CN112731771A - Novel tensioning mechanism of roll-to-roll double-sided digital laser direct-writing exposure machine - Google Patents
Novel tensioning mechanism of roll-to-roll double-sided digital laser direct-writing exposure machine Download PDFInfo
- Publication number
- CN112731771A CN112731771A CN202011615966.8A CN202011615966A CN112731771A CN 112731771 A CN112731771 A CN 112731771A CN 202011615966 A CN202011615966 A CN 202011615966A CN 112731771 A CN112731771 A CN 112731771A
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- roll
- tensioning
- clamping plate
- driving motor
- tensioning mechanism
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- 230000007246 mechanism Effects 0.000 title claims abstract description 72
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 230000000712 assembly Effects 0.000 claims abstract description 9
- 238000000429 assembly Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 description 15
- 239000011521 glass Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000002421 cell wall Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70783—Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
Abstract
The invention discloses a novel tensioning mechanism of a roll-to-roll double-sided digital laser direct writing exposure machine, which comprises a base and is characterized in that: the first tensioning mechanism and the second tensioning mechanism are arranged on corresponding bases, the first tensioning mechanism comprises a first driving motor, a second driving motor, a tensioning movable plate, a rotary table arranged on the tensioning movable plate and a clamping mechanism arranged on the rotary table and used for clamping a circuit board, the first driving motor and the second driving motor are arranged on the bases relatively and are connected with clamping plate assemblies of the clamping mechanism through transmission mechanisms, the tensioning movable plate is arranged on the bases and can slide on the bases, and the rotary table is rotatably connected with the tensioning movable plate.
Description
Technical Field
The invention relates to a roll-to-roll digital laser direct-writing exposure machine, in particular to a novel tensioning mechanism of a roll-to-roll double-sided digital laser direct-writing exposure machine.
Background
When a substrate (circuit board) covered with a photosensitive material is borne, the conventional double-sided exposure machine is generally referred, and the lower part of the substrate is supported by glass, so that the substrate is ensured to be in a flat state, and the substrate is enabled to reach the optimal exposure effect within the focal depth range of an exposure lens. A roll-to-roll double-sided laser direct-writing exposure machine also adopts a glass support below a substrate, the glass support can meet the exposure requirement, but dust or dirt can be prevented from falling on the glass, and the glass is difficult to clean in the exposure process, so that the yield of products is reduced, therefore, a device for straightening a circuit board by adopting a tensioning mechanism (patent name: a roll-to-roll double-sided exposure device and a double-sided digital direct-writing exposure method, application number: 202010431942.0) is designed, the suspension straightening is realized at the exposure mechanism, the glass plate support required by the support is avoided, but the circuit board straightened by adopting a counterweight type structure by adopting the tensioning mechanism is straightened, the stress on two sides of the circuit board is sometimes uneven, so that the stretching change of the two sides of the circuit board is different, the two sides of a graph exposed on the circuit board are asymmetrical, and the precision is influenced, the tensioning mechanism is arranged on the rolling machine, the rolling machine is easy to vibrate due to low required precision, and the vibration is transmitted to the circuit board through the tensioning mechanism, so that the exposure precision of the circuit board is influenced.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a tensioning mechanism of a roll-to-roll double-sided digital laser direct writing exposure machine.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a novel two-sided digital laser direct write exposure machine straining device of volume to volume, includes the base, its characterized in that: the first tensioning mechanism and the second tensioning mechanism are arranged on corresponding bases, the first tensioning mechanism comprises a first driving motor, a second driving motor, a tensioning movable plate, a rotary table arranged on the tensioning movable plate and a clamping mechanism arranged on the rotary table and used for clamping a circuit board, the first driving motor and the second driving motor are arranged on the bases relatively and are connected with clamping plate assemblies of the clamping mechanism through transmission mechanisms, the tensioning movable plate is arranged on the bases and can slide on the bases, and the rotary table is rotatably connected with the tensioning movable plate.
The tensioning moving plate is connected with the base through the linear guide rail assembly.
The turntable is connected with the tensioning moving plate through a bearing and rotates.
The clamping mechanism further comprises a clamping cylinder, the clamping plate assembly comprises an upper clamping plate and a lower clamping plate, the clamping cylinder is connected with the lower clamping plate, the piston end of the clamping cylinder is connected with the upper clamping plate, and the upper clamping plate is connected with the lower clamping plate through a linear guide rail assembly.
The transmission mechanism comprises a ball screw assembly, and the first driving motor and the second driving motor drive the clamping plate assembly to move through the corresponding ball screw assemblies.
The transmission mechanism further comprises a belt transmission assembly, and the first driving motor and the second driving motor are connected with the ball screw assembly through the corresponding belt transmission assemblies.
An upper rubber plate fixed on the upper clamping plate and a lower rubber plate fixed on the lower clamping plate are arranged between the upper clamping plate and the lower clamping plate.
The turntable is provided with a positioning groove, and the clamping plate assembly is positioned in the positioning groove.
