CN210899789U - High-voltage power supply lead-in device of vacuum chamber - Google Patents
High-voltage power supply lead-in device of vacuum chamber Download PDFInfo
- Publication number
- CN210899789U CN210899789U CN201921376378.6U CN201921376378U CN210899789U CN 210899789 U CN210899789 U CN 210899789U CN 201921376378 U CN201921376378 U CN 201921376378U CN 210899789 U CN210899789 U CN 210899789U
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- vacuum chamber
- flange
- voltage
- insulating flange
- power supply
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- 238000000034 method Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 description 6
- 239000010963 304 stainless steel Substances 0.000 description 3
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The utility model relates to a vacuum chamber high-voltage power supply introducing device. The vacuum chamber comprises a vacuum chamber, wherein a mounting hole is formed in the wall of the vacuum chamber, a first insulating flange is arranged in the mounting hole, and a high-voltage sleeve is arranged in the first insulating flange. Two ends of the high-voltage sleeve respectively extend out of the vacuum chamber and the vacuum chamber, and a second insulating flange and a positioning flange are respectively arranged in the two ends of the high-voltage sleeve. Two through holes are formed in the second insulating flange and the positioning flange, and two electrodes are arranged in the high-voltage sleeve. The inner ends of the two electrodes respectively penetrate through the two through holes on the second insulating flange and then extend out of the inner side of the second insulating flange, and the outer ends of the two electrodes respectively penetrate through the two through holes on the positioning flange and then extend out of the outer side of the positioning flange. By adopting the device, the influence on the electron accelerator can be avoided, and the normal work of the electron accelerator can be ensured. The high-voltage power supply is suitable for introducing a high-voltage power supply into a vacuum chamber.
Description
Technical Field
The utility model relates to a high voltage power supply. In particular to a power supply leading-in mechanism for leading high-voltage power supply into a vacuum chamber. The high-voltage power supply is suitable for introducing the high-voltage power supply of the vacuum chamber where the filament of the electron accelerator is located.
Background
It is known in the electron accelerator production industry that the filament of the electron accelerator is mounted in a vacuum chamber, and the power supply required for its operation is a high voltage power supply and must be introduced from the outside. The high-voltage power supply introducing mechanism is an important component of an electronic vacuum system of the electron accelerator, and whether the high-voltage power supply introducing mechanism can bear high vacuum, high air pressure and high voltage is an important condition for normal and stable operation of the electron accelerator.
The traditional vacuum chamber high-voltage power supply introducing device is characterized in that a mounting hole is processed in the wall of a vacuum chamber, a first insulating flange is mounted in the mounting hole, and a high-voltage sleeve is arranged in the first insulating flange. The inner end and the outer end of the high-voltage bushing respectively extend into the vacuum chamber and the outside of the vacuum chamber, and a second insulating flange and a positioning flange are respectively arranged in the two ends of the high-voltage bushing. Two through holes are processed on the second insulating flange and the positioning flange, and two electrodes are arranged in the high-voltage bushing. The inner ends of the two electrodes 4 respectively penetrate through the two through holes on the second insulating flange and then extend out of the inner side of the second insulating flange, and the outer ends of the two electrodes respectively penetrate through the two through holes on the positioning flange and then extend out of the outer side of the positioning flange. Two surfaces of the first insulating flange are both planes. Because two sides of the first insulating flange are planes, the creepage distance of the electric arc along the surface of the first insulating flange is shorter, and the high-voltage breakdown resistance of the first insulating flange is reduced. And because there is no shielding measure between the high-voltage bushing and the first insulating flange, it is difficult to shield and uniform the distorted electric field and high-voltage discharge between the high-voltage bushing and the first insulating flange. In addition, the inner ends of the two electrodes 4 respectively penetrate through the two through holes on the second insulating flange and then extend out of the inner side of the second insulating flange, so that the inner ends of the two electrodes 4 are not shielded, and the discharge phenomenon caused by electric field distortion caused by uniform irregular shapes and metal component tips cannot be shielded. In summary, all of the above problems affect the normal operation of the electron accelerator.
