CN112730891A - Miniature triaxial acceleration sensor structure - Google Patents
Miniature triaxial acceleration sensor structure Download PDFInfo
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- CN112730891A CN112730891A CN202110034880.4A CN202110034880A CN112730891A CN 112730891 A CN112730891 A CN 112730891A CN 202110034880 A CN202110034880 A CN 202110034880A CN 112730891 A CN112730891 A CN 112730891A
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- 230000001133 acceleration Effects 0.000 title claims abstract description 15
- 238000010008 shearing Methods 0.000 claims abstract description 18
- 239000000956 alloy Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 3
- 229910001285 shape-memory alloy Inorganic materials 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 6
- 230000008602 contraction Effects 0.000 abstract description 4
- 230000002411 adverse Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 230000008569 process Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention discloses a miniature triaxial acceleration sensor structure, which comprises a sensor base, three positioning rings, three shearing piezoelectric rings, three inner conical rings and three outer conical rings, wherein the three positioning rings are arranged on the sensor base; the shearing piezoelectric ring is sleeved outside the positioning ring; three central columns are arranged on the sensor base; any two of the three central columns are vertical, positioning rings are sleeved on the outer sides of the central columns, and inner cone rings are sleeved on the outer sides of the shearing piezoelectric rings; the conical surface of the inner conical ring is arranged on the outer side; the outer cone ring is sleeved outside the inner cone ring; the conical surface of the outer conical ring is arranged on the inner side, and the conical surface of the outer conical ring is matched with the conical surface of the inner conical ring. Through special structural cooperation, the shape memory alloy with unstable performance of special materials and domestic materials is not needed, the contraction at high temperature is not needed, the assembly process is simplified, and the adverse effect of the high-temperature environment on the performance of the shearing piezoelectric plate is avoided.
Description
Technical Field
The invention belongs to the technical field of acceleration sensors, and particularly relates to a miniature three-axis acceleration sensor structure.
Background
The triaxial ICP acceleration sensor is mainly produced by PCB companies abroad, the sensor basically covers performance indexes such as large range, miniature size, ultra-light weight, high resolution and the like, the sensor develops a whole set of technology to realize autonomous control, and the core technology is mastered. The sensor is mainly a shearing piezoelectric ring structure, and the shearing piezoelectric ring is fixed on a central column through the phase change shrinkage of the shape memory alloy to realize multi-axis vibration signal measurement.
In the traditional mode of tightening the piezoelectric ring by shape memory alloy contraction, the requirement on the characteristics of the shape memory alloy material is higher, and foreign researches on the aspects of the material formula, the phase change curve, the contraction characteristic and the like of the shape memory alloy are more, so that the piezoelectric ring has a complete and mature set of theoretical system support.
The current research situation of the shape memory alloy material at home is not optimistic, the preparation, shrinkage force control and measurement, phase change curve and the like of the shape memory alloy are still in the exploration stage, the corresponding preparation process is poor in stability, and domestic sensor manufacturers are bound by key materials if needing to develop corresponding miniature acceleration sensors, so that the realization of the performance of the final product is influenced.
Meanwhile, the shape memory alloy needs higher temperature when contracting, and the piezoelectric constant of the shear piezoelectric sheet is reduced due to overhigh temperature, so that the performance of the sensor is influenced.
Therefore, it is necessary to develop a micro three-axis acceleration sensor structure to solve the above problems.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides a micro three-axis acceleration sensor structure.
In order to achieve the purpose, the invention provides the following technical scheme:
a miniature triaxial acceleration sensor structure comprising:
a sensor base; three central columns are arranged on the sensor base; any two of the three central columns are vertical;
three positioning rings; the positioning ring is sleeved outside the central column;
three shear piezoelectric rings; the shearing piezoelectric ring is sleeved outside the positioning ring;
three inner conical rings; the inner cone ring is sleeved outside the shearing piezoelectric ring; the conical surface of the inner conical ring is arranged on the outer side;
three outer conical rings; the outer cone ring is sleeved outside the inner cone ring; the conical surface of the outer conical ring is arranged on the inner side, and the conical surface of the outer conical ring is matched with the conical surface of the inner conical ring.
Preferably, the longitudinal section of the inner cone ring is formed in a C-shape.
