CN112730438A - Automatic detection equipment for product appearance and laser processing production line - Google Patents

Automatic detection equipment for product appearance and laser processing production line Download PDF

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Publication number
CN112730438A
CN112730438A CN202011583641.6A CN202011583641A CN112730438A CN 112730438 A CN112730438 A CN 112730438A CN 202011583641 A CN202011583641 A CN 202011583641A CN 112730438 A CN112730438 A CN 112730438A
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China
Prior art keywords
axis moving
module
appearance
moving module
servo motor
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Withdrawn
Application number
CN202011583641.6A
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Chinese (zh)
Inventor
吕新奎
占传福
何宇飞
谢世全
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Priority to CN202011583641.6A priority Critical patent/CN112730438A/en
Publication of CN112730438A publication Critical patent/CN112730438A/en
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/93Detection standards; Calibrating baseline adjustment, drift correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides automatic detection equipment for product appearance and a laser processing production line, wherein the automatic detection equipment for product appearance comprises a workbench, an x-axis moving module, a y-axis moving module, a z-axis moving module, a detection module and a clamping module, wherein the x-axis moving module is arranged on the workbench, the y-axis moving module is arranged on the x-axis moving module, the z-axis moving module is arranged on the y-axis moving module, the detection module is arranged on the z-axis moving module, and the clamping module is arranged on the workbench and is positioned below the detection module. The invention can improve the automation degree of the appearance detection equipment, has higher detection speed compared with the traditional feeling detection mode, and greatly improves the detection efficiency and accuracy of the appearance detection equipment.

Description

Automatic detection equipment for product appearance and laser processing production line
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of appearance detection, in particular to automatic product appearance detection equipment and a laser processing production line.
[ background of the invention ]
The appearance detection is mainly used for rapidly identifying appearance defects of products, such as pits, cracks, warps, gaps, stains, sand grains, burrs, bubbles, uneven colors and the like, and the detected products can be transparent or opaque.
The traditional appearance detection usually adopts a hand touch and visual sense detection mode. With the rapid development of modern industry, the requirement of the product on the appearance is higher and higher, the precision requirement required by the product cannot be met only by the naked eye of a detector, and some appearance detection devices based on computer, optical, mechanical, electrical and other technologies are produced accordingly. Although these appearance detection equipment have certain precision, degree of automation and detection efficiency are lower.
Therefore, there is a need for an improvement in the structure of the appearance inspection apparatus described above.
[ summary of the invention ]
The technical problem to be solved by the invention is as follows: the utility model provides an automatic check out test set and laser beam machining production line of product outward appearance, solves the lower problem of degree of automation and detection efficiency of appearance check out test set among the prior art.
In order to solve the technical problems, the invention adopts the technical scheme that:
a first aspect of an embodiment of the present invention provides an apparatus for automatically detecting an appearance of a product, including: the X-axis moving module is arranged on the workbench, the Y-axis moving module is arranged on the X-axis moving module, the Z-axis moving module is arranged on the Y-axis moving module, the detecting module is arranged on the Z-axis moving module, and the clamping module is arranged on the workbench and located below the detecting module.
In some embodiments, the x-axis movement module comprises: first servo motor, first ball, first slide and locate the base of workstation, the base both sides are equipped with first slide rail respectively, first servo motor sets up on the base, and the drive connects in first ball, first ball connects in first slide, first slide sliding connection is in first slide rail.
In some embodiments, the y-axis movement module comprises: the second servo motor, the second ball screw, the second sliding plate and the bottom plate of the first sliding plate are arranged, second sliding rails are arranged on two sides of the bottom plate, the second servo motor is arranged on the bottom plate and is in driving connection with the second ball screw, the second ball screw is connected to the second sliding plate, and the second sliding plate is in sliding connection with the second sliding rails.
In some embodiments, the second slide plate is provided with a support base, and the z-axis moving module includes: third servo motor, third ball, third slide and locating the mounting panel of supporting seat, the mounting panel both sides are equipped with the third slide rail, third servo motor sets up on the mounting panel, and the drive connects in third ball, third ball connects in the third slide, the third slide sliding connects in the third slide rail.
In some embodiments, the detection module comprises: fourth servo motor, laser instrument and locating the mount pad of third slide, fourth servo motor and laser instrument all set up on the mount pad, the laser instrument is connected with the drive of fourth servo motor, the light-emitting window of laser instrument is towards the workstation.
In some embodiments, the apparatus for automatically detecting the appearance of a product further comprises: the positioning module is arranged on the mounting seat.
