CN112725761A - Boiling type vapor deposition furnace - Google Patents
Boiling type vapor deposition furnace Download PDFInfo
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- CN112725761A CN112725761A CN202011565834.9A CN202011565834A CN112725761A CN 112725761 A CN112725761 A CN 112725761A CN 202011565834 A CN202011565834 A CN 202011565834A CN 112725761 A CN112725761 A CN 112725761A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4417—Methods specially adapted for coating powder
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/442—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using fluidised bed process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
Abstract
The invention discloses a boiling type vapor deposition furnace, which comprises a furnace body with a closed hearth and a heating device for heating the closed hearth, wherein the furnace body is connected with a feeding device for feeding materials into the closed hearth, a discharging device for discharging the materials in the closed hearth and an exhaust device for discharging gas in the closed hearth, and the bottom of the closed hearth is provided with a gas nozzle for injecting gas into the hearth to blow up the materials. The boiling type vapor deposition furnace has the advantages of simple structure, low cost, easy control, convenient maintenance, high cladding efficiency, good cladding effect and the like.
Description
Technical Field
The invention relates to the technical field of heat treatment kilns, in particular to a boiling type vapor deposition furnace.
Background
The silicon-based negative electrode material is considered to be the most potential negative electrode material of the next generation of lithium ion batteries due to the advantages of high capacity, low lithium removal potential, low cost and the like. However, the large-scale application of the silicon-based negative electrode material has some problems, one of which is how to solve the problems of particle pulverization, falling and electrochemical performance failure caused by volume expansion and contraction when the silicon-based negative electrode material is used for releasing and inserting lithium in the charging and discharging processes of the lithium ion battery.
In order to improve the cycle performance of the silicon-based negative electrode material and improve the structural stability of the material in the cycle process, the production of the silicon-carbon negative electrode material by a vapor deposition method is generally regarded as the most possible method for realizing industrialization at present. In a high-temperature environment, nitrogen is used as protective gas, methane or other hydrocarbon gas is decomposed into carbon atoms, and a carbon coating layer is deposited on the surface of the micron-sized silicon oxide particles.
At present, all equipment used for producing and manufacturing materials by adopting a vapor deposition method is a rotary vapor deposition furnace, the rotary vapor deposition furnace is substantially in a rotary kiln form, and the problems of long coating time, nonuniform coating and low efficiency exist. The above problem is particularly prominent when the substrate such as micron-sized silica is ultrafine powder in which aggregation between particles is likely to occur.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects in the prior art and provides the boiling type vapor deposition furnace which is simple in structure, low in cost, easy to control, convenient to maintain, high in coating efficiency and good in coating effect.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a boiling formula vapor deposition stove, including the furnace body that has closed furnace and be used for right closed furnace carries out the heating device who heats, the furnace body is connected with and is used for sending into the material feed arrangement of closed furnace, is used for sealing furnace material exhaust discharging device and being arranged in with closed furnace gas exhaust's exhaust apparatus, closed furnace's bottom is equipped with and is used for upwards blowing the air cock that rises the material to the furnace internal jet gas.
As a further improvement of the above technical solution:
the automatic feeding device is characterized in that a material guide pipe is installed in the closed hearth, an annular blanking space is formed between the material guide pipe and the inner wall of the closed hearth, the material guide pipe is provided with a material guide channel which is communicated up and down to enable materials blown by the air nozzle to pass through, the lower port of the material guide channel is located right above the air nozzle, and a space is reserved between the upper port of the material guide channel and the top surface of the hearth.
The material guide channel is cylindrical.
The surface of the air tap is provided with a central area and an annular area surrounding the central area, the central area is provided with more than one first ejection port, the annular area is provided with a plurality of second ejection ports, and the air flow speed ejected by the first ejection ports is higher than that ejected by the second ejection ports.
The air tap is provided with an air cavity with an air inlet, all the first ejection ports and all the second ejection ports are communicated with the air cavity, and the opening area of the first ejection ports is smaller than that of the second ejection ports.
And the communicating port of the exhaust device and the closed hearth is positioned above the upper port of the material guide channel.
