CN112710404A - Optical device surface temperature distribution detection method based on compressed sensing - Google Patents
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- G01K3/00—Thermometers giving results other than momentary value of temperature
- G01K3/08—Thermometers giving results other than momentary value of temperature giving differences of values; giving differentiated values
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
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- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
- G01K7/24—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor in a specially-adapted circuit, e.g. bridge circuit
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Abstract
The invention discloses a method for detecting the surface temperature distribution of an optical device based on compressed sensing. The two-dimensional galvanometer changes the direction of the laser incident to the surface of an object to be measured, the laser irradiates an optical device, the optical device absorbs the energy of an irradiated laser beam to generate temperature rise, a temperature detection module measures the temperature rise caused by the irradiation of the laser by utilizing the bridge temperature measurement principle and converts a temperature signal into an electric signal, and a signal processing module amplifies and filters the electric signal, converts the amplified and filtered electric signal into a digital signal and sends the digital signal to a microcontroller or an FPGA (field programmable gate array) for processing. The optical device surface temperature distribution detection method based on compressed sensing is simple in structure and applicable to the field of temperature detection.
Description
Technical Field
The invention relates to the field of temperature detection, in particular to a method for detecting the surface temperature distribution of an optical device based on compressed sensing.
Background
Temperature is a physical quantity that characterizes the cold and hot extent of an object, and can only be measured indirectly by some property of the object that changes with temperature. Temperature sensors are often used to convert temperature into a usable output signal to indirectly measure temperature, and temperature sensors are widely used in various industry fields, such as: the method is widely applied to the industries such as medical industry, food industry, hydropower station, petrochemical industry, metallurgical industry, printing and dyeing pharmacy and the like. According to the temperature measurement mode, the method can be divided into a contact temperature measurement mode and a non-contact temperature measurement mode. The contact temperature measuring method features that the temperature measuring element is contacted directly with the measured object to exchange heat fully and reach heat balance, and the value of some physical parameter of the temperature measuring element represents the temperature value of the measured object. The non-contact temperature measurement method is characterized in that the temperature sensing element is not contacted with the measured object, but carries out heat exchange through radiation, so the defect that the contact temperature measurement method can damage a temperature field can be overcome, and the non-contact temperature measurement method has higher upper limit of temperature measurement. As used herein, contact bridge thermometry.
For surface temperature detection, the conventional method is to drive a single temperature sensor by using an array type temperature sensor or a designed servo system to complete surface temperature measurement. For the array type temperature sensor, there are two types of non-contact type and contact type. The temperature rise of an optical device caused by laser irradiation is small, so that the temperature measurement sensitivity of the non-contact array temperature sensor is low; contact array temperature sensors, however, can interfere with the measurement to a greater extent and the system is complex because each sensor is in contact with the optics. For a system in which a servo system drives a single temperature sensor, contact temperature measurement is generally adopted, and the temperature rise of an optical device caused by laser irradiation is small, so that the precision of the servo system may greatly influence the temperature measurement precision, and the servo system drives the sensor to move on the surface of the optical device, so that the surface of the device may be damaged, especially the optical film of the optical device coated with the optical film may be damaged. And seamless measurement of the surface temperature is not realized in both array type and scanning type, and the measured surface temperature may have a large deviation from the actual surface temperature. Particularly, for the temperature measurement of the optical device in the laser irradiation spot, if the sensor is directly placed at the position to be in contact with the optical device for measurement, the laser has energy, so the temperature sensor can be directly caused by the laser to generate temperature rise, and the temperature rise of the optical device is not accurately measured any more. In view of these several problems, applying compressive sensing to optical device surface temperature measurement is a desirable approach.
Compressed Sensing (CS) is a technology for searching sparse solutions of an underdetermined linear system, and realizes compressed sampling by some means, namely a data compression process is completed in the sampling process; it is one of the most glaring achievements that the signal processing field has entered the 21 st century, and compressed sensing is applied to the fields of magnetic resonance imaging, image processing, signal processing, etc. for acquiring and reconstructing sparse or compressible signals. The compressed sensing breaks through the gold law-nyquist sampling law in the field of signal processing. That is, during signal sampling, the same effect as full sampling is achieved with fewer sample points.
