CN112709873A

CN112709873A - Double-layer pipe, pipe joint and fluid conveying system

Info

Publication number: CN112709873A
Application number: CN202011561145.0A
Authority: CN
Inventors: 彭杰峰; 吴敏; 徐宁; 付新
Original assignee: Zhejiang Qier Electromechanical Technology Co ltd
Current assignee: Zhejiang Qier Electromechanical Technology Co ltd
Priority date: 2020-12-25
Filing date: 2020-12-25
Publication date: 2021-04-27

Abstract

The invention relates to a double-layer pipe, a pipe joint and a fluid conveying system. The invention comprises a double-layer pipe, a pipe joint and a fluid conveying system, wherein a part of the fluid flow subjected to precise temperature control is divided to be used for preserving the heat of the fluid flow in the inner layer, so that the fluid is subjected to the least environmental thermal disturbance in the conveying process, and the temperature precision of the fluid when the fluid is conveyed to a user unit is ensured. The double-layer pipe is provided with the heat-insulating layer, so that the capability of resisting environmental thermal interference of the conveyed fluid can be improved, the temperature precision in the fluid conveying process can be kept, and the fluid which is homologous with the conveyed fluid is selected as a heat-insulating material, so that additional heat-insulating fluid and a matched supply system are not needed; the heat preservation fluid is continuously updated, so that the heat preservation fluid has the temperature closest to the temperature of the conveying fluid, and the heat preservation performance of the heat preservation fluid is favorably maintained. The pipe joint is convenient for manufacturing and assembling the double-layer pipe, the fluid conveying system conveys the fluid in the double-layer pipe heat-insulation channel to a user unit with low temperature precision requirement, and the utilization rate of the fluid after temperature adjustment is improved.

Description

Double-layer pipe, pipe joint and fluid conveying system

Technical Field

The invention belongs to the technical field of fluid conveying, and relates to a double-layer pipe, a pipe joint and a fluid conveying system.

Background

In the field of precision manufacturing of semiconductors and the like, precise temperature control of fluids is often required. For example, an immersion lithography machine needs to continuously supply ultrapure water with a temperature fluctuation range of less than 0.01 ℃ to an exposure space to ensure that the optical properties of water are uniform; for another example, immersion lithography machines also use fluid flow for temperature control of the internal environment and components of the apparatus, including supplying a constant temperature water flow to the stage to maintain the stage at a temperature near 22 ℃, and supplying a lower temperature inert gas flow to the projection objective system to cool the lens. In these applications, it may be desirable for the fluid stream to have a high degree of temperature accuracy, for example, the temperature of the fluid stream fluctuates less than 0.1 ℃ or even less than 0.01 ℃ over time. Thermal disturbances in the environment during fluid delivery can reduce the temperature accuracy of the fluid, resulting in an inability to meet usage requirements after delivery of the fluid from the fluid source to the user unit.

One of the methods for solving the problem that the fluid is subjected to thermal disturbance in the conveying process is to take heat preservation measures on a fluid pipeline to reduce heat exchange between the fluid and the environment. The existing technical scheme for insulating the fluid pipeline is that the exterior of the fluid pipeline is coated with foaming materials such as polyurethane, but the coating of the foaming materials is easy to generate debris pollutants and is unfavorable in the semiconductor industry with high cleanliness; and the coating operation is easy to have the problems of uneven coating thickness, unreliable attachment and the like, and the heat insulation reliability of the fluid pipeline is reduced. An improved pipeline heat insulation scheme is that a layer of pipeline is arranged outside a fluid pipeline, and an interlayer space between the two layers of pipelines is filled with a heat insulation material (for example, a Chinese utility model patent with an authorization publication number of CN 203585592U), the method can ensure the uniformity of the heat insulation material coated outside the fluid pipeline, but the heat insulation material is usually customized, the cost is relatively high, and the method is limited by the heat insulation performance, the volume and other factors of the heat insulation material, and the occasion with high fluid temperature precision requirement can still be difficultly met.

The Chinese patent application with the publication number of CN105465554A discloses a heat-insulating double-layer pipe pipeline device for material conveying, which adopts a double-layer pipeline arrangement, wherein the inner layer pipeline is used for conveying heat-insulating materials, and circulating steam is supplied to a space between the inner layer pipeline and the outer layer pipeline to realize heat insulation of the materials. This solution improves the uniformity of the insulation performance and allows to adjust the steam supply parameters according to the insulation requirements. However, this solution requires an additional steam preparation and circulation system, and is costly.