Preferably, a plurality of grooves are formed in the inner side wall of the inner conical ring, and the grooves are distributed along the axial direction of the inner conical ring.
Furthermore, three grooves are uniformly formed in the inner side wall of the inner conical ring.
Preferably, the inner conical ring and the outer conical ring are both made of high specific gravity alloy.
Specifically, the central column is welded with the end face of the positioning ring; the inner cone ring is welded with the outer cone ring.
Compared with the prior art, the invention has the beneficial effects that:
through special structural cooperation, the shape memory alloy with unstable performance of special materials and domestic materials is not needed, the contraction at high temperature is not needed, the assembly process is simplified, and the adverse effect of the high-temperature environment on the performance of the shearing piezoelectric plate is avoided.
Drawings
FIG. 1 is a cross-sectional view of the present application;
FIG. 2 is a schematic diagram of a sensor base according to the present application;
FIG. 3 is a schematic structural diagram of an inner cone ring of the present application; wherein, a is a sectional view; b is a left view;
FIG. 4 is a cross-sectional view of an outer cone ring of the present application;
FIG. 5 is a schematic view of the inner cone ring and the outer cone ring of the present application;
in the figure: 1-a sensor base; 2-outer conical ring; 3-inner conical ring; 4-shearing the piezoelectric ring; 5-a positioning ring; 6-central column.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides the following technical scheme:
as shown in fig. 1 to 5, a micro three-axis acceleration sensor structure includes:
a sensor base 1; three central columns 6 are arranged on the sensor base 1; any two of the three central columns 6 are vertical; the sensor base 1 is formed into a cuboid shape, and three central posts 6 are respectively vertically arranged on three adjacent surfaces of one corner part of the sensor base 1;
three positioning rings 5; the positioning ring 5 is sleeved outside the central column 6;
three shear piezoelectric rings 4; the shearing piezoelectric ring 4 is sleeved outside the positioning ring 5; in order to realize reliable measurement of a vibration signal under a vibration condition and improve the frequency response index of the sensor, the shearing piezoelectric ring 4 needs to be firmly hooped on the outer cylinder of the positioning ring 5;
three inner cone rings 3; the inner conical ring 3 is sleeved outside the shearing piezoelectric ring 4; the conical surface of the inner conical ring 3 is arranged on the outer side;
three outer conical rings 2; the outer conical ring 2 is sleeved outside the inner conical ring 3; the conical surface of the outer conical ring 2 is arranged at the inner side, and the conical surface of the outer conical ring 2 is matched with the conical surface of the inner conical ring 3.
In some embodiments, the sensor base 1 and the three central columns 6 are integrated, and form and position tolerances in three axial directions can be strictly controlled through precise machining, so that the transverse sensitivity of the sensor is improved; the sensor also has higher natural frequency, so that the frequency response index of the sensor is improved;
in the embodiment, the inner cone ring 3, the outer cone ring 2, the shearing piezoelectric sheet and the positioning ring 5 are four layers of annular sensitive structures, so that the precise assembly of a unidirectional sensitive structure can be conveniently realized; the screening of the unidirectional sensitive structure body can be conveniently realized, so that the consistency of performance indexes of the sensor in all directions is improved.
As shown in fig. 3, the longitudinal section of the inner cone ring 3 is formed in a C-shape. Due to the structural design, the inner conical ring 3 has a certain deformation, and the outer conical ring 2 is axially assembled, so that the inner conical ring 3 is radially contracted, and the shearing piezoelectric ring 4 of a more inner ring is clamped on the outer cylinder of the positioning ring 5.
As shown in fig. 3, three grooves are formed in the inner side wall of the inner conical ring 3, and the three grooves are all arranged along the axial direction of the inner conical ring 3.
In some embodiments, the inner conical ring 3 and the outer conical ring 2 are made of high specific gravity alloy. Therefore, under the condition of the same size, compared with the traditional inlet sensor adopting the shape memory alloy for clamping, the sensor designed by the patent has higher sensitivity. Because the shape memory alloy is not adopted, different shrinkage forces of the shearing piezoelectric plate can be realized through different axial assembly positions of the double cones in structure, so that the frequency response index of the sensor is adjusted, the shrinkage force can be easily measured and controlled, and the frequency response index of the sensor is adjusted.
