CN112648926A - Line-focusing color confocal three-dimensional surface height measuring device and method - Google Patents
Line-focusing color confocal three-dimensional surface height measuring device and method Download PDFInfo
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The invention discloses a line focusing color confocal three-dimensional surface height measuring device and method, relates to the field of object imaging, and comprises a line focusing color confocal three-dimensional surface height measuring deviceIllumination deviceStructure and line focus color confocal imaging structure; the components of the line-focusing color confocal illumination structure, which are arranged according to the sequence of the light propagation direction, comprise a polychromatic light source, a focusing lens group, a semi-reflecting and semi-transmitting lens, a slit, a collimating lens group and a dispersive imaging lens group; the line focusing color confocal imaging optical path comprises a dispersion imaging lens group, a collimating lens group, a slit, a semi-reflecting and semi-transmitting mirror, a spectrum camera and an image processing unit which are shared by the line focusing color confocal imaging optical path and the illumination structure. The line focusing color confocal measuring device has simple structure, and the lighting and imaging light paths share a slit, so the engineering cost is low; the auxiliary scanning motion device can continuously measure the heights of different surface positions of the measured object, and can quickly finish the measurement of the large-size three-dimensional surface appearance.
Description
Technical Field
The invention relates to the field of optical imaging, in particular to a device and a method for measuring the height of a line-focusing color confocal three-dimensional surface.
Background
The ultra-precise three-dimensional measurement technology is a core foundation and a key technology of modern precision manufacturing and advanced processing manufacturing technology, is widely applied to the fields of aerospace, national defense industry, biomedicine, communication engineering, microelectronics and the like, and the modern manufacturing industry puts forward requirements on high precision, large measurement range and rapidness for surface appearance measurement. The optical measurement method does not need to prepare a measurement sample in advance and does not need to contact the sample, so that the surface of the measured sample cannot be damaged; compared with a three-dimensional measurement method of a contact type and scanning probe microscope, the optical measurement method does not need a physical probe, so that the preparation and measurement of sample measurement are more flexible, the speed can be improved in a non-scanning measurement mode, and the real-time three-dimensional topography measurement and even the high-speed three-dimensional topography measurement can be realized; optical measurement methods do not require the use of probes to physically contact or contact as much as possible the sample surface and therefore do not cause permanent damage to the sample surface. Various optical three-dimensional surface measurement methods have been developed:
first, the interferometric three-dimensional surface measurement method of optical measurement utilizes the position-sensitive property of light interference, and can realize rapid surface topography imaging and three-dimensional surface topography measurement of smooth surfaces. DCM9 of Leica can support two interferometric measurement methods of white light interference and phase shift interference, the height measurement error under white light interference is 3nm, and the height measurement range is 10 mm; and the height measurement error under phase-shifting interference is 0.16nm, and the height measurement range is 20 μm. But it is difficult to measure a rough surface sample and to measure a sample having a large difference in surface brightness by the interferometric measurement method in general; in addition, the measurement efficiency is low because the reference surface is required to move for scanning.
Secondly, the laser confocal technology of optical measurement adopts an optical slice to obtain the surface appearance of the measured sample, only a focused signal can greatly enter a detector when a confocal microscope images, an object can be moved in the optical axis direction by utilizing the characteristic, and the three-dimensional height of the measured sample can be determined by searching a light intensity peak value in the moving process. The measurement mode of an object moving in the optical axis direction is slow, and the precision is limited by the moving precision of a scanning motion device, so a differential confocal microscopy technology is provided, the height of the object in the optical axis direction is reduced by the light intensity difference of two detectors before and after focusing, the nanoscale longitudinal measurement can be realized, the axial scanning of the object to be measured is avoided, but the problem of extension of the height measurement range in the optical axis direction cannot be solved, and the multilayer surface height measurement of a transparent sample cannot be realized.
In the existing published patent literature, chinese invention patent 201811141205.6 discloses a color confocal three-dimensional topography measurement method and system, which uses a color camera to replace the traditional single-point spectrum detector, converts the RGB information acquired by the camera into an HIS color model, and then converts the HIS color model into the height of an object in the optical axis direction, so as to realize surface three-dimensional topography measurement.
The LCI series products of the Focalspec company use a line focusing color confocal system, the speed can be ensured to be continuous in the transmission process, the LCI1600 measurement precision is 0.98 mu m, 1500 line pairs are measured per second, but a detector of the system is not coaxially arranged with a light source, and the alignment difficulty of two slits of the instrument is large due to the separation of a detection light path and an imaging light path.
US 10082655B 2 discloses a differential filtering color confocal microscope system, which uses different slits to generate line light sources with different widths, wherein the polarization states of different light sources are different, and uses a spectroscope and an analyzer to enable different detectors to detect focusing line beams with different widths, the two detectors are located at the same focusing position in an optical system, and the height of a measured sample along the optical axis direction is calculated according to the difference of the light intensities obtained by the two detectors. However, the system has complex required composition structure, needs a plurality of slits to align spatially, and has high engineering difficulty and high manufacturing cost.
Disclosure of Invention
The invention aims to provide a line-focusing color confocal three-dimensional surface height measuring device and a method, wherein an illumination light path and a detection light path of the measuring device share the same path, and share a slit, so that the structure is simple, and the construction cost is low; the measuring device has the characteristic of high axial chromatographic precision of a laser confocal imaging system, firstly, the measuring device adopts parallel measurement, and can finish parallel extraction of height information of multiple points in an illuminated area of an object to be measured only by once imaging; secondly, the measuring device performs uniform linear scanning on the measured sample, so that the stop time of the stop-and-go measurement is avoided, and the large-size three-dimensional surface topography measurement can be rapidly completed.
