CN112782839A - High accuracy objective table device of angularly adjustable - Google Patents

High accuracy objective table device of angularly adjustable Download PDF

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Publication number
CN112782839A
CN112782839A CN202110201102.XA CN202110201102A CN112782839A CN 112782839 A CN112782839 A CN 112782839A CN 202110201102 A CN202110201102 A CN 202110201102A CN 112782839 A CN112782839 A CN 112782839A
Authority
CN
China
Prior art keywords
objective table
base
angularly adjustable
sliding
high precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110201102.XA
Other languages
Chinese (zh)
Inventor
周勇
吴俊杰
魏佳斯
蔡潇雨
李源
孙恺欣
刘娜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Measurement Information Technology Co ltd
Shanghai Institute of Measurement and Testing Technology
Original Assignee
Shanghai Measurement Information Technology Co ltd
Shanghai Institute of Measurement and Testing Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Measurement Information Technology Co ltd, Shanghai Institute of Measurement and Testing Technology filed Critical Shanghai Measurement Information Technology Co ltd
Priority to CN202110201102.XA priority Critical patent/CN112782839A/en
Publication of CN112782839A publication Critical patent/CN112782839A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/241Devices for focusing
    • G02B21/245Devices for focusing using auxiliary sources, detectors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/26Stages; Adjusting means therefor

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

The invention relates to an angle-adjustable high-precision objective table device, in the angle-adjustable high-precision objective table device, a base and an objective table are supported by three points through a fixed supporting column and two movable supporting columns, two driving mechanisms respectively drive two sliding rods to enable a slope surface at the front end of each sliding rod to jack two jacking balls to different heights, so that the pose of the objective table is adjusted, and because the rolling balls and the jacking balls are in rolling friction with moving parts, the friction force is small, the play cannot occur, and the pose of the objective table is smoothly and stably adjusted. Therefore, the high-precision object stage device with the adjustable angle can conveniently adjust the pose of the object stage, and is simple in structure and stable and smooth in movement.