In some embodiments, the positioning module comprises: CCD camera, light source and locate the connecting plate of mount pad, CCD camera and light source all set up on the connecting plate, the mouth of shooing of CCD camera and the light-emitting window of light source all face the workstation.
In some embodiments, the apparatus for automatically detecting the appearance of a product further comprises: and the calibration block is arranged on the workbench and is positioned below the laser.
In some embodiments, the clamping module comprises: the clamping device comprises a first clamping unit and a second clamping unit, wherein the first clamping unit and the second clamping unit are arranged at intervals;
the first clamping unit includes: the pneumatic chuck is arranged on the base, and the pneumatic chuck is in driving connection with the fifth servo motor;
the second clamping unit includes: the air cylinder is arranged on the base plate and is in driving connection with the tip cone, and the tip cone is in sliding connection with the fourth slide rail;
wherein, the air chuck and the tip cone are coaxial.
A second aspect of an embodiment of the present invention provides a laser processing production line, including: the automatic detection device for the product appearance is in communication connection with the control terminal.
From the above description, compared with the prior art, the invention has the following beneficial effects:
the X-axis moving module, the Y-axis moving module and the Z-axis moving module are adopted to drive the detection module to move in a three-dimensional space, and meanwhile, the appearance detection is carried out on the product to be detected clamped by the clamping module, so that the automation degree of the appearance detection equipment is improved. Compared with the traditional feeling detection mode, the method has higher detection speed, and greatly improves the detection efficiency and accuracy of the appearance detection equipment.
[ description of the drawings ]
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is to be understood that the drawings in the following description are of some, but not all, embodiments of the invention. For a person skilled in the art, other figures can also be obtained from the provided figures without inventive effort.
Fig. 1 is a schematic structural diagram of an automatic detection device for product appearance according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an x-axis moving module according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a y-axis moving module according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a z-axis moving module according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a detection module according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a calibration block according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a first clamping unit according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a second clamping unit according to an embodiment of the present invention;
fig. 9 is a block diagram of a laser processing line according to an embodiment of the present invention.
[ detailed description ] embodiments
For purposes of promoting a clear understanding of the objects, aspects and advantages of the invention, reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements throughout. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an automatic detection apparatus for product appearance according to an embodiment of the present invention.
As shown in fig. 1, an embodiment of the present invention provides an automatic detection apparatus for product appearance, including a workbench 1, an x-axis moving module 2, a y-axis moving module 3, a z-axis moving module 4, a detection module 5, and a clamping module 6, where the x-axis moving module 2 is disposed on the workbench 1, the y-axis moving module 3 is disposed on the x-axis moving module 2, the z-axis moving module 4 is disposed on the y-axis moving module 3, the detection module 5 is disposed on the z-axis moving module 4, and the clamping module 6 is disposed on the workbench 1 and located below the detection module 5.
It should be noted that the movement directions of the x-axis movement module 2, the y-axis movement module 3, and the z-axis movement module 4 are perpendicular to each other, and in practice, the x-direction, the y-direction, and the z-direction correspond to the directions of the x-axis, the y-axis, and the z-axis in the three-dimensional cartesian coordinate system. Based on this, the detection module 5 provided in the z-axis movement module 4 can realize the movement of an arbitrary position in the three-dimensional space by the cooperation of the x-axis movement module 2, the y-axis movement module 3, and the z-axis movement module 4.
In practical application, the x-axis moving module 2, the y-axis moving module 3 and the z-axis moving module 4 cooperate with each other to drive the detecting module 5 to move in a three-dimensional space, so as to perform appearance detection on a product to be detected clamped by the clamping module 6. In the process, the x-axis moving module 2, the y-axis moving module 3, the z-axis moving module 4 and the detection module 5 are automatically controlled by a certain control terminal.
The automatic detection equipment for the product appearance provided by the embodiment of the invention can improve the automation degree of the appearance detection equipment, has higher detection speed compared with the traditional feeling detection mode, and greatly improves the detection efficiency and accuracy of the appearance detection equipment.
Referring to fig. 2, fig. 3 and fig. 4, fig. 2 is a schematic structural diagram of an x-axis moving module according to an embodiment of the present invention, fig. 3 is a schematic structural diagram of a y-axis moving module according to an embodiment of the present invention, and fig. 4 is a schematic structural diagram of a z-axis moving module according to an embodiment of the present invention.
