CN112757259B - Mechanical clamping arm for transferring wafer box in linkage detection - Google Patents
Mechanical clamping arm for transferring wafer box in linkage detection Download PDFInfo
- Publication number
- CN112757259B CN112757259B CN202011636191.2A CN202011636191A CN112757259B CN 112757259 B CN112757259 B CN 112757259B CN 202011636191 A CN202011636191 A CN 202011636191A CN 112757259 B CN112757259 B CN 112757259B
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- Prior art keywords
- arm
- driving
- clamping
- block
- rotating block
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
- B25J9/0087—Dual arms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Abstract
The invention discloses a mechanical clamping arm for transferring a wafer cassette through linkage detection, which is characterized by comprising a first clamping hand, a second clamping hand, a first clamping arm, a second clamping arm, an installation base, a cylinder installation base, a driving cylinder and a driving mechanism, wherein the driving mechanism is installed on the installation base, the driving cylinder is installed on the cylinder installation base, the first clamping hand is installed at one end of the first clamping arm, and the second clamping hand is installed at one end of the second clamping arm. The wafer clamping device is provided with the symmetrical U-shaped clamping hands, the U-shaped clamping hands are driven by the driving mechanism to open and close, the wafer boxes are clamped, the opening and closing distances of the clamping hands are correspondingly adjusted according to the sizes of different wafer boxes, and the integrity and the stability of the clamping actions are guaranteed.
Description
Technical Field
The invention belongs to the technical field of semiconductor equipment, and particularly relates to a clamping arm of a wafer box transfer manipulator for linkage detection.
Background
In the configuration of semiconductor wet process equipment, a complete process path is required to be established, which comprises a wafer bearing area, a wafer cleaning process area, a wafer drying process area and a wafer unloading area, and the wafer transfer is required to be realized in the complete process cleaning process, and the wafer transfer is required to be carried out through a well-planned mechanical arm device or a wafer box for loading the wafer. The wafer is required to be combined with various devices and accessories in the transfer process, and the wafer is arranged on the wet process equipment, so that various undesirable phenomena such as stress concentration, vibration, shaking, deviation and deflection can be generated due to the vibration of the wet process equipment in the transfer process, and the wafer can be broken due to unexpected adverse effects on the wafer, so that the wafer product can be monitored in position by establishing the high-stability clamping hand device for clamping on the mechanical arm device module, and the wafer product transfer device has important significance.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a linkage detection wafer box transfer mechanical clamping arm, which can ensure that the loading and unloading actions of wafers can be smoothly carried out in the periodic transfer process of the wafers, and avoid the damage of the surfaces of the wafers caused by unexpected movement.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a mechanical clamping arm for transferring a wafer cassette by linkage detection, which comprises a first clamping hand, a second clamping hand, a first clamping arm, a second clamping arm, an installation base, a cylinder installation base, a driving cylinder and a driving mechanism, wherein the driving mechanism is installed on the installation base;
the driving mechanism comprises a first driving arm, a second driving arm, a first moving arm, a second moving arm, a first driving block, a second driving block, a first rotating block, a second rotating block, a first limiting block, a second limiting block and a limiting spring, wherein one end of the first driving arm and one end of the second driving arm are respectively connected with the output end of the driving cylinder, the other end of the first driving arm and the other end of the second driving arm are in an elliptical cone shape, one end of the first moving arm is connected with the other end of the first clamping arm, one end of the second moving arm is connected with the other end of the second clamping arm, the first rotating block is installed at the other end of the first moving arm, the second rotating block is installed at the other end of the second moving arm, the first driving block is installed on the first rotating block, the second driving block is installed on the second rotating block, the other end of the first driving arm is located below the first driving block and is in contact with the first driving block, the other end of the second driving arm is located below the second driving block and is in contact with the second limiting block, and the second limiting spring is installed on the second limiting block, and the second limiting spring is connected with the second limiting spring.
As a preferred technical scheme, a first proximity switch is installed on the first rotating block, a second proximity switch is installed on the second rotating block, a first inductor is arranged below the first proximity switch, and a second inductor is arranged below the second proximity switch.
As a preferred technical solution, the first rotating block and the first moving arm are coaxially disposed, and the second rotating block and the second moving arm are coaxially disposed.
Preferably, the first rotating block is attached to an end of the first moving arm by means of shaft attachment, and the second rotating block is attached to an end of the second moving arm by means of shaft attachment.
According to the preferable technical scheme, the first clamping glove is arranged at one end of the first clamping arm, and the second clamping glove is arranged at one end of the second clamping arm.