Description

High accuracy objective table device of angularly adjustable
Technical Field
The invention relates to a high-precision objective table device with an adjustable angle, in particular to an objective table device for high-precision instruments such as a microscope.
Background
In high-precision instruments such as microscopes, a stage is an important device. The leveling and angle adjustment of the object stage are very important, the precision is difficult to accurately control by a common manual adjustment mode in the prior art, the movement is easy to generate, and for a high-precision instrument, the object on the object stage can be greatly deviated from the target pose by slight movement. The objective table in the prior art is difficult to flexibly and conveniently adjust the inclination angle of the objective table, has a complex structure, is inconvenient to adjust and is easy to generate play.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention provides an angularly adjustable high-precision stage apparatus, which has a simple structure and is convenient for adjusting the attitude angle of the stage.
In order to achieve the purpose, the invention provides a high-precision objective table device with an adjustable angle, which adopts the following technical scheme: a high-precision objective table device with an adjustable angle comprises a base and an objective table, wherein a fixed supporting column is arranged on the base, a ball is arranged at the top of the fixed supporting column, and the ball is propped against the bottom of the objective table; the base is also provided with two guide holes parallel to the fixed supporting columns, each of the two guide holes is provided with a top bead, the bottom of the objective table is also provided with two movable supporting columns, the two movable supporting columns are respectively supported on the two top beads, and the central connecting lines of the fixed supporting columns and the two movable supporting columns form a triangle; the base is also provided with two guide channels (not shown in the figure), each of the two guide channels is connected with a sliding rod in a sliding manner, and the two sliding rods are driven by a driving mechanism respectively and can slide along the guide channels; the head ends of the sliding rods are provided with slope surfaces, and the head ends of the two sliding rods respectively extend into the two guide holes and enable the slope surfaces to abut against the top beads.
Preferably, the object stage and the base are tensioned by a plurality of tension springs.
More preferably, two sides of the fixed support column are respectively provided with a tension spring, and the vicinity of the two movable support columns are respectively provided with a tension spring.
Preferably, an elastic reed is arranged between the object stage and the base, one end of the elastic reed is connected to the base, and the other end of the elastic reed is connected to the object stage.
Preferably, the base is provided with a detection sensor for detecting the inclination angle of the objective table relative to the base, the detection sensor is connected with the control device, and the control device controls the driving mechanism to move according to a detection signal of the detection sensor.
Preferably, the center connecting line of the fixed supporting column and the two movable supporting columns forms an isosceles right triangle, and the fixed supporting column is located at the vertex of the right angle.
Preferably, the bottom of the object stage is provided with a spherical groove matched with the ball.
Preferably, actuating mechanism includes step motor, is connected with the hob on step motor's the output shaft, and threaded connection has the spiral sleeve on the hob, hob drive spiral sleeve axial displacement, the front end of spiral sleeve is equipped with a tight ball in top, the tight ball in top is tight at the slide bar tail end.
More preferably, the screw sleeve is arranged in the connecting seat, the connecting seat is connected to the base, a sliding channel is arranged in the connecting seat, and an outer cylindrical surface of the screw sleeve is in sliding connection with the sliding channel.
As described above, the high-precision stage device with an adjustable angle according to the present invention has the following advantageous effects: in the high-precision object stage device with the adjustable angle, the base and the object stage are supported by the fixed supporting column and the two movable supporting columns at three points, the two driving mechanisms respectively drive the two sliding rods to enable the slope surface at the front end of the sliding rod to jack the two jack balls to different heights, so that the position and the attitude of the object stage are adjusted, and the ball and the jack balls are in rolling friction with moving parts, so that the friction force is small, the play cannot occur, and the position and the attitude of the object stage are smoothly and stably adjusted. Therefore, the high-precision object stage device with the adjustable angle can conveniently adjust the pose of the object stage, and is simple in structure and stable and smooth in movement.
Drawings
Fig. 1 is a schematic structural diagram of an external shape of an angularly adjustable high-precision stage apparatus according to the present invention.
Fig. 2 is a schematic view of the angularly adjustable high precision stage apparatus of fig. 1 with the stage removed.
Fig. 3 shows a schematic view of the drive mechanism driving the stage to move.
Description of the element reference numerals
1 base
2 object stage
3 fixed support column
4 ball
5 guide hole
6 top bead
7 Movable supporting column
8 sliding rod
9 drive mechanism
10 slope surface
11 tension spring
12 spring reed
13 detection sensor mounting hole
14 stepping motor
15 jacking ball
16 connecting socket
17 objective table connecting bolt
18 base connecting bolt
19 compression spring
20 puller head
21 spiral sleeve
22 screw rod
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions under which the present invention can be implemented, so that the present invention has no technical significance, and any structural modification, ratio relationship change, or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention. In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not to be construed as a scope of the present invention.
As shown in fig. 1 to 3, the present invention provides an angle-adjustable high-precision stage apparatus, which includes a base 1 and a stage 2, wherein the base 1 is provided with a fixed support column 3, the top of the fixed support column 3 is provided with a ball 4, and the ball 4 is supported on the bottom of the stage 2; the base 1 is also provided with two guide holes 5 (not shown in the figure) parallel to the fixed support columns 3, each of the two guide holes 5 is provided with a top bead 6, the bottom of the objective table 2 is also provided with two movable support columns 7, the two movable support columns 7 are respectively supported on the two top beads 6, and the central connecting lines of the fixed support columns 3 and the two movable support columns 7 form a triangle; the base 1 is also provided with two guide channels, each of the two guide channels is connected with a sliding rod 8 in a sliding manner, and the two sliding rods 8 are driven by a driving mechanism 9 respectively and can slide along the guide channels; the head ends of the sliding rods 8 are provided with slope surfaces 10, and the head ends of the two sliding rods 8 respectively extend into the two guide holes 5 and enable the slope surfaces 10 to abut against the top beads 6.
