by dust to influence the detection result, improving the reliability of the equipment, compared with the prior dust removal mechanism, this dust removal mechanism simple structure, the practicality is higher.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The utility model provides a check out test set for chip production, includes base (1), loading platform (2), dead lever (3), branch (4), objective (6) and eyepiece (5), loading platform (2) set up the top at base (1), dead lever (3) vertical fixation is in one side of the top of base (1), the both ends of branch (4) respectively with the top and objective (6) fixed connection of dead lever (3), branch (4) base (1) parallel arrangement, eyepiece (5) set up the top at objective (6), objective (6) and loading platform (2) just to setting up, the inside of base (1) is equipped with PLC, its characterized in that still includes protection machanism and clean mechanism, protection machanism and clean mechanism all set up on base (1);
the protection mechanism comprises a protection component, a placing box (15), two control components and a plurality of first springs (14), wherein the protection component is arranged on a support rod (4), the placing box (15) is horizontally arranged above the loading platform (2), the first springs (14) are uniformly arranged between the loading platform (2) and the placing box (15), two ends of each first spring (14) are respectively connected with the lower part of the placing box (15) and the upper part of the loading platform (2), the two control components are respectively connected with two sides of the lower part of the placing box (15), two notches are arranged on the loading platform (2), the notches correspond to the control components one to one, the control components are arranged in the notches, blind holes are arranged at the bottoms in the notches, and the blind holes are communicated with the notches;
the control assembly comprises a moving rod (16), a fixing ring, a sealing ring, a guide rod (17), a control switch (18), a control rod (19), a piston (20), a limiting block (22), a connecting box (25), a connecting pipe (23), two branch pipes (24) and a plurality of elastic ropes (21), the periphery of the fixing ring and the inner wall of the notch close to one end of the placing box (15) are fixedly connected, the periphery of the sealing ring and the inner wall of the annular hole of the fixing ring are fixedly connected, one end of the moving rod (16) is fixedly connected with the lower part of the placing box (15), the other end of the moving rod (16) penetrates through the annular hole of the sealing ring and is arranged inside the notch, the inner ring of the sealing ring is abutted against the periphery of the moving rod (16), the other end of the moving rod (16) is fixedly connected with the center of the guide rod (17), the inner walls of two sides of the notch are, the both ends of guide bar (17) set up the inside at two recesses respectively, guide bar (17) and recess match, guide bar (17) and recess sliding connection, piston (20) set up the inside at the blind hole, piston (20) match with the blind hole, the periphery of piston (20) and the sealed sliding connection of inner wall of blind hole, the inside intercommunication of connecting pipe (23) and base (1) is passed through to the bottom in the blind hole, stopper (22) are fixed on the inner wall of the blind hole near the one end of notch, be equipped with the perforation on stopper (22), the one end of control lever (19) and the top fixed connection of piston (20), the other end of control lever (19) passes perforation and control switch (18) fixed connection, control lever (19) and perforation match, control lever (19) and stopper (22) sliding connection, the elastic ropes (21) are circumferentially and uniformly distributed above the piston (20), two ends of the elastic ropes (21) are respectively connected with the lower part of the limiting block (22) and the upper part of the piston (20), the control switch (18) and the guide rod (17) are regularly arranged, the connecting box (25) is annular, the connecting box (25) is fixed on the fixing ring, the connecting box (25) is sleeved on the moving rod (16), air outlet holes are uniformly arranged on one side of the connecting box (25) close to the moving rod (16), four through holes are arranged on the loading platform (2), the through holes correspond to the branch pipes (24) one by one, one end of the through hole is communicated with the bottom in the blind hole, one end of the branch pipe (24) is fixedly connected with the inner wall of the other end of the through hole, the other end of the branch pipe (24) is communicated with a connecting box (25), and the control switch (18) is electrically connected with the PLC;