As a possible embodiment, the specific structures of the x-axis moving module 2, the y-axis moving module 3, and the z-axis moving module 4 may be as follows.
As shown in fig. 2, the x-axis moving module 2 may include a first servo motor 21, a first ball screw 22, a first sliding plate 23, and a base 24 disposed on the worktable 1, wherein two sides of the base 24 are respectively provided with a first slide rail 25, the first servo motor 21 is disposed on the base 24 and is drivingly connected to the first ball screw 22, the first ball screw 22 is connected to the first sliding plate 23, and the first sliding plate 23 is slidably connected to the first slide rail 25.
In practical applications, the first servo motor 21 drives the first ball screw 22 to rotate, and the first ball screw 22 drives the first sliding plate 23 to reciprocate along the first sliding rail 25, so as to realize the movement of the x-axis moving module 2 in the x direction.
As shown in fig. 3, the y-axis moving module 3 may include a second servo motor 31, a second ball screw 32, a second sliding plate 33, and a bottom plate 34 disposed on the first sliding plate 23, wherein second sliding rails 35 are disposed on two sides of the bottom plate 34, the second servo motor 31 is disposed on the bottom plate 34 and is drivingly connected to the second ball screw 32, the second ball screw 32 is connected to the second sliding plate 33, and the second sliding plate 33 is slidably connected to the second sliding rails 35.
In practical applications, the moving manner of the y-axis moving module 3 is consistent with that of the x-axis moving module 2, and the moving manner of the y-axis moving module 3 may be referred to the related description of the x-axis moving module 2, which is not described herein again.
Further, since the moving directions of the z-axis moving module 4 and the y-axis moving module 3 are perpendicular to each other, in order to reserve a sufficient moving space for the z-axis moving module 4, a supporting seat 7 is required to be provided on the second sliding plate 33 to mount the y-axis moving module 3.
As shown in fig. 4, the z-axis moving module 4 may include a third servo motor 41, a third ball screw 42, a third sliding plate 43, and a mounting plate 44 disposed on the supporting base 7, wherein third sliding rails 45 are disposed on two sides of the mounting plate 44, the third servo motor 41 is disposed on the mounting plate 44 and is drivingly connected to the third ball screw 42, the third ball screw 42 is connected to the third sliding plate 43, and the third sliding plate 43 is slidably connected to the third sliding rails 45.
In practical applications, the moving manner of the z-axis moving module 4 is consistent with that of the x-axis moving module 2, and the moving manner of the z-axis moving module 4 may be referred to the related description of the x-axis moving module 2, which is not described herein again.
Referring to fig. 5 and fig. 6, fig. 5 is a schematic structural diagram of a detection module according to an embodiment of the present invention, and fig. 6 is a schematic structural diagram of a calibration block according to an embodiment of the present invention.
As another possible embodiment, the specific structure of the detection module 5 may be as follows.
As shown in fig. 5, the detection module 5 may include a fourth servo motor 51, a laser 52, and a mounting seat 53 disposed on the third sliding plate 43, wherein the fourth servo motor 51 and the laser 52 are both disposed on the mounting seat 53, the laser 52 is in driving connection with the fourth servo motor 51, and a light outlet of the laser 52 faces the workbench 1.
In practical application, the laser 52 emits laser to perform laser detection on the product to be detected clamped by the clamping module 6. In this process, the fourth servomotor 51 can drive the laser 52 to change the detection angle.
Further, in order to further improve the accuracy of appearance detection, the automatic detection device for product appearance provided in the embodiment of the present invention may further include a positioning module 8 disposed on the mounting seat 53, and configured to position the to-be-detected product held by the holding module 6 before the detection module 5 performs appearance detection on the to-be-detected product held by the holding module 6, so as to further improve the accuracy of appearance detection.
As an example, the positioning module 8 may include a CCD camera 81, a light source 82, and a connecting plate 83 disposed on the mounting seat 53, wherein the CCD camera 81 and the light source 82 are disposed on the connecting plate 83, and a shooting port of the CCD camera 81 and a light outlet of the light source 82 face the workbench.
In practical application, after the light emitted from the light source 82 irradiates the product to be detected held by the holding module 6, the CCD camera 81 performs photographing and positioning on the product to be detected held by the holding module 6.
Furthermore, in order to ensure the detection accuracy of the detection module 5, the automatic detection apparatus for product appearance provided by the embodiment of the present invention may further include a calibration block 9 disposed on the workbench 1 and below the laser 52. In fact, the calibration block 9 is a ground and finished workpiece with height difference. In practical application, the laser 52 performs laser detection on the calibration block 9 periodically to calibrate and verify the pixel value.