According to the characteristics of compressed sensing, the method can be applied to the field of surface temperature detection, and the full-coverage detection of the surface can be realized by combining compression and sampling with the non-adaptive linear temperature measurement system when only one pair of negative temperature coefficient temperature sensing elements are used.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the method comprises the steps of randomly changing the irradiation direction of a laser by using a two-dimensional galvanometer so as to realize random excitation on an object to be detected, and then utilizing a pair of temperature sensors to replace a traditional array or scanning type sensor to finish the sampling and reconstruction process of the surface temperature signal of the optical device.
The technical scheme for solving the technical problems is as follows: a detection method for optical device surface temperature distribution based on compressed sensing is characterized in that an optical device surface temperature distribution detection system adopted by the method comprises a laser, a two-dimensional galvanometer, an optical device, a temperature detection module, a signal processing module, a reflector and a laser power meter.
The two-dimensional galvanometer can be provided with signals by a microcontroller, and drives the optical scanning head through a driving amplifying circuit, so that the deflection of the laser beam (namely the plane where the optical device is located) is controlled in an X _ Y plane, namely the galvanometer can change the irradiation direction of the laser.
Wherein the laser irradiates the optical device, and the optical device absorbs the energy of the irradiated laser beam to generate temperature rise.
The temperature detection module adopts an unbalanced bridge to measure temperature, applies a bridge temperature measurement principle, introduces a reference arm into a bridge arm to meet the requirement of high-precision temperature measurement under the condition of changing environmental temperature, and the bridge measures the temperature rise of an optical device caused by laser irradiation and converts a temperature signal into an electric signal.
The signal processing module forms a post-processing module of the signal, firstly amplifies and filters the electric signal output by the bridge temperature measuring module, then converts the amplified and filtered electric signal into a digital signal and sends the digital signal to the microcontroller or the FPGA for processing.
Wherein, this system is applicable to the temperature detection field.
The basic principle applied by the invention relates to the following two aspects:
compressing the perception principle:
for compressed sensing, as long as the signal approximately satisfies sparsity in a certain transform domain, namely the signal is a compressible signal, under the condition that an observation matrix and a sparse representation basis are irrelevant, a high-dimensional signal obtained by transformation can be projected to a low-dimensional space by using the observation matrix, and then the original signal can be reconstructed with high probability from a small number of projections by solving an optimization problem.
The mathematical expression is as follows:
y＝Φx ⑴
x＝Ψs ⑵
the method comprises the following steps of obtaining a temperature signal of the surface of an object to be measured, wherein x is a one-dimensional signal with the length of N, namely an original signal, and the sparsity is K. Therefore, the compressed sensing problem is to solve an underdetermined equation set y to Φ x to obtain an original signal x on the basis of a known measurement value y and a measurement matrix Φ. However, the general natural signal itself is not sparse, and needs to be sparsely represented in a certain sparse domain, i.e. the formula two, so that the final equation becomes: y ═ Φ Ψ s. Knowing t, Φ, Ψ, solve for s. Common thinning methods are Discrete Fourier Transform (DFT), wavelet transform (DWT), Discrete Cosine Transform (DCT).
Let Θ be Φ Ψ, then y be Θ s, Θ is called a sensing matrix, which is a matrix of M × N, when M is N, s can be easily solved by y, however, in a normal case, M < < N, the number of equations is much smaller than the number of unknowns, and the equations are not definite solutions, and a signal cannot be reconstructed. However, since the signal is K sparse, if Φ in the above equation satisfies the finite equidistant property (RIP), K coefficients can be accurately reconstructed (to get an optimal solution) from M measurements. The condition of the finite equidistant property (RIP) is that the observation matrix Φ is uncorrelated with the sparse representation basis Ψ. The pottery huchenxuan and Cand es prove that: the independent and identically distributed Gaussian random measurement matrix can become a universal compressed sensing measurement matrix, and then the random measurement matrix meeting the Gaussian distribution becomes the most common observation matrix for CS.
