CN112709823A - Sealing device for moving shaft - Google Patents
Sealing device for moving shaft Download PDFInfo
- Publication number
- CN112709823A CN112709823A CN201911022834.1A CN201911022834A CN112709823A CN 112709823 A CN112709823 A CN 112709823A CN 201911022834 A CN201911022834 A CN 201911022834A CN 112709823 A CN112709823 A CN 112709823A
- Authority
- CN
- China
- Prior art keywords
- sealing
- sealing sleeve
- moving shaft
- guide
- mounting flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3244—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with hydrodynamic pumping action
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3268—Mounting of sealing rings
Abstract
The invention discloses a moving shaft sealing device which comprises a mounting flange and a sealing sleeve, wherein a sealing assembly is arranged between the sealing sleeve and the moving shaft, the moving shaft sealing device also comprises two groups of guide pairs which are used for enabling the sealing sleeve to float along with the position of the moving shaft and keeping the axial distance between the sealing sleeve and the mounting flange unchanged, the two groups of guide pairs are symmetrically arranged at two sides of the sealing sleeve, and a flexible sealing sleeve is connected between the mounting flange and the sealing sleeve. The invention has the advantages of simple structure, low cost, being beneficial to improving the reliability and prolonging the service life, etc.
Description
Technical Field
The invention relates to semiconductor processing equipment, in particular to a moving shaft sealing device.
Background
Taking a vacuum mechanical scanning shaft in semiconductor equipment as an example, the scanning process needs to do lifting motion along the Z-axis direction and rotate around the Z-axis, the vacuum dynamic seal usually adopts more than two stages of seal rings, a seal sleeve for generally bearing the seal rings and a mounting flange part are rigidly connected or are the same rigid structure body, the seal structure generally requires the installation of the seal moving shaft, the seal moving shaft has good position matching precision including rotation, linear sliding and seal sleeve, otherwise, the seal failure is easily caused, or the seal rings are unevenly worn in the using process to cause the premature failure of the seal, therefore, the moving structure design and the processing precision of the seal structure are high, and the high cost is generated.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a moving shaft sealing device which has simple structure and low cost and is beneficial to improving the reliability and prolonging the service life.
In order to solve the technical problems, the invention adopts the following technical scheme:
a sealing device for a moving shaft comprises a mounting flange and a sealing sleeve, wherein a sealing assembly is arranged between the sealing sleeve and the moving shaft, the sealing device for the moving shaft further comprises two groups of guide pairs, the two groups of guide pairs are used for enabling the sealing sleeve to float along with the moving shaft and keeping the axial distance between the sealing sleeve and the mounting flange unchanged, the two groups of guide pairs are symmetrically arranged on two sides of the sealing sleeve, and a flexible sealing sleeve is connected between the mounting flange and the sealing sleeve.
As a further improvement of the above technical solution: the guiding pair comprises a first slider, a first guide rail matched with the first slider, a second slider and a second guide rail matched with the second slider, the first slider is arranged on the sealing sleeve, the first guide rail is arranged on the second slider, the second guide rail is arranged on the mounting flange, and the second guide rail, the first guide rail and the moving shaft are perpendicular to each other.
As a further improvement of the above technical solution: the direction is vice including first guiding axle, with first guiding axle complex first linear bearing, second guiding axle and with second guiding axle complex second linear bearing, the guiding axle is located on the sealing boot, and first linear bearing locates on the second guiding axle, second linear bearing locates on the mounting flange, and first guiding axle, second guiding axle and motion axle mutually perpendicular.
As a further improvement of the above technical solution: the sealing assembly comprises at least two sealing rings, an air exhaust spacer ring is arranged between every two adjacent sealing rings, and a vacuum air exhaust interface is arranged on the air exhaust spacer ring.
As a further improvement of the above technical solution: the sealing ring is a polytetrafluoroethylene sealing ring.
As a further improvement of the above technical solution: the flexible sealing sleeve is a corrugated pipe, and two ends of the corrugated pipe are respectively connected with the mounting flange and the sealing sleeve in a welding mode.
Compared with the prior art, the invention has the advantages that: the invention discloses a moving shaft sealing device, wherein the part of a moving shaft, which is positioned in a sealing sleeve, is sealed by a sealing component, the part of the moving shaft, which is positioned between an installation flange and the sealing sleeve, is sealed by a flexible sealing sleeve, the flexible sealing sleeve can realize sealing connection without obstructing the movement of the sealing sleeve, the sealing sleeve realizes relative fixation with the installation flange through 2 groups of guide pairs, the position between the sealing sleeve and the installation flange is relatively fixed in a Z-axis direction, the X-axis and Y-axis directions can move in a small range and/or rotate around an X, Y axis, thereby realizing that the sealing main body composed of the sealing sleeve, the sealing component and the like has the characteristic of floating along with the position of the moving shaft, therefore, the position deviation between the moving shaft and the mounting flange can be eliminated, the position matching precision requirement between the moving shaft and the sealing assembly is reduced, the cost is reduced, and the problems of sealing failure or uneven wear in the use process and the like are avoided.