Specifically, the calibration block 9 may be constituted by a column 92 provided on the table 1 and a calibration block body 91 provided on the column 92.
As can be seen from the above description, the working axes in the x-axis moving module 2, the y-axis moving module 3, and the z-axis moving module 4 are all ball screws with high precision performance, and the ball screws are matched with the slide rails to realize the sliding function. On this basis, the automatic detection equipment for the appearance of the product provided by the embodiment of the invention is also provided with the positioning module 8, so that the CCD camera 81 in the positioning module 8 cooperates with the ball screw and the slide rail in the x-axis moving module 2, the y-axis moving module 3 and the z-axis moving module 4, the product to be detected clamped by the clamping module 6 can be accurately positioned, and the accuracy and precision of appearance detection are improved to a great extent.
Referring to fig. 7 and 8, fig. 7 is a schematic structural diagram of a first clamping unit according to an embodiment of the present invention, and fig. 8 is a schematic structural diagram of a second clamping unit according to an embodiment of the present invention.
As another possible embodiment, the specific structure of the clamping module 6 may be as follows.
As shown in fig. 7 and 8, the clamping module 6 may include a first clamping unit 61 and a second clamping unit 62 that are spaced apart from each other on the table 1.
Specifically, the first clamping unit 61 may include a fifth servo motor 611, an air chuck 612, and a base 613 disposed on the worktable 1, wherein the fifth servo motor 611 and the air chuck 612 are disposed on the base 613, and the air chuck 612 is in driving connection with the fifth servo motor 611. The second clamping unit 62 may include a cylinder 621, a top cone 622, and a substrate 623 disposed on the worktable 1, wherein the two sides of the substrate 623 are respectively provided with a fourth slide rail 624, the cylinder 621 is disposed on the substrate 623 and is drivingly connected to the top cone 622, and the top cone 622 is slidingly connected to the fourth slide rail 624.
In practical application, after the fifth servo motor 611 drives the pneumatic chuck 612 to clamp one end of the product to be detected, the cylinder 621 pushes the tip cone 622 to slide along the fourth slide rail 624 to abut against the other end of the product to be detected, so as to clamp and fix the product to be detected.
Referring further to fig. 9, fig. 9 is a block diagram of a laser processing line according to an embodiment of the present invention.
As shown in fig. 9, an embodiment of the present invention further provides a laser processing production line 100, which includes a control terminal 110 and the automatic detection device 120 for product appearance, wherein the automatic detection device 120 for product appearance is communicatively connected to the control terminal 110.
It should be noted that, in the summary of the present invention, each embodiment is described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. For the product class embodiment, since it is similar to the method class embodiment, the description is relatively simple, and for the relevant points, refer to the partial description of the method class embodiment.
It is further noted that, in the present disclosure, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined in this disclosure may be applied to other embodiments without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. An automatic inspection apparatus for product appearance, comprising: the X-axis moving module is arranged on the workbench, the Y-axis moving module is arranged on the X-axis moving module, the Z-axis moving module is arranged on the Y-axis moving module, the detecting module is arranged on the Z-axis moving module, and the clamping module is arranged on the workbench and located below the detecting module.
2. The automatic detection device of the appearance of a product of claim 1, wherein the x-axis movement module comprises: first servo motor, first ball, first slide and locate the base of workstation, the base both sides are equipped with first slide rail respectively, first servo motor sets up on the base, and the drive connects in first ball, first ball connects in first slide, first slide sliding connection is in first slide rail.
3. The apparatus for automatically detecting the appearance of a product according to claim 2, wherein the y-axis moving module comprises: the second servo motor, the second ball screw, the second sliding plate and the bottom plate of the first sliding plate are arranged, second sliding rails are arranged on two sides of the bottom plate, the second servo motor is arranged on the bottom plate and is in driving connection with the second ball screw, the second ball screw is connected to the second sliding plate, and the second sliding plate is in sliding connection with the second sliding rails.
4. The apparatus for automatically inspecting the appearance of a product according to claim 3, wherein the second slide plate is provided with a support base, and the z-axis moving module comprises: third servo motor, third ball, third slide and locating the mounting panel of supporting seat, the mounting panel both sides are equipped with the third slide rail, third servo motor sets up on the mounting panel, and the drive connects in third ball, third ball connects in the third slide, the third slide sliding connects in the third slide rail.