The air tap is located in the middle of the bottom surface of the closed hearth, and the bottom surface of the closed hearth extends upwards in an inclined mode along the direction far away from the air tap.
Feed arrangement is pneumatic feedway, pneumatic feedway sends the storehouse including the malleation, the malleation is sent the storehouse and is connected with and is used for the air supply pipeline that links to each other with the pressure air supply, the malleation is sent the storehouse and is passed through feed line and closed furnace intercommunication, the last feeding control valve that is used for controlling the feed line break-make that is equipped with of feed line, the malleation is sent the storehouse and still is equipped with the openable charge door that is used for the feeding.
The discharging device comprises a receiving bin and a negative pressure pumping fan connected with the receiving bin, the receiving bin is communicated with the closed hearth through a discharging pipeline, and a discharging control valve used for controlling the on-off of the discharging pipeline is arranged on the discharging pipeline.
The gas nozzle is connected with a gas supply device, the gas supply device comprises a first gas inlet pipeline for introducing reaction gas and a second gas inlet pipeline for introducing replacement gas, a first gas inlet control valve for controlling the on-off of the first gas inlet pipeline is arranged on the first gas inlet pipeline, and a second gas inlet control valve for controlling the on-off of the second gas inlet pipeline is arranged on the second gas inlet pipeline.
Compared with the prior art, the invention has the advantages that:
the boiling type vapor deposition furnace adopts a static closed hearth, and is provided with a feeding device for feeding materials into the closed hearth, a discharging device for discharging the materials in the closed hearth and an exhaust device for discharging gas in the closed hearth, meanwhile, the bottom of the closed hearth is provided with an air nozzle which is matched with an exhaust device to exhaust, the air nozzle sprays gas into the hearth to blow up the materials, on one hand, the materials are scattered after being blown upwards by the sprayed gas, and part of the materials are suspended in the closed hearth, part of the materials fall to the bottom of the closed hearth and are blown upwards again by the gas ejected by the gas nozzle, and the materials are blown up in the closed hearth repeatedly for many times to form a boiling effect, so that the materials can be uniformly and fully contacted with the reaction gas to form a uniform coating layer, and the coating efficiency and the coating effect are greatly improved; on the other hand, the ejected gas has an impact effect on the materials, so that the materials can be blown away, the materials are prevented from being agglomerated, and the coating efficiency and the coating effect can be further improved. The boiling type vapor deposition furnace does not need to be provided with a precise structure such as a rotation driving device and the like, and has the advantages of simple structure, low cost, easy control and convenient maintenance.
Drawings
FIG. 1 is a schematic view of a boiling type vapor deposition furnace.
Fig. 2 is a schematic structural view of the arrangement of the first ejection outlet and the second ejection outlet on the surface of the air nozzle.
Illustration of the drawings:
1. a furnace body; 11. a hearth; 2. a heating device; 3. a feeding device; 31. a positive pressure sending bin; 32. a gas source pipeline; 33. a feed line; 34. a feed control valve; 35. the feed inlet can be opened and closed; 4. a discharging device; 41. receiving a stock bin; 42. a negative pressure air extractor; 43. a discharge pipeline; 44. a discharge control valve; 5. an exhaust device; 6. an air tap; 601. a first air intake line; 602. a second air intake line; 603. a first intake control valve; 604. a second intake control valve; 605. a first gas supply line; 606. a second gas supply line; 607. a first mass flow meter; 608. a second mass flow meter; 609. a mixing tank; 61. a first discharge port; 62. a second discharge port; 7. a material guide pipe.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
