CN112728243A - Flange assembly for high-energy light source vacuum pipeline and sealing gasket thereof - Google Patents

Flange assembly for high-energy light source vacuum pipeline and sealing gasket thereof Download PDF

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Publication number
CN112728243A
CN112728243A CN202011605909.1A CN202011605909A CN112728243A CN 112728243 A CN112728243 A CN 112728243A CN 202011605909 A CN202011605909 A CN 202011605909A CN 112728243 A CN112728243 A CN 112728243A
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CN
China
Prior art keywords
annular gasket
flange
gasket body
light source
energy light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011605909.1A
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Chinese (zh)
Inventor
王鹏程
刘佳明
黄涛
关玉慧
刘顺明
谭彪
孙晓阳
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Institute of High Energy Physics of CAS
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Institute of High Energy Physics of CAS
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Application filed by Institute of High Energy Physics of CAS filed Critical Institute of High Energy Physics of CAS
Priority to CN202011605909.1A priority Critical patent/CN112728243A/en
Publication of CN112728243A publication Critical patent/CN112728243A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00Flanged joints
    • F16L23/02Flanged joints the flanges being connected by members tensioned axially
    • F16L23/032Flanged joints the flanges being connected by members tensioned axially characterised by the shape or composition of the flanges
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00Flanged joints
    • F16L23/16Flanged joints characterised by the sealing means
    • F16L23/18Flanged joints characterised by the sealing means the sealing means being rings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)

Abstract

The invention discloses a flange component for a high-energy light source vacuum pipeline and a sealing gasket thereof, wherein the sealing gasket comprises: an annular gasket body; the elastic bulges are arranged on the two side surfaces of the annular gasket body and are arranged around the inner ring of the annular gasket body; the distances from the top ends of the elastic bulges to the side surface of the annular gasket body are equal. The elastic bulge groups respectively positioned on the two side faces of the annular gasket body can not only ensure that a gap exists between the two flange plates, but also ensure that the closed space between the two flange plates is communicated with the closed space in the vacuum pipeline, thereby reducing the impedance of the high-energy light source vacuum pipeline, ensuring the sufficient contact effect with the end faces of the flange plates in the process of extruding and pressing the two flange plates, and not damaging the conductivity of the electric field generated by the vacuum pipeline to the magnetic field.