The purpose of the invention is realized by the following technical scheme:
a line focus color confocal three-dimensional surface height measuring device comprises a line focus color confocal lighting structure and a line focus color confocal spectral imaging structure; the line focusing illumination structure comprises a polychromatic light source, a focusing lens group, a semi-reflecting and semi-transmitting lens, a slit, a collimating lens group and a dispersion imaging lens group, wherein the polychromatic light source is arranged on one side of the focusing lens group, the other side of the focusing lens group is sequentially provided with the semi-reflecting and semi-transmitting lens and the slit, the semi-reflecting and semi-transmitting lens is arranged on one side of the slit, the collimating lens group and the dispersion imaging lens group are sequentially arranged on the other side of the slit, and the slit is placed on a focal line of the collimating lens group; according to the light propagation direction, the light emitted by the polychromatic light source sequentially passes through the focusing lens group, the semi-reflecting and semi-transparent mirror, the slit, the collimating lens group and the dispersion imaging lens group in sequence and irradiates on the surface of the object to be measured; the line focusing spectrum imaging optical path structure comprises a spectrum camera, an image processing unit and an optical path structure shared with an illumination optical path, wherein the shared optical path structure comprises an object to be measured, a dispersion imaging lens group, a collimating lens group, a slit and a half-reflecting and half-transmitting mirror according to the transmission direction of reflected light; the light is reflected by the semi-reflecting and semi-transmitting lens to enter a spectrum camera arranged at the same side of the semi-reflecting and semi-transmitting lens, and the spectrum phaseThe machine is electrically connected with the image processing unit; the slit and the surface of the object to be detected are conjugated in an imaging light path, the slit is imaged on the surface of the object to be detected at different heights, and a series of points Si along the slit direction and the image position Y of the surface of the object to be detectediAnd the slits are in one-to-one correspondence with the optical conjugate of the spectral camera in the imaging optical path.
Preferably, the system also comprises a system control device and a scanning motion device; the spectrum camera sequentially comprises a collimating lens, a dispersion original, a focusing lens and a black-and-white area-array camera image sensor according to the advancing direction of imaging light path light, the strip light of the slit is transversely unfolded into an area array shape in a spectrum space after passing through a dispersion element, the area array shape is completely fallen on the image sensor of the area-array camera after being focused by the imaging lens, and the strip light Y in the long edge directioniCovering a first direction of an image sensor of an area-array camera, each long-side direction stripe light YiSpectrum Y generated by point light spreadingi(λk) λ ofkThe direction covers the second direction of the image sensor of the area array camera, and the two directions are vertical to each other, the position relation of the area array camera and the slit is that the area array camera and the slit are conjugated in a light path consisting of a half-reflecting and half-transmitting lens, a collimating lens, a dispersion element and a focusing lens; reflected light of the half-reflecting and half-transmitting mirror passes through the dispersion element in sequence and is converted into a digital image signal through imaging of the black-white area array camera, and the digital image signal enters the image processing unit; the scanning motion device is electrically connected with the system control device, the object to be detected is placed on the surface of the scanning motion device, the scanning direction of the scanning motion device is set to be X, and the direction, perpendicular to the strip-shaped light illumination direction, of X is called Y; the scanning motion device is electrically connected with the black-and-white area array camera, and the scanning motion device sends out electric signals in equal step length to trigger the black-and-white area array camera to synchronously expose and collect images.
Preferably, the dispersive imaging lens group comprises a dispersive tube lens group and an imaging lens group in sequence according to the propagation direction of the illumination light, the dispersive tube lens group is arranged at one side close to the slit, and the imaging lens group is arranged at the other side of the dispersive tube lens group close to the object to be measured.
Preferably, the slit is a reflective or transmissive slit.
Preferably, the slit formed by the slit reflection type structured light illuminating device or the slit formed by the transmission type structured light illuminating device, and the width of the slit and the light state of the switch at the adjacent point of the slit can be digitally and independently adjusted.
Preferably, the spectrum camera is integrated with the image processing unit, the image analysis processing unit is an embedded programming algorithm, and the embedded programming algorithm is embedded and integrated into the spectrum camera to form an embedded line high output unit.
Preferably, the polychromatic light source is a strip-shaped parallel light source, the width of one side is far greater than that of the other side, the focusing lens group is a cylindrical lens group, and the long side of the strip-shaped parallel light source of the polychromatic light source, the long side of the cylindrical lens of the focusing lens group and the long side of the slit are consistent in direction.
Preferably, the slit is a slit formed by a reflection-type structured light illuminating device or a slit formed by a transmission-type structured light illuminating device, and the width of the slit and the light state of the switch at the adjacent point of the slit can be digitally and independently adjusted.