Drawings
Fig. 1 is a schematic structural view of a first embodiment of a moving shaft sealing device according to the present invention.
Fig. 2 is a schematic structural view of a second embodiment of the sealing device for a moving shaft according to the present invention.
The reference numerals in the figures denote: 1. a motion shaft; 2. installing a flange; 3. sealing sleeves; 4. a seal assembly; 41. a seal ring; 42. an air exhaust spacer ring; 43. a vacuum air extraction interface; 5. a guide pair; 51. a first slider; 52. a first guide rail; 53. a second slider; 54. a second guide rail; 6. a flexible sealing sleeve.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples of the specification.
Fig. 1 shows an embodiment of the moving shaft sealing device of the present invention, which includes a mounting flange 2 and a sealing sleeve 3, wherein a sealing assembly 4 is disposed between the sealing sleeve 3 and the moving shaft 1, the moving shaft sealing device further includes two sets of guiding pairs 5 for making the sealing sleeve 3 float along with the position of the moving shaft 1 and keeping the axial distance between the sealing sleeve 3 and the mounting flange 2 unchanged, the two sets of guiding pairs 5 are symmetrically disposed at two sides of the sealing sleeve 3, and a flexible sealing sleeve 6 is connected between the mounting flange 2 and the sealing sleeve 3.
In the moving shaft sealing device, the part of the moving shaft 1, which is positioned in the sealing sleeve 3, is sealed by the sealing component 4, the part of the moving shaft 1, which is positioned between the mounting flange 2 and the sealing sleeve 3, is sealed by the flexible sealing sleeve 6, the flexible sealing sleeve 6 can realize sealing connection without obstructing the movement of the sealing sleeve 3 relative to the mounting flange 2, the sealing sleeve 3 realizes relative fixation with the mounting flange 2 through 2 groups of guide pairs 5, so that the position Z axis direction between the sealing sleeve 3 and the mounting flange 2 is relatively fixed, the X axis direction and the Y axis direction can move in a small range and/or rotate around the X, Y axis, thereby realizing that a sealing main body consisting of the sealing sleeve 3, the sealing component 4 and the like has the characteristic of floating along with the position of the moving shaft 1, consequently, the position deviation between the moving shaft 1 and the mounting flange 2 can be eliminated, the position matching precision requirement between the moving shaft 1, the cost is reduced, and the problems of sealing failure or uneven wear in the use process and the like are avoided.
Further, in this embodiment, the guiding pair 5 includes a first slider 51, a first guide rail 52 and a second slider 53 that are engaged with the first slider 51, and a second guide rail 54 that is engaged with the second slider 53, the first slider 51 is disposed on the sealing sleeve 3, the first guide rail 52 is disposed on the second slider 53, the second guide rail 54 is disposed on the mounting flange 2, and the second guide rail 54, the first guide rail 52, and the moving axis 1 are perpendicular to each other, that is, only a linear guiding pair is used in this embodiment, and the floating effect is limited to the translational floating in the X direction and the Y direction. Of course, in other embodiments, the guiding pair 5 may also be: including first guiding axle, with first guiding axle complex first linear bearing, second guiding axle and with second guiding axle complex second linear bearing, on seal cover 3 was located to the guiding axle, first linear bearing located on the second guiding axle, second linear bearing located mounting flange 2, and first guiding axle, second guiding axle and motion axle 1 mutually perpendicular. The structure similar to a gyroscope can be adopted, and the guide structure with double functions of sliding and rotating is provided, so that the floating effect has translation in the X direction and the Y direction and rotation around the X axis and the Y axis, and the maximum floating capacity is provided.
Further, in this embodiment, the sealing assembly 4 includes two sealing rings 41, an air exhaust spacer ring 42 is disposed between two adjacent sealing rings 41, the air exhaust spacer ring 42 is provided with a vacuum air exhaust interface 43, the vacuum air exhaust interface 43 can be connected to a vacuum pump, and air between the two sealing rings 41 is exhausted to form a vacuum area. Referring to fig. 2, in other embodiments, more sealing rings 41 may be provided and matched with the air-extracting spacer ring 42, so as to further improve the sealing effect.
In the present embodiment, the seal ring 41 is preferably a teflon seal ring. The polytetrafluoroethylene sealing ring has small sliding friction coefficient, good wear resistance and better elasticity, and can ensure the sealing performance and the service life.
As a preferred technical solution, in this embodiment, the flexible sealing sleeve 6 is a corrugated pipe, and two ends of the corrugated pipe are respectively connected with the mounting flange 2 and the sealing sleeve 3 by welding. The corrugated pipe is adopted and welded for connection, the sealing performance is good, and the structure is reliable.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.