Description

Flange assembly for high-energy light source vacuum pipeline and sealing gasket thereof
Technical Field
The application relates to the technical field of high-energy light source vacuum pipelines, in particular to a flange assembly for a high-energy light source vacuum pipeline and a sealing gasket thereof.
Background
Modern particle accelerators and storage rings are constantly pursuing high flow and brightness. High energy, rigid beams, generally have two approximations. The rigid beam is approximate, namely the beam is rigid when passing through a vacuum pipeline with a discontinuous structure, the influence of a tail field on the beam is a perturbation quantity, the longitudinal and transverse movement of the beam cannot be influenced, and the longitudinal distance between the source beam and observed particles is unchanged in a period of action time; the second is pulse approximation, i.e. the integral of the tail field in a period of time is acted on the beam motion, and the tail field has no meaning on the instantaneous action of the beam. The tail field is the transient response of the beam current to the vacuum structure, and for the purpose of measuring the effect, the integral of the tail field along a ring or a plurality of vacuum pipelines is commonly used to describe the tail field, namely the tail field potential.
When the beam passes through the vacuum pipeline, a tail field generated by interaction with the surrounding environment reacts on the beam, disturbance is generated on the motion of the beam, energy loss and frequency shift of the beam are caused, and when the strength of the tail field is large enough, instability of the motion of the beam can be caused, and even beam loss is caused. Beam instability caused by the tail field or impedance is called beam collective instability (collecting instability). For relativistic beam current, the field generated by the beam current in free space or an ideal smooth conductor pipeline is vertical to the motion direction, and the beam current collective effect cannot be generated.
Therefore, the beam current collective effect is required to be generated by non-relativistic beam current or non-ideal conductor or discontinuous geometric structure of the vacuum pipeline. Ionization of residual gas in the pipeline by proton beams, impact of lost proton beams on the pipeline wall, stripping action of injected stripping films, secondary electron emission and the like can generate a large amount of electrons, and therefore electron cloud is formed in the vacuum pipeline. The electron cloud and the proton beam are bound to each other and oscillate, possibly causing instability, i.e., electron cloud instability. When the beam intensity in the storage ring is higher and higher, the effects can seriously affect the beam performance, and further affect the stability of the beam or the brightness of the collider.
Disclosure of Invention
The application aims to provide a flange assembly for a high-energy light source vacuum pipeline and a sealing gasket thereof, and a gap space is formed between two flange plates which are connected together so as to reduce the impedance of the vacuum pipeline of a particle accelerator.
According to a first aspect of the present application, there is provided a sealing gasket for a high-energy light source vacuum pipe flange assembly, comprising:
an annular gasket body;
the elastic bulge groups are respectively arranged on two side surfaces of the annular gasket body and comprise a plurality of elastic bulges, and the elastic bulges on the two side surfaces are all arranged around the inner ring of the annular gasket body in an enclosing manner; the distances from the top ends of the elastic bulges to the side surface of the annular gasket body are equal.
Further, the sealing gasket for the flange assembly of the high-energy light source vacuum pipeline is characterized in that the elastic protrusions on one side surface of the annular gasket body and the elastic protrusions on the other side surface of the annular gasket body are arranged at equal intervals, and the elastic protrusions on one side surface of the annular gasket body and the elastic protrusions on the other side surface of the annular gasket body are in one-to-one correspondence with each other.
Further, the gasket seal for the flange assembly of the vacuum pipe of the high-energy light source, wherein the elastic protrusion is of an L-shaped structure, and the elastic protrusion of the L-shaped structure includes: a first fin and a second fin; one end of the first fin is fixedly arranged on the periphery of the inner ring of the annular gasket body, and the other end of the first fin is connected with one end of the second fin.
Further, the sealing gasket for the high-energy light source vacuum pipeline flange assembly is characterized in that one end of the first fin is fixedly arranged at the circumferential edge of the inner ring of the annular gasket body, and the surface of the first fin facing the central line direction of the annular gasket body and the circumferential surface of the inner ring of the annular gasket body are in the same plane.
Further, the sealing gasket for the high-energy light source vacuum pipeline flange assembly is characterized in that the thicknesses of the first fin and the second fin are both 0.1 mm.