A measuring method of a line focus color confocal three-dimensional surface height measuring device is characterized by comprising the following measuring steps:
s1: a line focus illumination step, in particular: the lighting structure of the line-focusing color confocal three-dimensional surface height measuring device forms a thin rainbow light wall above the surface of an object to be measured, and establishes O in the space of the object to be measured for convenient descriptionWorldXYZ coordinate system, thin line Y intersecting the thin rainbow wall and the object surface as direction Y i(i =1,2,3, … N), the thin rainbow wall is a rainbow band spread in the spectral space in the direction perpendicular to the surface of the object to be measured, i.e. in the height Z direction, with different wavelengths λk(k =1,2, …, M) of strip-shaped light components focused at different heights Z k(k =1,2, …, M);
s2: a line focus spectral imaging step, specifically: the line focus imaging structure of the line focus color confocal three-dimensional surface height measuring deviceLight reflected by different height surfaces of the object to be measured is imaged on an image sensor of a black-and-white area-array camera of the spectrum camera, and a coordinate system O of the black-and-white area-array camera 1 is established along the rows and columns of the image sensorImageY λ, wherein the row direction Y and the slit long side and OWorldY in XYZ coordinate system corresponds to and the column direction lambda corresponds to OWorldThe Z direction of the XYZ coordinate system corresponds to the Z direction, and S1 and S2 are synchronously performed;
s3: an image analysis step, in particular: the image processing unit analyzes the image of the image sensor at S2 based on the previously scaled object position Yworld_iAnd the image square line position Y image_i(i =1,2,3, … N), and calculates the scale relation for each line Y in the image line direction image_i(i =1,2,3, … N) corresponding to the surface position of the object to be measured at OWorldY in XYZ coordinate systemworld_iThe value of (d); analyze each row Y image_i(i =1,2,3, … N) image pixel gray value, acquiring the maximum column position j of each row of i (i =1,2,3, … N) image gray value, and calculating the O-position of the surface of the object to be measured on the O-position according to the corresponding relation between the height Z of the object to be measured and the corresponding column position j of the spectrum image gray extreme value in advanceWorldY in XYZ coordinate systemworld_i(i =1,2,3, … N) object point position YiHeight Z of i(i =1,2,3, … N), thereby completing the height of each point of the illumination area of the surface of the object to be measured illuminated by the strip-line focused light.
Preferably, the method further comprises the following steps of:
c0: placing an object to be measured with a known height Z1 on a scanning motion device, specifically, placing the object to be measured on the scanning motion device, and adjusting the height of the scanning motion device to enable the surface of the object to be measured to be within the working range of a line-focusing color confocal three-dimensional surface height measuring device;
c1 known height of Z1The surface height measuring step of the line focusing area of the surface of the object to be measured specifically comprises the following steps: the line focus illumination step of S1, the line focus spectral imaging step of S2, and the spectral image analysis step of S3 are performed to obtain a height Z1Corresponding peak column position j1Record the true height Z1And a measured value j1；
C2 knowing the height Z2The object to be measured is placed in the scanning movement device to repeat the above step C1 to obtain the height Z2Corresponding peak column position j2Record the true height Z2And a measured value j2；
So repeatedly measuring QQ > 2 objects Z with different heightsQAnd its corresponding peak column position jQAnd recording the true height Z of the seriesQAnd a measured value jQ(Q＞2)；
C3 calculating the peak column position j of the spectral imageQHeight Z of objectQThe one-to-one scale relation curve Z = Z (j).
Preferably, the method further comprises the following steps of:
m0: placing an object to be measured on a scanning motion device, specifically: placing an object to be measured on a scanning motion device, and adjusting the height of the scanning motion device to enable the surface of the object to be measured to be within the working range of a line-focusing color confocal three-dimensional surface height measuring device;
m1 measuring the height of the surface of the line focus area of the object surface, specifically: the line focus illumination step of S1, the line focus spectral imaging step of S2, and the spectral image analysis step of S3, to obtain heights of points of the object surface along the line focus illumination light;
m2: a translation scanning step, specifically: the object to be measured is driven by the scanning motion device to move along the O lineWorldMoving the X-axis direction of an XYZ coordinate system by a line width distance of the focused light, and synchronously performing the step M2 and the step M1;
m3, circulating the steps, specifically, repeating M1 and M2 until the region to be measured on the surface of the object to be measured is completed, and obtaining the heights of all points at which the line-by-line focused illumination light illuminates on the X-axis direction of the surface to be measured of the object to be measured; the object surface points form a strip-shaped belt with the length L and the width W, wherein the relationship between the length L and the imaging times M of the spectral camera, the imaging time interval delta t and the moving speed v is as follows:
L=M*δt*v；
wherein δ t × v is integrated as a single line focused illumination line width on the object surface. The width W is also the length of the long side of the single line focusing illumination line on the surface of the object, the relationship between W and the pixel size p of the spectral camera, the magnification factor beta of the imaging lens and the number N of the image lines of the spectral camera is as follows:
W=p*n/β；
m4, if the surface of the object to be measured needs R rectangles with length L and width W, the scanning motion device moves the object to be measured along the Y direction to be close to W but not to exceed the distance of W, the steps of M1-M3 are repeated to finish the measurement of the stripe on the surface of the second object, and the steps are repeated until the measurement of the R rectangles covering the surface of the object to be measured is finished.
