CN112728791A - Process for preparing broad light-absorbing thermal film structure containing single-layer or multi-layer nano metal thin layer - Google Patents

Process for preparing broad light-absorbing thermal film structure containing single-layer or multi-layer nano metal thin layer Download PDF

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Publication number
CN112728791A
CN112728791A CN202011469317.1A CN202011469317A CN112728791A CN 112728791 A CN112728791 A CN 112728791A CN 202011469317 A CN202011469317 A CN 202011469317A CN 112728791 A CN112728791 A CN 112728791A
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layer
metal
nano
film
film structure
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宋太伟
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24SSOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S70/00Details of absorbing elements
    • F24S70/20Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
    • F24S70/25Coatings made of metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/081Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/40Solar thermal energy, e.g. solar towers

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention relates to a widely applicable green light-absorbing thermal nano metal film structure technology, which is a light-absorbing thermal film structure technology for adding a single-layer or multi-layer nano metal particle thin layer on a metal or nonmetal substrate or film. The light-absorbing thermal film structure mainly comprises a substrate, a nano metal particle layer, a metal oxide or other high-transmittance nonmetal separating covering layers and the like. The middle of the multilayer nano metal particle layers is provided with a metal oxide or other high-transmittance nonmetal separating covering layers as isolating layers, and the material of each layer of nano metal particles is matched with the particle size and the layer thickness in a calculation way, so that the high-efficiency full-spectrum absorption effect is achieved. The invention can be widely applied to the surface of a substrate or a base layer made of metal, glass, textile, organic film, semiconductor material and the like, and can be used as a light absorption heat film, a reflection reduction film and a heat insulation film or has the function of stealth.

Description

Process for preparing broad light-absorbing thermal film structure containing single-layer or multi-layer nano metal thin layer
Technical Field
The invention belongs to the technical field of nano materials, microelectronics, light absorption thermal function materials and new energy, and mainly relates to a widely applicable green light absorption thermal nano metal film structure technical process.
Background
The development and utilization of solar energy are the most important ways for solving the energy crisis and the environmental crisis. The development of an economic and applicable green high-efficiency full-spectrum light absorption thermal film structure process technology is one of key technologies and links for widely utilizing solar energy. Meanwhile, the problems of antireflection of the smooth surface of the metal surface and other light-absorbing heat material structures, the invisibility of modern military weapons and personnel, heat-absorbing infrared and the like are all lack of a new efficient and widely applicable technical method.
After more than ten years of theoretical and experimental exploration, the inventor has completed basic theoretical logics of photothermal spectrum decomposition, absorption, transflectance and synthesis of solar full spectrum and related technical process and design innovation. As one of the innovations, the present invention is a process for forming a broad light absorbing thermal thin film structure comprising a single or multiple layers of nano-metal particles, and is based on the object of solving the above-mentioned problems. The light absorption thermal film structure process technology can be widely applied to the surface of a substrate or a base layer made of metal, glass, textile, organic films, semiconductor materials and the like, and can be used as a light absorption thermal film, a reflection reducing film and a heat insulation film or has the function of stealth.
Disclosure of Invention
The invention relates to a widely applicable green light-absorbing thermal nano metal film structure technology, which is a light-absorbing thermal film structure technology for adding a single-layer or multi-layer nano metal particle thin layer on a metal or nonmetal substrate or film. The light-absorbing thermal film structure mainly comprises a substrate, a nano metal particle layer, a metal oxide or other high-transmittance nonmetal separating covering layers and the like.
The nano metal grain layer in the structure can be any one of common harmless metals such as copper, aluminum, iron, nickel, zinc, manganese, tantalum, titanium, chromium, zirconium and the like, and the grain diameter is 1nm to 500 nm. The nano metal particle layer can be a plurality of layers, the middle part of the nano metal particle layer is provided with a metal oxide or other high-transmissivity nonmetal separating covering layer as an isolating layer, and the material, the particle size and the layer thickness of each layer of nano metal particles can be matched so as to achieve the high-efficiency full-spectrum absorption effect. Meanwhile, the nano metal particle layer is uniformly coated on the substrate or the base layer film or the isolating layer film at a proper plane coverage rate. The nano metal particle dispersing agent can be water, ethanol and other completely volatile solvents, and the dispersing solvent can also comprise a transparent non-volatile organic film forming agent, a nano metal particle layer of a transparent organic film forming agent and an organic nano metal particle layer forming stable solid solution.
The metal oxide or other high-transmissivity nonmetal separating covering layer in the structure can be made of silicon dioxide, aluminum oxide, zirconium oxide, tantalum oxide, silicon nitride, silicon and the like.
The thickness of each single-layer film of the light-absorbing thermal film structure is 0.01nm to 10 mu m. If the light-absorbing thermal film structure is formed by only 1 transparent solid-solution organic nano-metal particle layer, the thickness of the organic nano-metal particle layer can be up to 2-5 mm at most.
The light absorption thermal film structure process technology can be widely applied to the surface of a substrate or a base layer made of metal, glass, textiles, organic films, semiconductor materials and the like, and can be used as a light absorption thermal film, a reflection reducing film and a heat insulation film or has the function of stealth.
Detailed description of the invention
The invention relates to a widely applicable green light absorption heat nanometer metal film structure technical process. The structure of the device is mainly formed by overlapping a substrate, a nano metal particle layer, a metal oxide or other high-transmissivity nonmetal separating covering layers and the like, and the industrialization process is relatively easy to control and realize. The nano metal layer can be completed by spin coating and proper heat treatment, other film layers can be completed by physical vapor deposition or sputtering deposition under vacuum condition, and some films can also be completed by chemical coating process.
The following examples further illustrate the practice of the invention:
take stainless steel substrate or glass substrate or PMMA plastic film substrate or crystal silicon substrate as an example. Firstly, the substrate is physically cleaned and dried, then an alumina cushion layer with the thickness of 0.1-50 nm can be added by using a film coating method such as electron beam evaporation and the like, nano copper aqueous dispersion liquid which is corresponding to the appropriate nano copper grain plane coverage rate and determines the copper grain diameter is coated by using a spin coating method, after the vacuum thermal evaporation and drying treatment, a silicon dioxide separation covering layer with the thickness of 1-300nm is deposited by using a film coating method such as electron beam evaporation and the like, and annealing treatment is carried out. If the nano metal particle layer is of a multi-layer structure, on the premise of determining the matching particle size and the film thickness, repeatedly spin-coating the nano copper particle layer and the silicon dioxide separation covering layer and carrying out annealing treatment.
The foregoing is illustrative of the present invention and is not to be construed as limiting thereof in any way. All matters contained in the claims and the description are intended to be embraced by the scope of the present invention.

