CN112663001A - Titanium alloy blade protective coating and preparation method thereof - Google Patents

Titanium alloy blade protective coating and preparation method thereof Download PDF

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CN112663001A
CN112663001A CN202011470813.9A CN202011470813A CN112663001A CN 112663001 A CN112663001 A CN 112663001A CN 202011470813 A CN202011470813 A CN 202011470813A CN 112663001 A CN112663001 A CN 112663001A
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mcraly
alsiy
titanium alloy
arc
protective coating
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CN112663001B (en
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吴护林
解志文
向林
高旭
公平
宁海青
陈永君
郭锋
苏艳
高诗情
邢志辉
刘鹏
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University of Science and Technology Liaoning USTL
Southwest Institute of Technology and Engineering of China South Industries Group
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University of Science and Technology Liaoning USTL
No 59 Research Institute of China Ordnance Industry
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Abstract

本发明提供了一种钛合金叶片防护涂层及其制备方法,采用设置在钛合金基体上的MCrAlY+AlSiY复合涂层,MCrAlY层通过电弧离子镀工艺沉积在钛合金基体表面,AlSiY层通过离子辅助电弧离子镀工艺沉积在MCrAlY层上。采用本发明的方案,所得防护涂层与钛合金叶片基材的结合强度高,防护涂层表面及其内部无大颗粒尺寸及数量、无微孔,涂层致密性非常优异,不仅能够提高钛合金叶片防护涂层的抗高温氧化、抗热腐蚀性能,尤其适用于湿热盐雾环境(如海洋服役环境)下的高温防护,而且能有效延长钛合金叶片防护涂层的使用寿命。

Figure 202011470813

The invention provides a titanium alloy blade protective coating and a preparation method thereof. The MCrAlY+AlSiY composite coating arranged on a titanium alloy base is adopted. The MCrAlY layer is deposited on the surface of the titanium alloy base by an arc ion plating process, and the AlSiY The assisted arc ion plating process is deposited on the MCrAlY layer. By adopting the scheme of the present invention, the obtained protective coating has high bonding strength with the titanium alloy blade substrate, the surface of the protective coating and its interior have no large particle size and number, no micropores, and the coating has excellent compactness, which can not only improve the titanium alloy The high temperature oxidation resistance and thermal corrosion resistance of the alloy blade protective coating are especially suitable for high temperature protection in hot and humid salt spray environment (such as marine service environment), and can effectively prolong the service life of the titanium alloy blade protective coating.

Figure 202011470813

Description

Titanium alloy blade protective coating and preparation method thereof
Technical Field
The invention relates to the technical field of marine equipment surface engineering, in particular to a titanium alloy blade protective coating suitable for a marine service environment and a preparation method thereof.
Background
In recent years, with the deep expansion of overseas interests in China and the continuous promotion of strong ocean plans for building oceans, the strength construction of naval equipment of China enters an unprecedented development period, and various novel naval vessels are sequentially arranged and armed to start serving. The gas turbine has the advantages of small volume, light weight, high energy conversion efficiency, good power stability and the like, gradually replaces the traditional steam and diesel power device, and is widely applied to large surface naval vessels. The titanium alloy has the advantages of high strength, low density, high toughness, good corrosion resistance and the like, and is one of the preferred materials of the current and future gas turbine blades. However, under multiple marine service environments such as high temperature, high humidity, high salt and water vapor, the titanium alloy blade can generate serious high-temperature solid salt-water vapor synergistic corrosion, and the chemical oxidation-electrochemical corrosion caused by the serious high-temperature solid salt-water vapor synergistic corrosion seriously threatens the marine service life and reliability of the whole equipment. Therefore, the corrosion prevention of the titanium alloy blade in the marine service environment is one of the key technical problems to be solved urgently.