The invention has the beneficial effects that: the near parallel light emitted from the white light source is focused on the slit after passing through the focusing lens group, and is shaped into narrow strip light through the slit, and the width of the long side of the narrow strip light is much wider than that of the short side of the narrow strip light, so that a series of strip light or rainbow walls which are expressed as thin and thin in image form can be formed after the narrow strip light is subjected to the dispersion of the dispersion imaging lens group; the dispersive imaging lens group is an imaging lens group with a longitudinal dispersive function and can be an imaging lens group without achromatization, strip light from the slit is divided into light with different color bands after passing through the dispersive imaging lens group, the light of narrow strip bands with different colors is focused on objects with different surface heights, and the long side direction of the strip light is the Y direction of a coordinate system; the strip light irradiated on the surface of the object to be measured is reflected, sequentially passes through the dispersion imaging lens group, the slit, the semi-reflecting and semi-transparent mirror and enters the embedded line height measuring unit. The strip light is reflected by the surface of the moving object to be measured, reflected to the focusing lens group by the slit conjugated with the surface of the object to be measured and reflected to the spectrum camera of the embedded line height measuring unit. The bar light entering the embedded line height measurement unit spectral camera is (for ease of description) discretized by a series of spatial points Y, because the detector is a discrete point collecting dataiThe constituent bar-shaped light spots. Each point Y of these discrete lightsiThe light is dispersed into a series of lights Y with different wave bands by a dispersion element of a spectrum cameraiλ(λ =1,2,3, … M) and covers one direction (called the column direction) of the black-and-white area-array image sensor in the spectral camera, while the different spatial points Yi(i=1，2，3，… N) covers the line direction of the monochrome area-array camera image sensor (assuming that the image line direction coincides with the slit long side, object surface line-focus illumination long side direction). In image sensor convention, the image row direction is perpendicular to the column direction. Thus passing through the long side direction Y of the slitiThe series of points pass through the image processing unit of the embedded line height measuring unit, and the spectrum camera corresponds to each position point YiDetermining the coordinate position j (namely peak wavelength lambda) of the peak pixel column of the gray scale curve, and determining each position point Y of the surface of the object to be measured along the line focusing illumination direction according to the peak wavelength lambdaiSurface height Z ofi. During the scanning and moving of the object to be measured, a series of strip-shaped light beams successively scan the surface of the object, and all the strip-shaped light beams scan the position Y of a space point of an areaiSurface height Z ofiIt is obtained. The lighting light path and the detection light path of the measuring device share the same path, and the lighting light path and the detection light path share the same slit, so that the measuring device has a simple structure and low construction cost; firstly, the measuring device adopts parallel measurement and can complete the extraction of height information in an illuminated area of an object to be measured only by one-time imaging; secondly, the measuring device performs uniform line scanning on the measured sample, and can rapidly complete large-size three-dimensional surface topography measurement.
Drawings
FIG. 1 is a schematic structural diagram of a line-focusing color confocal three-dimensional surface height measuring device according to the present invention;
FIG. 2 is a schematic diagram illustrating a structure of a line-focusing chromatic confocal three-dimensional surface height measuring device according to the present invention;
FIG. 3 is a schematic diagram showing the spectrum expansion of the measuring method of the line-focusing color confocal three-dimensional surface height measuring device according to the present invention;
FIG. 4 is a schematic diagram of the light reflected from the light source with multiple colors in the short side direction of the slit formed by the reflective structure light modulator in the line-focusing illumination structure of the present invention;
FIG. 5 is a schematic diagram of the light reflected from the object to be measured in the short side direction of the slit formed by the reflective structure light modulator in the line-focusing illumination structure according to the present invention;
FIG. 6 is an enlarged view of a portion C of FIG. 2 according to the present invention;
FIG. 7 is an enlarged view of portion B of FIG. 2 according to the present invention;
FIG. 8 is an enlarged view of portion A of FIG. 2 according to the present invention;
FIG. 9 is a schematic diagram of a transmissive slit structure according to the present invention;
in the figure, 1-a polychromatic light source, 2-a focusing lens group, 3-a semi-reflecting and semi-transparent mirror, 4-a slit, 5-a collimating lens group, 6-a prism, 7-a dispersive tube lens group, 8-an imaging lens group, 9-an object to be measured, 16-a dispersive element, 17-a black and white area array camera, 18-an image processing unit, 19-an embedded line height measuring unit, 21-an imaging lens, 22-a scanning motion device, 78-a dispersive imaging lens group and 167-a spectral camera.
Detailed Description
The technical solutions of the present invention are further described in detail below with reference to the accompanying drawings, but the scope of the present invention is not limited to the following.
As shown in fig. 1 to 9, a line-focusing color confocal three-dimensional surface height measuring device comprises a complex color illumination structure and a spectrum imaging structure; the compound color illumination structure comprises a compound color light source 1, a focusing lens group 2, a semi-reflecting and semi-transparent lens 3, a slit 4, a collimating lens group 5, a prism 6 and a dispersion imaging lens group 78, wherein the compound color light source 1 is arranged on one side of the focusing lens group 2, the semi-reflecting and semi-transparent lens 3 and the slit 4 are sequentially arranged on the other side of the focusing lens group 2, and the collimating lens group 5, the prism 6 and the dispersion imaging lens group 78 are sequentially arranged on the same side, close to the semi-reflecting and semi-transparent lens 3, of the; the spectrum imaging light path structure comprises an embedded line height measuring unit 19, the embedded line height measuring unit 19 is arranged on one side, away from the focusing lens group 2, of the semi-reflecting and semi-transmitting lens 3, and the embedded line height measuring unit 19 is used for imaging processing.
Furthermore, an object 9 to be measured is arranged on one side of the dispersive imaging lens group 78 of the device, which is far away from the prism 6, and the object 9 to be measured is arranged on the scanning motion device; the dispersive imaging lens group 78 comprises a dispersive tube lens group 7 and an imaging lens group 8, the dispersive tube lens group 7 is arranged at one side close to the prism 6, and the imaging lens group 8 is arranged at the other side of the dispersive tube lens group 7; the embedded line height measuring unit 19 comprises a spectrum camera 167 and an image processing unit 18, the spectrum camera 167 comprises a dispersion original 16 and a black-and-white area-array camera 17, the reflected light of the half-reflecting and half-transmitting mirror 3 sequentially passes through the dispersion original 16 and then enters the image processing unit 18 for image processing through imaging of the black-and-white area-array camera 17; while the slits 4 are reflective spatial light modulators.