the protection assembly comprises a motor (7), a rotating shaft (9), a first protection unit, a second protection unit, two first bearings and two gears (8), one end of the support rod (4) close to the objective lens (6) is provided with a through hole, the outer rings of the two first bearings are respectively fixedly connected with the inner walls of the two ends of the through hole, the rotating shaft (9) is fixedly connected with the inner ring of the first bearing, the motor (7) is fixed on the support rod (4), the motor (7) is in transmission connection with one gear (8) of the motor, the other gear (8) is fixed on the rotating shaft (9), the two gears (8) are meshed, the two ends of the rotating shaft (9) are respectively connected with the two first protection units and the second protection unit, each first protection unit comprises a first connecting rod (10) and a first protection plate (11), and the first protection plate (11) is fixedly connected with the rotating shaft (9) through the first connecting rod (10), the first protection plate (11) abuts against one end, far away from the objective lens (6), of the eyepiece lens (5), the second protection unit comprises a second connecting rod (12) and a second protection plate (13), the second protection plate (13) is fixedly connected with the rotating shaft (9) through the second connecting rod (12), the second protection plate (13) abuts against one end, far away from the eyepiece lens (5), of the eyepiece lens (6), and the motor (7) is electrically connected with the PLC;
the cleaning mechanism comprises an air cylinder (33), a pressing plate (32), an air bag (29), a fixed pipe (31), two hoses (28), two nozzles (27) and a plurality of second springs (30), wherein the cylinder body of the air cylinder (33) is vertically fixed at the bottom in the base (1), an air rod of the air cylinder (33) is fixedly connected with the pressing plate (32), the upper part and the lower part of the air bag (29) are respectively fixedly connected with the top in the base (1) and the upper part of the pressing plate (32), the second springs (30) are uniformly arranged in the air bag (29), two ends of each second spring (30) are respectively connected with the top and the bottom in the air bag (29), one side of the air bag (29) is communicated with the fixed pipe (31), two sides of the air bag (29) are respectively communicated with one end of each hose (28), the two nozzles (27) are respectively fixed on the inner walls of two sides of the placing box (15), the nozzle (27) is communicated with the other end of the hose (28), and the air cylinder (33) is electrically connected with the PLC.
2. The inspection apparatus for chip production according to claim 1, wherein a rubber pad (26) is fixed to a side of the guide bar (17) adjacent to the control switch (18).
3. The inspection apparatus for chip production as claimed in claim 1, wherein the cross-sectional shape of said perforations is square.
4. The inspection apparatus for chip production as claimed in claim 1, wherein said groove is a dovetail groove.
5. The inspection apparatus for chip production as claimed in claim 1, wherein an inner wall of said groove is coated with a lubricating oil.
6. The inspection apparatus for chip production as claimed in claim 1, wherein the inner wall of said blind hole is coated with a sealing grease.
7. The detection apparatus for chip production according to claim 1, wherein the motor (7) is a servo motor.
8. The inspection apparatus for chip production according to claim 1, wherein the surfaces of the first and second protection plates (11, 13) are coated with an anti-corrosion zinc plating layer.
9. The inspection apparatus for chip production according to claim 1, wherein the outer periphery of the control rod (19) is a mirror surface.
10. The inspection apparatus for chip production according to claim 1, wherein the bottom inside the placing box (15) is provided with an anti-slip pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011548672.8A CN112798590A (en) | 2020-12-24 | 2020-12-24 | Detection equipment for chip production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011548672.8A CN112798590A (en) | 2020-12-24 | 2020-12-24 | Detection equipment for chip production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112798590A true CN112798590A (en) | 2021-05-14 |
Family
ID=75805392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011548672.8A Withdrawn CN112798590A (en) | 2020-12-24 | 2020-12-24 | Detection equipment for chip production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112798590A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114264610A (en) * | 2021-12-19 | 2022-04-01 | 安徽庆宇光电科技有限公司 | Optical window protection mechanism and outdoor cabinet thereof |
-
2020
- 2020-12-24 CN CN202011548672.8A patent/CN112798590A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114264610A (en) * | 2021-12-19 | 2022-04-01 | 安徽庆宇光电科技有限公司 | Optical window protection mechanism and outdoor cabinet thereof |
| CN114264610B (en) * | 2021-12-19 | 2024-07-02 | 安徽庆宇光电科技有限公司 | Optical window protection mechanism and outdoor cabinet thereof |
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Application publication date: 20210514 |
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