Claims (7)

1. A broad-spectrum light-absorbing thermal film structure process containing single-layer or multi-layer nano metal particle layer is characterized by that on the metal or non-metal base or film a full-spectrum light-absorbing thermal film structure technology process of single-layer or multi-layer nano metal particle thin layer and separation covering layer is added, said light-absorbing thermal film structure mainly is formed from substrate, nano metal particle layer, metal oxide or other high-transmissivity non-metal separation covering layer, and the thickness of every single-layer film of said light-absorbing thermal film structure is 0.01 nm-10 micrometers.
2. The process according to claim 1, wherein a metal or non-metal base layer film or a substrate film is provided between the substrate or the base layer and the nano metal particle layer.
3. The process of claim 1, wherein the nano-metal particles are multi-layered, and the intermediate layer is a metal oxide or other high-transmittance non-metal separating cover layer, and the material of each layer of nano-metal particles is precisely matched with the particle size and layer thickness to achieve high-efficiency full-spectrum absorption; and the nano metal particle layer is uniformly coated on the substrate or the base layer film or the isolating layer film with proper plane coverage rate.
4. The process of claim 1, wherein the nano-metal particle dispersing agent of the nano-metal particle layer is water, ethanol or other harmless solvent which is completely volatile, and the dispersing solvent also comprises transparent non-volatile harmless organic film forming agent, nano-metal particle layer of transparent organic film forming agent, and forms stable solid solution organic nano-metal particle layer.
5. A broad absorption thermal film structure process as claimed in claim 1, wherein the nano metal particles of the nano metal particle layer are any one of the metals of copper, aluminum, iron, nickel, zinc, manganese, tantalum, titanium, chromium, zirconium, etc. with a particle size of 1nm to 500 nm.
6. A broad light absorbing thermal film structure process comprising one or more nanometal particle layers as claimed in claim 1 wherein the metal oxide or other high transmittance non-metal spacer cap layer of the nanometal particle layers is selected from the group consisting of silicon dioxide, aluminum oxide, zirconium oxide, tantalum oxide, silicon nitride, silicon, etc.
7. The process of claim 1, wherein the thickness of the organic nano metal particle layer is 2-5 mm at most if only 1 transparent solid solution organic nano metal particle layer is used for the light-absorbing thermal film structure.
CN202011469317.1A 2020-12-14 2020-12-14 Process for preparing broad light-absorbing thermal film structure containing single-layer or multi-layer nano metal thin layer Pending CN112728791A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007041374A1 (en) * 2007-08-30 2009-03-05 o.m.t. Oberflächen- und Materialtechnologie GmbH Producing quantum structures and/or continuous nano-metal islands on substrate for bipolar plates, by cleaning substrate surface from impurities and/or oxide layers, structuring and then depositing active atomic- and/or molecular clusters
CN103162452A (en) * 2013-03-05 2013-06-19 日出东方太阳能股份有限公司 Inoxidizability solar spectrum selective absorbing coating and preparation method thereof
CN106091444A (en) * 2016-06-06 2016-11-09 南宁可煜能源科技有限公司 A kind of coating for selective absorption of sunlight spectrum
CN108611610A (en) * 2016-12-02 2018-10-02 北京有色金属研究总院 A kind of dual dielectric layer selective solar spectrum absorbing membrane and preparation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007041374A1 (en) * 2007-08-30 2009-03-05 o.m.t. Oberflächen- und Materialtechnologie GmbH Producing quantum structures and/or continuous nano-metal islands on substrate for bipolar plates, by cleaning substrate surface from impurities and/or oxide layers, structuring and then depositing active atomic- and/or molecular clusters
CN103162452A (en) * 2013-03-05 2013-06-19 日出东方太阳能股份有限公司 Inoxidizability solar spectrum selective absorbing coating and preparation method thereof
CN106091444A (en) * 2016-06-06 2016-11-09 南宁可煜能源科技有限公司 A kind of coating for selective absorption of sunlight spectrum
CN108611610A (en) * 2016-12-02 2018-10-02 北京有色金属研究总院 A kind of dual dielectric layer selective solar spectrum absorbing membrane and preparation method thereof

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