Further, the measuring device comprises a compound color illumination structure and a spectrum imaging structure, and when the device is used for measuring the height of an object, the measuring method comprises the following steps:
s1: a line focus illumination step, in particular: the lighting structure of the line-focusing color confocal three-dimensional surface height measuring device forms a thin rainbow wall above the surface of an object 9, and for the convenience of description, O is established in the space of the object 9WorldXYZ coordinate system, thin line Y intersecting the thin rainbow wall and the object surface in Y direction i(i =1,2,3, … N), the thin rainbow walls are rainbow bands spread out in spectral space in the direction perpendicular to the surface of the object 9, i.e. in the height Z, at different wavelengths λk(k =1,2, …, M) of strip-shaped light components focused at different heights Z k(k =1,2, …, M);
s2: a line focus spectral imaging step, specifically: the line focus imaging structure of the line focus color confocal three-dimensional surface height measuring device images the light reflected from the different height surfaces of the object 9 on the black and white camera image sensor 16 of the spectral camera 167, and establishes a camera coordinate system O along the rows and columns of the image sensorImageY λ, wherein the row direction Y is parallel to the long side of the slit 4 and OWorldY in XYZ coordinate system corresponds to and the column direction lambda corresponds to OWorldThe Z direction of an XYZ coordinate system corresponds to the Z direction; s1 is performed in synchronization with S2, but is separated into two steps for descriptive convenience;
s3: an image analysis step, in particular: the image processing unit 18 analyzes the image of the image sensor 16 based on the previously scaled object position Yworld_iAnd the image square line position Y image_i(i =1,2,3, … N), and calculates the scale relation for each line Y in the image line direction image_i(i =1,2,3, … N) corresponds to the surface position of object 9 being at OWorldY in XYZ coordinate systemworld_iThe value of (d); analyze each row Y image_i(i =1,2,3, … N) imageObtaining a column position λ of a maximum value of an image gray value of each row i (i =1,2,3, … N)kAccording to the height Z of the object space 9 calibrated in advance and the wavelength lambda corresponding to the gray scale extreme value of the spectral imagekTo calculate the surface of the object 9 at OWorldY in XYZ coordinate systemworld_i(i =1,2,3, … N) position i(i =1,2,3, … N), thereby completing the height of each point of the illumination area of the surface of the object 9 illuminated by the strip-line focused light;
further, in the specific implementation process, the polychromatic light source 1 is a strip-shaped parallel light source, the used focusing lens group 2 is a cylindrical lens group, the long side of the strip-shaped parallel light source, the long side of the cylindrical lens group and the long side of the designed slit 4 are in the same direction, the slit 4 is preferably a reflective spatial light modulator (e.g., a micromirror array or a digital micromirror array (DMD)), and the direction of the micromirror reflected light forming the reflective slit is different from the direction of the micromirror reflected light forming the non-slit portion, so that the same incident light falling into the slit can continuously advance along one direction (also called a predetermined light path), and the light falling into the non-slit portion is reflected to the other direction (also called a direction towards the strong absorption surface) and absorbed; the spatial light modulator comprises P rows by Q columns of reflective micromirrors, and the normal direction of the surface of a single micromirror can be time-shared in R (R is more than or equal to 2) different directions, so that incident light is reflected along different directions.
When the slit 4 is a reflective stripe slit, and the long side is far larger than the short side, the light emitted from the polychromatic light source 1 can only continue to reach the surface of the object 9 to be detected along the polychromatic illumination light path structure after passing through the slit 4, and other incident light which does not fall into the slit 4 is reflected to the strong absorption surface, and neither can advance along the polychromatic illumination light path structure to reach the surface of the object 9 to be detected, nor can advance along the light path propagation structure of the device (the half-mirror 3, the slit 4, the collimating lens group 5, the prism 6, and the dispersive imaging lens group 78 are collectively referred to as light path propagation structures, and will be referred to as "light path propagation structures" in the following description), and enter the polychromatic detection light path or the light path propagation structure, as shown in fig. 4. Only the part of the light reflected from the surface of the object 9 to be measured, which is reflected by the slit 4, may reach the spectral camera 16 of the embedded line height measuring unit 19 for imaging, and other reflected light from the surface of the object 9 to be measured, which does not fall into the slit 4, is reflected to the strong absorption surface, and likewise cannot advance along the light path propagation structure of the device to enter the polychromatic detection light path or the light path propagation structure, and cannot advance along the polychromatic illumination light path structure to fall onto the surface of the object 9 to be measured, as shown in fig. 5.
When the slit 4 is a transmissive strip slit, and the long side is far larger than the short side, the light emitted from the polychromatic light source 1 can only pass through the transmissive part of the slit 4 and continue to reach the surface of the object to be measured 9 along the polychromatic illumination light path structure, and other incident light which does not fall into the slit 4 is strongly absorbed by the non-slit part and leaves the polychromatic illumination light path structure; only the part of the light transmitted from the object surface through the slit 4 can reach the spectral camera 16 of the embedded line height measuring unit 19 for imaging, and the reflected light from the object surface to be measured is not strongly absorbed by the transmitted part of the slit 4 and leaves the optical path propagation structure of the device. And the slit 4 in this embodiment is composed of a transmissive spatial light modulator SLM including P rows by Q columns of modulation units, the state of the modulation units constituting the slit is different from the state of the units of the non-slit portion, and thus the transmission coefficient of the modulation units constituting the slit is significantly higher than that of the modulation units constituting the non-slit portion.