5. The apparatus for automatically detecting the appearance of a product according to claim 4, wherein said detection module comprises: fourth servo motor, laser instrument and locating the mount pad of third slide, fourth servo motor and laser instrument all set up on the mount pad, the laser instrument is connected with the drive of fourth servo motor, the light-emitting window of laser instrument is towards the workstation.
6. The apparatus for automatically detecting the appearance of a product according to claim 5, further comprising: the positioning module is arranged on the mounting seat.
7. The apparatus for automatically detecting the appearance of a product according to claim 6, wherein said positioning module comprises: CCD camera, light source and locate the connecting plate of mount pad, CCD camera and light source all set up on the connecting plate, the mouth of shooing of CCD camera and the light-emitting window of light source all face the workstation.
8. The apparatus for automatically detecting the appearance of a product according to claim 7, further comprising: and the calibration block is arranged on the workbench and is positioned below the laser.
9. The apparatus for automatically detecting the appearance of a product according to claim 1, wherein the clamping module comprises: the clamping device comprises a first clamping unit and a second clamping unit, wherein the first clamping unit and the second clamping unit are arranged at intervals;
the first clamping unit includes: the pneumatic chuck is arranged on the base, and the pneumatic chuck is in driving connection with the fifth servo motor;
the second clamping unit includes: the air cylinder is arranged on the base plate and is in driving connection with the tip cone, and the tip cone is in sliding connection with the fourth slide rail;
wherein, the air chuck and the tip cone are coaxial.
10. A laser machining line, comprising: a control terminal and an automatic detection device of the appearance of a product according to any one of claims 1 to 9, said automatic detection device of the appearance of a product being in communication connection with the control terminal.
CN202011583641.6A 2020-12-28 2020-12-28 Automatic detection equipment for product appearance and laser processing production line Withdrawn CN112730438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011583641.6A CN112730438A (en) 2020-12-28 2020-12-28 Automatic detection equipment for product appearance and laser processing production line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011583641.6A CN112730438A (en) 2020-12-28 2020-12-28 Automatic detection equipment for product appearance and laser processing production line

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Publication Number Publication Date
CN112730438A true CN112730438A (en) 2021-04-30

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102621152A (en) * 2012-03-28 2012-08-01 浙江工业大学 Surface defect detecting system of crystalline silicon polished wafer
CN204718970U (en) * 2015-05-28 2015-10-21 大族激光科技产业集团股份有限公司 Product appearance inspection device
CN208421202U (en) * 2018-06-21 2019-01-22 苏州佳祺仕软件技术有限公司 A kind of efficient flux measuring device
CN109746774A (en) * 2019-01-29 2019-05-14 淮南市众兴机械制造有限责任公司 A kind of continuity bearing grinding device
CN109827968A (en) * 2019-01-10 2019-05-31 常州工学院 Lithium battery film thickness and detection method of surface flaw and device based on conveyer belt
CN209280548U (en) * 2018-11-28 2019-08-20 东莞融创智科光电科技有限公司 A kind of Systems for optical inspection
CN110346298A (en) * 2019-07-30 2019-10-18 北京允升吉电子有限公司 A kind of SMT steel plate automatic checkout equipment and its detection method
CN111673589A (en) * 2020-06-30 2020-09-18 西安工业大学 Abrasive belt grinding machine based on variable frequency control

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102621152A (en) * 2012-03-28 2012-08-01 浙江工业大学 Surface defect detecting system of crystalline silicon polished wafer
CN204718970U (en) * 2015-05-28 2015-10-21 大族激光科技产业集团股份有限公司 Product appearance inspection device
CN208421202U (en) * 2018-06-21 2019-01-22 苏州佳祺仕软件技术有限公司 A kind of efficient flux measuring device
CN209280548U (en) * 2018-11-28 2019-08-20 东莞融创智科光电科技有限公司 A kind of Systems for optical inspection
CN109827968A (en) * 2019-01-10 2019-05-31 常州工学院 Lithium battery film thickness and detection method of surface flaw and device based on conveyer belt
CN109746774A (en) * 2019-01-29 2019-05-14 淮南市众兴机械制造有限责任公司 A kind of continuity bearing grinding device
CN110346298A (en) * 2019-07-30 2019-10-18 北京允升吉电子有限公司 A kind of SMT steel plate automatic checkout equipment and its detection method
CN111673589A (en) * 2020-06-30 2020-09-18 西安工业大学 Abrasive belt grinding machine based on variable frequency control

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Application publication date: 20210430