As a preferable technical solution, the movement angle of the first rotation block and the second rotation block is 1 to 3 degrees, and the relative movement distance of the first clamping arm and the second clamping arm is 16 to 25 mm.
According to the preferable technical scheme, the clamping device further comprises a fixed seat, the fixed seat and the air cylinder installation seat are of an integrated structure, a limiting groove is formed in the fixed seat, the first clamping arm is connected with the first moving arm through a first connecting external member, the second clamping arm is connected with the second moving arm through a second connecting external member, and the first connecting external member and the second connecting external member are arranged in the limiting groove and can move left and right in the limiting groove.
Preferably, the first and second rotating blocks have an octagonal transverse cross section.
Compared with the prior art, the invention has the beneficial effects that:
(1) The wafer clamping device is provided with the symmetrical U-shaped clamping hands, the U-shaped clamping hands are driven by the driving mechanism to open and close, the wafer boxes are clamped, the opening and closing distances of the clamping hands are correspondingly adjusted according to the sizes of different wafer boxes, and the integrity and the stability of the clamping actions are guaranteed.
(2) The driving mechanism realizes the accurate opening and closing control of the clamping arm through the linkage of the driving arm, the driving block, the rotating block and the limiting block, only one driving cylinder needs to be controlled, the space occupied by the driving mechanism is greatly reduced, and the smooth operation of loading and unloading the wafers is met.
(3) According to the invention, through the limiting spring, the reset process of the clamping arm is realized, the use of a power device is reduced, the stability of the action process is ensured, and the clamping efficiency of the wafer is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic view of a linkage detecting wafer cassette transfer robot according to one embodiment of the present invention.
FIG. 2 is a second schematic view of the linkage detecting wafer cassette transferring robot according to the present invention.
FIG. 3 is a partially enlarged view of the linkage detecting wafer cassette transfer robot according to the present invention.
FIG. 4 is a second enlarged view of a linkage detecting wafer cassette transfer robot according to the present invention.
FIG. 5 is a third enlarged view of a third embodiment of the linkage detecting wafer cassette transfer robot of the present invention.
Wherein the reference numerals are as follows: the clamping device comprises a first clamping arm 1, a second clamping arm 2, a first clamping hand 3, a second clamping hand 4, a first moving arm 5, a second moving arm 6, a mounting base 7, a cylinder mounting base 8, a driving cylinder 9, a first driving arm 10, a second driving arm 11, a first rotating block 12, a second rotating block 13, a first driving block 14, a second driving block 15, a first limiting block 16, a second limiting block 17, a limiting spring 18, a first proximity switch 19, a second proximity switch 20, a first inductor 21, a second inductor 22 and a fixing base 23.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
The present embodiment provides a clamping arm for a wafer transfer robot, which is used to clamp a wafer cassette. The mechanical clamping arm for linkage detection wafer transfer comprises a first clamping hand 3, a second clamping hand 4, a first clamping arm 1, a second clamping arm 2, a mounting base 7, a cylinder mounting base 8, a fixing base 23, a driving cylinder 9 and a driving mechanism. The first clamping hand 3 and the second clamping hand 4 are symmetrically arranged in a U-shaped structure and can be clamped at the edge positions of two sides of the wafer box, so that the wafer box can be clamped. The first clamping hand 3 is arranged at one end of the first clamping arm 1, the second clamping hand 4 is arranged at one end of the second clamping arm 2, and the first clamping hand 3 and the second clamping hand 4 are driven to open and close through the movement of the first clamping arm 1 and the second clamping arm 2. More preferably, the first clamping arm 3 is sleeved at one end of the first clamping arm 1, the second clamping arm 4 is sleeved at one end of the second clamping arm 2, and the first clamping arm 3 and the second clamping arm 4 can be opened and closed only along with the first clamping arm 1 and the second clamping arm 2 without rotating in a sleeved manner.