SUMMERY OF THE UTILITY MODEL
The to-be-solved problem of the utility model is to provide a real empty room high voltage power supply introducing device. By adopting the device, the influence on the electron accelerator can be avoided, and the normal work of the electron accelerator can be ensured.
The utility model discloses the above-mentioned problem that solves is realized by following technical scheme:
the utility model discloses a real empty room high voltage power supply introducing device, including real empty room, there is the mounting hole on real empty room's the wall, has first insulating flange in the mounting hole, has high-tension bushing in the first insulating flange. Two ends of the high-voltage sleeve respectively extend out of the vacuum chamber and the vacuum chamber, and a second insulating flange and a positioning flange are respectively arranged in the two ends of the high-voltage sleeve. Two through holes are formed in the second insulating flange and the positioning flange, and two electrodes are arranged in the high-voltage sleeve. The inner ends of the two electrodes respectively penetrate through the two through holes on the second insulating flange and then extend out of the inner side of the second insulating flange, and the outer ends of the two electrodes respectively penetrate through the two through holes on the positioning flange and then extend out of the outer side of the positioning flange, and the positioning flange is characterized in that: the two surfaces of the first insulating flange are both wavy, and the high-voltage sleeves on the two sides of the first insulating flange are sleeved with shielding rings.
The utility model discloses a further improvement scheme is that high-tension bushing is located that one of vacuum chamber and serves and has the shield cover.
The utility model discloses a further improvement scheme is, the shield cover is the nozzle stub, and the pipe wall of nozzle stub is spherical, and its one end bore links together with high-tension bushing's external diameter looks adaptation and the two between.
According to the scheme, the two surfaces of the first insulating flange are both wavy, so that the areas of the two surfaces of the first flange are increased, the creepage distance of electric arcs along the surfaces of the first flange is prolonged, and the high-voltage breakdown resistance of the first insulating flange is enhanced.
And because the high-voltage bushing on both sides of the first insulating flange is sleeved with the shielding ring, the distorted electric field between the high-voltage bushing and the first insulating flange is effectively shielded and homogenized, thereby avoiding the occurrence of high-voltage discharge.
In addition, the end of the high-voltage bushing in the vacuum chamber is provided with the shielding cover, so that the discharge phenomenon caused by the distortion of an electric field caused by irregular shapes and metal component tips is effectively shielded and homogenized.
In a word, adopt the utility model discloses, can ensure electron accelerator's normal operating.
Drawings
Fig. 1 is a schematic diagram of a high-voltage power supply introducing device of a vacuum chamber of the present invention.
Detailed Description
As shown in figure 1, the utility model discloses a real empty room high voltage power supply introducing device includes real empty room, and it has the mounting hole to process on real empty room's the wall 8, installs first insulating flange 1 in the mounting hole. The first insulating flange is a flange plate made of No. 95 ceramic, and the two central surfaces of the first insulating flange are both flat and provided with rubber sealing rings for isolating vacuum and gas. A high-voltage bushing 3 is installed in the first insulating flange 1. The high-voltage bushing 3 is a 304 stainless steel product, two ends of the high-voltage bushing extend into the vacuum chamber and the vacuum chamber respectively, the shielding rings 2 are sleeved on the high-voltage bushing 3 on two sides of the first insulating flange 1, the shielding rings 2 are metal rings which are arc-shaped and are supported by 304 stainless steel, arc-shaped surfaces of the two shielding rings face to the plane of the center of the first insulating flange 1 and are welded with the high-voltage bushing 3, and the high-voltage bushing 3 is used for shielding high-voltage discharge caused by an electric field distorted at the welding part of the high-voltage bushing 3 and the first insulating flange 1.
