CN112684829A - Temperature detection control system and method for MPCVD device - Google Patents
Temperature detection control system and method for MPCVD device Download PDFInfo
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Abstract
The invention relates to a temperature detection control system and method for an MPCVD device, which comprises a temperature detection unit and a temperature control unit, wherein the temperature detection unit comprises an interaction module, an alarm processing module and a detection module, the detection module comprises a K-type thermocouple, the alarm processing module comprises a single chip microcomputer, the K-type thermocouple is connected with a microwave power supply, and the single chip microcomputer is respectively connected with the K-type thermocouple, the interaction module and the temperature control unit; the K-type thermocouple detects the real-time temperature of the diamond synthesis process in the microwave power supply, the interaction module inputs the set temperature and displays the real-time temperature and the set temperature, the alarm processing module acquires the real-time temperature and the set temperature, judges whether the error range of the set temperature is exceeded or not, and controls the temperature of the microwave power supply by changing the microwave power according to the control signal of the alarm processing module through the temperature control unit.
Description
Technical Field
The invention relates to the field of control and detection of microwave chemical vapor deposition equipment, in particular to a temperature detection control system and method for an MPCVD device.
Background
The diamond coating is a novel functional material in the 21 st century, has high strength, high frictional wear performance, high thermal conductivity and chemical stability, and has wide application prospect. Microwave Plasma Chemical Vapor Deposition (MPCVD) is a method in which gas in a reaction chamber is ionized under the excitation of Microwave energy to form a mixture of atoms, radicals, ions and electrons, thereby depositing a diamond film on a substrate. The method carries out deposition by ionizing gas in a reaction cavity through microwave-excited plasma, has the advantages of no pollution, good controllability, high electron density of the excited microwave plasma, no electrode pollution, high energy utilization rate and the like, and is considered as a preferred method for preparing high-quality diamond films in a plurality of preparation methods of the diamond films.
The MPCVD device in patent CN109666924A mentions that a magnetron is an important part for generating microwave, the microwave stability is related to the quality of the diamond film, but the microwave most directly affects the deposition temperature of the substrate, so that the reasonable control and detection of the temperature in the diamond synthesis process are important problems. The synthesis temperature is very important to the quality of the diamond film, and the intelligent control in the synthesis process is very important. At present, the matching of all factors is reasonably adjusted by adopting a manual adjustment mode, the effect is poor, time and labor are consumed, and the unstable microwave condition and the huge fluctuation of plasma can be caused depending on the proficiency of an operator. In addition, the currently adopted infrared temperature measurement equipment generally has a measurement range of 300-1200 ℃, the maximum allowable error is within +/-1% tm (note: tm is the difference value of the measurement range), and the measurement range is not very accurate.
Therefore, it is necessary to provide an automatic adjusting device for designing and optimizing the temperature detection and control scheme of the MPCVD apparatus.
Disclosure of Invention
The present invention is directed to overcoming the above-mentioned drawbacks of the prior art and providing a temperature detection control system and method for an MPCVD apparatus, which is accurate in measurement and automatic in adjustment.
The purpose of the invention can be realized by the following technical scheme:
a temperature detection control system for an MPCVD device is used for controlling the temperature of a microwave power supply and is characterized by comprising a temperature detection unit and a temperature control unit, wherein the temperature detection unit comprises an interaction module, an alarm processing module and a detection module;
k type thermocouple detection microwave power supply in the real-time temperature of diamond synthesis process, interactive module input set temperature and show real-time temperature and set temperature, alarm processing module obtain real-time temperature and set temperature through K type thermocouple and interactive module respectively to judge whether current temperature surpasss the error range of setting for the temperature, if, then start the warning and send control signal to temperature control unit, temperature control unit change the microwave power size according to alarm processing module's control signal, control microwave power supply's temperature.
Further, the alarm processing module further comprises a buzzer, a first LED indicator light and a second LED indicator light, the first LED indicator light and the second LED indicator light are different in color, and the buzzer, the first LED indicator light and the second LED indicator light are respectively connected with the single chip microcomputer.
Furthermore, when the single chip microcomputer judges that the current temperature is higher than the error range of the set temperature, the buzzer is driven to alarm, the first LED indicator lamp is driven to light, and a control signal is sent to the temperature control unit;
when the single chip microcomputer judges that the current temperature is lower than the error range of the set temperature, the buzzer is driven to give an alarm, the second LED indicator lamp is driven to light, and a control signal is sent to the temperature control unit, the temperature control unit increases the microwave power and feeds the microwave power back to the microwave power supply, so that the temperature is increased to the error range of the set temperature.