The driving mechanism is installed on the installation base 7, the driving cylinder 9 is installed on the cylinder installation base 8, the driving mechanism comprises a first driving arm 10, a second driving arm 11, a first moving arm 5, a second moving arm 6, a first driving block 14, a second driving block 15, a first rotating block 12, a second rotating block 13, a first limiting block 16, a second limiting block 17, a limiting spring 18, a first proximity switch 19, a second proximity switch 20, a first inductor 21 and a second inductor 22, wherein one end of the first driving arm 10 and one end of the second driving arm 11 are respectively connected with the output end of the driving cylinder 9 and extend out or retract under the action of the driving cylinder 9, the other ends of the first driving arm 10 and the second driving arm 11 are in an elliptical cone shape, the radius of the other ends of the first driving arm 10 and the second driving arm 11 changes along the length direction, one end of the first moving arm 5 is connected with the other end of the first clamping arm 1, one end of the second moving arm 6 is connected with the other end of the second clamping arm 2, the first driving arm 12 is installed at the other end of the first moving arm 5 in a shaft installation mode, the second moving block 13 is coaxially installed on the first moving arm 6, and the second rotating block 13 is coaxially installed with the second rotating arm 6. The first and second rotating blocks 12 and 13 have octagonal transverse cross sections. The first driving block 14 is mounted on a side of the first rotating block 12 facing the second rotating block 13, and the second driving block 15 is mounted on a side of the second rotating block 13 facing the first rotating block 12. The other end of the first driving arm 10 is positioned below the first driving block 14 and is always in contact with the first driving block 14; the other end of the second drive arm 11 is located below the second drive block 15 and always abuts against the second drive block 15. The first limiting block 16 is mounted on the first rotating block 12, the second limiting block 17 is mounted on the second rotating block 13, the limiting spring 18 is connected with the first limiting block 16 and the second limiting block 17, the limiting spring 18 is located below the first driving arm 10 and the second driving arm 11, the limiting spring 18 is used for ensuring that the first driving arm 10 and the first driving block 14 are always in a contact state, and the second driving arm 11 and the second driving block 15 are always in a contact state. The first rotating block 12 is provided with a first proximity switch 19, the second rotating block 13 is provided with a second proximity switch 20, a first inductor 21 is arranged below the first proximity switch 19, and a second inductor 22 is arranged below the second proximity switch 20. The movement angle of the first rotating block 12 and the second rotating block 13 is 1-3 degrees, and the relative movement distance of the first clamping arm 1 and the second clamping arm 2 is 16-25 mm. Fixing base 23 and 8 formula structures as an organic whole of cylinder mount pad have seted up the spacing groove on the fixing base 23, and first centre gripping arm 1 is connected through first connection external member with first moving arm 5, and second centre gripping arm 2 is connected through second connection external member with second moving arm 6, and first connection external member, second connection external member set up in the spacing inslot and can control in the spacing inslot.
The working process comprises the following steps:
in an initial state, the driving cylinder 9 is in a retraction state, the first clamping arm 1 and the second clamping arm 2 are in a close state, when a wafer cassette needs to be clamped, the driving cylinder 9 acts to push the first driving arm 10 and the second driving arm 11, the first driving arm 10 and the second driving arm 11 push the first driving block 14 and the second driving block 15, the first driving block 14 and the second driving block 15 drive the first rotating block 12 and the second rotating block 13 to rotate, the first rotating block 12 and the second rotating block 13 rotate to drive the first limiting block 16 and the second limiting block 17 to be far away, so that the first moving arm 5 and the second moving arm 6 are driven to be far away, and the first moving arm 5 and the second moving arm 6 drive the first clamping arm 1 and the second clamping arm 2 to be opened. When the first clamping arm 1 and the second clamping arm 2 need to be folded, the driving cylinder 9 retracts, and the first rotating block 12 and the second rotating block 13 reset under the action of the limiting spring 18.
Although the present invention has been described in detail with respect to the above embodiments, it will be understood by those skilled in the art that modifications or improvements based on the disclosure of the present invention may be made without departing from the spirit and scope of the invention, and these modifications and improvements are within the spirit and scope of the invention.
Claims (8)
1. The mechanical clamping arm for transferring the wafer box is characterized by comprising a first clamping hand, a second clamping hand, a first clamping arm, a second clamping arm, an installation base, an air cylinder installation base, a driving air cylinder and a driving mechanism, wherein the driving mechanism is installed on the installation base, the driving air cylinder is installed on the air cylinder installation base, the first clamping hand is installed at one end of the first clamping arm, and the second clamping hand is installed at one end of the second clamping arm;
the driving mechanism comprises a first driving arm, a second driving arm, a first moving arm, a second moving arm, a first driving block, a second driving block, a first rotating block, a second rotating block, a first limiting block, a second limiting block and a limiting spring, wherein one end of the first driving arm and one end of the second driving arm are respectively connected with the output end of the driving cylinder, the other end of the first driving arm and the other end of the second driving arm are in an elliptical cone shape, one end of the first moving arm is connected with the other end of the first clamping arm, one end of the second moving arm is connected with the other end of the second clamping arm, the first rotating block is installed at the other end of the first moving arm, the second rotating block is installed at the other end of the second moving arm, the first driving block is installed on the first rotating block, the second driving block is installed on the second rotating block, the other end of the first driving arm is located below the first driving block and is in contact with the first driving block, the other end of the second driving arm is located below the second driving block and is in contact with the second limiting block, and the second limiting spring is installed on the second limiting block, and the second limiting spring is connected with the second limiting spring.