Further, when the reflected bar light passes through the spectrum camera 16 of the embedded line height measuring unit 19, the spectrum camera 167 includes a dispersion element 16 (such as a prism or a grating) and a black-and-white area-array camera 17. The reflected strip light is dispersed by the dispersion element 16 and then expanded into an area array shape, and then enters the spectrum camera 16 to form a series of position points Y on the spectrum camera 16i(i =1,2,3, … N), each position YiSpread into a series of points Yiλ(i =1,2,3, … N). Each position YiSpectrum space of (2) into a spectrum YiλCovering one direction (λ direction, also called column direction) of the image sensor of the black-and-white area-array camera 17 in the spectrum camera 167, each spatial position YiDot coverage of another image sensor of the black-and-white area-array camera 17A direction (i direction, also called as row direction), and two directions of the black-and-white area array camera 17, i direction and x direction, are perpendicular to each other, as shown in fig. 3; image processing unit 18 analyzes spectrum camera 167 corresponding to each position point YiThe gray scale value of the image of one line, the column (lambda) position of the maximum value and the peak wavelength which reflects the position point Y of the object 9 to be measurediThe surface height Z of (a). Since the slit 4 is conjugate with the surface of the object 9, the slit 4 is imaged on the surface of the object 9, and a series of points S along the direction of the slit 4iY of its image position on the surface of the object 9 to be measurediOne to one, as shown in fig. 2. The image sensor of the spectral camera 167 is conjugated with the surface of the object 9 to be measured, and the image position Yi is conjugated with the image position Y of the surface of the object 9 to be measurediOne-to-one correspondence, as shown in fig. 9, is a schematic diagram of another embodiment.
Further, the object 9 to be measured is driven by the scanning motion device to move along the X-axis direction of the coordinate system, and the spectrum camera 16 of the embedded line height measuring unit 19 is used for measuring each X on the object surface of the object 9 to be measuredjReflected light of the strip-shaped light region in the Y-axis direction at the (j =1,2,3, … M) position and perpendicular to the X-axis is imaged, and the image processing unit 18 analyzes and obtains the reflected light at each Xj(j =1,2,3, … M) height curve Y-Z of the strip-shaped light band in the Y-axis direction with the position perpendicular to the X-axis, since the spectral camera 167 is integrated with the image processing unit 18, the image processing unit 18 has an embedded programming algorithm, embedded integrated into the spectral camera 167, and forms an embedded line height measuring unit 19 together with the spectral camera 167 (the image processing unit 18 and the spectral camera 167 constitute the measuring unit 19). The output of the height measuring unit 19 is a Y-Z height curve, wherein Yi(i =1,2,3, … N) is the combination of discrete positions of the long side of the strip light, and the Y-Z height curve of the coordinate system is the height curve of the position point of the object 9 along the direction of the strip light, as shown in fig. 8.
When the object 9 is moved, the strip light irradiates on the surface of the object 9 to be measured, and the surface topography of the object 9 to be measured along a strip band with length L and width W in the X direction of the moving object 9 is obtained, wherein the length L and the imaging times M of the spectrum camera 16, the imaging time interval δ t and the moving speed are related as follows:
L=M*δt*v；
the relationship between the width W and the pixel size p of the spectral camera, the magnification factor beta of the imaging lens and the number N of image lines of the spectral camera 9 is as follows:
W=p*n/β；
according to the speed and the moving time of the scanning motion device, a length L of the moving object 9 along the X direction, i.e., the length of the projection of the moving object 9 on the coordinate system X-Y, can be calculated by the formula L = M × δ t × v, and then the width of the moving object 9 along the Y axis direction when the strip light irradiates on the moving object 9, i.e., the width of the projection of the moving object 9 on the coordinate system X-Y, can be calculated according to the formula W = p × n/β, as shown in fig. 6 and 7.
The scanning motion device drives the object 9 to be measured to move, so that a set of a series of positions which are finally displayed on the image processing unit 18 through reflection is the surface three-dimensional shape of the object 9 to be measured.
The illumination light path and the detection light path of the measuring technology share the same path, and the illumination light path and the detection light path share the same slit, so that the structure is simple, and the construction cost is low; firstly, the measurement technology adopts parallel measurement, and can finish the extraction of height information in an illuminated area of an object to be measured only by once imaging; secondly, the measurement technology performs uniform line scanning on the measured sample, and can quickly finish large-size three-dimensional surface topography measurement.
