CN112643720A - Contact sensor - Google Patents
Contact sensor Download PDFInfo
- Publication number
- CN112643720A CN112643720A CN202110036305.8A CN202110036305A CN112643720A CN 112643720 A CN112643720 A CN 112643720A CN 202110036305 A CN202110036305 A CN 202110036305A CN 112643720 A CN112643720 A CN 112643720A
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- CN
- China
- Prior art keywords
- contact
- support
- data processor
- touch
- sensing element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of semiconductor and solar cleaning equipment, in particular to a contact sensor which comprises an induction element, a support and a contact element arranged on the support, wherein the contact element is vertically contacted with the support under the action of gravity, a detection target is contacted with the contact element to drive the contact element to rotate, the induction element monitors that the contact element is disconnected from the support, and the connection state of the induction element is changed to send a signal outwards; the data processor is connected with the sensing element and receives signals sent by the sensing element; the data processor is connected with an indicating element and controls the indicating element to send out or display an alarm signal; the invention has the beneficial effects that: the contact sensor detects the detection target and is not influenced by fog and vibration in the environment; the reliability of detection is improved; meanwhile, the contact sensor is sensitive in response, and equipment or product damage caused by abnormity is effectively reduced.
Description
Technical Field
The invention relates to the technical field of semiconductor and solar cleaning equipment, in particular to a contact type sensor.
Background
In semiconductor and solar energy slot type self-cleaning trade, because cell body expend with heat and contract with cold, the silicon chip carrier that lies in the treatment trough can not effectively be colluded to the manipulator often appears, leads to the silicon chip carrier to drop in unsettled removal, or the treatment trough has when appearing the manipulator and reciprocate and has left over the silicon chip carrier, and the manipulator still places the silicon chip carrier in toward the treatment trough once more, leads to pressing the basket trouble. Aiming at the abnormity, unexpected loss caused by the abnormity is reduced. Sensors are typically installed on the robot in the industry to confirm that the silicon wafer carrier is truly hooked away or is truly detached from the hooking device.
Under the influence of working conditions and environments, the selection limitations of the detection method and the sensor are large. The photoelectric sensor or ultrasonic sensor or retransmission sensor commonly used by the equipment in the market often generates false alarm condition, which causes the equipment to stop normally and has low detection reliability.
Disclosure of Invention
It is an object of the present invention to provide a touch sensor that solves the problems set forth above in the background.
In order to achieve the purpose, the invention provides the following technical scheme:
a contact sensor comprises a sensing element, a support and a contact element arranged on the support, wherein the contact element is vertically contacted with the support under the action of gravity, the contact between a detection target and the contact element drives the contact element to rotate, the sensing element monitors the disconnection of the contact element from the contact support, and the connection state of the sensing element is changed to send a signal outwards.
As a further scheme of the invention: the contact element comprises a contact lever which is mounted on the support in an articulated manner by means of a rotary shaft.
As a still further scheme of the invention: one end of the support, which is far away from the contact element, is provided with a connecting part, and the connecting part is connected with the manipulator.
As a still further scheme of the invention: the induction element comprises a magnetic induction piece arranged on the support and a magnet arranged on the top of the contact element and contacted with the magnetic induction piece.
As a still further scheme of the invention: the magnetic induction piece is provided with a contact point, and the contact point is arranged on one side, opposite to the contact element, of the support.
As a still further scheme of the invention: the magnetic induction piece comprises an induction coil, the output end of the induction coil is connected with the switch circuit, and the contact is in contact with the magnet to be communicated with the switch circuit.
As a still further scheme of the invention: the data processor is connected with the sensing element, receives signals sent by the sensing element and sends out instructions.
As a still further scheme of the invention: the data processor is connected with an indicating element, and the data processor controls the indicating element to send out or display an alarm signal.
Compared with the prior art, the invention has the beneficial effects that: the contact sensor detects the detection target and is not influenced by fog and vibration in the environment; the reliability of detection is improved; meanwhile, the contact sensor is sensitive in response, and equipment or product damage caused by abnormity is effectively reduced.
Drawings
Fig. 1 is a schematic structural diagram of a touch sensor in an embodiment of the invention, the touch sensor sensing a trigger state.
Fig. 2 is a schematic structural diagram of an initial state of a touch sensor according to an embodiment of the present invention.