In the prior art, a patent CN101724301A discloses a MCrAlY + AlSiY composite coating for Ni base, wherein an AlSiY coating is deposited on a conventional MCrAlY coating to form a MCrAlY composite coating which is rich in Al at the outer layer and rich in Cr at the inner layer and is distributed in a gradient manner, the concentration of Al element on the surface layer of the composite coating is 18-22 wt%, and the concentration of Cr element on the inner layer is 28-45 wt%; the preparation method comprises the following steps: arc Ion Plating (AIP) to prepare a conventional MCrAlY coating; depositing an AlSiY coating on the basis of a conventional MCrAlY coating; finally obtaining the MCrAlY composite coating which is rich in Al on the outer layer and rich in Cr on the inner layer and is in gradient distribution through high-temperature vacuum diffusion annealing at 950 ℃. Although the performance of the MCrAlY + AlSiY composite coating is improved compared with the performance of the conventional MCrAlY coating, the problems of easy corrosion and short service life still exist when the MCrAlY + AlSiY composite coating is applied to the surface of the titanium alloy gas turbine blade in the marine service environment.
Disclosure of Invention
The invention aims to provide a titanium alloy blade protective coating which is corrosion-resistant and long in service life and is used in an ocean service environment, and the invention aims to provide a preparation method of the titanium alloy blade protective coating.
In order to achieve the above object, the present invention adopts the following technical solutions.
A titanium alloy blade protective coating is characterized in that: the protective coating adopts a MCrAlY + AlSiY composite coating arranged on a titanium alloy matrix, an MCrAlY layer is deposited on the surface of the titanium alloy matrix through an arc ion plating process, and an AlSiY layer is deposited on the MCrAlY layer through an ion-assisted arc ion plating process.
In order to further improve the corrosion resistance and the service life of the protective coating of the titanium alloy blade, the AlSiY layer is deposited on the MCrAlY layer through an ion-assisted arc ion plating process and a low-temperature annealing process, and the annealing temperature of the low-temperature annealing process is 600-720 ℃.
In order to further improve the corrosion resistance and the service life of the protective coating of the titanium alloy blade, the MCrAlY target material adopted by the arc ion plating process comprises the following components (in percentage by mass): co: 26-44.5, Cr: 18-22, Al: 11-12, Y: 0.5 to 0.6, Ni: the balance; the AlSiY target comprises the following components in percentage by mass: 60-88.5, Si: 11-39.5, Y: 0.5 to 0.9.
In a preferred embodiment of the invention, the thickness of the MCrAlY layer is 30 to 31 micrometers and the thickness of the AlSiY layer is 27 to 33 micrometers.
The preparation method of the titanium alloy blade protective coating comprises the following steps:
step 1, performing sand blasting treatment on a base material before deposition, and then performing ultrasonic cleaning and drying;
step 2, ion cleaning: when the vacuum degree in the vacuum chamber reaches 1 x 10-3Pa~2×10-2When Pa is needed, argon is introduced into the vacuum chamber, the air pressure is controlled within the range of 0.1-4.0 Pa, the pulse negative bias is applied to the substrate and controlled within-40 to-500V, the gas glow discharge is enhanced through electric arc, and the substrate is subjected to glow discharge ion cleaning for 10-120 minutes;
and 3, depositing the MCrAlY + AlSiY composite coating on the base material: regulating Ar gas flow, controlling the air pressure in a vacuum chamber within the range of 0.1-4.0 Pa, controlling the matrix plus pulse negative bias within-40-500V, simultaneously starting an MCrAlY target arc source, wherein the arc flow is 60-150A, the deposition temperature is 200-400 ℃, and preparing an MCrAlY layer (the MCrAlY layer is deposited on a base material);
then adjusting the flow rate of Ar again, controlling the air pressure in the vacuum chamber to be 0.1-4.0 Pa, controlling the matrix plus pulse negative bias to be-40 to-500V, simultaneously starting an AlSiY target arc source, wherein the arc flow is 50-130A, simultaneously starting an arc enhanced gas glow discharge system, carrying out Ar ion auxiliary deposition, and obtaining an AlSiY layer (the AlSiY layer is deposited on the MCrAlY layer, and the obtained coating is an MCrAlY + AlSiY composite coating);
and 4, stopping arc, stopping pulse negative bias of the substrate, stopping gas introduction, continuing vacuumizing, cooling the workpiece to below 80 ℃ along with the furnace, opening the vacuum chamber, and taking out the workpiece.