As shown in fig. 1, the boiling type vapor deposition furnace of the present embodiment includes a furnace body 1 having a closed furnace 11 and a heating device 2 for heating the closed furnace 11, the furnace body 1 is connected with a feeding device 3 for feeding materials into the closed furnace 11, a discharging device 4 for discharging the materials from the closed furnace 11 and an exhaust device 5 for exhausting gas in the closed furnace 11, and the bottom of the closed furnace 11 is provided with a gas nozzle 6 for injecting gas into the furnace 11 to blow up the materials. The boiling type vapor deposition furnace adopts a closed hearth 11 which is statically arranged, a feeding device 3 for feeding materials into the closed hearth 11, a discharging device 4 for discharging the materials of the closed hearth 11 and an exhaust device 5 for discharging gas in the closed hearth 11 are arranged, meanwhile, an air nozzle 6 is arranged at the bottom of the closed hearth 11 and is matched with the exhaust device 5 to exhaust, the air nozzle 6 sprays gas into the hearth 11 to blow the materials upwards, on one hand, the materials can be scattered upwards after being blown by the sprayed gas, part of the materials can be suspended in the closed hearth 11, part of the materials can fall to the bottom of the closed hearth 11 and be blown upwards again by the gas sprayed by the air nozzle 6, the materials are blown repeatedly and repeatedly in the closed hearth 11 to form a boiling effect, so that the materials can be uniformly and fully contacted with reaction gas to form a uniform coating layer, thereby greatly improving the coating efficiency and the coating effect, and having high reaction efficiency and good reaction effect; on the other hand, the ejected gas has an impact effect on the materials, so that the materials can be blown away, the materials are prevented from being agglomerated, and the coating efficiency and the coating effect can be further improved. The boiling type vapor deposition furnace does not need to be provided with a precise structure such as a rotation driving device and the like, and has the advantages of simple structure, low cost, easy control and convenient maintenance.
In this embodiment, the material guiding pipe 7 is installed in the closed furnace 11, an annular blanking space is formed between the material guiding pipe 7 and the inner wall of the closed furnace 11, the material guiding pipe 7 has a material guiding channel which is vertically through to allow the material blown by the air nozzle 6 to pass through, a lower port of the material guiding channel is located right above the air nozzle 6, and a space is left between an upper port of the material guiding channel and the top surface of the furnace 11. The gas that air cock 6 jetted can wrap up in the guide passageway that holds the material entering passage 7 under hand, and the material rises along the guide passageway and from the last port of passage 7 to diffusion all around, slowly falls from the annular blanking space between passage 7 and the closed furnace 11 again, has prolonged the material in closed furnace 11 motion path, also makes the material distribute more evenly in whole closed furnace 11, is difficult for agglomerating more, can further improve cladding efficiency and cladding effect.
In this embodiment, the material guiding channel is cylindrical, and the cylindrical material guiding channel enables the material to be spread around from the upper end opening (i.e. the upper opening of the material guiding channel) of the material guiding pipe 7 which is more uniform.
In this embodiment, the surface of the air nozzle 6 is provided with a central area provided with one or more first discharge ports 61 and an annular area surrounding the central area provided with a plurality of second discharge ports 62, and the air flow velocity discharged from the first discharge ports 61 is larger than the air flow velocity discharged from the second discharge ports 62. Because the air flow speed sprayed out of the first spray opening 61 is higher than that sprayed out of the second spray opening 62, the air flow sprayed out of the second spray opening 62 is gathered towards the air flow sprayed out of the first spray opening 61, and then the wrapped and blown materials are gathered towards the middle part, so that more materials pass through the material guide channel of the material guide pipe 7, and the wrapping efficiency and the wrapping effect are further improved. Preferably, the central region and the annular region are both centered on the center line of the material guiding pipe 7, so that the material can more easily enter the material guiding channel of the material guiding pipe 7.
In the present embodiment, the air nozzle 6 has an air chamber with an air inlet, all the first ejection ports 61 and all the second ejection ports 62 communicate with the air chamber, and the opening area of the first ejection ports 61 is smaller than that of the second ejection ports 62, see fig. 2. Under the condition of being connected with the same air source, the opening area of the first ejection port 61 is smaller than that of the second ejection port 62, so that the air flow speed ejected by the first ejection port 61 is larger than that ejected by the second ejection port 62, the air nozzle 6 is simple in structure, low in cost and easy to manufacture, the air nozzle 6 is supplied with air by only one air source, and the air supply device is simplified.