Disclosure of Invention

The invention aims to provide a double-layer pipe, a pipe joint and a fluid conveying system, wherein a part of fluid flow subjected to precise temperature control is divided for heat preservation of inner-layer fluid flow, so that the fluid is subjected to the least environmental thermal disturbance in the conveying process, and the temperature precision of the fluid in the conveying process to a user unit is ensured.

A double-layer pipe comprises an inner pipe and an outer pipe, wherein the inner pipe is positioned inside the outer pipe, a fluid conveying channel is formed inside the inner pipe, and a heat preservation channel is formed in a space between the inner pipe and the outer pipe; the conveying channel and the heat preservation channel are communicated at the upstream end by a flow path, so that the fluid is divided into the conveying channel and the heat preservation channel; a liquid outlet is arranged at the downstream of the heat preservation channel; the fluid in the conveying channel is conveyed to a downstream user unit continuously, and the fluid in the heat preservation channel is discharged out of the double-layer pipe through the liquid outlet;

the flow path communicating the conveying channel and the heat preservation channel is an opening on the inner pipe wall.

The upstream end of inner tube extends out the outer tube end portion, and the upstream end of inner tube has the drainage mouth, and the drainage mouth passes through the drainage tube to be connected with the opening in heat preservation passageway upper reaches, forms intercommunication transfer passage and heat preservation passageway the flow path.

A double-layer pipe is formed by connecting an inner pipe and an outer pipe through a pipe joint; the pipe joint comprises an external joint, an inner pipe joint and an outer pipe joint which extend out of the base body, the inner pipe joint is positioned on the radial inner side of the outer pipe joint, a through fluid channel is arranged between the external joint and the inner pipe joint, and a through opening is formed in the wall surface of the inner pipe joint; the inner tube fitting extends a greater length relative to the base than the outer tube fitting. The end of the pipe joint is provided with a sawtooth structure and is used for being connected with a pipeline.

The pipe joint can also comprise an external joint, an inner pipe joint and an outer pipe joint which extend out of the base body, and also comprises a drainage joint which extends out of the base body; the inner pipe joint is positioned at the radial inner side of the outer pipe joint, and a through fluid channel is arranged between the outer joint and the inner pipe joint; the inner pipe joint extends out of the base body for a longer length than the outer pipe joint; the interior of the drain fitting has a flow path that extends to the space between the inner and outer pipe fittings. The end of the pipe joint is provided with a sawtooth structure and is used for being connected with a pipeline.

A fluid delivery system using the double-layer pipe comprises a temperature regulating device and a user unit, wherein the double-layer pipe is used for connecting the temperature regulating device and the user unit and is used for delivering fluid from the temperature regulating device to the user unit. The fluid in the insulated channel of the double pipe is transported to another user unit.

By using the double-layer pipe provided by the invention, the insulating layer is arranged to wrap the outside of the conveyed fluid, so that the capability of resisting environmental thermal interference of the conveyed fluid can be improved, and the temperature precision in the fluid conveying process can be kept. The double-layer pipe uses fluid which is the same as the conveying fluid as a heat insulation material, and does not need additional heat insulation fluid and a matched supply system; the heat preservation fluid is continuously updated, so that the heat preservation fluid has the temperature closest to the temperature of the conveying fluid, and the heat preservation performance of the heat preservation fluid is favorably maintained. The pipe joint of the invention is convenient for manufacturing and assembling the double-layer pipe, and is particularly suitable for assembling the double-layer pipe on site. For the fluid conveying system of the user units with different temperature precision requirements, the fluid in the double-layer pipe heat-insulating channel can be conveyed to the user units with low temperature precision requirements, and the utilization rate of the fluid after temperature regulation is improved.

Drawings

FIG. 1 is a schematic structural view of a double-walled tube according to a first embodiment of the present invention;

FIG. 2 is a schematic right-view structural diagram of a double-walled tube according to a first embodiment of the present invention;

FIG. 3 is a schematic structural view of a second embodiment of the double tube of the present invention;

FIG. 4 is a schematic structural diagram of a first embodiment of the pipe joint according to the present invention;

FIG. 5 is a schematic structural view of a second embodiment of the pipe joint according to the present invention;

FIG. 6 is a right side view schematically illustrating a second embodiment of the pipe joint according to the present invention;

FIG. 7 is a schematic view showing an installation structure of the pipe joint according to the present invention;

FIG. 8 is a schematic view of a first embodiment of a fluid delivery system according to the present invention;

FIG. 9 is a schematic view of a second embodiment of a fluid delivery system of the present invention.