As shown in fig. 1, one end of the central column 6 connected to the sensor base 1 is provided with an annular protrusion, and the side wall of the annular protrusion of the central column 6 is welded with the end face of the positioning ring 5; the inner cone ring 3 and the outer cone ring 2 are welded into a whole, and then a lead is welded to lead out a charge signal of the sensor to a rear-end processing circuit, so that vibration acceleration measurement in three directions is realized.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A miniature three-axis acceleration sensor structure, comprising:
a sensor base; three central columns are arranged on the sensor base; any two of the three central columns are vertical;
three positioning rings; the positioning ring is sleeved outside the central column;
three shear piezoelectric rings; the shearing piezoelectric ring is sleeved outside the positioning ring;
three inner conical rings; the inner cone ring is sleeved outside the shearing piezoelectric ring; the conical surface of the inner conical ring is arranged on the outer side;
three outer conical rings; the outer cone ring is sleeved outside the inner cone ring; the conical surface of the outer conical ring is arranged on the inner side, and the conical surface of the outer conical ring is matched with the conical surface of the inner conical ring.
2. The structure of claim 1, wherein the longitudinal section of the inner cone ring is formed in a C-shape.
3. The structure of claim 2, wherein the inner wall of the inner conical ring has a plurality of grooves formed therein, and the plurality of grooves are all arranged along the axial direction of the inner conical ring.
4. The structure of claim 3, wherein the inner wall of the inner cone ring has three grooves formed therein.
5. The structure of a miniature triaxial acceleration sensor according to any one of claims 1-4, wherein the inner conical ring and the outer conical ring are made of high specific gravity alloy.
6. The miniature three-axis acceleration sensor structure according to claim 1, wherein the center post is welded to an end surface of the positioning ring; the inner cone ring is welded with the outer cone ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110034880.4A CN112730891A (en) | 2021-01-12 | 2021-01-12 | Miniature triaxial acceleration sensor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110034880.4A CN112730891A (en) | 2021-01-12 | 2021-01-12 | Miniature triaxial acceleration sensor structure |
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| Publication Number | Publication Date |
|---|---|
| CN112730891A true CN112730891A (en) | 2021-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110034880.4A Pending CN112730891A (en) | 2021-01-12 | 2021-01-12 | Miniature triaxial acceleration sensor structure |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107167631A (en) * | 2017-06-07 | 2017-09-15 | 西人马（厦门）科技有限公司 | Electric charge output element and annular shearing piezoelectric acceleration sensor |
| CN107525580A (en) * | 2016-12-08 | 2017-12-29 | 苏州长风航空电子有限公司 | Built-in amplifying circuit annular shearing piezoelectric element structure |
| US20200096535A1 (en) * | 2018-09-20 | 2020-03-26 | Fatri United Testing & Control (Quanzhou) Technologies Co., Ltd. | Charge output structure and piezoelectric acceleration sensor thereof |
| CN211478369U (en) * | 2020-03-30 | 2020-09-11 | 西人马联合测控（泉州）科技有限公司 | Three-axis acceleration sensor |
| CN211927950U (en) * | 2020-04-15 | 2020-11-13 | 厦门乃尔电子有限公司 | Charge output element |
-
2021
- 2021-01-12 CN CN202110034880.4A patent/CN112730891A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107525580A (en) * | 2016-12-08 | 2017-12-29 | 苏州长风航空电子有限公司 | Built-in amplifying circuit annular shearing piezoelectric element structure |
| CN107167631A (en) * | 2017-06-07 | 2017-09-15 | 西人马（厦门）科技有限公司 | Electric charge output element and annular shearing piezoelectric acceleration sensor |
| US20200096535A1 (en) * | 2018-09-20 | 2020-03-26 | Fatri United Testing & Control (Quanzhou) Technologies Co., Ltd. | Charge output structure and piezoelectric acceleration sensor thereof |
| CN211478369U (en) * | 2020-03-30 | 2020-09-11 | 西人马联合测控（泉州）科技有限公司 | Three-axis acceleration sensor |
| CN211927950U (en) * | 2020-04-15 | 2020-11-13 | 厦门乃尔电子有限公司 | Charge output element |
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Application publication date: 20210430 |