Further, the gasket seal for the flange assembly of the vacuum pipe of the high-energy light source further comprises: locate two at least positioning hole on the cyclic annular gasket body, be equipped with on the relevant position of vacuum pipe ring flange terminal surface with the constant head tank that positioning hole corresponds, the locating pin wear to establish positioning hole and with in the constant head tank that positioning hole corresponds.
Further, the sealing gasket for the high-energy light source vacuum pipeline flange assembly is provided with two positioning through holes, and the two positioning through holes are axisymmetric with respect to the center line of the annular gasket body.
Further, the sealing gasket for the high-energy light source vacuum pipeline flange assembly is characterized in that the annular gasket body comprises an outer annular gasket and an inner annular gasket, and an outer ring of the inner annular gasket is sleeved in an inner ring of the outer annular gasket; the inner ring of the annular gasket body is the inner ring of the inner annular gasket, and the elastic bulges are arranged around the inner ring of the inner annular gasket in an enclosing manner. The at least two positioning through holes are arranged on the outer annular gasket.
According to a second aspect of the present application, there is also provided a flange assembly for a high-energy light source vacuum pipeline, comprising a sealing gasket of the flange assembly for a high-energy light source vacuum pipeline, and two flanges; one flange is arranged at one end of one vacuum pipeline, the other flange is arranged at one end of the other vacuum pipeline, and one flange is connected with the other flange so as to connect one vacuum pipeline with the other vacuum pipeline; the sealing gasket is positioned between the flange plate and the other flange plate; the end surfaces of the two flange plates are respectively provided with a circle of convex edges, and the circumferential size of each convex edge is smaller than that of the sealing gasket; the distance from the top end of the elastic bulge to the side face of the annular gasket body is basically equal to the distance from the top end of the circle of convex edge to the end face of the flange plate.
Further, the flange assembly for the high-energy light source vacuum pipeline is characterized in that the circumferential size of the outer ring of the annular gasket body is smaller than or equal to the circumferential size of the outer ring of the vacuum pipeline flange, and the circumferential size and the shape of the inner ring of the annular gasket body are consistent with those of the inner ring of the vacuum pipeline flange.
The invention has the beneficial effects that:
the application provides a flange subassembly and seal gasket for high energy light source vacuum tube, the elastic bulge group that is located cyclic annular gasket body both sides face respectively not only can guarantee to have the clearance between the two ring flanges, can also guarantee the intercommunication in airtight space between the two ring flanges and the vacuum tube in the airtight space simultaneously, thereby reduce the impedance of vacuum tube, the in-process that compresses tightly can be guaranteed with the abundant contact effect of ring flange terminal surface at the extrusion of two ring flanges, can not harm the conductivity of vacuum tube to the produced electric field in magnetic field.
Drawings
FIG. 1 is an isometric view of a gasket seal for a high-energy light source vacuum line flange assembly as provided herein;
FIG. 2 is an enlarged view of a portion of FIG. 1;
FIG. 3 is a front view of a gasket seal for a high-energy light source vacuum manifold flange assembly according to the present application;
FIG. 4 is a schematic diagram of a vacuum tube for a high-energy light source according to the present application;
fig. 5 is a schematic cross-sectional view of fig. 4.
Detailed Description
The present application will be described in further detail below with reference to the accompanying drawings by way of specific embodiments.
The first embodiment,
This embodiment provides a seal gasket for high energy light source vacuum pipe flange subassembly, and high energy light source vacuum pipe is connected the formation through the flange subassembly by a plurality of vacuum pipe, and the flange subassembly comprises the ring flange of two adjacent vacuum pipe connection ends, two ring flange fixed connection to with two vacuum pipe connection, a plurality of vacuum pipe link together through the ring flange of link separately and form this high energy light source vacuum pipe.
Referring to fig. 1, the present embodiment provides a gasket for a flange assembly of a vacuum tube for a high-energy light source, the vacuum tube for a high-energy light source being made of an austenitic material (e.g., 304 or 316L stainless steel), and the gasket being made of an annealed copper material. The seal gasket specifically includes: the gasket comprises a ring-shaped gasket body 10 and elastic bulge groups respectively arranged on two side surfaces of the ring-shaped gasket body 10. The two sets of elastic protrusions 20 each include a plurality of elastic protrusions 20, the elastic protrusions 20 on the two side surfaces of the annular gasket body 10 are all arranged around the inner ring of the annular gasket body 10, and the distances from the top end of each elastic protrusion 20 to the side surfaces of the annular gasket body 10 are all equal.