Detailed Description

Double tube embodiment one

As shown in fig. 1 and 2, a double tube 1A includes an inner tube 13 and an outer tube 15, the inner tube 13 being located inside the outer tube 15, the inner tube 13 and the outer tube 15 being substantially equal in length; a conveying channel 14 for fluid is formed inside the inner pipe 13, and a heat preservation channel 16 is formed in the space between the inner pipe 13 and the outer pipe 15; the heat preservation channel 16 is provided with a conveying inlet 11 at the upstream and a conveying outlet 12 at the downstream; the upstream of the inner pipe 13 is provided with an inner through hole 161 and an outer through hole 161, and the inner through hole 161 is communicated with the conveying channel 14 and the heat preservation channel 16; a drain 162 is provided downstream of the incubation passage 16, and the drain 162 has a drain opening 163 for discharging the fluid in the incubation passage 16 to the outside of the pipe.

After the conveyed fluid enters the double-layer pipe 1A through the conveying inlet 11, a part of the fluid flows downstream along the conveying channel 14 and flows out of the double-layer pipe 1A through the conveying outlet 12; the other part of the fluid enters the heat preservation channel 16 through the inner and outer through holes 161, flows downstream along the heat preservation channel 16 and is discharged out of the heat preservation channel 16 through the liquid discharge port 163. The fluid in the heat-preserving channel 16 is subjected to a thermal disturbance from the external environment to generate a temperature change, the amplitude of the temperature change gradually decreases inwards along the radial direction of the pipeline, so that the fluid in the heat-preserving channel 16 close to the inner pipe 13 has a smaller temperature change amplitude; because the inner pipe obstructs convection between the fluids in the conveying channel 14 and the heat preservation channel 16, the path of the environmental thermal disturbance influencing the temperature of the fluid in the conveying channel 14 through thermal convection is weakened, and the temperature maintenance of the fluid in the conveying channel 14 is facilitated; downstream of the double tube 1A, the fluid in the insulated channel 16 has a lower temperature accuracy than the fluid in the delivery channel 14, and the fluid in the delivery channel 14 is delivered to the downstream user unit, and the fluid in the insulated channel 16 is discharged. The fluid in the heat preservation channel 16 is enabled to be continuously updated, the situation that the fluid in the heat preservation channel 16 continuously accumulates environmental thermal interference to form temperature drift can be avoided, the temperature difference of the fluid in the heat preservation channel 16 and the fluid in the conveying channel 14 can be reduced, and the heat preservation of the fluid in the conveying channel 14 can be facilitated. Since the fluid in the incubation channel 16 and the delivery channel 14 are from the same source, no additional incubation fluid supply circulation system is required; the temperature of the holding channel 16 is the same temperature as the fluid in the transfer channel 14 upstream of the double tube 1A, with minimal thermal interference with the fluid in the transfer channel 14, and without the need to match the temperature of the holding fluid and the transfer fluid. Therefore, the invention obtains good heat preservation performance to the conveying fluid and improves the capability of resisting external heat interference under the condition of not configuring an additional heat preservation fluid supply system.

The sizes and the numbers of the openings of the upstream inner and outer through holes 161 and the downstream liquid discharge port 163 of the double-layer pipe 1A and the sectional area of the heat preservation channel 16 are changed, so that the proportion of the flow rates of the fluids in the heat preservation channel 16 and the conveying channel 14 can be changed, and different heat preservation performances of the conveyed fluids can be obtained.

Double tube embodiment two

As shown in fig. 3, a double tube 1B, the upstream of the inner tube 13 extends to a position further than the outer tube 15; a drainage end 165 is arranged at the upstream of the inner pipe 13, a drainage port 166 is arranged in the drainage end 165, and the drainage end 165 can be a structural feature of the inner pipe 13 or a structural feature which is added to the inner pipe 13 in the form of a tee joint and the like; the inner and outer through holes 161 are not directly connected to the conveyance path 14 and the heat-insulating path 16; the drainage port 166 communicates with the inner and outer through holes 161 through a drainage tube 167 to drain the fluid in the transfer passage 14 to the warming passage 16. The remaining embodiments are the same as the first double tube embodiment.