Furthermore, the detection module also comprises a temperature conversion chip, and the K-type thermocouple is connected with the single chip microcomputer through the temperature conversion chip.
Further, the interactive module comprises a keyboard and a display screen, the keyboard and the display screen are respectively connected with the single chip microcomputer, the keyboard is used for inputting the set temperature, and the display screen is used for displaying the real-time temperature and the set temperature.
Furthermore, the keyboard comprises three keys which are a PLAS key, an SUBS key and a START key respectively, wherein the PLAS key is used for increasing the set temperature, the SUBS key is used for reducing the set temperature, the START key is used for starting the set mode, all the three keys of the keyboard are normally open keys which are connected with the ground to form a low level after being pressed down, and the single chip microcomputer is effective when the key data are read by the single chip microcomputer to be the low level;
when the system is started, the set temperature increases when the PLAS key is pressed, decreases when the SUBS key is pressed, and enters a set mode when the START key is pressed.
Further, the display screen is an LCD display screen and comprises two lines of display lines, each line comprises 16 characters, and the display lines are respectively used for displaying the current real-time temperature and the set temperature.
Further preferably, the singlechip is AT89C51 singlechip, the keyboard controls the input set temperature range to be 350-1000 ℃ through the singlechip, the use temperature range of the K-type thermocouple is 333-1200 ℃, and the error range is +/-0.75% tm。
Furthermore, the temperature control unit comprises a computer and a signal identification module which are connected with each other, the signal identification module is connected with the single chip microcomputer, and the computer changes the microwave power through a control signal identified by the signal identification module and controls the temperature of the microwave power supply.
A method of operating a temperature sensing control system for an MPCVD apparatus as described, comprising the steps of:
s1: the alarm processing module acquires the set temperature input by the interaction module;
s2: the alarm processing module acquires real-time temperature of a diamond synthesis process in the microwave power supply detected by the K-type thermocouple, and sends the real-time temperature and the set temperature to the interaction module to display the real-time temperature and the set temperature;
s3: the alarm processing module judges whether the current real-time temperature is higher than the error range of the set temperature or lower than the error range of the set temperature, if so, the step S4 is executed, if not, the step S5 is executed, otherwise, the MPCVD device normally operates;
s4: the alarm processing module starts an alarm and sends a control signal to the temperature control unit, and the temperature control unit reduces microwave power and feeds back the microwave power to the microwave power supply to reduce the temperature to be within the error range of the set temperature;
s5: the alarm processing module starts an alarm and sends a control signal to the temperature control unit, and the temperature control unit increases the microwave power and feeds back the microwave power to the microwave power supply to enable the temperature to rise to be within the error range of the set temperature.
Compared with the prior art, the invention has the following advantages:
1) the temperature measuring precision of the K-type thermocouple adopted by the invention is higher than that of a common infrared thermometer, the measurement is accurate, the accuracy of the deposition temperature detection can be improved, the accurate control of the CVD diamond deposition temperature is facilitated, and the temperature detection and control precision is improved;
2) according to the invention, through the single chip microcomputer, the microwave power supply, the K-type thermocouple, the LCD display and temperature control unit, the automatic adjustment of the deposition temperature of the microwave power supply can be realized, the deposition temperature is ensured to be within a reasonable range, the matching of all factors is reasonably adjusted, the single chip microcomputer obtains the current temperature through the K-type thermocouple in real time, the adjustment sensitivity is high, and the time and the labor are saved;
3) according to the invention, the temperature detection and the temperature control are automatically completed through the temperature detection unit and the temperature control unit, the microwave power is adjusted, the stable operation of the equipment is ensured, the 24-hour manual monitoring is not needed, the labor cost is saved, and the equipment safety is improved.
Drawings
FIG. 1 is a flow chart of temperature detection and automatic control of an MPCVD apparatus according to the present invention;
FIG. 2 is a circuit diagram of a Proteus simulation circuit for temperature detection and automatic control of the MPCVD apparatus of the present invention.
1. The device comprises a microwave power supply, a type-2 and type-K thermocouple, a single chip microcomputer, a type-4 temperature conversion chip, a type-5 keyboard, a type-6 display screen, a type-7 temperature control unit, a type-8 relay.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.