Further, the preparation method further comprises the step 5: and (4) after the step 4 is finished, carrying out vacuum annealing treatment on the workpiece (actually carrying out vacuum annealing treatment on the MCrAlY + AlSiY composite coating), wherein the annealing time is 1-6 hours.
Further, the preparation method further comprises the step 6: and (5) after the step 5 is finished, carrying out pre-oxidation treatment on the workpiece (essentially carrying out pre-oxidation treatment on the MCrAlY + AlSiY composite coating), wherein the pre-oxidation temperature is 600-720 ℃, and the pre-oxidation time is 6-8 hours.
Has the advantages that: by adopting the scheme of the invention, the bonding strength of the obtained protective coating and the titanium alloy blade base material is high, the surface and the interior of the protective coating have no large particle size and number and no micropores, and the compactness of the coating is very excellent, so that the high-temperature oxidation resistance and the hot corrosion resistance of the titanium alloy blade protective coating can be improved, the titanium alloy blade protective coating is particularly suitable for high-temperature protection in a hot and humid salt fog environment (such as an ocean service environment), and the service life of the titanium alloy blade protective coating can be effectively prolonged; the titanium alloy blade protective coating prepared by the scheme of the invention also has the advantages of good process repeatability, controllable components, easy industrial production and the like.
Drawings
FIG. 1 and FIG. 2 are sectional morphology diagrams (scanning electron microscope images) of the MCrAlY/AlSiY composite coating on the titanium alloy substrate in example 1 and example 2 in sequence;
FIGS. 3 and 4 are sectional profile (scanning electron microscope images) of the MCrAlY/AlSiY composite coating on the titanium alloy substrate in example 3 and comparative example in sequence;
FIG. 5 is a graph of the hot corrosion weight gain of the MCrAlY/AlSiY composite coating on the titanium alloy substrate of example 4.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific embodiments, but the following embodiments are only used for understanding the principle of the present invention and the core idea thereof, and do not limit the scope of the present invention. It should be noted that modifications to the invention as described herein, which do not depart from the principles of the invention, are intended to be within the scope of the claims which follow.
Example 1
The base material adopts titanium alloy (the mark is Ti6Al 4V), the sample size is 20mm multiplied by 10mm, and the coated surface size is 15mm multiplied by 15 mm. Depositing a MCrAlY/AlSiY composite coating on a base material by adopting electric Arc Ion Plating (AIP), wherein the MCrAlY target comprises the following components in percentage by mass: co: 26, Cr: 22, Al: 12, Y: 0.5, Ni: the balance; the AlSiY target comprises the following components in percentage by mass: 88.5, Si: 11, Y: 0.9.