In the drawings: 1-bracket, 2-induction part, 3-magnet part, 4-rotation axis, 5-contact lever, 6-detection target.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
Referring to fig. 1 and 2, in an embodiment of the present invention, the touch sensor includes a sensing element, a bracket 1, and a contact element mounted on the bracket 1, the contact element vertically contacts with the bracket under the action of gravity, a detection target 6 contacts with the contact element to drive the contact element to rotate, the sensing element monitors that the contact element breaks the contact bracket 1, and the connection state of the sensing element changes to send a signal to the outside.
Specifically, the induction element comprises a magnetic induction piece arranged on a support 1 and a magnet arranged on the top of the contact element and contacted with the magnetic induction piece, the induction part 2 is formed at the position where the magnetic induction piece is arranged on the support 1, and the magnet part 3 is formed at the position where the magnet is arranged on the top of the contact element; and in the process of hooking the silicon wafer carrier in the processing tank, the contact sensor is installed on the manipulator. In an initial state, the contact element is vertically kept static, the top of the contact element is in contact with the support, so that the induction part 2 is in contact with the magnet part 3, a magnetic induction piece of the induction element is electrified under the action of magnetic induction, and in an induction triggering state, when the contact of the detection target 6 and the contact element drives the contact element to rotate, the induction part 2 is disconnected from the magnet part 3, so that the magnetic induction piece of the induction element does not induce the magnet and is powered off; the connection state of the magnetic induction piece is changed to form an electric signal which is received by the data processor, the data processor performs corresponding operation, and the corresponding operation can be a control instruction for sending an audible and visual alarm signal to prompt the manipulator to hook a fault; or directly controlling the mechanical arm to stop working. The contact sensor detects the detection target and is not influenced by fog and vibration in the environment; the reliability of detection is improved; meanwhile, compared with other sensors, the contact sensor has sensitive reaction, and the damage to equipment or products caused by abnormality is effectively reduced.
Referring to fig. 1 and 2, in a preferred embodiment of the present invention, the contact element includes a contact lever 5, and the contact lever 5 is hinged to the bracket through a rotating shaft 4.
Specifically, a connecting hole is formed in the upper middle position of the contact lever 5, and the rotating shaft 4 is inserted into the connecting hole and hinged with the support; when the detection target 6 contacts the lower end of the contact lever 5, the contact lever 5 rotates clockwise by taking the rotating shaft 4 as an axis, and simultaneously, the contact of the induction part 2 and the magnet part 3 is disconnected due to the rotation of the contact lever 5, so that the connection state of the magnetic induction piece is changed; the data processor responds correspondingly according to the change of the connection state of the magnetic induction piece.
Referring to fig. 1, in a preferred embodiment of the present invention, a connecting portion is disposed at an end of the support away from the contact element, and the connecting portion is connected to the robot.
The outer circumference of the connecting part is provided with a thread or a clamping pin hole, the connecting part is connected with the manipulator through the thread or the clamping pin hole, when the manipulator hooks the silicon wafer carrier, the manipulator is detected, and the silicon wafer carrier is ensured to be hooked stably and effectively.
Referring to fig. 1, in a preferred embodiment of the present invention, the magnetic induction member is provided with a contact point, and the contact point is arranged on one side of the bracket opposite to the contact element.
The contact sensitivity of the induction part 2 and the magnet part 3 is improved by arranging the contact, so that the reaction is more sensitive when the induction part 2 and the magnet part 3 are in contact disconnection, and the damage of the detection target 6 or the contact sensor caused by detection time delay is effectively reduced.
Referring to fig. 1, in another embodiment of the present invention, the magnetic induction element includes an induction coil, an output end of the induction coil is connected to the switch circuit, and the contact contacts the magnet to communicate with the switch circuit.
The induction coil, the magnet and the switch circuit form a magnetic induction switch, the working state of the manipulator is judged through the on-off of the magnetic induction switch, and the detection of whether the manipulator hooks the silicon wafer carrier is realized.
Referring to fig. 1, in another embodiment of the present invention, the present invention further includes a data Processor (PLC), where the data processor is connected to the sensing element, and the data processor receives a signal sent by the sensing element and sends an instruction to the outside.
When the manipulator grabs the silicon wafer carrier, the outer surface of the bottom of the contact lever 5 contacts the silicon wafer carrier and displaces, so that the on-off state of a switch circuit of the sensing element is changed, an electric signal is generated and sent to the data processor, and the on-off state of the switch circuit is kept unchanged in the moving process of the silicon wafer carrier. If the silicon wafer carrier hooking is abnormal, the contact lever 5 is reset under the influence of gravity, and the contact between the induction part 2 and the magnet part 3 is recovered; the on-off state of the switch circuit is changed, and an electric signal is generated and sent to the data processor; the data processor judges that the manipulator is in a carrier-free state; the data processor sends out an abnormal alarm in time through comparison, and simultaneously stops the movement of the manipulator.