Examples
As shown in fig. 1 and 2, the present invention provides a temperature detection control system for an MPCVD apparatus for controlling the temperature of a microwave power supply 1, comprising a temperature detection unit and a temperature control unit 7. The temperature detection unit comprises an interaction module, an alarm processing module and a detection module, and the temperature control unit 7 comprises a computer and a signal identification module which are connected with each other.
Alarm processing module includes singlechip 3, bee calling organ, first LED pilot lamp and second LED pilot lamp, and the colour of first LED pilot lamp and second LED pilot lamp is different, in this embodiment, is red and green respectively, and bee calling organ, first LED pilot lamp and second LED pilot lamp are connected with singlechip 3 respectively, and singlechip 3 still is connected with microwave power supply 1 through relay 8. The signal identification module of the temperature control unit 7 is connected with the single chip microcomputer 3, and the computer changes the microwave power through the control signal identified by the signal identification module and controls the temperature of the microwave power supply 1.
The detection module comprises a K-type thermocouple 2 and a temperature conversion chip 4, the K-type thermocouple 2 is connected with the single chip microcomputer 3 through the temperature conversion chip 4, and the K-type thermocouple 2 is further connected with the microwave power supply 1.
The interaction module comprises a keyboard 5 and a display screen 6, the keyboard 5 and the display screen 6 are respectively connected with the single chip microcomputer 3, the keyboard 5 is used for inputting set temperature, and the display screen 6 is used for displaying real-time temperature and set temperature. In this embodiment, the keyboard 5 includes three keys, which are a PLAS key, a SUBS key and a START key, respectively, the PLAS key is used to increase the set temperature, the SUBS key is used to decrease the set temperature, the START key is used to START the set mode, all three keys of the keyboard 5 are normally open keys, when not triggered, the keys are in an off state, and the keys are connected to the ground after being pressed, so the keys are at a low level, and the single chip microcomputer is effective when reading the key data to be at the low level; when the system is started, the set temperature increases when the PLAS key is pressed, decreases when the SUBS key is pressed, and enters a set mode when the START key is pressed.
This system during operation, K type thermocouple 2 is used for detecting the real-time temperature of diamond synthesis process in microwave power supply 1, and keyboard 5 is used for the input to set for the temperature, and display screen 6 is used for showing real-time temperature and sets for the temperature, and singlechip 3 obtains real-time temperature and sets for the temperature through K type thermocouple 2 and keyboard 5 respectively to judge whether current real-time temperature surpasss the error band who sets for the temperature:
if the current real-time temperature is higher than the error range of the set temperature, a buzzer is driven to give an alarm, a first LED indicator lamp is driven to light, and a control signal is sent to a temperature control unit 7, the temperature control unit 7 reduces the microwave power according to the control signal of the singlechip 3 and feeds the microwave power back to the microwave power supply 1, so that the temperature is reduced to the error range of the set temperature;
if the current real-time temperature is lower than the error range of the set temperature, the buzzer is driven to give an alarm, the second LED indicator lamp is driven to light, and a control signal is sent to the temperature control unit 7, the microwave power is increased by the temperature control unit 7 and fed back to the microwave power supply 1, so that the temperature is increased to the error range of the set temperature.
In this embodiment, the error range is set to ± 6.5 ℃, the temperature conversion chip 4 is of a type MAX6675, the display screen 6 is of an LCD display screen, and includes two rows of display lines, each row includes 16 characters, and is respectively used for displaying the current real-time temperature and the set temperature, the single chip microcomputer 3 is of an AT89C51 single chip microcomputer, the keyboard 5 controls the input set temperature range to be 350 ℃ to 1000 ℃ through the single chip microcomputer 3, the diameter of the K-type thermocouple 2 is generally 1.2mm to 4.0mm, and the nominal chemical composition of the positive electrode (KP) is as follows: ni: and Cr is 90: the nominal chemical composition of the negative electrode (KN) is: ni: si 97: 3, the using temperature range is 333-1200 DEG CError range of. + -. 0.75% tm(note: tm is the difference of measuring range), the current K-type thermocouple is the cheapest metal thermocouple with the largest dosage, and the dosage is the sum of other thermocouples. .