In the high-precision object stage device with the adjustable angle, the base 1 and the object stage 2 are supported by the fixed supporting column 3 and the two movable supporting columns 7 at three points, the two driving mechanisms 9 respectively drive the two sliding rods 8 to enable the slope surfaces 10 at the front ends of the sliding rods 8 to jack the two jacking balls 6 to different heights, so that the position and pose of the object stage 2 are adjusted, and the rolling balls 4 and the jacking balls 6 are in rolling friction with moving parts, so that the friction force is small, the movement cannot occur, and the position and pose of the object stage 2 are smoothly and stably adjusted. Therefore, the high-precision object stage device with the adjustable angle can conveniently adjust the pose of the object stage 2, and is simple in structure and stable and smooth in movement.
As shown in fig. 2, the stage 2 and the base 1 are arranged in parallel, and the stage 2 and the base 1 are tensioned by a plurality of tension springs 11, so that the stage 2 is reliably in contact with the balls 4 and the movable support columns 7, and the stage 2 is stably supported on the base 1. As a preferred embodiment, as shown in fig. 2, the fixed support columns 3 are provided with one tension spring 11 on each side, the tension springs 11 on each side of the fixed support columns 3 ensure that the object stage 2 is reliably contacted with the balls 4 on the top of the fixed support columns 3 to stably support the object stage 2 by the balls 4, and the tension springs 11 on each side of the two movable support columns 7 ensure that the object stage 2 is reliably contacted with the movable support columns 7 to stably support the object stage 2 by the movable support columns 7.
As shown in fig. 2, an elastic reed 12 is arranged between the object stage 2 and the base 1, one end of the elastic reed 12 is connected to the base 1, the other end of the elastic reed 12 is connected to the object stage 2, the elastic reed 12 is of a symmetrical structure, the front end of the elastic reed 12 is connected to the base 1 through a base connecting bolt 18, the rear end of the elastic reed 12 is connected to the object stage 2 through an object stage connecting bolt 17, the elastic reed 12 limits the lateral movement of the object stage 2, but the elastic reed 12 can elastically twist along with the angular adjustment of the object stage 2.
In order to facilitate the angle adjustment of the object stage 2, as shown in fig. 2, a detection sensor for detecting the inclination angle of the object stage 2 relative to the base 1 is arranged on the base 1, the detection sensor is connected with a control device, the control device controls the driving mechanism 9 to move according to a detection signal of the detection sensor, and the detection sensor is installed in a detection sensor installation hole 13. As to how the control means specifically control the movement of the object table 2, there are various control means, which prior art means can easily be implemented and will not be described in detail here.
As shown in fig. 2, the connecting lines of the centers of the fixed support column 3 and the two movable support columns 7 form a triangle, so that the object stage 2 can be stably supported by three-point support, and preferably, the connecting lines of the centers of the fixed support column 3 and the two movable support columns 7 form an isosceles right triangle, that is, the connecting lines of the projection points of the axes of the fixed support column 3 and the two movable support columns 7 on the base 1 form an isosceles right triangle, and the fixed support column 3 is located at the vertex position of the right angle. Referring to fig. 1 and 2, the base 1 and the objective table 2 are rectangular, the fixed support columns 3 and the movable support columns 7 are respectively close to three corners of the base 1, when the angle of the objective table 2 needs to be adjusted, one of the movable support columns 7 can be adjusted or the height positions of the two movable support columns 7 can be adjusted at the same time to enable the objective table 2 to reach a target angle position, the balls 4 on the tops of the fixed support columns 3 are used for supporting the objective table 2, and the objective table 2 can be flexibly turned over for a certain angle relative to the balls 4. In order to reliably connect the object stage 2 and the balls 4, a spherical groove (not shown) is provided at the bottom of the object stage 2 to be engaged with the balls 4, and the balls 4 are engaged with the spherical groove in a rolling manner.
As shown in fig. 3, the driving mechanism 9 includes a stepping motor 14, a screw rod 22 is connected to an output shaft of the stepping motor 14, a screw sleeve 21 is connected to the screw rod 22 through a screw thread, the screw rod 22 drives the screw sleeve 21 to move axially, a tightening ball 15 is disposed at a front end of the screw sleeve 21, and the tightening ball 15 is tightened against a tail end of the sliding rod 8. The screw sleeve 21 is arranged in the connecting seat 16, the connecting seat 16 is connected to the base 1, a sliding channel (not shown) is arranged in the connecting seat 16, an outer cylindrical surface of the screw sleeve 21 is slidably connected with the sliding channel, a bearing for limiting the rotation of the screw sleeve 21 relative to the movable channel is arranged on the outer side surface of the screw sleeve 21, the screw sleeve 21 can only perform linear motion in the front-back direction, when the stepping motor 14 rotates, the output shaft outputs rotary motion to drive the screw rod 22 to rotate, and the screw rod 22 drives the screw sleeve 21 to perform linear motion through a thread pair. In order to make the holding ball reliably contact with the rear end of the sliding rod, as shown in fig. 3, the rear end of the sliding rod is provided with a holding head 20, the sliding rod 8 is sleeved with a compression spring 19, and the compression spring 19 presses the sliding rod 8 towards the holding ball 15 to ensure that the holding ball 15 is reliably contacted with the sliding rod 8.
Referring to fig. 2, two driving mechanisms 9 are provided in the high-precision object stage device with an adjustable angle of the present invention, each driving mechanism 9 can drive one sliding rod 8 to move linearly, and a slope 10 at the end of the sliding rod 8 can drive the top ball 6 to move up and down, so as to drive the movable support column 7 to move up and down, so that a certain angle of the object stage 2 is lifted or lowered, and the object stage 2 is turned to a target angle pose.
Based on the technical scheme of the embodiment, the high-precision object stage device with the adjustable angle can conveniently adjust the pose of the object stage 2, and is simple in structure and stable and smooth in movement.
In conclusion, the present invention effectively overcomes various disadvantages of the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (9)