The foregoing is illustrative of the preferred embodiments of this invention, and it is to be understood that the invention is not limited to the precise form disclosed herein and that various other combinations, modifications, and environments may be resorted to, falling within the scope of the concept as disclosed herein, either as described above or as apparent to those skilled in the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A line focus color confocal three-dimensional surface height measuring device is characterized by comprising a line focus illumination structure and a line focus spectral imaging structure;
the line focusing illumination structure comprises a polychromatic light source (1), a focusing lens group (2), a semi-reflecting and semi-transparent mirror (3), a slit (4), a collimating lens group (5) and a dispersion imaging lens group (78), wherein the polychromatic light source (1) is arranged on one side of the focusing lens group (2), the semi-reflecting and semi-transparent mirror (3) and the slit (4) are sequentially arranged on the other side of the focusing lens group (2), the semi-reflecting and semi-transparent mirror is arranged on one side of the slit (4), the collimating lens group (5) and the dispersion imaging lens group (78) are sequentially arranged on the other side of the slit (4), and the slit 4 is placed on a focal line of the collimating lens group (5);
according to the light propagation direction, light emitted by the polychromatic light source (1) sequentially passes through the focusing lens group (2), the semi-reflecting and semi-transparent mirror (3), the slit (4), the collimating lens group (5) and the dispersion imaging lens group (78) in sequence and irradiates on the surface of an object to be measured (9);
the line focusing spectrum imaging light path structure comprises a spectrum camera (167), an image processing unit (18) and a light path structure shared with an illumination light path, wherein the light path structure comprises an object to be measured (9), a dispersion imaging lens group (78), a collimating lens group (5), a slit (4) and a half-reflecting and half-transmitting mirror (3) according to the propagation direction of reflected light; the light enters a spectrum camera (167) arranged on the same side of the semi-reflecting and semi-transmitting mirror (3) through the reflection of the semi-transmitting mirror (3), and the spectrum camera (167) is electrically connected with an image processing unit (18);
the slit (4) and the surface of the object to be detected (9) are conjugated in an illumination light path, namely, the slit (4) images the surface of the object to be detected (9) at different heights in different spectral bands, and a series of points Si along the direction of the slit (4) and the image position Y of the surface of the object to be detected (9)iThe slits (4) and the spectrum camera (167) are also optically conjugated in the imaging light path in a one-to-one correspondence.
2. The line-focusing color confocal three-dimensional surface height measuring device according to claim 1, characterized in that: the system also comprises a system control device and a scanning motion device (22);
the spectrum camera (167) sequentially comprises a collimating lens (20), a dispersion element (16), an imaging lens (21) and a black-and-white area-array camera (17) according to the advancing direction of the imaging light path, the strip light of the slit (4) passes through the dispersion element (16) and is transversely expanded into an area array shape in the spectrum space, the area array shape is focused by the imaging lens (21) and then completely falls on an image sensor of the area-array camera (17), and the spatial dimension direction of the area array shape is corresponding to the strip light YiCovers the first direction of the image sensor of the area-array camera, the direction of the spectral dimension of the shape of the area array, i.e. each spatial point YiSpectrum spread Y ofi(λk) λ ofkThe direction covers the second direction of the image sensor of the area-array camera, and the first direction and the second direction are vertical to each other; the position relation between the area-array camera (17) and the slit (4) is that the area-array camera and the slit are conjugated in a light path consisting of the half-reflecting and half-transmitting lens (3), the collimating lens (20), the dispersion element (16) and the focusing lens (21), and the first direction corresponds to the long side direction of the slit;
reflected light of the half-reflecting and half-transmitting mirror (3) passes through the dispersion element (16) in sequence, and then enters the image processing unit (18) after being converted into telecommunication through imaging of the black-white area array camera (17);
the scanning motion device (22) is electrically connected with the system control device, the object (9) to be detected is placed on the surface of the scanning motion device (22), the scanning direction of the scanning motion device (22) is set to be X, and the X is called Y perpendicular to the strip-shaped light illumination direction;
the scanning motion device (22) is electrically connected with the black and white area array camera (17), and the electric signals sent by the scanning motion device (22) in equal step length trigger the black and white area array camera (17) to synchronously expose and acquire images.
3. The line-focusing chromatic confocal three-dimensional surface height measurement device according to claim 1, characterized in that the dispersive imaging lens group (78) comprises, in order of the illumination light propagation direction, a dispersive tube lens group (7) and an imaging lens group (8), the dispersive tube lens group (7) being disposed at one side close to the slit 4, and the imaging lens group (8) being disposed at the other side of the dispersive tube lens group (7) close to the object to be measured (9).
4. The line-focus color confocal three-dimensional surface height measurement device according to claim 1, wherein the slit (4) is a reflective or transmissive slit.
5. The line-focusing color confocal three-dimensional surface height measuring device according to claim 1, characterized in that the spectrum camera (167) is integrated with the image processing unit (18), and the image analysis processing unit (18) is an embedded programming algorithm embedded into the spectrum camera (167) to form an embedded line height output unit (19).
6. The confocal three-dimensional surface height measuring device of line focus colour of claim 1, characterized in that, compound colour light source (1) is the bar form parallel light source, and the width of one side is far greater than other side, focusing lens group (2) is the cylindrical lens group, the long limit of the bar form parallel light source of compound colour light source (1), the cylindrical lens long limit of focusing lens group (2) and the long limit direction of slit (4) unanimity.
7. The confocal three-dimensional surface height measuring device of claim 1, wherein the slit (4) is formed by a reflective structured light illuminating device or a transmissive structured light illuminating device, and the width of the slit (4) and the switch optical state of the point adjacent to the slit (4) can be adjusted digitally and independently.
