CN112798160A - Small-size and large-range pressure sensor - Google Patents
Small-size and large-range pressure sensor Download PDFInfo
- Publication number
- CN112798160A CN112798160A CN202110245227.2A CN202110245227A CN112798160A CN 112798160 A CN112798160 A CN 112798160A CN 202110245227 A CN202110245227 A CN 202110245227A CN 112798160 A CN112798160 A CN 112798160A
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- cavity
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- casing
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 239000010703 silicon Substances 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 238000009792 diffusion process Methods 0.000 claims abstract description 5
- 238000007789 sealing Methods 0.000 claims description 10
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 238000013461 design Methods 0.000 abstract description 6
- 230000006872 improvement Effects 0.000 description 13
- 238000009825 accumulation Methods 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention relates to a small-sized, wide-range pressure sensor, comprising: the casing, a cavity has in the casing, it has liquid to annotate in the cavity, just casing one side opening, be equipped with the bottom on the opening, casing one side is equipped with first through-hole, be equipped with the connector in the first through-hole, be equipped with the diffusion silicon sensor on the connector, the casing for the cavity wall of bottom opposite side has outside first arch and inside second arch, be first inclined plane between first bellied highest point and the minimum, be the second inclined plane between the bellied highest point of second and the minimum, just the second inclined plane with cavity lateral wall department of meeting has interior chamfer. The pressure sensor has the first inclined plane and the second inclined plane, so that the measuring range and the sensitivity are greatly improved. And moreover, the joint of the cavity and the second inclined plane adopts an inner chamfer design, so that the measuring range and the service life of the pressure sensor are further improved.
Description
Technical Field
The invention relates to the field of pressure sensor equipment, in particular to a small-size large-range pressure sensor.
Background
With the development of road traffic networks, truck traffic business is rapidly developing accordingly. Simultaneously, along with the fine management of transportation and the requirement of transportation safety, the vehicle-mounted pressure is monitored, and the micro-deformation data of the frame in the transportation process are acquired, and the micro-deformation data are acquired by using a pressure sensor.
However, when the conventional pressure sensor is subjected to a large pressure, stress concentration at the pressed part is mainly caused by stress concentration at a right angle outside the pressed part and stress concentration at a right angle or a sharp angle of the inner cavity wall, and these parts are often torn and broken, so that the pressure sensor cannot be used, and the measuring range of the small-sized pressure sensor is limited.
Disclosure of Invention
In order to solve the problem that the right-angle part of the existing pressure sensor is easy to tear and damage due to stress accumulation, the invention adopts the technical scheme that: a small-scale, large-range pressure sensor, comprising: the casing, a cavity has in the casing, it has liquid to annotate in the cavity, just casing one side is equipped with the intercommunication the opening of cavity, be equipped with the bottom on the opening, casing one side is equipped with the intercommunication the first through-hole of cavity, be equipped with the connector in the first through-hole, be equipped with diffusion silicon sensor on the connector, the casing for the cavity wall of bottom opposite side has outside first arch and inside second arch, be first inclined plane between first bellied peak and the minimum, be the second inclined plane between bellied peak and the minimum of second, just the second inclined plane with cavity lateral wall department of meeting has interior chamfer.
In a further improvement, the first protrusion and the cavity are both circular.
In a further refinement, a diameter of the first projection is no greater than a diameter of the cavity.
In a further improvement, the highest point and the lowest point of the second bulge correspond to the highest point and the lowest point of the first bulge.
The improved structure is characterized in that a step structure is arranged on the edge of the bottom cover, and the bottom cover is in interference fit with the shell.
The further improvement is that the step structure of the bottom cover is sleeved with a sealing ring.
In a further improvement, the slope of the first inclined surface is not less than 8 ° and less than 90 °.
The invention has the beneficial effects that:
according to the small-size large-range pressure sensor provided by the invention, the edge of the part of the bulge, which is used for bearing pressure, on the outer surface is an inclined surface, when the bulge is pressed, the stress of the bulge is dispersed to the periphery, and compared with the bulge with a right angle at the edge, the bulge can bear larger pressure and cannot be torn at the bulge edge caused by stress accumulation. Meanwhile, due to the design of the first inclined plane, the measuring range of the pressure sensor is greatly improved under the condition of unchanged size. The arrangement of the second inclined plane improves the sensitivity of the pressure sensor. And the joint of the cavity and the second inclined plane adopts an inner chamfer design, so that the phenomenon that the cavity is torn due to stress concentration at a right angle or an acute angle when the cavity is pressed is avoided, and the measuring range and the service life of the pressure sensor are further improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic view of the external structure of the pressure sensor of the present invention;
fig. 2 is a schematic diagram of the pressure sensor structure of the present invention.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
In the description of the invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be considered as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to specific situations.