The invention has the beneficial effects that: the invention has the following advantages:
at least one of the first tensioning mechanism and the second tensioning mechanism is connected in a multi-degree-of-freedom manner in a material pulling direction, so that horizontal material pulling and rotation can be realized, and the condition that tension imbalance is generated in a direction perpendicular to a roll-to-roll material pulling direction of a roll material base material (circuit board) is eliminated; when a pulling force in a material pulling direction is applied, the base material can be leveled when the mechanism is tensioned;
2, the first tensioning mechanism and the second tensioning mechanism can set different tensioning forces for coiled material base materials with different thicknesses, so that the base materials with different thicknesses are prevented from being pulled and deformed and can be tensioned;
3, the first tensioning mechanism and the second tensioning mechanism are respectively installed on the bases on two sides of the exposure machine, so that the influence of vibration of the left and right rolling mechanisms on the base material can be eliminated, and the alignment accuracy during exposure is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a structural view of a first tensioning mechanism;
fig. 3 is a structural view of the tensioning mechanism in another orientation.
Detailed Description
The invention discloses a novel roll-to-roll double-sided digital laser direct writing exposure machine tensioning mechanism, which comprises bases arranged oppositely, wherein a first tensioning mechanism 1 and a second tensioning mechanism 2 are arranged on the corresponding bases, the bases are stone columns, the shock resistance is good, the first tensioning mechanism 1 and the second tensioning mechanism 2 clamp two ends of a circuit board respectively, the first tensioning mechanism 1 and the second tensioning mechanism 2 can be the same or different in structure, in order to save cost and simplify control, the first tensioning mechanism 1 and the second tensioning mechanism 2 are different in structure, the second tensioning mechanism 2 and a clamping mechanism are the same in structure, only one end of the circuit board needs to be clamped, and adjustment is achieved through the first tensioning mechanism 1.
As shown in the figure, straining device 1 includes driving motor one 3, two 4 of driving motor, tensioning movable plate 5, sets up carousel 6 on tensioning movable plate 5 and sets up the fixture who is used for the centre gripping circuit board on carousel 6, driving motor one 3 and two 4 relative centers of rotation with carousel 6 set up on the base and all be connected through drive mechanism and fixture's splint subassembly, tensioning movable plate 5 sets up on the base and can slide on the base, tensioning movable plate 5 passes through linear guide subassembly and pedestal connection, carousel 6 rotates with tensioning movable plate 5 to be connected, carousel 6 passes through the bearing and is connected and rotate with tensioning movable plate 5. The first driving motor 3 and the second driving motor 4 adopt servo motors, the two servo motors adopt tension closed-loop control, and the two servo motors realize tension balance on two sides of a circuit board clamping point through torsion balance setting.
The specific structure of the clamping mechanism is as follows: the clamping mechanism also comprises a clamping cylinder 7, the clamping plate assembly comprises an upper clamping plate 9 and a lower clamping plate 10, the clamping cylinder 7 is connected with the lower clamping plate 10, and the piston end of the clamping cylinder 7 is connected with an upper clamping plate 9, the upper clamping plate 9 is connected with a lower clamping plate 10 through a linear guide rail assembly, of course, for convenience of processing and assembly, the clamping cylinder 7 is connected with the lower clamping plate 10 through the clamping support plate 8, the piston end of the clamping cylinder 7 is connected with the upper clamping plate 9 through the clamping connecting plate 11, thus, after the circuit board passes through the upper clamping plate 9 and the lower clamping plate 10, the clamping cylinder 7 drives the upper clamping plate 9 to move downwards, thereby step up the circuit board, as preferred structure, be equipped with between punch holder 9 and lower plate 10 in the fixed upper rubber plate of punch holder 9, with the lower rubber plate of lower plate 10 fixed, the upper rubber plate not only can be anti-skidding with lower rubber plate, has the difficult damage circuit board of flexibility moreover.
The specific structure of the transmission mechanism is as follows: the transmission mechanism comprises a ball screw assembly, and the first driving motor 3 and the second driving motor 4 drive the clamping plate assembly to move through the corresponding ball screw assemblies; in order to save space and adjust the rotating speed of the motor, the transmission mechanism further comprises a belt transmission assembly, the first driving motor 3 and the second driving motor 4 are connected with the ball screw assembly through the corresponding belt transmission assemblies, the belt transmission assembly comprises a belt 12, a driving belt wheel 13 and a driven belt wheel 14, the driving belt wheel 13 is connected with the first driving motor 3, a shaft on the driven belt wheel 14 is connected with the ball screw through a coupling, and a screw nut is connected with the lower clamping plate 10 through a connecting pipe sleeve and a tension connecting plate; the connection structure of the second driving motor 4 is the same as that of the first driving motor 3, but the position is different, and thus, the detailed description is omitted.
As shown in the figure, be equipped with the constant head tank on the carousel 6, lower plate 10 is located this constant head tank, and the constant head tank is simple to operate not only, and one side of lower plate 10 can paste tightly with the cell wall of constant head tank moreover, and when can avoiding direct screw locking, the big and production adjusting error in clearance of screw and screw.