In this embodiment, the elastic protrusions 20 on one side of the annular gasket body 10 are equally spaced from the elastic protrusions 20 on the other side of the annular gasket body 10, and the elastic protrusions 20 on one side of the annular gasket body 10 are in one-to-one correspondence with the elastic protrusions 20 on the other side of the annular gasket body 10. The elastic protrusions 20 on one side of the annular gasket body 10 are arranged around the inner ring of the annular gasket body 10 at equal intervals, and the elastic protrusions 20 on the other side of the annular gasket body 10 are arranged around the inner ring of the annular gasket body 10 at equal intervals.
As mentioned before, the high-energy light source vacuum pipeline flange component comprises two flange plates at the connecting ends of two adjacent vacuum pipelines, and the two flange plates are fixedly connected through the sealing gasket so as to seal the gap between the two flange plates. Referring to fig. 4 and 5, flanges 31 are provided at both ends of the vacuum pipes 30, and the gasket is clamped between the flanges 31 at the connecting ends of two adjacent vacuum pipes 30 to seal the gap between the two flanges 31. A circle of convex edges 311 is arranged on the end surface of the flange plate 31, the circumferential size of the circle of convex edges 311 is smaller than that of the sealing gasket (annular gasket body), and meanwhile, the distance from the top end of the circle of convex edges 311 to the end surface of the flange plate 31 is basically equal to the distance from the top end of each elastic bulge 20 to the side surface of the annular gasket body 10. The ring of convex edges 311 on the two flanges 31 are pressed against the two side surfaces of the annular gasket body 10, so that the gap between the two flanges 31 is sealed, and a sealed environment is provided for the high-energy light source vacuum pipeline. Meanwhile, the elastic bulge groups on the two side surfaces of the annular gasket body 10 generate certain elastic deformation under the extrusion effect and are communicated with a gap formed between the inner cavity of the vacuum pipeline 30 and the two flange plates 31, the elastic bulge groups are wrapped in the gap by a circle of convex edge 311, and the gap is sealed by a circle of convex edge 311, so that the impedance of the high-energy light source vacuum pipeline is reduced.
When the charged particles move in the sealed vacuum pipeline with reduced impedance in the form of beam clusters, the magnetic field generated by the interaction of the charged particles and the surrounding environment cannot react to accelerate the particles and further cannot disturb the motion of trailing particles to lose the particles, so that the stability of the beam is improved.
It can be understood that, in order to ensure the sealing performance, the flatness of the two sides of the annular gasket body 10 is consistent, so that when the two circles of convex edges 311 press against the sides of the annular gasket body 10, no gap is generated, and the sealing effect is improved.
In this embodiment, the circumferential size and shape of the outer ring of the annular gasket body 10 are the same as the circumferential size and shape of the outer ring of the flange 30, and the circumferential size and shape of the inner ring of the annular gasket body 10 are the same as the circumferential size and shape of the inner ring of the flange 30, that is, the same as the circumferential size and shape of the inner diameter of the vacuum pipe. The circumferential shape of the inner diameter of the vacuum pipe is shown as an oval, and the circumferential shape of the inner ring of the annular gasket body 10 is also an oval.
Referring to fig. 1 and 2, the elastic protrusion 20 has an L-shaped structure, and the elastic protrusion 20 of the L-shaped structure includes: one end of the first fin 21 is fixedly arranged around the inner ring of the annular gasket body 10, and the other end of the first fin 21 is connected with one end of the second fin 22, so that the first fin 21 and the second fin 22 form an L-shaped structure. The top of elastic bulge 20 is the one side that second fin 22 deviates from cyclic annular gasket body 10, and second fin 22's top surface promptly, when this seal gasket was compressed tightly in the extrusion of two ring flanges 31, the top surface of second fin 21 received the extrusion of two ring flanges 31, and first fin 21 produces deformation, can guarantee with the abundant contact of ring flange 31 terminal surface. Because a certain magnetic field is generated when the charged particles are transported in the vacuum pipeline, the conductivity of the vacuum pipeline to an electric field generated by the magnetic field cannot be damaged by the sufficient contact mode of the flange 31 and the second fin 22.
In one embodiment, one end of the first fin 21 is fixedly arranged at the edge of the inner ring of the annular gasket body 10 in the circumferential direction, and the surface of the first fin 21 facing the center line direction of the annular gasket body 10 and the circumferential surface of the inner ring of the annular gasket body 10 are in the same plane. It can be understood that the fins extend from the axial edge of the inner ring of the annular gasket body 10 along the central line direction of the annular gasket body 10 to the direction away from the annular gasket body 10, and then the L-shaped structure is formed by bending the fins. In the application, the thickness of the first fin 21 and the thickness of the second fin 22 are both designed to be 0.1mm, and for enhancing the strength of the fins, the fins are also made of the same material after annealing.