a specific preparation method of a titanium alloy blade protective coating comprises the following steps:
step 1, performing sand blasting treatment on a base material before deposition, and then performing ultrasonic cleaning and drying for later use;
step 2, depositing the MCrAlY/AlSiY composite coating by adopting domestic arc ion plating equipment, wherein the vacuum degree in the vacuum chamber reaches 4.8 multiplied by 10-3When Pa, introducing argon into the vacuum chamber, controlling the air pressure at 1.7Pa, applying pulse negative bias to the substrate at-160V, and enhancing gas glow discharge through electric arc to perform glow discharge ion cleaning on the surface of the substrate for 60 minutes, wherein the pulse duty ratio is 65%;
step 3, regulating the flow rate of Ar, controlling the air pressure in the vacuum chamber to be 1.3Pa, applying pulse negative bias to the base material to be-120V, and starting an MCrAlY target arc source with the pulse duty ratio of 50 percent, wherein the MCrAlY target arc flow is 105A, the deposition temperature is 220 ℃, the deposition time is 240min, and the thickness of the prepared MCrAlY layer is 31 microns;
adjusting the argon flow again, controlling the air pressure at 1.1Pa, applying pulse negative bias to the substrate at-170V, controlling the pulse duty ratio at 48%, simultaneously starting an AlSiY target arc source, controlling the AlSiY target arc flow at 85A, simultaneously starting an arc enhanced gas glow discharge system, performing Ar ion assisted deposition, controlling the deposition temperature at 310 ℃ and the deposition time at 110min, and controlling the thickness of the prepared AlSiY layer at 33 micrometers;
step 4, stopping arc, stopping matrix pulse negative bias, stopping gas introduction, continuing vacuumizing, cooling the workpiece to below 80 ℃ along with the furnace, opening a vacuum chamber, and taking out the workpiece;
and 5, after the step 4 is finished, carrying out vacuum annealing on the workpiece, wherein the annealing temperature is 650 ℃, and the annealing time is 3 hours.
The MCrAlY/AlSiY composite coating prepared in the embodiment has a smooth surface, the roughness of Ra1.48 microns, uniform and consistent color and luster of the coating and no obvious defects.
The MCrAlY/AlSiY composite coating in the embodiment is subjected to electron microscope scanning, and the result is shown in figure 1, so that the whole section of the coating is completely free of micropores and very compact, and the corrosion resistance of the coating is very excellent.
Example 2
The base material components and process parameters refer to the examples, and the difference from the example 1 is the preparation method, the specific preparation method in the example:
step 1, performing sand blasting treatment on a base material before deposition, and then performing ultrasonic cleaning and drying for later use;
step 2, depositing the MCrAlY/AlSiY composite coating by adopting domestic arc ion plating equipment, wherein the vacuum degree in the vacuum chamber reaches 4.8 multiplied by 10-3When Pa, introducing argon into the vacuum chamber, controlling the air pressure at 1.7Pa, applying pulse negative bias to the substrate at-160V, and enhancing gas glow discharge through electric arc to perform glow discharge ion cleaning on the surface of the substrate for 60 minutes, wherein the pulse duty ratio is 65%;
step 3, regulating the flow rate of Ar, controlling the air pressure in the vacuum chamber to be 1.3Pa, applying pulse negative bias to the base material to be-120V, and starting an MCrAlY target arc source with the pulse duty ratio of 50 percent, wherein the MCrAlY target arc flow is 105A, the deposition temperature is 220 ℃, the deposition time is 240min, and the thickness of the prepared MCrAlY layer is 31 microns; continuously depositing an AlSiY layer with the thickness of 33 microns on the MCrAlY layer (in the process, the air pressure is controlled to be 1.1Pa, the pulse negative bias voltage is applied to the base material to be-170V, the pulse duty ratio is 48 percent, simultaneously, an AlSiY target arc source is started, the AlSiY target arc flow is 85A), and obtaining the MCrAlY/AlSiY composite coating;
step 4, stopping arc, stopping matrix pulse negative bias, stopping gas introduction, continuing vacuumizing, cooling the workpiece to below 80 ℃ along with the furnace, opening a vacuum chamber, and taking out the workpiece;
and 5, after the step 4 is finished, carrying out vacuum annealing on the workpiece, wherein the annealing temperature is 680 ℃, and the annealing time is 3 hours.
The MCrAlY/AlSiY composite coating in the embodiment is subjected to electron microscope scanning, and the result is shown in figure 2, so that the section of the sample has individual micropores, but the coating is relatively dense.