This embodiment allows for more flexibility in placing the vents 166, as compared to the first dual tube embodiment, facilitating assembly of the dual tube; meanwhile, the structure of the inner pipe is simpler, and the double-layer pipe is convenient to manufacture.

Pipe joint embodiment one

As shown in fig. 4 and 5, a pipe joint 2 for double-layer pipes, fig. 4 shows a first pipe joint 2A, the first pipe joint 2A has an outer joint 21, an inner pipe joint 22 and an outer pipe joint 23 extending from a base body and connecting an upstream pipe 131, an inner pipe 13 and an outer pipe 15, respectively, the inner pipe joint 22 is located at a radially inner side of the outer pipe joint 23, and an inner and outer through hole 161 is formed in a wall surface of the inner pipe joint 22 to communicate a conveying passage 14 and a heat-insulating passage 16; the connection mode of each joint and each pipe can adopt the existing pipe connection technology, for example, in the embodiment, the external joint 21, the internal pipe joint 22 and the external pipe joint 23 are all provided with a zigzag structure to form a pagoda head 24; and sleeving hoses such as PP pipes on the pagoda head 24, applying pressure or applying pressure after heating to enable the hoses to be subjected to plastic deformation and be nested with the pagoda head 24, and completing connection and sealing of the pipes and the joints.

Fig. 5 shows a second pipe connector 2B, wherein the second pipe connector 2B is provided with one drainage connector 25 more than the first pipe connector 2B for connecting with a drainage pipe 167; the second pipe joint 2B is internally provided with a drainage channel 251 which communicates the drainage pipe 167 with the inner and outer through holes 161 and the heat preservation channel 16; the inner and outer through holes 161 may be provided in the form of circumferentially uniformly distributed openings; the inner tube fitting 22 is arranged to extend further relative to the base than the outer tube fitting 23, with the pagoda head of the inner tube fitting 22 exposed beyond the outer tube fitting 23.

With the first pipe joint 2A and the second pipe joint 2B of the present embodiment, the double pipe equivalent to the first embodiment of the double pipe of the present invention can be obtained by connecting simple single-layer pipes in the above-described manner using the drain joint 25 of the second pipe joint 2B for liquid discharge.

As shown in fig. 7, when the pipe joint is connected to the pipe, as shown in fig. 7(a), the inner pipe 13 is placed inside the outer pipe 15, the inner pipe 13 is moved so that its end portion protrudes from the inside of the outer pipe 15, and the inner pipe joint 22 and the inner pipe 13 are connected; moving the outer pipe 15 to enable the end part of the outer pipe to be sleeved on the outer pipe joint 23, and connecting the outer pipe joint 23 and the outer pipe 15; connecting the upstream pipe 131 and the external joint 131; the connection of the first pipe joint 2A to the pipe is completed. The second pipe joint 2B is connected to the pipe in a similar manner to the first pipe joint 2A.

The connection mode of the pipe joint and the single-layer pipeline is adopted, the double-layer pipeline is convenient to assemble in site construction, special double-layer pipes do not need to be customized, and the use is more convenient.

Pipe joint embodiment two

A second pipe joint 2B is used at the upstream and downstream, respectively, the drainage joint 25 of the second pipe joint 2B at the upstream is used for drainage, the drainage joint 25 of the second pipe joint 2B at the downstream is used for drainage, and after the pipelines are connected, the double-layer pipe corresponding to the second embodiment of the double-layer pipe of the invention can be obtained. This embodiment can reduce a number of pipe joint configurations relative to the first pipe joint embodiment.

Embodiment A of the fluid delivery System

As shown in fig. 8, a fluid delivery system includes a reservoir 31, a pump 32, a temperature regulating device 33, a thermometer 34, a first user unit 35, and a second user unit 36; a pump 32 for powering the fluid in the tank 31 to be pumped towards the user unit, the fluid being temperature regulated by a temperature regulating device 33, the temperature of the temperature regulated fluid being monitored by a thermometer 34; the fluid conveying system also comprises a double-layer pipe 1, and fluid which is subjected to temperature adjustment by the temperature adjusting device 33 enters the double-layer pipe 1 to be conveyed; one part of the fluid is conveyed to the user unit through the conveying channel 14 of the double-layer pipe 1, and the other part of the fluid enters the heat preservation channel 16 of the double-layer pipe 1 through the inner through hole 161 and the outer through hole 161, flows to the liquid outlet 163 and then is discharged out of the double-layer pipe 1.