Referring to fig. 1, 3 and 4, in order to improve the installation convenience of the sealing gasket, at least two positioning through holes 13 are further provided on the annular gasket body 10, positioning grooves 312 corresponding to the positioning through holes are provided on corresponding positions of the end surface of the vacuum pipe flange 31, and positioning pins are inserted into the positioning through holes 13 and the positioning grooves 312 corresponding to the positioning through holes 13, so as to position the sealing gasket.
In the present embodiment, two positioning through holes 13 are provided, and the two positioning through holes 13 are axisymmetrical with respect to the center line of the annular gasket body 10.
Referring to fig. 1, 2 and 3, the annular gasket body 10 includes an outer annular gasket 11 and an inner annular gasket 12, the outer ring of the inner annular gasket 12 is sized to fit the inner ring of the outer annular gasket 11, and the outer ring of the inner annular gasket 12 is sleeved in the inner ring of the outer annular gasket 11, so as to form the annular gasket body 10. The inner ring of the annular gasket body 10 is the inner ring of the inner annular gasket 12, and the elastic protrusions 20 respectively located on the two side surfaces of the annular gasket body 10 are respectively arranged around the inner ring of the inner annular gasket 12. The aforementioned at least two positioning through holes 13 are provided on the outer annular gasket 11.
It should be noted that, the annular gasket body 10 is provided with the split type outer annular gasket 11 and the split type inner annular gasket 12, and different inner annular gaskets 12 are replaced under the condition that the inner diameter shape and the size of the vacuum pipeline are different, so that the manufacturing cost for manufacturing the sealing gasket can be reduced.
Example II,
Referring to fig. 4 and 5, the present embodiment further provides a flange assembly for a vacuum pipe of a high-energy light source, including the sealing gasket of the first embodiment, the vacuum pipe of the high-energy vacuum source includes at least two vacuum pipes 30, and the flange assembly includes: and two flanges 31 respectively provided at both ends of each vacuum pipe 30. One flange 31 is installed at one end of one vacuum pipe 30, the other flange 31 is installed at one end of the other vacuum pipe 30, and one flange 31 is connected to the other flange 31 to connect one vacuum pipe 30 to the other vacuum pipe 30. The sealing gasket in the first embodiment is arranged between one flange 31 and the other flange 31, so as to fixedly connect the two vacuum pipes 30. The end surfaces of the two flanges 31 are respectively provided with a circle of convex edge 311, the circumferential size of the circle of convex edge 311 is smaller than that of the sealing gasket, and the distance from the top end of each elastic bulge 20 to the side surface of the annular gasket body 10 is basically equal to the distance from the top end of the circle of convex edge 311 to the end surface of the flange 31. The circumferential size of the outer ring of the annular gasket body 10 is smaller than or equal to the circumferential size of the outer ring of the flange plate 31, and the circumferential size and the shape of the inner ring of the annular gasket body 10 are consistent with those of the inner ring of the flange plate 31.
In this embodiment, all functions and features of the gasket are described in detail in the first embodiment, and are not described herein again.
In conclusion, a sealing gasket for sealing a gap between two flanges is fixed between the two flange plates, the two sides of the sealing gasket are provided with elastic bulge groups, the flange plates are provided with a circle of convex edges for extruding and pressing a sealing gasket body, and the flange assembly is sealed in a mode of extruding the sealing gasket by the circle of convex edges, so that the sealing performance of the flange joint of the vacuum pipeline can be ensured. The elastic bulge groups respectively positioned on the two side surfaces of the annular gasket body can not only ensure that a gap exists between the two flange plates, but also ensure that the closed space between the two flange plates is communicated with the closed space in the vacuum pipeline, thereby reducing the impedance of the vacuum pipeline. The full contact effect with the end faces of the flanges can be ensured in the extruding process of the two flanges, and the conductivity of the vacuum pipeline to an electric field generated by a magnetic field can not be damaged.
The foregoing is a more detailed description of the present application in connection with specific embodiments thereof, and it is not intended that the present application be limited to the specific embodiments thereof. It will be apparent to those skilled in the art from this disclosure that many more simple derivations or substitutions can be made without departing from the inventive concepts herein.