To sum up, the tensioning mechanism 2 adopts the fixed clamping and the tensioning mechanism 1 adopts the connection mode of multi freedom, so that the coil stock base material can be completely leveled and tensioned, the tension balance of the base material in the exposure area is ensured, the condition of elastic edges in the direction perpendicular to the coil stock pulling direction is avoided, the expansion and contraction consistency of the base material in the whole exposure area is ensured, and the quality of exposure lines is improved.
The novel roll-to-roll double-sided digital laser direct writing exposure machine tensioning mechanism provided by the embodiment of the invention is described in detail, a specific example is applied in the text to explain the principle and the implementation mode of the invention, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (8)
1. The utility model provides a novel two-sided digital laser direct write exposure machine straining device of volume to volume, includes the base, its characterized in that: the first tensioning mechanism and the second tensioning mechanism are arranged on corresponding bases, the first tensioning mechanism comprises a first driving motor, a second driving motor, a tensioning movable plate, a rotary table arranged on the tensioning movable plate and a clamping mechanism arranged on the rotary table and used for clamping a circuit board, the first driving motor and the second driving motor are arranged on the bases relatively and are connected with clamping plate assemblies of the clamping mechanism through transmission mechanisms, the tensioning movable plate is arranged on the bases and can slide on the bases, and the rotary table is rotatably connected with the tensioning movable plate.
2. The novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine according to claim 1, characterized in that: the tensioning moving plate is connected with the base through the linear guide rail assembly.
3. The novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine according to claim 1, characterized in that: the turntable is connected with the tensioning moving plate through a bearing and rotates.
4. The novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine according to claim 1, characterized in that: the clamping mechanism further comprises a clamping cylinder, the clamping plate assembly comprises an upper clamping plate and a lower clamping plate, the clamping cylinder is connected with the lower clamping plate, the piston end of the clamping cylinder is connected with the upper clamping plate, and the upper clamping plate is connected with the lower clamping plate through a linear guide rail assembly.
5. The novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine according to claim 1, characterized in that: the transmission mechanism comprises a ball screw assembly, and the first driving motor and the second driving motor drive the clamping plate assembly to move through the corresponding ball screw assemblies.
6. The novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine according to claim 5, characterized in that: the transmission mechanism further comprises a belt transmission assembly, and the first driving motor and the second driving motor are connected with the ball screw assembly through the corresponding belt transmission assemblies.
7. The novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine according to claim 4, characterized in that: an upper rubber plate fixed on the upper clamping plate and a lower rubber plate fixed on the lower clamping plate are arranged between the upper clamping plate and the lower clamping plate.
8. The novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine according to claim 1, characterized in that: the turntable is provided with a positioning groove, and the clamping plate assembly is positioned in the positioning groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011615966.8A CN112731771B (en) | 2020-12-30 | 2020-12-30 | Novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011615966.8A CN112731771B (en) | 2020-12-30 | 2020-12-30 | Novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112731771A true CN112731771A (en) | 2021-04-30 |
| CN112731771B CN112731771B (en) | 2023-06-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011615966.8A Active CN112731771B (en) | 2020-12-30 | 2020-12-30 | Novel tensioning mechanism of roll-to-roll double-sided digital laser direct writing exposure machine |
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| Country | Link |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6370802B1 (en) * | 1999-09-16 | 2002-04-16 | Lsi Industries Inc | Back-lit fascia with spring loaded fascia tensioner |
| CN102738740A (en) * | 2012-07-06 | 2012-10-17 | 艾伦塔斯电气绝缘材料(铜陵)有限公司 | Method for stripping coat of enameled wire |
| CN108646525A (en) * | 2017-06-16 | 2018-10-12 | 深圳市前海野马自动化设备有限公司 | A kind of automatic contraposition device and its exposure sources of belt lifting mechanism |
-
2020
- 2020-12-30 CN CN202011615966.8A patent/CN112731771B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6370802B1 (en) * | 1999-09-16 | 2002-04-16 | Lsi Industries Inc | Back-lit fascia with spring loaded fascia tensioner |
| CN102738740A (en) * | 2012-07-06 | 2012-10-17 | 艾伦塔斯电气绝缘材料(铜陵)有限公司 | Method for stripping coat of enameled wire |
| CN108646525A (en) * | 2017-06-16 | 2018-10-12 | 深圳市前海野马自动化设备有限公司 | A kind of automatic contraposition device and its exposure sources of belt lifting mechanism |
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| Publication number | Publication date |
|---|---|
| CN112731771B (en) | 2023-06-02 |
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Effective date of registration: 20240123 Address after: 528400 No. 3 Mingzhu Road, Torch Development Zone, Zhongshan City, Guangdong Province Patentee after: Zhongshan Xinnuo Microelectronics Co.,Ltd. Country or region after: China Address before: 528400 No. 3 Mingzhu Road, Torch Development Zone, Zhongshan City, Guangdong Province Patentee before: ZHONGSHAN AISCENT TECHNOLOGIES Co.,Ltd. Country or region before: China |
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