CN112652354A - 一种平面结构三自由度微纳定位平台及使用方法 - Google Patents
一种平面结构三自由度微纳定位平台及使用方法 Download PDFInfo
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- CN112652354A CN112652354A CN202011639070.3A CN202011639070A CN112652354A CN 112652354 A CN112652354 A CN 112652354A CN 202011639070 A CN202011639070 A CN 202011639070A CN 112652354 A CN112652354 A CN 112652354A
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- 238000000034 method Methods 0.000 title claims abstract description 7
- 230000007246 mechanism Effects 0.000 claims abstract description 244
- 230000003321 amplification Effects 0.000 claims abstract description 106
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 106
- 238000006073 displacement reaction Methods 0.000 claims description 56
- 239000000919 ceramic Substances 0.000 claims description 15
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- 230000033001 locomotion Effects 0.000 description 13
- 230000008901 benefit Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- 238000005299 abrasion Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 238000005461 lubrication Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
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- 239000000523 sample Substances 0.000 description 1
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104440817A (zh) * | 2014-12-04 | 2015-03-25 | 山东大学 | 一种空间三维微位移精密定位装置 |
CN104742099A (zh) * | 2015-04-09 | 2015-07-01 | 南京航空航天大学 | 一种自行式平面三自由度压电驱动平台 |
CN204622006U (zh) * | 2015-04-09 | 2015-09-09 | 南京航空航天大学 | 一种自行式平面三自由度压电驱动平台 |
CN106195541A (zh) * | 2016-07-04 | 2016-12-07 | 山东大学 | 一种三自由度压电驱动微纳定位平台 |
CN109650327A (zh) * | 2018-11-07 | 2019-04-19 | 天津大学 | 一种平板式三维大行程纳米操作平台 |
CN109654333A (zh) * | 2018-11-07 | 2019-04-19 | 天津大学 | 一种空间立体式三维大行程纳米操作平台 |
CN110148436A (zh) * | 2018-10-12 | 2019-08-20 | 宁波大学 | 一种大行程、可转动的三自由度并联柔性微动平台 |
US20190353507A1 (en) * | 2017-09-13 | 2019-11-21 | Nanjing Univ. Of Aeronautics And Astronautics | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
CN110492781A (zh) * | 2019-08-05 | 2019-11-22 | 包头稀土研究院 | 三级微位移放大机构及其放大方法 |
CN111917328A (zh) * | 2020-07-02 | 2020-11-10 | 三英精控(天津)仪器设备有限公司 | 一种菱形微位移放大机构的纳米扫描平台 |
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2020
- 2020-12-31 CN CN202011639070.3A patent/CN112652354B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104440817A (zh) * | 2014-12-04 | 2015-03-25 | 山东大学 | 一种空间三维微位移精密定位装置 |
CN104742099A (zh) * | 2015-04-09 | 2015-07-01 | 南京航空航天大学 | 一种自行式平面三自由度压电驱动平台 |
CN204622006U (zh) * | 2015-04-09 | 2015-09-09 | 南京航空航天大学 | 一种自行式平面三自由度压电驱动平台 |
CN106195541A (zh) * | 2016-07-04 | 2016-12-07 | 山东大学 | 一种三自由度压电驱动微纳定位平台 |
US20190353507A1 (en) * | 2017-09-13 | 2019-11-21 | Nanjing Univ. Of Aeronautics And Astronautics | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
CN110148436A (zh) * | 2018-10-12 | 2019-08-20 | 宁波大学 | 一种大行程、可转动的三自由度并联柔性微动平台 |
CN109650327A (zh) * | 2018-11-07 | 2019-04-19 | 天津大学 | 一种平板式三维大行程纳米操作平台 |
CN109654333A (zh) * | 2018-11-07 | 2019-04-19 | 天津大学 | 一种空间立体式三维大行程纳米操作平台 |
CN110492781A (zh) * | 2019-08-05 | 2019-11-22 | 包头稀土研究院 | 三级微位移放大机构及其放大方法 |
CN111917328A (zh) * | 2020-07-02 | 2020-11-10 | 三英精控(天津)仪器设备有限公司 | 一种菱形微位移放大机构的纳米扫描平台 |
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Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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