Claims (10)

1. A gasket seal for a high energy light source vacuum pipe flange assembly, comprising:
an annular gasket body;
the elastic bulge groups are respectively arranged on two side surfaces of the annular gasket body and comprise a plurality of elastic bulges, and the elastic bulges on the two side surfaces are all arranged around the inner ring of the annular gasket body in an enclosing manner; the distances from the top ends of the elastic bulges to the side surface of the annular gasket body are equal.
2. A gasket seal for a flange assembly of a high energy light source vacuum manifold as recited in claim 1, wherein each of said resilient protrusions of one side of said annular gasket body is equally spaced from each of said resilient protrusions of the other side of said annular gasket body, and wherein each of said resilient protrusions of one side of said annular gasket body is in one-to-one correspondence with a position of each of said resilient protrusions of the other side of said annular gasket body.
3. The gasket seal for a high energy source vacuum manifold flange assembly of claim 1 wherein said resilient projection is of an L-shaped configuration, said L-shaped configuration comprising: a first fin and a second fin; one end of the first fin is fixedly arranged on the periphery of the inner ring of the annular gasket body, and the other end of the first fin is connected with one end of the second fin.
4. The sealing gasket for a high-energy light source vacuum pipe flange assembly as defined in claim 3, wherein one end of the first fin is fixedly arranged at the circumferential edge of the inner ring of the annular gasket body, and the surface of the first fin facing the central line direction of the annular gasket body is in the same plane with the circumferential surface of the inner ring of the annular gasket body.
5. The gasket seal for a high-energy light source vacuum tube flange assembly of claim 3, wherein said first fin and said second fin are each 0.1mm thick.
6. The gasket seal for a high energy source vacuum manifold flange assembly of claim 1 further comprising: locate two at least positioning hole on the cyclic annular gasket body, be equipped with on the relevant position of vacuum pipe ring flange terminal surface with the constant head tank that positioning hole corresponds, the locating pin wear to establish positioning hole and with in the constant head tank that positioning hole corresponds.
7. The sealing gasket for a high-energy light source vacuum duct flange assembly of claim 6, wherein there are two said locating through-holes, and wherein the two said locating through-holes are axisymmetrical about the center line of said annular gasket body.
8. The sealing gasket for a high energy light source vacuum pipe flange assembly of claim 7, wherein said annular gasket body comprises an outer annular gasket and an inner annular gasket, an outer ring of said inner annular gasket fitting within an inner ring of said outer annular gasket; the inner ring of the annular gasket body is the inner ring of the inner annular gasket, and the elastic bulges are arranged around the inner ring of the inner annular gasket in an enclosing manner. The at least two positioning through holes are arranged on the outer annular gasket.
9. A flange assembly for a high-energy light source vacuum pipeline, which comprises a sealing gasket for the flange assembly for the high-energy light source vacuum pipeline as claimed in any one of claims 1 to 8, and two flanges; one flange is arranged at one end of one vacuum pipeline, the other flange is arranged at one end of the other vacuum pipeline, and one flange is connected with the other flange so as to connect one vacuum pipeline with the other vacuum pipeline; the sealing gasket is positioned between the flange plate and the other flange plate; the end surfaces of the two flange plates are respectively provided with a circle of convex edges, and the circumferential size of each convex edge is smaller than that of the sealing gasket; the distance from the top end of the elastic bulge to the side face of the annular gasket body is basically equal to the distance from the top end of the circle of convex edge to the end face of the flange plate.
10. The flange assembly for a high energy source vacuum manifold of claim 9, wherein the circumferential dimension of the outer ring of the annular gasket body is less than or equal to the circumferential dimension of the outer ring of the vacuum manifold flange, and the circumferential dimension and shape of the inner ring of the annular gasket body are consistent with the circumferential dimension and shape of the inner ring of the vacuum manifold flange.
CN202011605909.1A 2020-12-30 2020-12-30 Flange assembly for high-energy light source vacuum pipeline and sealing gasket thereof Pending CN112728243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011605909.1A CN112728243A (en) 2020-12-30 2020-12-30 Flange assembly for high-energy light source vacuum pipeline and sealing gasket thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011605909.1A CN112728243A (en) 2020-12-30 2020-12-30 Flange assembly for high-energy light source vacuum pipeline and sealing gasket thereof

Publications (1)

Publication Number Publication Date
CN112728243A true CN112728243A (en) 2021-04-30

Family

ID=75611828

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011605909.1A Pending CN112728243A (en) 2020-12-30 2020-12-30 Flange assembly for high-energy light source vacuum pipeline and sealing gasket thereof

Country Status (1)

Country Link
CN (1) CN112728243A (en)

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