2. The arm as claimed in claim 1, wherein the first rotating block is mounted with a first proximity switch, the second rotating block is mounted with a second proximity switch, a first sensor is disposed under the first proximity switch, and a second sensor is disposed under the second proximity switch.
3. The robot as claimed in claim 1, wherein the first rotating block is disposed coaxially with the first moving arm, and the second rotating block is disposed coaxially with the second moving arm.
4. The arm as claimed in claim 3, wherein the first rotating block is mounted to an end of the first moving arm by means of shaft mounting, and the second rotating block is mounted to an end of the second moving arm by means of shaft mounting.
5. The arm as claimed in claim 1, wherein the first clamping glove is disposed at one end of the first clamping arm, and the second clamping glove is disposed at one end of the second clamping arm.
6. The robot as claimed in claim 1, wherein the first and second rotation blocks are moved at an angle of 1-3 degrees and the first and second clamp arms are moved at a distance of 16-25 mm relative to each other.
7. The arm as claimed in claim 1, further comprising a fixing base, wherein the fixing base and the cylinder mounting base are integrally formed, the fixing base has a limiting groove, the first clamping arm is connected to the first moving arm through a first connecting member, the second clamping arm is connected to the second moving arm through a second connecting member, and the first connecting member and the second connecting member are disposed in the limiting groove and can move left and right in the limiting groove.
8. The robot as claimed in claim 1, wherein the first and second rotating blocks have octagonal transverse cross-sections.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011636191.2A CN112757259B (en) | 2020-12-31 | 2020-12-31 | Mechanical clamping arm for transferring wafer box in linkage detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011636191.2A CN112757259B (en) | 2020-12-31 | 2020-12-31 | Mechanical clamping arm for transferring wafer box in linkage detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112757259A CN112757259A (en) | 2021-05-07 |
| CN112757259B true CN112757259B (en) | 2022-12-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011636191.2A Active CN112757259B (en) | 2020-12-31 | 2020-12-31 | Mechanical clamping arm for transferring wafer box in linkage detection |
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| Country | Link |
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| CN (1) | CN112757259B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101422902A (en) * | 2007-10-31 | 2009-05-06 | 鸿富锦精密工业（深圳）有限公司 | Manipulator |
| CN111807270A (en) * | 2020-07-09 | 2020-10-23 | 京良(广州)科技股份有限公司 | Forklift robot with picking and placing functions |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030097286A (en) * | 2002-06-20 | 2003-12-31 | 삼성전자주식회사 | A wafer transfer apparatus |
| DE102015226205A1 (en) * | 2015-12-21 | 2017-06-22 | Robert Bosch Gmbh | Protective device for a manipulation device on a handling device and handling device |
| CN205466286U (en) * | 2016-01-20 | 2016-08-17 | 苏州襄行智能科技有限公司 | Clamping jaw device |
| CN210525088U (en) * | 2019-09-26 | 2020-05-15 | 浙江钱江机器人有限公司 | Mechanical arm |
| CN211879336U (en) * | 2020-01-08 | 2020-11-06 | 江苏启微半导体设备有限公司 | Wafer conveying device of BOE wet processing equipment |
| CN211682104U (en) * | 2020-01-14 | 2020-10-16 | 惠强 | Mechanical arm for machine-building |
| CN111312639B (en) * | 2020-02-27 | 2022-03-18 | 至微半导体(上海)有限公司 | Mechanical arm device and method for reducing shaking and vibration of mechanical arm device |
-
2020
- 2020-12-31 CN CN202011636191.2A patent/CN112757259B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101422902A (en) * | 2007-10-31 | 2009-05-06 | 鸿富锦精密工业（深圳）有限公司 | Manipulator |
| CN111807270A (en) * | 2020-07-09 | 2020-10-23 | 京良(广州)科技股份有限公司 | Forklift robot with picking and placing functions |
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| Publication number | Publication date |
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| CN112757259A (en) | 2021-05-07 |
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