In this embodiment, the communicating port of the exhaust device 5 and the closed hearth 11 is located above the upper port of the material guiding channel, and when the exhaust device 5 exhausts, gas in the closed hearth 11 flows to the communicating port of the exhaust device 5 and the closed hearth 11 along an upward direction, so that the upward movement of the material is facilitated, the falling speed of the material can be delayed, more materials are suspended, and the coating efficiency and the coating effect can be further improved. Meanwhile, after the materials are scattered and flow out from the upper port of the material guide channel, the materials can be more dispersed and more uniform under the action of the upward flowing air flow, and the coating efficiency and the coating effect are also favorably improved.
In this embodiment, the air tap 6 is located in the middle of the bottom surface of the closed hearth 11, and the bottom surface of the closed hearth 11 extends upward in an inclined manner along a direction away from the air tap 6, that is, the bottom surface of the closed hearth 11 extends to the air tap 6 from the periphery in an inclined downward direction. After falling down, the materials can slide downwards along the bottom surface of the closed hearth 11 and gather above the air nozzle 6, so that the materials can be blown up again conveniently. Preferably, the bottom surface of the closed hearth 11 is in an inverted cone shape.
In this embodiment, feed arrangement 3 is pneumatic feedway, and pneumatic feedway sends storehouse 31 including the malleation, and the malleation sends storehouse 31 to be connected with and is used for the air supply pipeline 32 that links to each other with the pressure air supply, and the malleation sends storehouse 31 and passes through feed line 33 and seal furnace 11 intercommunication, is equipped with the feeding control valve 34 that is used for controlling feed line 33 break-make on feed line 33, and malleation sends storehouse 31 still to be equipped with the openable feed inlet 35 that is used for the feeding. The openable/closable charge port 35 may be a cover plate that is bolted to the positive pressure sending chamber 31 and seals the inlet of the positive pressure sending chamber 31, or may be an openable/closable valve or the like. After adding the material into positive pressure from openable charge door 35 and sending storehouse 31, open feeding control valve 34 and make feed line 33 intercommunication, pressure gas passes through gas source pipeline 32 with pressure gas and lets in positive pressure and send storehouse 31, and the material in positive pressure sends the storehouse 31 can get into closed furnace 11 through feed line 33 under gaseous transport effect to the realization is sent the material into closed furnace 11. After a predetermined amount of material is fed into the closed furnace 11, the feed control valve 34 is closed to disconnect the feed line 33, thereby preventing the influence on the subsequent treatment. The feeding device 3 has the advantages of simple structure, low cost and simple and convenient control.
In this embodiment, the discharging device 4 includes a receiving bin 41 and a negative pressure pumping fan 42 connected to the receiving bin 41, the receiving bin 41 is communicated with the closed hearth 11 through a discharging pipeline 43, and a discharging control valve 44 for controlling the on-off of the discharging pipeline 43 is arranged on the discharging pipeline 43. When needing the ejection of compact, open ejection of compact control valve 44 and make ejection of compact pipeline 43 communicate, open suction fan 42, can make the material in the closed furnace 11 get into through ejection of compact pipeline 43 and receive feed bin 41, realize the ejection of compact of material, close ejection of compact control valve 44 after the ejection of compact is accomplished and make ejection of compact pipeline 43 break off, can avoid influencing subsequent processing. The discharging device 4 has the advantages of simple structure, low cost and simple and convenient control.
In this embodiment, the air faucet 6 is connected to a gas supply device, the gas supply device includes a first gas inlet pipeline 601 for introducing reaction gas and a second gas inlet pipeline 602 for introducing replacement gas, the gas supply device includes a first gas inlet control valve 603 arranged on the first gas inlet pipeline 601 for controlling the on/off of the first gas inlet pipeline 601, and a second gas inlet control valve 604 arranged on the second gas inlet pipeline 602 for controlling the on/off of the second gas inlet pipeline 602. The first air inlet pipe 601 can be used for introducing inert gas (for example, nitrogen gas) for replacement into the closed furnace 11, the second air inlet pipe 602 can be used for supplying reaction gas of the blowing material to the air tap 6, and the first air inlet pipe 601 and the second air inlet pipe 602 can be controlled to work independently and not interfere with each other by opening and closing the first air inlet control valve 603 and the second air inlet control valve 604. The gas supply device can supply two different gases, meets the requirements of supplying different gases at different stages, and has the advantages of simple structure, low cost and easy control.