Example 3
The base material components and process parameters refer to the examples, and the difference from the example 1 is the preparation method, the specific preparation method in the example:
step 1, performing sand blasting treatment on a base material before deposition, and then performing ultrasonic cleaning and drying for later use;
step 2, depositing the MCrAlY/AlSiY composite coating by adopting domestic arc ion plating equipment, wherein the vacuum degree in the vacuum chamber reaches 4.8 multiplied by 10-3When Pa, introducing argon into the vacuum chamber, controlling the air pressure at 1.7Pa, applying pulse negative bias to the substrate at-160V, and enhancing gas glow discharge through electric arc to perform glow discharge ion cleaning on the surface of the substrate for 60 minutes, wherein the pulse duty ratio is 65%;
step 3, regulating the flow rate of Ar, controlling the air pressure in the vacuum chamber to be 1.3Pa, applying pulse negative bias to the base material to be-120V, and starting an MCrAlY target arc source with the pulse duty ratio of 50 percent, wherein the MCrAlY target arc flow is 105A, the deposition temperature is 220 ℃, the deposition time is 240min, and the thickness of the prepared MCrAlY layer is 31 microns;
adjusting the argon flow again, controlling the air pressure at 1.1Pa, applying pulse negative bias to the substrate at-170V, controlling the pulse duty ratio at 48%, simultaneously starting an AlSiY target arc source, controlling the AlSiY target arc flow at 85A, simultaneously starting an arc enhanced gas glow discharge system, performing Ar ion assisted deposition, controlling the deposition temperature at 310 ℃ and the deposition time at 110min, and controlling the thickness of the prepared AlSiY layer at 33 micrometers;
and 4, stopping arc, stopping pulse negative bias of the substrate, stopping gas introduction, continuing vacuumizing, cooling the workpiece to below 80 ℃ along with the furnace, opening the vacuum chamber, and taking out the workpiece.
The MCrAlY/AlSiY composite coating prepared in the embodiment has a smooth and flat surface, the roughness of Ra1.65 microns, uniform and consistent color and luster of the coating and no obvious defects. The MCrAlY/AlSiY composite coating in the embodiment is subjected to electron microscope scanning, and the result is shown in figure 3, so that the whole section of the coating is almost free of micropores, and the coating is very dense.
Comparative examples
The base material components and process parameters refer to the examples, and the difference from the example 1 is the preparation method, the specific preparation method in the example:
step 1, performing sand blasting treatment on a base material before deposition, and then performing ultrasonic cleaning and drying for later use;
step 2, depositing the MCrAlY/AlSiY composite coating by adopting domestic arc ion plating equipment, wherein the vacuum degree in the vacuum chamber reaches 4.8 multiplied by 10-3When Pa, introducing argon into the vacuum chamber, controlling the air pressure at 1.7Pa, applying pulse negative bias to the substrate at-160V, and enhancing gas glow discharge through electric arc to perform glow discharge ion cleaning on the surface of the substrate for 60 minutes, wherein the pulse duty ratio is 65%;
step 3, regulating the flow rate of Ar, controlling the air pressure in the vacuum chamber to be 1.3Pa, applying pulse negative bias to the base material to be-120V, and starting an MCrAlY target arc source with the pulse duty ratio of 50 percent, wherein the MCrAlY target arc flow is 105A, the deposition temperature is 220 ℃, the deposition time is 240min, and the thickness of the prepared MCrAlY layer is 31 microns; continuously depositing an AlSiY layer with the thickness of 33 microns on the MCrAlY layer (in the process, the air pressure is controlled to be 1.1Pa, the pulse negative bias voltage is applied to the base material to be-170V, the pulse duty ratio is 48 percent, simultaneously, an AlSiY target arc source is started, the AlSiY target arc flow is 85A), and obtaining the MCrAlY/AlSiY composite coating;
and 4, stopping arc, stopping pulse negative bias of the substrate, stopping gas introduction, continuing vacuumizing, cooling the workpiece to below 80 ℃ along with the furnace, opening the vacuum chamber, and taking out the workpiece.