The working method of the temperature detection control system of the MPCVD device specifically comprises the following steps:
s1: the alarm processing module acquires the set temperature input by the interaction module;
s2: the alarm processing module acquires the real-time temperature of the diamond synthesis process in the microwave power supply 1 detected by the K-type thermocouple 2 and sends the real-time temperature and the set temperature to the interaction module to be displayed;
s3: the alarm processing module judges whether the current real-time temperature is higher than the error range of the set temperature or lower than the error range of the set temperature, if so, the step S4 is executed, if not, the step S5 is executed, otherwise, the MPCVD device normally operates;
s4: the alarm processing module starts an alarm and sends a control signal to the temperature control unit 7, and the temperature control unit 7 reduces the microwave power and feeds back the microwave power to the microwave power supply 1 to reduce the temperature to be within the error range of the set temperature;
s5: the alarm processing module starts alarm and sends a control signal to the temperature control unit 7, and the temperature control unit 7 increases microwave power and feeds back the microwave power to the microwave power supply 1, so that the temperature is increased to be within the error range of the set temperature.
As shown in fig. 2, in the present embodiment, the set temperature is set to 700 ℃, and when the error range is 700 ± 6.5 ℃, the whole system operates normally. When the temperature is higher than 706.5 ℃, the AT89C51 singlechip U1 sends out a control signal and an alarm signal to drive the buzzer LS1 to send out alarm sound, meanwhile, the first LED indicator light RED light turns on D3(LED RED), the temperature control unit 7 reduces the microwave power and feeds back the microwave power to the microwave power supply 1, so that the temperature is reduced to be within the temperature range of 700 +/-6.5 ℃; when the temperature is lower than 693.5 ℃, the U1 of the AT89C51 singlechip sends out a control signal and an alarm signal to drive the buzzer LS1 to send out alarm sound, meanwhile, the GREEN light of the second LED indicator light is turned on D1(LED GREEN), the temperature control unit 7 increases the microwave power and feeds back the microwave power to the microwave power supply 1, and the temperature is increased to be within the temperature range of 700 +/-6.5 ℃.
The main program of the system mainly comprises a system initialization part, a temperature value sampling part, a keyboard scanning part, a real-time display part and the like, and is provided with a keyboard and a display subprogram. In order to realize real-time display and control of the temperature. The temperature control part uses K-type temperature sensor, AT89C51 single chip and LCD display screen hardware circuit to complete real-time temperature detection and display, uses K-type temperature sensor to detect temperature, uses median filter method to fetch a value and store it in a unit in the program memory access as final detection signal, sets temperature by means of key-press, and displays it in LCD.
A Proteus simulation circuit is adopted, the temperature is set to be detected by a sensor and input into an AT89C51 singlechip, and the temperature is displayed on an LED nixie tube, so that the temperature is in a temperature control range. When the temperature is out of the control temperature range, the singlechip sends out a control signal and an alarm signal, and the buzzer sends out an alarm sound. When the detected temperature is higher than the upper temperature limit, the corresponding LED red light is on, and the control system reduces the microwave power and feeds the microwave power back to the microwave power supply to reduce the temperature to the control temperature range; when the detected temperature is lower than the lower temperature limit, the corresponding LED green light is on, the control system reduces the microwave power and feeds the microwave power back to the microwave power supply, so that the temperature is increased to the control temperature range.
While the invention has been described with reference to specific embodiments, the invention is not limited thereto, and those skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A temperature detection control system for an MPCVD device is used for controlling the temperature of a microwave power supply (1), and is characterized by comprising a temperature detection unit and a temperature control unit (7), wherein the temperature detection unit comprises an interaction module, an alarm processing module and a detection module, the detection module comprises a K-type thermocouple (2), the alarm processing module comprises a single chip microcomputer (3), the K-type thermocouple (2) is connected with the microwave power supply (1), and the single chip microcomputer (3) is respectively connected with the K-type thermocouple (2), the interaction module and the temperature control unit (7);
k type thermocouple (2) detect the real-time temperature of diamond synthesis process in microwave power supply (1), mutual module input set temperature and show real-time temperature and set temperature, alarm processing module obtain real-time temperature and set temperature through K type thermocouple (2) and mutual module respectively to judge whether current temperature surpasss the error range of setting for the temperature, if, then start the warning and send control signal to temperature control unit (7), temperature control unit (7) change the microwave power size according to alarm processing module's control signal, control the temperature of microwave power supply (1).
2. The temperature detection control system for the MPCVD apparatus according to claim 1, wherein the alarm processing module further comprises a buzzer, a first LED indicator and a second LED indicator, the first LED indicator and the second LED indicator are different in color, and the buzzer, the first LED indicator and the second LED indicator are respectively connected to the single chip microcomputer (3).