In the invention, the power of the laser is fixed, the power of the laser is measured by a laser power meter, a two-dimensional coordinate is randomly selected by a pseudo-random number generator, the coordinate is stored by a microcontroller and a two-dimensional galvanometer is controlled, so that the laser is incident on a measured object by taking the two-dimensional coordinate as the direction, and a temperature signal is detected under the excitation. And taking multiple times of random laser excitation in different incidence directions as an observation matrix phi sampled randomly, measuring y [ M ], repeating the process for M times to obtain a measurement vector y, and solving for s according to the y ═ Θ s. The reconstruction of CS is a method for solving the system of equations y Θ s. This is a zero norm (l0) minimization problem, an NP-complete problem (one without a fast solution), and therefore often translates into a solution of one norm (l1) minimization, or some approximate estimation algorithm.
Bridge temperature measurement principle:
the bridge is composed of four bridge arms, when the temperature does not change, the bridge is in a balanced state, no voltage is output at the moment, if the resistance value of the sensor changes due to the temperature change, the balance is broken, voltage is output, the voltage signal is amplified and filtered, then the voltage signal is sent to an analog-to-digital converter to be converted into a digital signal, and then the digital signal is sent to a micro controller or FPGA to be processed.
The invention has the beneficial effects that:
the sensor in the system only uses a pair of negative temperature coefficient temperature sensing elements (NTC), plays a certain role in fixing, improves the sensitivity of the system, realizes seamless measurement of the surface temperature of an optical device, and has high sensitivity and simple system structure. The traditional scanning type surface temperature detection needs a servo system to change the position of a sensor, so the precision of the servo system influences the precision of temperature detection, the array type temperature detection sensitivity is low, the structure is complex, and seamless detection can not be realized no matter in the array type or the scanning type.
The invention applies the compression sensing technology, can reconstruct the original signal after detecting the object to be detected for a few times, and compared with the traditional temperature detection, the communication frequency between the sensor and the microcontroller is reduced, so the communication bandwidth required by the sensor is lower.
According to the invention, a compressed sensing technology is utilized, and the sampling times are reduced, so that the data acquisition rate is improved to a certain extent.
Drawings
FIG. 1 is a method for detecting the temperature distribution of an optical device surface based on compressed sensing.
Fig. 2 is a flow chart of compressing a perceptually reconstructed signal.
The device comprises a laser 1, a laser 2, a two-dimensional galvanometer 3, an adiabatic chamber 4, a reference channel 5, an optical device 6, a measuring NTC7, a reference NTC 8, a bridge temperature measuring module 9, a signal processing module 10, a reflector 11 and a laser power meter.
Detailed Description
The invention will be further described with reference to the accompanying drawings.
As shown in fig. 1, includes: 1. the device comprises a laser, 2, a two-dimensional galvanometer, 3, an adiabatic chamber, 4, a reference channel, 5, an optical device, 6, a measuring NTC, 7, a reference NTC, 8, a bridge temperature measuring module, 9, a signal processing module, 10, a reflector, 11 and a laser power meter.
In the present invention, the laser 1 can select an infrared laser having a wavelength ranging from 1000nm to 2000nm, but in practical applications, the wavelength of the laser should be selected according to the material of the optical device. Firstly, a laser 1 is incident on a two-dimensional galvanometer 2, then a microcontroller in a signal processing module 9 is used for generating a random two-dimensional coordinate, the microcontroller in the signal processing module 9 stores the coordinate and controls the deflection of the two-dimensional galvanometer 2, the laser 1 with fixed laser power is incident on an optical device 5 by taking the two-dimensional coordinate as the direction, a temperature signal is detected by using a measuring NTC6 and a reference NTC7 under the excitation, the temperature signal is converted into an electric signal to be output by a bridge temperature measuring module 8, the electric signal is amplified and filtered by the signal processing module 9 and then is sent to the microcontroller or FPGA in the signal processing module 9 for storage and processing, the light transmitted through the device is reflected by a reflecting mirror 10 and is incident on a laser power meter 11 to measure the laser power at the moment, and is also sent to the microcontroller in the signal processing module 9. Then one laser incident direction and incident power corresponds to one set of observation matrices and detected temperature. Then the micro-controller in the signal processing module 9 controls the galvanometer to randomly change the deflection direction of the galvanometer, and records the two-dimensional coordinate for controlling the deflection of the galvanometer and the measurement data at the moment; and carrying out a plurality of measurements, taking a plurality of random laser excitations in different incidence directions as an observation matrix for random sampling, and measuring the temperature data on the surface of the optical device. And solving by using the graph 2, so as to reconstruct the surface temperature distribution of the optical element, and judging the parameter characteristics and defect characteristics (such as device defects or film quality and the like) of the optical device by taking the reconstructed surface temperature distribution as a reference.