Example one
As shown in fig. 1 and 2, the present invention provides a small-sized, wide-range pressure sensor, including: the casing comprises a casing 1, a cavity 11 is arranged in the casing 1, liquid is injected in the cavity 11, the liquid can adopt silicon oil, an opening communicated with the cavity 11 is arranged on one side of the casing 1, the opening is matched with the cavity in size, a bottom cover 2 is arranged on the opening and used for sealing the cavity, a first through hole 12 communicated with the cavity 11 is arranged on one side of the casing 1, a connector 13 is arranged in the first through hole 12, the connector not only achieves the purpose of sealing the first through hole, but also is provided with a diffused silicon sensor on the cavity end of the connector 13, the casing 1 is provided with an outward first bulge 14 and an inward second bulge 16 relative to the cavity wall on one side of the bottom cover 2, a first inclined plane 15 is formed between the highest point and the lowest point of the first bulge 14, and a second inclined plane 17 is formed between the highest point and the lowest point of the second bulge 16, and the joint of the second inclined surface 17 and the side wall of the cavity is provided with an inner chamfer 18.
The diffused silicon sensor utilizes the piezoresistive effect principle of silicon crystal and diffusion/impurity-infiltration industry to prepare strain resistors from high-purity monocrystalline silicon to form a Wheatstone bridge. The diffusion silicon sensor integrates force sensitivity and force-electricity conversion, and can accurately detect and output a pressure value on a tiny size. The sensitivity is extremely high: is 50-80 times higher than the metal resistance strain gauge; the excitation voltage only needs 5v or even 3v, and the output signal is up to more than 100 mv; the external interface circuit is friendly; no mechanical moving part loss exists, and the resolution ratio is extremely high; the comprehensive precision is very high; the frequency response is high; good robustness, stability and reliability.
According to the small-size large-range pressure sensor provided by the invention, the edge of the part of the bulge, which is used for bearing pressure, on the outer surface is an inclined surface, when the bulge is pressed, the stress of the bulge is dispersed to the periphery, and compared with the bulge with a right angle at the edge, the bulge can bear larger pressure and cannot be torn at the bulge edge caused by stress accumulation. Meanwhile, due to the design of the first inclined plane, the measuring range of the pressure sensor is greatly improved under the condition of unchanged size. The arrangement of the second inclined plane improves the sensitivity of the pressure sensor. And the joint of the cavity and the second inclined plane adopts an inner chamfer design, so that the phenomenon that the cavity is torn due to stress concentration at a right angle or an acute angle when the cavity is pressed is avoided, and the measuring range and the service life of the pressure sensor are further improved. On the premise of the same size, the pressure sensor has higher measuring range and sensitivity due to the first inclined plane, the second inclined plane and the inner chamfer.
In a further improvement, the first protrusion 14 and the cavity 11 are both circular.
In a further improvement, the diameter of the first protrusion 14 is not greater than the diameter of the cavity 11.
In a further improvement, the highest point and the lowest point of the second protrusion 16 correspond to the highest point and the lowest point of the first protrusion 14.
In a further improvement, the slope of the first inclined surface is not less than 8 ° and less than 90 °. When the gradient of the first inclined plane is lower than 8 degrees, the maximum measuring range of the sensor cannot meet the weighing requirement of the lowest load weight of the freight truck. When the gradient reaches 90 degrees, the shearing force applied to the bottom end of the first inclined plane is increased along with the increase of the pressure applied to the pressure sensor, and in order to meet the requirement of the corresponding measuring range, the strength and toughness of the material of the sensor are required to be high, so that the measuring range of the sensor cannot be large while the cost is increased.
Example two
As shown in fig. 1 and 2, the present invention provides a small-sized, wide-range pressure sensor, including: the shell body 1, a cavity 11 is arranged in the shell body 1, liquid is injected in the cavity 11, the liquid can adopt silicon oil, an opening communicated with the cavity 11 is arranged on one side of the shell body 1, the opening is matched with the cavity in size, a bottom cover 2 is arranged on the opening and used for sealing the cavity, a step structure 21 is arranged on the edge of the bottom cover 2, correspondingly, a step structure on the shell body matched with the step structure 21 is also arranged on the edge of the opening, the bottom cover 2 is in interference fit with the shell body 1, a first through hole 12 communicated with the cavity 11 is arranged on one side of the shell body 1, a connector 13 is arranged in the first through hole 12, the connector not only achieves the purpose of sealing the first through hole, meanwhile, a diffused silicon sensor is arranged on the cavity end of the connector 13, the shell body 1 is provided with an outward first bulge 14 and an inward second bulge 16 relative to the cavity wall on one side of the bottom cover 2, a first inclined plane 15 is formed between the highest point and the lowest point of the first bulge 14, a second inclined plane 17 is formed between the highest point and the lowest point of the second bulge 16, and an inner chamfer 18 is arranged at the joint of the second inclined plane 17 and the side wall of the cavity.
According to the pressure sensor, the bottom cover and the shell are matched in a step structure and are installed in an interference fit mode, so that the sealing performance of the structure of the bottom cover and the shell is greatly improved, the measuring range of the pressure sensor is further improved, and the use stability of the pressure sensor is improved; meanwhile, the seam is not required to be welded by kilowatt-level welding equipment, and only low-power welding equipment is required to weld.