In this embodiment, the second air intake pipeline 602 is further connected to an air mixing device, the air mixing device includes a mixing tank 609 connected to the second air intake pipeline 602, the mixing tank 609 is connected to the first air intake pipeline 605 and the second air intake pipeline 606, the first air intake pipeline 605 is provided with a first mass flow meter 607, the second air intake pipeline 606 is provided with a second mass flow meter 608, and the two gases (for example, hydrocarbon gas and nitrogen gas) can be mixed and then introduced into the mixing tank 609, and then introduced into the air faucet 6 through the second air intake pipeline 602. The gas mixing device is arranged to supply gas to the gas nozzle 6 conveniently.
In this embodiment, the exhaust device 5 is connected with the closed hearth 11 and is connected with the cooler and the dust remover connected with the cooler, and the gas discharged from the closed hearth 11 is cooled by the cooler and then enters the dust remover for dust removal and then is discharged. The dust remover preferably adopts a sintered plate dust remover with a pulse back-blowing system. In other embodiments, the exhaust apparatus 5 also refers to an exhaust system for exhausting gas in an existing heat treatment kiln.
In this embodiment, both the furnace body 1 and the heating device 2 can be configured with reference to the existing heat treatment kiln. Preferably, the furnace body 1 comprises a housing and a heat insulation layer arranged in the housing, the heat insulation layer is enclosed to form a closed hearth 11, the housing is made of stainless steel materials, the heat insulation layer is made of polycrystalline fiber materials, the heat insulation performance is good, the reflectivity is high, and the heating device 2 is made of alloy resistance wires and arranged on the heat insulation layer.
When the boiling type vapor deposition furnace of the embodiment is used for carbon coating treatment of a silicon-carbon cathode material of a lithium ion battery, the specific steps and the working principle are as follows:
firstly, closing the feeding control valve 34, the discharging control valve 44 and the second feeding control valve 604, opening the first feeding control valve 603, and introducing nitrogen into the closed hearth 11 through the first feeding pipeline 601 to replace air in the closed hearth 11, so that the concentration of the nitrogen in the closed hearth 11 reaches 99.99%.
Secondly, the first air inlet control valve 603 is closed, the second air inlet control valve 604 is opened, and mixed gas of hydrocarbon gas and nitrogen gas with preset proportion is introduced into the closed hearth 11 through the second air inlet pipeline 602.
And thirdly, opening the feeding control valve 34, feeding the lithium ion battery silicon-carbon cathode material into the closed hearth 11 by the feeding device 3, and closing the feeding control valve 34 after the material is added.
And fourthly, starting the heating device 2, then opening the second air inlet control valve 604, introducing mixed gas of hydrocarbon gas and nitrogen gas with preset proportion into the closed hearth 11 through the second air inlet pipeline 602, and injecting the mixed gas into the closed hearth 11 through the air nozzle 6, so that the silicon-carbon cathode material of the lithium ion battery and the mixed gas react in the closed hearth 11.
And fifthly, after the reaction is finished, adjusting the introduction flow of the mixed gas, opening the discharge control valve 44, starting the negative pressure pumping fan 42, pumping the reacted material to the receiving bin 41, and finishing the discharge.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-described embodiments. Modifications and variations that may occur to those skilled in the art without departing from the spirit and scope of the invention are to be considered as within the scope of the invention.
Claims (10)
1. A boiling type vapor deposition furnace is characterized in that: including furnace body (1) that has closed furnace (11) and be used for right closed furnace (11) carry out heating device (2) that heat, furnace body (1) is connected with feed arrangement (3) that are used for sending into closed furnace (11) with the material, is used for sealing furnace (11) material exhaust discharging device (4) and be arranged in with closed furnace (11) gas outgoing exhaust apparatus (5), the bottom of closed furnace (11) is equipped with and is used for upwards blowing up air cock (6) of blowing up with the material to furnace (11) interior gas injection.