Claims (6)
1. The utility model provides a motion shaft seal device, includes mounting flange (2) and seal cover (3), be equipped with seal assembly (4), its characterized in that between seal cover (3) and motion axle (1): the moving shaft sealing device further comprises two groups of guide pairs (5) which are used for enabling the sealing sleeve (3) to float along with the position of the moving shaft (1) and keeping the axial distance between the sealing sleeve (3) and the mounting flange (2) unchanged, the two groups of guide pairs (5) are symmetrically arranged on two sides of the sealing sleeve (3), and a flexible sealing sleeve (6) is connected between the mounting flange (2) and the sealing sleeve (3).
2. The moving shaft seal assembly as claimed in claim 1 wherein: the guide pair (5) comprises a first sliding block (51), a first guide rail (52) matched with the first sliding block (51), a second sliding block (53) and a second guide rail (54) matched with the second sliding block (53), the first sliding block (51) is arranged on the sealing sleeve (3), the first guide rail (52) is arranged on the second sliding block (53), the second guide rail (54) is arranged on the mounting flange (2), and the second guide rail (54), the first guide rail (52) and the moving shaft (1) are perpendicular to each other.
3. The moving shaft seal assembly as claimed in claim 1 wherein: the guide pair (5) comprises a first guide shaft, a first linear bearing matched with the first guide shaft, a second guide shaft and a second linear bearing matched with the second guide shaft, the guide shaft is arranged on the sealing sleeve (3), the first linear bearing is arranged on the second guide shaft, the second linear bearing is arranged on the mounting flange (2), and the first guide shaft, the second guide shaft and the moving shaft (1) are perpendicular to each other.
4. A moving shaft sealing device as claimed in claim 1, 2 or 3, wherein: the sealing assembly (4) comprises at least two sealing rings (41), an air exhaust spacer ring (42) is arranged between every two adjacent sealing rings (41), and the air exhaust spacer ring (42) is provided with a vacuum air exhaust interface (43).
5. The moving shaft seal assembly as claimed in claim 4 wherein: the sealing ring (41) is a polytetrafluoroethylene sealing ring.
6. A moving shaft sealing device as claimed in claim 1, 2 or 3, wherein: the flexible sealing sleeve (6) is a corrugated pipe, and two ends of the corrugated pipe are respectively connected with the mounting flange (2) and the sealing sleeve (3) in a welding mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911022834.1A CN112709823B (en) | 2019-10-25 | 2019-10-25 | Motion shaft sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911022834.1A CN112709823B (en) | 2019-10-25 | 2019-10-25 | Motion shaft sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112709823A true CN112709823A (en) | 2021-04-27 |
| CN112709823B CN112709823B (en) | 2023-05-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911022834.1A Active CN112709823B (en) | 2019-10-25 | 2019-10-25 | Motion shaft sealing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112709823B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1211444A2 (en) * | 2000-11-29 | 2002-06-05 | Kabushiki Kaisha Toyota Jidoshokki | Shaft seal of a lip type with guiding components having the same |
| CN101576165A (en) * | 2008-05-09 | 2009-11-11 | 陆建平 | Double-bearing floating sealing device |
| CN101696729A (en) * | 2009-11-12 | 2010-04-21 | 刘宝林 | Combined sealing structure of combined sealing device and steering drilling tool |
| CN103352980A (en) * | 2013-07-24 | 2013-10-16 | 大连华锐重工集团股份有限公司 | Hollow tube sealing device |
| CN105114473A (en) * | 2015-08-04 | 2015-12-02 | 上海创力集团股份有限公司 | Tunneling machine stretching part structure |
| CN205789673U (en) * | 2016-06-30 | 2016-12-07 | 中国西电电气股份有限公司 | A kind of high pressure sulfur hexafluoride breaker axle sealing structure |
| CN109860012A (en) * | 2019-02-28 | 2019-06-07 | 中国电子科技集团公司第四十八研究所 | A kind of ion implantation apparatus upright scanning device |
-
2019
- 2019-10-25 CN CN201911022834.1A patent/CN112709823B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1211444A2 (en) * | 2000-11-29 | 2002-06-05 | Kabushiki Kaisha Toyota Jidoshokki | Shaft seal of a lip type with guiding components having the same |
| CN101576165A (en) * | 2008-05-09 | 2009-11-11 | 陆建平 | Double-bearing floating sealing device |
| CN101696729A (en) * | 2009-11-12 | 2010-04-21 | 刘宝林 | Combined sealing structure of combined sealing device and steering drilling tool |
| CN103352980A (en) * | 2013-07-24 | 2013-10-16 | 大连华锐重工集团股份有限公司 | Hollow tube sealing device |
| CN105114473A (en) * | 2015-08-04 | 2015-12-02 | 上海创力集团股份有限公司 | Tunneling machine stretching part structure |
| CN205789673U (en) * | 2016-06-30 | 2016-12-07 | 中国西电电气股份有限公司 | A kind of high pressure sulfur hexafluoride breaker axle sealing structure |
| CN109860012A (en) * | 2019-02-28 | 2019-06-07 | 中国电子科技集团公司第四十八研究所 | A kind of ion implantation apparatus upright scanning device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112709823B (en) | 2023-05-30 |
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