This pressure sensor is the inclined plane because of the surface is used for bearing the partial bellied edge of pressure, and when the pressurized, bellied atress is dispersed all around, compares in the arch of edge right angle, can bear bigger pressure and can not stress the tearing of the protruding edge that the gathering leads to. Meanwhile, due to the design of the first inclined plane, the pressure sensor greatly improves the measuring range under the condition of unchanged size, and can be suitable for the transportation of heavy-duty trucks.
Moreover, it is found through experiments that the larger the angle of the first inclined plane 15, the smaller the overall deformation amount after being pressed, i.e. when the inclined plane is vertical (90 degrees), the deformation amount is the smallest, and thus it is proved that the inclined plane smaller than 90 degrees can improve the sensitivity of the pressure sensor.
In a further improvement, the first protrusion 14 and the cavity 11 are both circular.
In a further improvement, the diameter of the first protrusion 14 is not greater than the diameter of the cavity 11.
In a further improvement, the highest point and the lowest point of the second protrusion 16 correspond to the highest point and the lowest point of the first protrusion 14.
In a further improvement, the step structure 21 of the bottom cover 2 is sleeved with a sealing ring 22. Because of the interference fit of the bottom cover and the sealing ring, the seam of the bottom cover does not need to be welded, and the high-pressure sealing requirement can be met.
In a further improvement, the slope of the first inclined surface is not less than 8 ° and less than 90 °. When the gradient of the first inclined plane is lower than 8 degrees, the maximum measuring range of the sensor cannot meet the weighing requirement of the lowest load weight of the freight truck. When the gradient reaches 90 degrees, the shearing force applied to the bottom end of the first inclined plane is increased along with the increase of the pressure applied to the pressure sensor, and in order to meet the requirement of the corresponding measuring range, the strength and toughness of the material of the sensor are required to be high, so that the measuring range of the sensor cannot be large while the cost is increased.
Through the setting on first inclined plane and second inclined plane for the casing that the cavity corresponds the department is thin more to the edge, and then even if pressure has when less change, it still has corresponding deformation, thereby has improved this pressure sensor's sensitivity greatly.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (7)
1. A small-size, wide-range pressure sensor, comprising: the casing, a cavity has in the casing, it has liquid to annotate in the cavity, just casing one side is equipped with the intercommunication the opening of cavity, be equipped with the bottom on the opening, casing one side is equipped with the intercommunication the first through-hole of cavity, be equipped with the connector in the first through-hole, be equipped with diffusion silicon sensor on the connector, the casing for the cavity wall of bottom opposite side has outside first arch and inside second arch, be first inclined plane between first bellied peak and the minimum, be the second inclined plane between bellied peak and the minimum of second, just the second inclined plane with cavity lateral wall department of meeting has interior chamfer.
2. The small-scale, large-range pressure sensor of claim 1, wherein the first protrusion and the cavity are both circular.
3. The small-scale, large-range pressure sensor of claim 2, wherein the diameter of the first protrusion is no greater than the diameter of the cavity.
4. The small-scale, large-range pressure sensor of claim 1, wherein the highest and lowest points of the second bump correspond to the highest and lowest points of the first bump.
5. The small-scale, large-range pressure sensor of claim 1, wherein the bottom cover is provided with a step structure at an edge thereof, and the bottom cover is in interference fit with the housing.
6. The small-scale, large-range pressure sensor of claim 5, wherein the step structure of the bottom cap is sleeved with a sealing ring.
7. The small-scale, large-range pressure sensor according to claim 1, wherein a slope of the first slope is not less than 8 ° and less than 90 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110245227.2A CN112798160A (en) | 2021-03-05 | 2021-03-05 | Small-size and large-range pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110245227.2A CN112798160A (en) | 2021-03-05 | 2021-03-05 | Small-size and large-range pressure sensor |
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| Publication Number | Publication Date |
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| CN112798160A true CN112798160A (en) | 2021-05-14 |
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| CN202110245227.2A Pending CN112798160A (en) | 2021-03-05 | 2021-03-05 | Small-size and large-range pressure sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113670486A (en) * | 2021-09-14 | 2021-11-19 | 王星星 | Weighing pressure sensor with high working efficiency |
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-
2021
- 2021-03-05 CN CN202110245227.2A patent/CN112798160A/en active Pending
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| CN109870252A (en) * | 2017-12-02 | 2019-06-11 | 西安兴仪科技股份有限公司 | A kind of anti-pressure and abrasion-proof type ceramic pressure sensor |
| CN109060201A (en) * | 2018-08-25 | 2018-12-21 | 成都凯天电子股份有限公司 | High temperature resistant silicon piezoresistive pressure sensing element |
| CN112014027A (en) * | 2019-05-28 | 2020-12-01 | 合肥杰发科技有限公司 | Multi-device packaging structure and manufacturing method thereof |
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Non-Patent Citations (1)
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| 王晓丹: "论装配关系中不同硬度零部件的圆角倒角设计", 《中国科技纵横》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113670486A (en) * | 2021-09-14 | 2021-11-19 | 王星星 | Weighing pressure sensor with high working efficiency |
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Application publication date: 20210514 |
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