The MCrAlY/AlSiY composite coating in this example was subjected to electron microscope scanning, and the result is shown in fig. 4, which shows that the end face thereof has a large number of micropores, the coating has poor compactness, and the surface thereof has poor corrosion resistance.
Example 4
Substrate composition, process parameters reference example, and steps 1-5 of the method of preparation reference example 1, which differs from example 1 in that: and 5, after the step 5 is finished, carrying out pre-oxidation treatment on the workpiece, wherein the pre-oxidation temperature is 650 ℃ and the time is 6 hours.
As shown in fig. 5, a hot corrosion weight gain curve is obtained for the MCrAlY/AlSiY composite coating deposited in this example, and meanwhile, as a comparison, the situations of the TC4 substrate without coating and the MCrAlY/AlSiY composite coating deposited without ion beam assisted (obtained after pre-oxidation treatment of the composite coating in example 2) are also given, as can be seen from the curve, the TC4 substrate is subjected to weight loss after corrosion for 40 hours, which indicates that the material is corroded and peeled off, the MCrAlY/AlSiY composite coating deposited without ion beam assisted starts to be corroded for 60 hours, while the MCrAlY/AlSiY composite coating prepared in this example is still subjected to weight loss at 100 hours, and is not found to be significantly corroded and peeled off, and the surface has excellent hot corrosion resistance.
Example 5
The base material adopts TA17 titanium alloy (the mark is Ti-4 Al-2V), and the MCrAlY/AlSiY composite coating is deposited on the base material by adopting electric Arc Ion Plating (AIP), wherein the MCrAlY target material comprises the following components in percentage by mass: ni: 26, Cr: 18, Al: 11, Y: 0.5, the balance of Co, and AlSiY target components (mass percent) of Al: 60, Si: 39.5, Y: 0.5.
the preparation method comprises the following steps:
step 1, performing sand blasting treatment on a base material before deposition, and then performing ultrasonic cleaning and drying for later use;
step 2, depositing the MCrAlY/AlSiY composite coating by adopting domestic arc ion plating equipment, wherein the vacuum degree in the vacuum chamber reaches 5.8 multiplied by 10-3When Pa, introducing argon into the vacuum chamber, controlling the air pressure at 1.1Pa, applying pulse negative bias to the substrate at-125V, and enhancing gas glow discharge through electric arc to perform glow discharge ion cleaning on the surface of the substrate for 85 minutes, wherein the pulse duty ratio is 65%;
step 3, regulating the flow rate of Ar, controlling the air pressure in the vacuum chamber to be 1.9Pa, applying pulse negative bias to the base material to be-180V, and starting an MCrAlY target arc source with the pulse duty ratio of 42%, wherein the MCrAlY target arc flow is 120A, the deposition temperature is 230 ℃, the deposition time is 260min, and the thickness of the prepared MCrAlY layer is 30 micrometers;
adjusting the argon flow again, controlling the air pressure at 1.14Pa, applying pulse negative bias to the substrate at-140V, controlling the pulse duty ratio at 63%, simultaneously starting an AlSiY target arc source, controlling the AlSiY target arc flow at 88A, simultaneously starting an arc enhanced gas glow discharge system, performing Ar ion assisted deposition, controlling the deposition temperature at 360 ℃, the deposition time at 110min, and controlling the thickness of the prepared AlSiY layer at 27 microns;
step 4, stopping arc, stopping matrix pulse negative bias, stopping gas introduction, continuing vacuumizing, cooling the workpiece to below 80 ℃ along with the furnace, opening a vacuum chamber, and taking out the workpiece;
5-6, after the step 4 is finished, carrying out vacuum annealing on the workpiece, wherein the annealing temperature is 710 ℃, and the annealing time is 4 hours; and after the vacuum annealing is finished, pre-oxidation treatment is carried out, wherein the pre-oxidation temperature is 620 ℃, and the time is 6 hours.