1. A high-precision objective table device with an adjustable angle is characterized by comprising a base and an objective table, wherein a fixed supporting column is arranged on the base, a ball is arranged at the top of the fixed supporting column, and the ball is propped against the bottom of the objective table; the base is also provided with two guide holes parallel to the fixed supporting columns, each of the two guide holes is provided with a top bead, the bottom of the objective table is also provided with two movable supporting columns, the two movable supporting columns are respectively supported on the two top beads, and the central connecting lines of the fixed supporting columns and the two movable supporting columns form a triangle; the base is also provided with two guide channels, each of the two guide channels is connected with a sliding rod in a sliding manner, and the two sliding rods are driven by a driving mechanism respectively and can slide along the guide channels; the head ends of the sliding rods are provided with slope surfaces, and the head ends of the two sliding rods respectively extend into the two guide holes and enable the slope surfaces to abut against the top beads.
2. The angularly adjustable high precision stage apparatus of claim 1, wherein: the objective table and the base are tensioned through a plurality of tension springs.
3. The angularly adjustable high precision stage apparatus of claim 2, wherein: two sides of the fixed supporting column are respectively provided with a tension spring, and the positions near the two movable supporting columns are respectively provided with a tension spring.
4. The angularly adjustable high precision stage apparatus of claim 1, wherein: an elastic reed is arranged between the objective table and the base, one end of the elastic reed is connected to the base, and the other end of the elastic reed is connected to the objective table.
5. The angularly adjustable high precision stage apparatus of claim 1, wherein: the base is provided with a detection sensor for detecting the inclination angle of the objective table relative to the base, the detection sensor is connected with a control device, and the control device controls the driving mechanism to move according to a detection signal of the detection sensor.
6. The angularly adjustable high precision stage apparatus of claim 1, wherein: the fixed supporting column and the two movable supporting columns form an isosceles right triangle, and the fixed supporting column is located at the vertex of the right angle.
7. The angularly adjustable high precision stage apparatus of claim 1, wherein: and a spherical groove matched with the ball is arranged at the bottom of the objective table.
8. The angularly adjustable high precision stage apparatus of claim 1, wherein: the driving mechanism comprises a stepping motor, a screw rod is connected to an output shaft of the stepping motor, a screw sleeve is connected to the screw rod in a threaded mode, the screw rod drives the screw sleeve to move axially, a jacking ball is arranged at the front end of the screw sleeve, and the jacking ball is tightly jacked at the tail end of the sliding rod.
9. The angularly adjustable high precision stage apparatus of claim 8, wherein: the spiral sleeve is arranged in the connecting seat, the connecting seat is connected to the base, a sliding channel is arranged in the connecting seat, and the outer cylindrical surface of the spiral sleeve is connected with the sliding channel in a sliding mode.
CN202110201102.XA 2021-02-23 2021-02-23 High accuracy objective table device of angularly adjustable Pending CN112782839A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110201102.XA CN112782839A (en) 2021-02-23 2021-02-23 High accuracy objective table device of angularly adjustable

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110201102.XA CN112782839A (en) 2021-02-23 2021-02-23 High accuracy objective table device of angularly adjustable

Publications (1)

Publication Number Publication Date
CN112782839A true CN112782839A (en) 2021-05-11

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Application Number Title Priority Date Filing Date
CN202110201102.XA Pending CN112782839A (en) 2021-02-23 2021-02-23 High accuracy objective table device of angularly adjustable

Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113702385A (en) * 2021-07-28 2021-11-26 南京工程学院 Angle-adjustable objective table and using method thereof
CN113701798A (en) * 2021-08-29 2021-11-26 孙恺欣 Calibration device and method for two-dimensional grid standard plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113702385A (en) * 2021-07-28 2021-11-26 南京工程学院 Angle-adjustable objective table and using method thereof
CN113701798A (en) * 2021-08-29 2021-11-26 孙恺欣 Calibration device and method for two-dimensional grid standard plate
CN113701798B (en) * 2021-08-29 2024-01-19 孙恺欣 Calibrating device and method for two-dimensional grid standard plate

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