2. The ebullated vapor deposition furnace as recited in claim 1, wherein: install passage (7) in the closed furnace (11), be formed with annular blanking space between the inner wall of passage (7) and closed furnace (11), passage (7) have and link up so that the guide passageway that the material that is blown by air cock (6) passes through from top to bottom, the lower port of guide passageway is located directly over air cock (6), leave the interval between the upper end mouth of guide passageway and the top surface of furnace (11).
3. The ebullated vapor deposition furnace as recited in claim 2, wherein: the material guide channel is cylindrical.
4. The ebullated vapor deposition furnace as recited in claim 2, wherein: the surface of the air nozzle (6) is provided with a central area and an annular area surrounding the central area, the central area is provided with more than one first ejection hole (61), the annular area is provided with a plurality of second ejection holes (62), and the air flow speed ejected from the first ejection holes (61) is higher than that ejected from the second ejection holes (62).
5. The ebullated vapor deposition furnace as recited in claim 4, wherein: the air tap (6) is provided with an air cavity with an air inlet, all the first ejection holes (61) and all the second ejection holes (62) are communicated with the air cavity, and the opening area of the first ejection holes (61) is smaller than that of the second ejection holes (62).
6. The ebullated vapor deposition furnace as recited in claim 2, wherein: and the communicating port of the exhaust device (5) and the closed hearth (11) is positioned above the upper end port of the material guide channel.
7. The ebullated vapor deposition furnace as recited in claim 1, wherein: the air tap (6) is located in the middle of the bottom surface of the closed hearth (11), and the bottom surface of the closed hearth (11) is obliquely and upwards extended and arranged along the direction far away from the air tap (6).
8. The ebullated vapor deposition furnace according to any one of claims 1 to 7, wherein: feed arrangement (3) are pneumatic feedway, pneumatic feedway sends storehouse (31) including the malleation, the malleation is sent storehouse (31) and is connected with air supply pipeline (32) that are used for linking to each other with pressure air supply, the malleation is sent storehouse (31) and is communicated with closed furnace (11) through feed line (33), be equipped with on feed line (33) and be used for controlling feed line (33) feed control valve (34) of break-make, but the malleation is sent storehouse (31) and still is equipped with switching charge door (35) that are used for the feeding.
9. The ebullated vapor deposition furnace according to any one of claims 1 to 7, wherein: discharging device (4) including receive feed bin (41) and with take out negative pressure fan (42) that receive feed bin (41) and link to each other, receive feed bin (41) through discharge pipe (43) and seal furnace (11) intercommunication, be equipped with ejection of compact control valve (44) that are used for controlling discharge pipe (43) break-make on discharge pipe (43).
10. The ebullated vapor deposition furnace according to any one of claims 1 to 7, wherein: air cock (6) are connected with gas supply unit, gas supply unit is including first air inlet pipeline (601) that are used for letting in reaction gas and second air inlet pipeline (602) that are used for letting in replacement gas, be equipped with on first air inlet pipeline (601) and be used for controlling first air inlet pipeline (601) break-make first air inlet control valve (603), be equipped with on second air inlet pipeline (602) and be used for controlling second air inlet pipeline (602) break-make second air inlet control valve (604).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011565834.9A CN112725761A (en) | 2020-12-25 | 2020-12-25 | Boiling type vapor deposition furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011565834.9A CN112725761A (en) | 2020-12-25 | 2020-12-25 | Boiling type vapor deposition furnace |
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| Publication Number | Publication Date |
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| CN112725761A true CN112725761A (en) | 2021-04-30 |
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| CN202011565834.9A Pending CN112725761A (en) | 2020-12-25 | 2020-12-25 | Boiling type vapor deposition furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023035378A1 (en) * | 2021-09-13 | 2023-03-16 | 华中科技大学 | Atomic layer deposition device |
-
2020
- 2020-12-25 CN CN202011565834.9A patent/CN112725761A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023035378A1 (en) * | 2021-09-13 | 2023-03-16 | 华中科技大学 | Atomic layer deposition device |
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