The MCrAlY/AlSiY composite coating prepared in the embodiment has a smooth surface, the roughness of Ra1.34 microns, uniform and consistent color and luster of the coating and no obvious defects.

Claims (7)

1. A titanium alloy blade protective coating is characterized in that: the protective coating adopts a MCrAlY + AlSiY composite coating arranged on a titanium alloy matrix, an MCrAlY layer is deposited on the surface of the titanium alloy matrix through an arc ion plating process, and an AlSiY layer is deposited on the MCrAlY layer through an ion-assisted arc ion plating process.
2. The titanium alloy blade protective coating of claim 1, wherein: the AlSiY layer is deposited on the MCrAlY layer through an ion-assisted arc ion plating process and a low-temperature annealing process, and the annealing temperature of the low-temperature annealing process is 600-720 ℃.
3. The titanium alloy blade protective coating of claim 2, wherein: the MCrAlY target material adopted by the arc ion plating process comprises the following components in percentage by mass: co: 26-44.5%, Cr: 18-22%, Al: 11-12%, Y: 0.5-0.6%, Ni: the balance; the AlSiY target comprises Al: 60-88.5%, Si: 11-39.5%, Y: 0.5 to 0.9 percent.
4. The titanium alloy blade protective coating according to any one of claims 1 to 3, wherein: the thickness of the MCrAlY layer is 30-31 microns, and the thickness of the AlSiY layer is 27-33 microns.
5. The method for preparing the protective coating of the titanium alloy blade as claimed in any one of claims 1 to 4, characterized by comprising the following steps:
step 1, performing sand blasting treatment on a base material before deposition, and then performing ultrasonic cleaning and drying;
step 2, ion cleaning: when the vacuum chamber is vacuumThe degree reaches 1 x 10-3Pa~2×10-2When Pa is needed, argon is introduced into the vacuum chamber, the air pressure is controlled within the range of 0.1-4.0 Pa, the pulse negative bias is applied to the substrate and controlled within-40 to-500V, the gas glow discharge is enhanced through electric arc, and the substrate is subjected to glow discharge ion cleaning for 10-120 minutes;
and 3, depositing the MCrAlY + AlSiY composite coating on the base material: adjusting the flow rate of Ar, controlling the air pressure in a vacuum chamber within the range of 0.1-4.0 Pa, controlling the matrix plus pulse negative bias within-40-500V, simultaneously starting an MCrAlY target arc source, wherein the arc flow is 60-150A, the deposition temperature is 200-400 ℃, and obtaining an MCrAlY layer; then adjusting the flow rate of Ar again, controlling the pressure in the vacuum chamber to be 0.1-4.0 Pa, controlling the matrix plus pulse negative bias to be-40 to-500V, simultaneously starting an AlSiY target arc source, wherein the arc flow is 50-130A, simultaneously starting an arc enhanced gas glow discharge system, carrying out Ar ion auxiliary deposition, and the deposition temperature is 200-400 ℃ to prepare an AlSiY layer deposited on the MCrAlY layer;
and 4, stopping arc, stopping pulse negative bias of the substrate, stopping gas introduction, continuing vacuumizing, cooling the workpiece to below 80 ℃ along with the furnace, opening the vacuum chamber, and taking out the workpiece.
6. The method for preparing according to claim 5, further comprising the step of 5: and 4, after the step 4 is finished, carrying out vacuum annealing treatment on the workpiece, wherein the annealing time is 1-6 hours.
7. The method as claimed in claim 6, further comprising a step 6, wherein after the step 5, the workpiece is pre-oxidized at a pre-oxidation temperature of 600-720 ℃ for 6-8 hours.
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CN115505881A (en) * 2021-06-07 2022-12-23 中国兵器工业第五九研究所 Application of ion beam assisted deposition in inhibiting mutual diffusion of metal coating element interfaces

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