The double-layer pipe 1 is used for conveying the fluid, so that the fluid can be subjected to the least environmental thermal interference between the temperature adjusting device 33 and the user unit, and the temperature precision of the fluid can be kept.

The user unit may work directly with a fluid, for example in an immersion lithography machine using an immersion fluid to form a liquid lens; the user unit may also perform a temperature maintenance or adjustment function using a fluid, for example using a low temperature inert gas flow to cool a projection objective in an immersion lithography machine. After passing through the first and

second user units

35 and 36, the fluid may be discharged directly or returned to the storage tank 31 for recycling. The fluid discharged from the heat preservation channel 16 can be directly discharged, and can also be returned to the storage tank 31 for recycling.

Embodiment two of the fluid delivery System

As shown in fig. 9, the fluid in the thermal insulation passage 16 of the double pipe 1 is discharged through the liquid discharge port 163 and then is sent to the first user unit 35; the fluid in the delivery channel 14 of the double pipe 1 is delivered to the second user unit 36; the other embodiments are the same as the first embodiment of the fluid delivery system.

If the requirement of the first user unit 35 on the accuracy of the fluid temperature is low and the fluid in the heat preservation channel 16 can also meet the requirement of the temperature accuracy, the use of the embodiment can simultaneously meet the liquid using requirements of the first user unit 35 and the second user unit 36, and the utilization rate of the fluid in the heat preservation channel 16 is improved.

In the positional relationship description of the present invention, the appearance of terms such as "inner", "outer", "upper", "lower", "left", "right", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings is merely for convenience of describing the embodiments and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, is not to be construed as limiting the present invention.

The foregoing summary and structure are provided to explain the principles, general features, and advantages of the product and to enable others skilled in the art to understand the invention. The foregoing examples and description have been presented to illustrate the principles of the invention and are intended to provide various changes and modifications within the spirit and scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A double-layer pipe comprises an inner pipe and an outer pipe, and is characterized in that: the inner pipe is positioned in the outer pipe, a fluid conveying channel is formed in the inner pipe, and a heat preservation channel is formed in a space between the inner pipe and the outer pipe; the conveying channel and the heat preservation channel are communicated at the upstream end by a flow path, so that the fluid is divided into the conveying channel and the heat preservation channel; a liquid outlet is arranged at the downstream of the heat preservation channel; the fluid in the conveying channel is conveyed to the downstream user unit continuously, and the fluid in the heat preservation channel is discharged out of the double-layer pipe through the liquid outlet.

2. The double-walled tube of claim 1, wherein: the flow path communicating the conveying channel and the heat preservation channel is an opening on the inner pipe wall.

3. The double-walled tube of claim 1, wherein: the upstream end of inner tube extends out the outer tube end portion, and the upstream end of inner tube has the drainage mouth, and the drainage mouth passes through the drainage tube to be connected with the opening in heat preservation passageway upper reaches, forms intercommunication transfer passage and heat preservation passageway the flow path.

4. A double-walled tube characterized by: connecting the inner pipe and the outer pipe by using a pipe joint to form a double-layer pipe; the pipe joint comprises an external joint, an inner pipe joint and an outer pipe joint which extend out of the base body, the inner pipe joint is positioned on the radial inner side of the outer pipe joint, a through fluid channel is arranged between the external joint and the inner pipe joint, and a through opening is formed in the wall surface of the inner pipe joint; the inner tube fitting extends a greater length relative to the base than the outer tube fitting.

5. The double-walled tube of claim 4, wherein: the pipe joint comprises an external joint, an inner pipe joint and an outer pipe joint which extend out of the base body, and further comprises a drainage joint which extends out of the base body; the inner pipe joint is positioned at the radial inner side of the outer pipe joint, and a through fluid channel is arranged between the outer joint and the inner pipe joint; the inner pipe joint extends out of the base body for a longer length than the outer pipe joint; the interior of the drain fitting has a flow path that extends to the space between the inner and outer pipe fittings.

6. The double-walled tube of claim 4 or 5, wherein: the end part of the pipe joint is provided with a sawtooth structure and is used for being connected with a pipeline.

7. A fluid transport system using the double tube of claims 1-4, wherein: the double-layer pipe is used for connecting the temperature adjusting device and the user unit and is used for conveying the fluid subjected to temperature adjustment by the temperature adjusting device to the user unit.

8. A fluid delivery system according to claim 7, wherein: the fluid in the insulated channel of the double pipe is transported to another user unit.