Referring to fig. 1, in another embodiment of the present invention, the data Processor (PLC) is connected to an indicating element, and the data processor controls the indicating element to send or display an alarm signal.
The indicating element comprises an audible and visual alarm and a buzzer, and the audible and visual alarm and the buzzer are respectively connected with the PLC; and after the PLC compares and judges the electric signals of the switch circuit, whether the manipulator hooks the silicon wafer carrier is obtained, and an abnormal alarm is given out through an audible and visual alarm and a buzzer.
The working principle of the invention is as follows: the induction element comprises a magnetic induction piece arranged on the support 1 and a magnet arranged on the top of the contact element and contacted with the magnetic induction piece, the induction part 2 is formed at the position where the magnetic induction piece is arranged on the support 1, and the magnet part 3 is formed at the position where the magnet is arranged on the top of the contact element; and in the process of hooking the silicon wafer carrier in the processing tank, the contact sensor is installed on the manipulator. In an initial state, the contact element is vertically kept static, the top of the contact element is in contact with the support, so that the induction part 2 is in contact with the magnet part 3, a magnetic induction piece of the induction element is electrified under the action of magnetic induction, and in an induction triggering state, when the contact of the detection target 6 and the contact element drives the contact element to rotate, the induction part 2 is disconnected from the magnet part 3, so that the magnetic induction piece of the induction element does not induce the magnet and is powered off; the connection state of the magnetic induction piece is changed to form an electric signal which is received by the data processor, and the data processor carries out corresponding operation.
It should be noted that the data processor used in the present invention is an application of the prior art, and those skilled in the art can implement the functions to be achieved according to the related description, or implement the technical features to be achieved by the similar technology, and will not be described in detail herein.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
It will be understood that the present disclosure is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (8)
1. A contact sensor is characterized by comprising a sensing element, a support and a contact element arranged on the support, wherein the contact element is vertically contacted with the support under the action of gravity, the contact between a detection object and the contact element drives the contact element to rotate, the sensing element monitors that the contact element is disconnected from the contact support, and the connection state of the sensing element is changed to send a signal outwards.
2. The touch sensor of claim 1, wherein the touch element comprises a touch lever hingedly mounted to the bracket by a pivot shaft.
3. A touch sensor according to claim 1, wherein the support is provided with a coupling at an end remote from the touch element, the coupling being coupled to a robot arm.
4. The touch sensor of claim 1, wherein the sensing element comprises a magnetic sensor mounted on the support, and a magnet mounted on top of the touch element for contacting the magnetic sensor.
5. A touch sensor according to claim 4, wherein the magnetic induction member is provided with a contact point arranged on a side of the support opposite the touch element.
6. The touch sensor of claim 5, wherein the magnetic induction element comprises an induction coil, an output of the induction coil is connected to the switch circuit, and the contact contacts the magnet to communicate with the switch circuit.
7. The touch sensor of claim 1, further comprising a data processor coupled to the sensing element, the data processor receiving signals from the sensing element and issuing commands to the sensing element.
8. The touch sensor of claim 7, wherein an indicator element is coupled to the data processor, and the data processor controls the indicator element to emit or display an alarm signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110036305.8A CN112643720A (en) | 2021-01-12 | 2021-01-12 | Contact sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110036305.8A CN112643720A (en) | 2021-01-12 | 2021-01-12 | Contact sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112643720A true CN112643720A (en) | 2021-04-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110036305.8A Pending CN112643720A (en) | 2021-01-12 | 2021-01-12 | Contact sensor |
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| Country | Link |
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| CN (1) | CN112643720A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117419771A (en) * | 2023-12-18 | 2024-01-19 | 山东博硕自动化技术有限公司 | Device and method for dynamically detecting building material with irregular thickness |
-
2021
- 2021-01-12 CN CN202110036305.8A patent/CN112643720A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117419771A (en) * | 2023-12-18 | 2024-01-19 | 山东博硕自动化技术有限公司 | Device and method for dynamically detecting building material with irregular thickness |
| CN117419771B (en) * | 2023-12-18 | 2024-02-20 | 山东博硕自动化技术有限公司 | Device and method for dynamically detecting building material with irregular thickness |
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Address after: No. 209, Zhangjing East Section, Xigang Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214194 Applicant after: Wuxi Fuchuan Technology Co.,Ltd. Address before: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant before: Shanghai Fuchuan Intelligent Technology Co.,Ltd. |
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