3. The temperature detection control system for the MPCVD device according to claim 2, wherein when the single chip microcomputer (3) judges that the current temperature is higher than the error range of the set temperature, the buzzer alarm and the first LED indicator lamp are driven to light up, and a control signal is sent to the temperature control unit (7), and the temperature control unit (7) reduces the microwave power and feeds back the microwave power to the microwave power supply (1) to reduce the temperature to the error range of the set temperature;
when the single chip microcomputer (3) judges that the current temperature is lower than the error range of the set temperature, the buzzer is driven to give an alarm, the second LED indicating lamp is lightened, and a control signal is sent to the temperature control unit (7), the temperature control unit (7) increases the microwave power and feeds the microwave power back to the microwave power supply (1), so that the temperature is increased to the error range of the set temperature.
4. The temperature detection control system for the MPCVD apparatus according to claim 1, wherein the detection module further comprises a temperature conversion chip (4), and the K-type thermocouple (2) is connected to the single chip microcomputer (3) through the temperature conversion chip (4).
5. The temperature detection control system for the MPCVD apparatus according to claim 1, wherein the interaction module comprises a keyboard (5) and a display screen (6), the keyboard (5) and the display screen (6) are respectively connected with the single chip microcomputer (3), the keyboard (5) is used for inputting the set temperature, and the display screen (6) is used for displaying the real-time temperature and the set temperature.
6. The temperature detection control system for the MPCVD device according to claim 5, wherein the keyboard (5) comprises three keys, namely a PLAS key, a SUBS key and a START key, wherein the PLAS key is used for increasing the set temperature, the SUBS key is used for decreasing the set temperature, the START key is used for starting the set mode, all three keys of the keyboard (5) are normally open keys which are connected with the ground to form a low level after being pressed, and the single chip microcomputer (3) reads the key data to be effective when the key data is in the low level;
when the system is started, the set temperature increases when the PLAS key is pressed, decreases when the SUBS key is pressed, and enters a set mode when the START key is pressed.
7. The temperature detection control system for MPCVD apparatus according to claim 5, wherein said display screen (6) is an LCD display screen comprising two display lines, each line comprising 16 characters, for displaying the current real-time temperature and the set temperature respectively.
8. The temperature detection control system for the MPCVD device according to claim 6, wherein the single chip microcomputer (3) is an AT89C51 single chip microcomputer, the keyboard (5) controls the input set temperature range to be 350-1000 ℃ through the single chip microcomputer (3), and the keyboard controls the input set temperature range to be 350-1000 ℃ through the single chip microcomputer (3)The service temperature range of the K-type thermocouple (2) is 333-1200 ℃, and the error range is +/-0.75 percent tm。
9. The temperature detection control system for the MPCVD apparatus according to claim 3, wherein the temperature control unit (7) comprises a computer and a signal identification module which are connected with each other, the signal identification module is connected with the single chip microcomputer (3), and the computer controls the temperature of the microwave power supply (1) by changing the microwave power according to the control signal identified by the signal identification module.
10. A method of operating a temperature detection control system for an MPCVD apparatus according to any one of claims 1 to 9, comprising the steps of:
s1: the alarm processing module acquires the set temperature input by the interaction module;
s2: the alarm processing module acquires the real-time temperature of the diamond synthesis process in the microwave power supply (1) detected by the K-type thermocouple (2), and sends the real-time temperature and the set temperature to the interaction module to be displayed;
s3: the alarm processing module judges whether the current real-time temperature is higher than the error range of the set temperature or lower than the error range of the set temperature, if so, the step S4 is executed, if not, the step S5 is executed, otherwise, the MPCVD device normally operates;
s4: the alarm processing module starts an alarm and sends a control signal to the temperature control unit (7), and the temperature control unit (7) reduces the microwave power and feeds the microwave power back to the microwave power supply (1) to reduce the temperature to be within the error range of the set temperature;
s5: the alarm processing module starts alarm and sends a control signal to the temperature control unit (7), and the temperature control unit (7) increases microwave power and feeds back the microwave power to the microwave power supply (1) to enable the temperature to rise to the error range of the set temperature.
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| CN113026001B8 (en) * | 2021-05-26 | 2021-09-14 | 上海征世科技股份有限公司 | Method for preparing diamond by metastable state control |
| CN118497722A (en) * | 2024-07-17 | 2024-08-16 | 成都晶柱科技有限公司 | High-temperature ionization control system in MPCVD diamond cultivation process |
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Application publication date: 20210420 |