Claims (6)
1. A detection method for optical device surface temperature distribution based on compressed sensing is disclosed, wherein an optical device surface temperature distribution detection system adopted by the method comprises a two-dimensional galvanometer, a laser, an optical device, a temperature detection module, a signal processing module, a reflector and a laser power meter;
the two-dimensional galvanometer, the laser, the optical device and the temperature detection module form a temperature measurement system; the two-dimensional galvanometer can provide signals by a microprocessor and drive the optical scanning head through a drive amplifying circuit so as to control the deflection of laser beams (namely the plane where the optical device is located) on an X _ Y plane, namely the galvanometer can change the irradiation direction of the laser to realize random excitation; the laser irradiates an optical device, and the optical device absorbs the energy of the irradiated laser beam to generate temperature rise; the temperature detection module is in contact with the optical device by using a pair of NTCs (negative temperature coefficient sensors), measures the temperature rise of the optical device caused by random laser excitation and converts a temperature signal into an electric signal;
the signal processing module is used for amplifying and filtering the electric signal generated by the temperature measuring system, converting the amplified and filtered electric signal into a digital signal and sending the digital signal to a microprocessor or FPGA for processing, so that the signal reconstruction of temperature signal sampling based on compressed sensing is realized;
the laser power meter is used for measuring the power of the laser;
according to the optical device surface temperature distribution detection method based on compressed sensing, the original signal can be recovered by measuring an object to be detected for a few times, and compared with the traditional temperature measurement method, the communication times of a sensor and a microprocessor are reduced, so that the communication bandwidth required by the sensor is lower;
the optical device surface temperature distribution detection method based on compressed sensing changes the direction of a laser by using a two-dimensional galvanometer and replaces the laser with fixed direction incidence so as to realize random excitation;
the optical device surface temperature distribution detection method based on compressed sensing uses a pair of negative temperature coefficient temperature sensing elements (NTC) with extremely high sensitivity to replace the traditional array and scanning surface temperature detection method, and realizes gapless measurement of surface temperature.
2. The method for detecting the temperature distribution of the optical device surface based on the compressed sensing as claimed in claim 1, wherein: the effect of surface temperature measurement can be achieved by only using a pair of temperature sensors, the system sensitivity is improved while a certain fixing effect is achieved, seamless measurement of the surface temperature of the optical device is realized, the sensitivity is high, and the system structure is simple; the traditional scanning type surface temperature detection needs a servo system to change the position of a sensor, so the precision of the servo system can influence the precision of temperature detection, and seamless detection can not be realized no matter in an array type or a scanning type.
3. The method for detecting the temperature distribution of the optical device surface based on the compressed sensing as claimed in claim 1, wherein: when an object to be measured is measured, a double negative temperature coefficient temperature sensing element (NTC) measures the temperature in the excitation direction under the same incident laser direction, and multiple random laser excitations in different incident directions are used as observation matrixes for random sampling according to a compressive sensing theory to measure for multiple times so as to realize the detection and reconstruction of the surface temperature of the whole optical device.
4. The method for detecting the temperature distribution of the optical device surface based on the compressed sensing as claimed in claim 1, wherein: by applying the bridge temperature measurement principle, a reference arm is introduced into a bridge arm so as to meet the requirement of high-precision temperature measurement under the condition of changing the ambient temperature.
5. The method for detecting the temperature distribution of the optical device surface based on the compressed sensing as claimed in claim 1, wherein: the signal processing module firstly amplifies and filters the signals, then converts the amplified and filtered analog signals into digital signals by the analog-to-digital converter, and sends the digital signals into the microprocessor or the FPGA for processing.
6. The method for detecting the temperature distribution of the optical device surface based on the compressed sensing as claimed in claim 1, wherein: the system is suitable for the field of temperature detection.
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