8. The measuring method of the line-focusing color confocal three-dimensional surface height measuring device according to any one of claims 1 to 7, characterized by comprising the following measuring steps:
s1: a line focus illumination step, in particular: the line focusing illumination structure forms a thin rainbow wall above the surface of the object to be measured (9), and for convenience of description, O is established in the space of the object to be measured (9)WorldAn XYZ coordinate system, a thin line Y along the direction Y at the intersection of the thin rainbow wall and the object surface i(i =1,2,3, … N), the rainbow thin wall is a rainbow band spread in the spectral space in the direction perpendicular to the surface of the object (9) to be measured, i.e. in the height Z direction, with different wavelengths λk(k =1,2, …, M) of strip-shaped light components focused at different heights Z k(k =1,2, …, M);
s2: a line focus spectral imaging step, specifically: the line focusing imaging structure images the light reflected from the surfaces of different heights of the object (9) to be detected on an image sensor of a black-and-white area array camera (17) of a spectrum camera (167) and converts the light into a digital image signal; for convenience of description, a coordinate system O of a black-and-white area array camera (17) is established along rows and columns of an image sensorImageY λ, wherein the row direction Y is parallel to the long side of the slit (4) and OWorldY in XYZ coordinate system corresponds to and the column direction lambda corresponds to OWorldThe Z direction of an XYZ coordinate system corresponds to the dimension of the spectrum wavelength lambda of spectrum expansion, and in fact, the steps S1 and S2 are performed synchronously, and only two steps are convenient to describe;
s3: an image analysis step, in particular: the image processing unit (18) analyzes the image of the image sensor at S2 based on the previously scaled object position Yworld_iAnd the image square line position Y image_i(i =1,2,3, … N), and calculates the scale relation for each line Y in the image line direction image_i(i =1,2,3, … N) corresponding to the surface position of the object (9) to be measured at OWorldY in XYZ coordinate systemworld_iThe value of (d); analysing the column space Y in each row image_j(j =1,2,3, … M) pixel gray value of the image, acquiring the column position j of the maximum value of the pixel gray value of different columns j (j =1,2,3, … M) of each row, and obtaining the gray value of the spectrum image according to the height Z of the object to be measured (9) and the gray value of the spectrum image which are scaled in advanceThe corresponding relation of the extreme value corresponding to the column position j is calculated to calculate the surface O of the object (9) to be measuredWorldY in XYZ coordinate systemworld_i(i =1,2,3, … N) position i(i =1,2,3, … M), thereby completing the height of each point of the illumination area of the surface of the object (9) to be measured illuminated by the strip-line focused light.
9. The method for measuring the line-focus color confocal three-dimensional surface height measuring device according to claim 8, further comprising the steps of:
c0: placing an object (9) to be measured with a known height Z1 on a scanning motion device (22), specifically, placing the object (9) to be measured on the scanning motion device (22), and adjusting the height of the scanning motion device (22) to enable the surface of the object (9) to be measured to be within the working range of a line-focusing color confocal three-dimensional surface height measuring device;
c1 known height of Z1The surface height measuring step of the line focus area of the surface of the object (9) to be measured specifically: the line focus illumination step of S1, the line focus spectral imaging step of S2, and the spectral image analysis step of S3 are performed to obtain a height Z1Corresponding maximum gray scale pixel column position j1Record the true height Z1And a measured value j1；
C2 knowing the height Z2The object (9) to be measured is placed in the scanning movement device (22) and the above-mentioned step C1 is repeated to obtain the height Z2Corresponding peak column position j2Record the true height Z2And a measured value j2；
Q (Q > 2) objects Z with different heights are repeatedly measured in the wayQAnd its corresponding peak column position jQAnd recording the true height Z of the seriesQAnd a measured value jQ（Q＞2）；
C3 calculating the peak column position j of the spectral imageQHeight Z of objectQThe one-to-one scale relation curve Z = Z (j).
10. The method for measuring the height of a line-focused color confocal three-dimensional surface according to claim 8, further comprising the step of translational scanning:
m0: -placing the object (9) to be measured on a scanning movement device (22), in particular: placing an object (9) to be measured on a scanning motion device (22), and adjusting the height of the scanning motion device (22) to enable the surface of the object (9) to be measured to be within the working range of a line-focusing color confocal three-dimensional surface height measuring device;
m1 surface height measuring step of the line focus area of the surface of the object 9, specifically: the line focus illumination step of S1, the line focus spectral imaging step of S2, and the spectral image analysis step of S3 are performed to obtain the surface heights of the points along the line where the surface of the object is illuminated by the line focus illumination;
m2: a translation scanning step, specifically: the object (9) to be measured is driven by the scanning motion device (22) along OWorldMoving the X-axis direction of an XYZ coordinate system by a line width distance of the focused light, and synchronously performing the step M2 and the step M1;
m3, circulating the steps, specifically, repeating M1 and M2 until the region to be measured on the surface of the object (9) to be measured is completed, and obtaining the shapes of all points on the surface of the object (9) to be measured of a strip-shaped belt with the maximum dimension L in the X-axis direction and the width W of the surface to be measured of the object (9), wherein the relationship between the length L and the imaging times M of the spectral camera (16), the imaging time interval delta t and the moving speed v is as follows:
L=M*δt*v；
wherein δ t × v is the effective width of the line-focus illumination stripe; the relationship between the width W and the pixel size p of the spectral camera, the magnification beta of the imaging lens and the number N of image lines of the spectral camera (9) is as follows:
W=p*n/β；
m4, if the surface of the object to be measured (9) needs R (R is more than or equal to 1) rectangles with the length of L and the width of W to cover, the scanning motion device (22) moves the object to be measured (9) along the Y direction for the distance of W, the steps of M1-M3 are repeated to finish the measurement of the second strip, and the steps are repeated until the measurement of the R rectangles covering the surface to be measured of the object is finished.
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