And a second insulating flange 5 and a positioning flange 7 are respectively arranged in the two ends of the high-voltage bushing 3. Second insulating flange 5 and flange 7 are No. 95 ceramic, all process two through-holes on second insulating flange 5 and the flange 7, are provided with two electrodes 4 in the high-voltage bushing 3. The inner ends of the two electrodes 4 respectively penetrate through the two through holes on the second insulating flange 5 and then extend out of the inner side of the second insulating flange 5, and the outer ends of the two electrodes 4 respectively penetrate through the two through holes on the positioning flange 7 and then extend out of the outer side of the positioning flange 7. Wherein: both sides of the first insulating flange 1 are wavy.
The end of the high voltage bushing 3 located inside the vacuum chamber is provided with a shield 6. The shield 6 is a short pipe made of 304 stainless steel, the pipe wall of the short pipe is spherical, the caliber of one end of the short pipe is matched with the outer diameter of the high-voltage sleeve 3, and the short pipe and the high-voltage sleeve are connected together. Can be used for shielding the uneven electric field of the end of the high-voltage bushing 3 and the electrode 4.
Claims (3)
1. The vacuum chamber high-voltage power supply leading-in device comprises a vacuum chamber, wherein a wall (8) of the vacuum chamber is provided with a mounting hole, a first insulating flange (1) is arranged in the mounting hole, and a high-voltage sleeve (3) is arranged in the first insulating flange (1); two ends of the high-voltage bushing (3) respectively extend out of the vacuum chamber and the vacuum chamber, and a second insulating flange (5) and a positioning flange (7) are respectively arranged in two ends of the high-voltage bushing (3); two through holes are formed in the second insulating flange (5) and the positioning flange (7), and two electrodes (4) are arranged in the high-voltage sleeve (3); the inner ends of the two electrodes (4) respectively penetrate through the two through holes on the second insulating flange (5) and then extend out of the inner side of the second insulating flange (5), and the outer ends of the two electrodes (4) respectively penetrate through the two through holes on the positioning flange (7) and then extend out of the outer side of the positioning flange (7); the method is characterized in that: the two surfaces of the first insulating flange (1) are both wave-shaped, and the high-voltage sleeves (3) on the two sides of the first insulating flange (1) are sleeved with the shielding rings (2).
2. The vacuum chamber high voltage power supply introducing apparatus according to claim 1, wherein: the end of the high-voltage bushing (3) located in the vacuum chamber is provided with a shielding cover (6).
3. The vacuum chamber high voltage power supply introducing apparatus according to claim 2, wherein: the shielding cover (6) is a short pipe, the pipe wall of the short pipe is spherical, the caliber of one end of the short pipe is matched with the outer diameter of the high-voltage sleeve (3), and the short pipe and the high-voltage sleeve are connected together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921376378.6U CN210899789U (en) | 2019-08-23 | 2019-08-23 | High-voltage power supply lead-in device of vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921376378.6U CN210899789U (en) | 2019-08-23 | 2019-08-23 | High-voltage power supply lead-in device of vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210899789U true CN210899789U (en) | 2020-06-30 |
Family
ID=71321842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921376378.6U Withdrawn - After Issue CN210899789U (en) | 2019-08-23 | 2019-08-23 | High-voltage power supply lead-in device of vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210899789U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110519907A (en) * | 2019-08-23 | 2019-11-29 | 无锡爱邦辐射技术有限公司 | Vacuum chamber high voltage power supply introducing device |
-
2019
- 2019-08-23 CN CN201921376378.6U patent/CN210899789U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110519907A (en) * | 2019-08-23 | 2019-11-29 | 无锡爱邦辐射技术有限公司 | Vacuum chamber high voltage power supply introducing device |
| CN110519907B (en) * | 2019-08-23 | 2024-05-10 | 无锡爱邦辐射技术有限公司 | Vacuum chamber high-voltage power supply introduction device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20200630 Effective date of abandoning: 20240510 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20200630 Effective date of abandoning: 20240510 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |