CN112639155B - Method for forming thermal spray coating - Google Patents

Method for forming thermal spray coating Download PDF

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CN112639155B
CN112639155B CN201980055731.7A CN201980055731A CN112639155B CN 112639155 B CN112639155 B CN 112639155B CN 201980055731 A CN201980055731 A CN 201980055731A CN 112639155 B CN112639155 B CN 112639155B
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thermal spray
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spray coating
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CN112639155A (en
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三木真哉
永井正也
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Tocalo Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/129Flame spraying

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  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
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Abstract

The invention provides a method for forming a thermal spray coating film by causing a non-oxide ceramic material to collide with a base material by a high-speed flame spraying method. A non-oxide ceramic material having an average particle diameter of 0.1 to 5.0 [ mu ] m and a particle size distribution of a powder material in a range of 0.1 [ mu ] m or more and less than 1.0 [ mu ] m and in a range of 1.0 [ mu ] m or more and less than 10.0 [ mu ] m, each having one or more peaks, is dispersed in a solvent to prepare a slurry (11), and the slurry (11) is supplied from the outside to a flame (10) discharged from a thermal spray gun (2) to form a dense thermal spray coating film structure.

Description

Method for forming thermal spray coating
Technical Field
The present invention relates to a method for forming a thermal spray coating by forming a dense thermal spray coating on a substrate from a non-oxide ceramic material by a high-speed flame spraying method.
Background
In order to improve the functionality of the surface of a member, various methods of forming a thermal spray coating on the surface of a component are widely used. The spray coating method is a surface treatment technique in which a thermal spray material such as metal, ceramic, cermet, or the like is supplied to a flame generated from a combustion gas, a plasma arc, or the like, softened or melted, and sprayed at high speed onto the surface of an object to be sprayed, thereby coating the surface with a thermal spray film.
Although various materials can be used for thermal spraying, on the other hand, since a heating and melting process at a high temperature is performed, evaporation and oxidation of the thermal spray material may occur in the process, and a good coating film cannot be obtained unless the thermal spraying conditions are sufficiently selected depending on the materials used. In particular, non-oxide ceramics such as aluminum nitride are generally more difficult to select thermal spraying conditions than other materials, and various studies have been made in the past.
Patent document 1 describes a method for producing a coating film by forming an aluminum nitride coating film on a base material using an explosive spraying apparatus having a combustion cylinder, a gas supply mechanism for supplying a fuel gas or the like, an ignition mechanism for igniting a mixed gas of the fuel gas, and a powder supply mechanism. In this document, aluminum nitride powder having an average particle diameter of 1 to 5 μm is granulated into powder having an average particle diameter of 20 to 60 μm and used as feed powder.
Patent document 2 describes a film forming method for forming an aluminum nitride thermal spray coating film on a substrate by an atmospheric plasma spraying method by adjusting the temperature and the flight speed of aluminum nitride powder.
Patent document 3 describes a method for forming a coating film by continuously depositing unmelted nitride powder particles on a substrate for a component of a semiconductor manufacturing apparatus.
Patent document 4 describes a method for forming a coating film on the surface of a base material by dispersing a raw material powder mainly composed of particles of a metal nitride having sublimation properties and no molten phase in an organic solvent to prepare a slurry, and flame spraying the slurry under predetermined thermal spraying conditions.
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 2017-71835
Patent document 2: japanese laid-open patent publication No. 2009-235558
Patent document 3: international publication No. 2010/027073
Patent document 4: japanese laid-open patent publication No. 2014-198898
Disclosure of Invention
Problems to be solved by the invention
The above documents 1 to 4 have common problems that: if the size of the thermal spray material is too large, the particles are not melted and film formation is difficult, and even if film formation is performed, it is difficult to obtain a dense film or a film having sufficient adhesion to the substrate. Further, if the size of the thermal spray material is too small, oxidation of particles proceeds excessively, and it is difficult to obtain a coating film having a desired composition.
The method described in patent document 1 is a method of forming a film of aluminum nitride powder with an adjusted average particle diameter by using an explosive spray apparatus, and in this method, the average particle diameter of the material used is large, and therefore, the material cannot be sufficiently melted to form a film, or a dense film cannot be formed even when the material is formed.
In the film formation method of patent document 2, aluminum nitride is formed by using an atmospheric plasma spraying method, and in this method, the flame temperature of the plasma heat source is very high, which causes sublimation of aluminum nitride. In addition, in order to improve the density, it is necessary to add a rare earth cermet.
Patent document 3 describes that 90% or more of the powder particles of nitride in the formed thermal spray coating are deposited without melting, and this is achieved by modifying a thermal spray nozzle of an ultra-high-speed flame spraying apparatus, but does not describe how to modify the powder particles.
In patent document 4, a powder in which metal nitride particles have a particle size of about 0.5 to 3 μm is used, and unless thermal spraying conditions are set with very high accuracy, oxidation of the particles proceeds excessively as described above, and it is difficult to obtain a coating film of a desired composition.
In view of the problems of the prior art, an object of the present invention is to provide a method for forming a thermal spray coating film that can obtain a dense coating film with high adhesion even when a non-oxide ceramic is used as a material.
Solutions for solving the problem-
The present inventors have studied a method for forming a thermal spray coating film by causing a non-oxide ceramic material to collide with a base material to form a film on the base material, and succeeded in forming a dense and high-adhesion coating film by using a material having a predetermined average particle diameter and particle size distribution by a high-speed flame spraying method, thereby solving the above-mentioned problems.
That is, the method for forming a thermal spray coating of the present invention is a method for forming a thermal spray coating by causing a non-oxide ceramic material having an average particle diameter of 0.1 to 5.0 μm and having one or more peaks in a particle size distribution of 0.1 μm or more and less than 1.0 μm and in a particle size distribution of 1.0 μm or more and less than 10.0 μm to collide with a substrate by a high-speed flame spraying method.
The present invention adopts the high-speed flame spraying method, so that the excessive oxidation of the non-oxide ceramic material in the thermal spraying process can be prevented, and the thermal spraying film taking the non-oxide ceramic as a main body can be obtained. Here, "non-oxide ceramic is mainly" means that the non-oxide ceramic is the largest in mass unit among the constituent components of the thermal spray coating. Further, in the present invention, the non-oxide ceramic material has an average particle diameter smaller than that of a conventional thermal spray material, and contains therein a particle group having a larger size and a particle group having a smaller size. Specifically, the non-oxide ceramic material has an average particle diameter of 0.1 to 5.0. Mu.m, and the particle size distribution of the non-oxide ceramic material has one or more peaks in a range of 0.1 μm or more and less than 1.0. Mu.m, and in a range of 1.0 μm or more and less than 10.0. Mu.m, respectively. Even when the high-speed flame spraying method is used, when thermal spraying is performed in an oxygen-containing atmosphere (for example, in the atmosphere), some oxidation occurs from the outer peripheral side of the particles. In this case, most of the particles in the range of 0.1 μm or more and less than 1.0 μm are oxidized during the thermal spraying, and only a part of the particles in the range of 1.0 μm or more and less than 10.0 μm are oxidized, and thus the entire oxidation is difficult. When these materials are films, particles in the range of 0.1 μm or more and less than 1.0 μm are an adhesive agent that connects particles in the range of 1.0 μm or more and less than 10.0 μm to each other. That is, when a non-oxide ceramic material having a small average particle diameter is used, since a certain amount of each of large-sized particles and small-sized particles is contained, the small-sized particles function as a binder for connecting the large-sized particles to each other, and as a result, a dense coating film having high adhesion force can be obtained.
In the non-oxide ceramic material, the volume ratio of the material having a particle diameter in the range of 1.0 μm or more and less than 10.0 μm to the material having a particle diameter in the range of 0.1 μm or more and less than 10.0 μm is preferably 60% or more, and more preferably 90% or less. In this case, a more dense coating film with high adhesion can be obtained.
Preferably, the non-oxide ceramic material is fed into the flame as a suspension dispersed in a solvent. By forming a film by the suspension high-speed flame spraying method, the aggregation of the materials during the conveyance of the thermal spray material can be suppressed, and a dense film can be formed more reliably.
Preferably, the suspension is fed into a flame emitted from the tip of a thermal spray nozzle. In the case of the high-speed flame spraying method using the internal feed method, the thermal spray material is deposited in the nozzle, and the deposit is condensed to easily cause splashing. In contrast, by adopting an external supply method of supplying the suspension into the flame ejected from the tip of the thermal spray nozzle, it is possible to prevent the occurrence of the splash.
The non-oxide ceramic material may be composed of a material including one or more ceramics selected from carbide ceramics, nitride ceramics, and boride ceramics. Although these non-oxide ceramics are harder materials than oxide ceramics, they are generally difficult to form by thermal spraying. According to the method for forming a thermal spray coating of the present invention, a coating having a high density and a high adhesion force can be formed even when these materials are used, and therefore a hard and high-quality coating can be obtained.
Effects of the invention
According to the present invention, a dense and high-adhesion coating film can be obtained by using, as a thermal spray material made of a non-oxide ceramic, a material having an average particle diameter of 0.1 to 5.0 μm, a particle size distribution in a predetermined range of particle sizes smaller than 1.0 μm with 1.0 μm as a boundary, and one or more peaks in a predetermined range of particle sizes larger than 1.0 μm, and by performing high-speed flame spraying on the thermal spray material, particles in the predetermined range of particle sizes smaller than the average particle size are made to be a binder that connects particles in the predetermined range of particle sizes larger than the average particle size.
Drawings
Fig. 1 is a schematic view of a main part of a thermal spraying apparatus for carrying out a high-velocity flame spraying method used in a method for forming a thermal spray coating film.
Fig. 2 is a graph showing the particle size distribution of titanium carbide powder having the monomodal and bimodal particle size distributions.
FIG. 3 is a photograph showing the results of film formation.
Fig. 4 is a graph showing the particle size distribution of an aluminum nitride powder having a bimodal particle size distribution.
Fig. 5 is a table showing the relationship between the surface roughness of the base material and the adhesion force.
Fig. 6 is a table showing cross-sectional structure observation images and skin components.
Fig. 7 is a cross-sectional structure observation image showing a state of bonding between particles in a coating film.
Detailed Description
Embodiments of the present invention will be explained. The method for forming the thermal spray coating of the present embodiment employs a high velocity flame (HVOF) spray method. The thermal spray powder is caused to collide with the base material by a high-speed flame spraying method to form a thermal spray coating film. The high-speed flame spraying method is a spraying method in which combustion energy of combustion gas is used as a heat source, and a supersonic flame is generated by increasing the pressure in a combustion chamber, and a thermal spray powder is supplied to the center of a supersonic flame jet to be accelerated into a molten or semi-molten state, and is continuously sprayed at a high speed.
Since the molten thermal spray particles collide with the base material at supersonic velocities, a dense thermal spray coating having high adhesion force can be formed, and particularly, since the thermal spray coating can be continuously formed, a homogeneous thermal spray coating can be obtained. As the combustion gas usable as the heat source, hydrogen, a combustible gas containing carbon and hydrogen as main components, such as acetylene, ethylene, and propane, and a combustion-supporting gas containing oxygen can be used. Liquid fuel such as kerosene (kerosene) may also be used instead of the combustible gas.
Specifically, a supersonic flame having a flame speed of 900 to 2500 m/sec and a flame temperature of 1800 to 3800 ℃ is generated by using a mixed gas such as oxygen/propane, oxygen/propylene, oxygen/natural gas, oxygen/ethylene, oxygen/hydrogen, or the like as a combustion gas, and thermal spraying is performed while maintaining the thermal spraying distance of 100 to 350mm and controlling the substrate temperature during thermal spraying to 200 ℃ or lower.
Examples of the substrate include, but are not limited to, a metal material, a ceramic material, and a polymer material. Specific examples of the metal material include a metal selected from Fe, cr, ni, al, ti, and Mg, or an alloy containing one or more elements selected from Fe, cr, ni, al, ti, and Mg. Such a metal material is formed by extrusion, cutting, plastic working, and forging. The substrate may be one formed by hardfacing (wet hardfacing), electroplating, or thermal spraying a coating on a metallic material. An undercoat layer may be provided between the substrate and the thermal spray coating.
Non-oxide ceramic materials are used as thermal spray materials. The non-oxide ceramic material is composed of a material containing one or more ceramics selected from carbide ceramics, nitride ceramics, and boride ceramics.
Specifically, carbide ceramics, nitride ceramics, boride ceramics, and mixtures thereof containing one or more elements selected from Ni, cr, co, al, ta, Y, W, nb, V, ti, B, si, mo, zr, fe, hf, and La are cited.
Examples of the carbide ceramic include TiC, WC, taC and B 4 C、SiC、HfC、ZrC、VC、Cr 3 C 2 . Examples of the nitride ceramics include TiN, crN, and Cr 2 N、TaN、AlN、BN、Si 3 N 4 、HfN、NbN、YN、ZrN、Mg 3 N 2 、Ca 3 N 2 . The boride ceramic may include TiB 2 、ZrB 2 、HfB 2 、VB 2 、TaB 2 、NbB 2 、W 2 B 5 、CrB 2 、LaB 6
Fig. 1 is a schematic view of a main part of a thermal spray apparatus 1 for carrying out a high-speed flame spray method used in the method for forming a thermal spray coating film according to the present embodiment. The thermal spray apparatus 1 is configured as a suspension HVOF spray apparatus that supplies a slurry (suspension) of a thermal spray material from the outside. The thermal spray apparatus 1 is an external feed type thermal spray apparatus that externally feeds a slurry prepared by dispersing a thermal spray powder in a solvent, and includes a thermal spray gun 2 and a slurry feed nozzle 3.
The thermal spray gun 2 includes a combustion vessel portion 5 forming a combustion chamber 4, a thermal spray nozzle 6 continuous with the combustion vessel portion 5, and an ignition device 7. Gas containing high-pressure oxygen and fuel is supplied into the combustion chamber 4, and the gas is ignited by the ignition device 7. Then, the flame generated in the combustion chamber 4 is converged by the thermal spray nozzle 6, expanded and made into a supersonic flame, and ejected from the tip of the thermal spray nozzle 6 at a high speed. The slurry 11 is supplied from the slurry supply nozzle 3 to the flame 10 to be sprayed. The thermal spray powder in the slurry 11 becomes a molten or semi-molten body, and is accelerated by the flame 10 and collides with the substrate 100 at a high speed, thereby forming a thermal spray coating film on the substrate 100.
The slurry 11 is obtained by dispersing a thermal spray powder in water or an organic solvent containing a dispersion medium composed of an alcohol and an organic dispersant. The slurry 11 contains particles of the thermal spray powder in a mass ratio of 5 to 40%. The slurry 11 is fed into the flame 10 ejected from the tip of the thermal spray nozzle 6.
In the internal supply system in which the slurry is supplied to the inside of the thermal spray nozzle, the thermal spray material is deposited in the nozzle tube and may be condensed to cause sputtering. In contrast, in the present embodiment, as shown in fig. 1, the slurry 11 is supplied to the flame 10 from the outside by an external supply method, and the occurrence of splash can be prevented.
The non-oxide ceramic material as the thermal spray powder has an average particle diameter of 0.1 to 5.0 [ mu ] m, and has a particle size distribution having one or more peaks in a range of 0.1 [ mu ] m or more and less than 1.0 [ mu ] m and in a range of 1.0 [ mu ] m or more and less than 10.0 [ mu ] m. That is, one or more peak shapes are present in the particle size distribution in the range of 0.1 μm or more and less than 1.0 μm, and one or more peak shapes are present in the particle size distribution in the range of 1.0 μm or more and less than 10.0 μm. The average particle size of the particles is defined as: the particle diameter (median diameter) at which the cumulative value of the particle size distribution is 50% was measured by a laser diffraction scattering method (micro-track method).
Two or three or more peaks may be present in the range of 0.1 μm or more and less than 1.0 μm and in the range of 1.0 μm or more and less than 10.0. Mu.m, respectively. As a typical example, a non-oxide ceramic material in which one peak is present in a range of 0.1 μm or more and less than 1.0 μm and one peak is present in a range of 1.0 μm or more and less than 10.0 μm can be cited. As another example, there is a non-oxide ceramic material in which a plurality of peaks are present in a range of 0.1 μm or more and less than 1.0 μm, and a plurality of peaks are also present in a range of 1.0 μm or more and less than 10.0 μm.
The particles of the non-oxide ceramic material need to be present in a large amount in a range of 0.1 μm or more and less than 1.0 μm in particle diameter, and also in a large amount in a range of 1.0 μm or more and less than 10.0 μm in particle diameter. Further, in the non-oxide ceramic material, the volume ratio of the material having a particle size in the range of 1.0 μm or more and less than 10.0 μm to the material having a particle size in the range of 0.1 μm or more and less than 10.0 μm is preferably 60% or more, and more preferably 90% or less.
Since the particles having a particle diameter in the range of 0.1 μm or more and less than 1.0 μm are very small, they are oxidized by contacting the atmosphere during thermal spraying, and most of them are oxidized. A thermal spray powder composed of a non-oxide ceramic material is formed so that the average particle diameter is 0.1 to 5.0 [ mu ] m, and the particle size distribution has one or more peaks in a predetermined range having a particle size of less than 1.0 [ mu ] m and in a predetermined range having a particle size of more than 1.0 [ mu ] m, respectively, with 1.0 [ mu ] m as a boundary, whereby a large number of particles in a predetermined range having a small particle size, which are oxides, have a binder function of binding particles in a predetermined range having a large particle size to each other. The small-sized particles fill gaps between the large-sized particles to connect the large-sized particles to each other. This makes it possible to obtain a very dense coating.
In addition, in the non-oxide ceramic material, if the volume ratio of the material having a particle size in the range of 1.0 μm or more and less than 10.0 μm to the material having a particle size in the range of 0.1 μm or more and less than 10.0 μm is 60% or more, preferably 90% or less, the inter-particle bonding force is significantly improved, and therefore a more dense and high-adhesion coating film can be formed. The volume ratio can be calculated by comparing the areas of the respective particle size distributions as measured by a laser diffraction scattering method (micro-track method).
In general, if a considerable amount of powder having a particle size of about 0.1 to 1.0 μm is obtained, the fluidity of the thermal spray powder is lowered, and there is a possibility that the thermal spray powder cannot be stably supplied. In contrast, in the present embodiment, since the film is formed by the suspension high-speed flame spraying method in which the thermal spray material is supplied as the slurry, the thermal spray material can be transported while suppressing the agglomeration of the thermal spray powder, and the thermal spray powder can be stably supplied. In general, when non-oxide ceramics are thermally sprayed, if particles having a particle size of approximately 10.0 μm are contained in a large amount, the particles may become excessively porous and the film quality may be lowered, and in the present embodiment, since particles having a small particle size serve as a binder, a high-quality dense thermal spray film can be formed.
The thickness of the thermal spray coating obtained by the above method for forming a thermal spray coating is preferably in the range of 50 to 2000 μm, and the thickness thereof may be appropriately set according to the purpose of use. In general, if the thickness is 50 μm or more, the uniformity of the coating film can be maintained and the function of the coating film can be sufficiently exhibited, and if the thickness is 2000 μm or less, the mechanical strength can be prevented from being lowered due to the influence of the residual stress in the coating film.
The porosity of the ceramic thermal spray coating may be about 0.1 to 5%, and the porosity of the thermal spray coating obtained by the method for forming a thermal spray coating according to the present embodiment may be further less than 0.1% depending on the particle size distribution of the thermal spray powder. If the porosity is large, there is a possibility that the mechanical strength is lowered or that gas easily invades into the skin when used in a gas atmosphere, for example. The film forming conditions may be set as appropriate depending on the substrate, the raw material powder, the film thickness, the production environment, and the like.
Examples
Hereinafter, examples of actually forming a coating film according to the present invention will be described.
Two titanium carbide powders with different particle size distributions were used to study the relationship of the size of the material powder to the film forming property. Two kinds of (material a, material B) titanium carbide powders adjusted to the particle size distribution shown in fig. 2 were used. One of the titanium carbides (material A) has only one peak in the range of 1 to 10 μm, the other titanium carbide (material B) has one peak in the range of 0.1 to 1.0 μm, and has one peak in the range of 1.0 to 10.0. Mu.m.
The average particle size of the material A was 3.7 μm, and the average particle size of the material B was 2.4. Mu.m. In the material a, the volume ratio of the material having a particle diameter in the range of 1.0 μm or more and less than 10.0 μm to the material having a particle diameter in the range of 0.1 μm or more and less than 10.0 μm is 100%. In the material B, the volume ratio of the material having a particle diameter in the range of 1.0 μm or more and less than 10.0 μm to the material having a particle diameter in the range of 0.1 μm or more and less than 10.0 μm was 74%.
Each titanium carbide powder was suspended in water to prepare a slurry, and the slurry was subjected to suspension HVOF spraying to form a film on a stainless steel substrate. FIG. 3 is a photograph showing the film forming property results. SD in the table is the thermal spray distance (mm). It is found that even when powders having the same average particle size are used, the material a having a monomodal particle size distribution hardly forms a film, and when the material B having a bimodal particle size distribution is used, a film can be formed.
Next, two kinds of (materials C and D) aluminum nitride powders having a bimodal particle size distribution as shown in fig. 4 were used, respectively, and the relationship between the size of the material powder and the film forming property was examined. The average particle size of material C was 1.8 μm, and the average particle size of material D was 1.4. Mu.m. In the material C, the volume ratio of the material having the particle diameter in the range of 1.0 μm or more and less than 10.0 μm to the material having the particle diameter in the range of 0.1 μm or more and less than 10.0 μm is 83%, and in the material D, the volume ratio of the material having the particle diameter in the range of 1.0 μm or more and less than 10.0 μm to the material having the particle diameter in the range of 0.1 μm or more and less than 10.0 μm is 70%.
Each aluminum nitride powder was suspended in an alcohol to prepare a slurry, and the material was subjected to a test of forming a film on a stainless steel substrate by suspension HVOF spraying, whereby both materials were able to form a film. Therefore, a film sample was prepared again using the material C, and film evaluations such as a tensile test for examining the relationship between the surface roughness and the adhesion force of the substrate, observation of the cross-sectional structure, measurement of porosity, analysis of film composition, and electrical property examination were performed.
In order to investigate the relationship between the surface roughness and the adhesion force of the base material, a plurality of stainless steel base materials adjusted to an arbitrary surface roughness by sand blasting were prepared in a tensile test. Fig. 5 is a table showing the relationship between the surface roughness of the base material and the adhesion force. All samples had sufficient adhesion regardless of the magnitude of the surface roughness Ra of the substrate and regardless of the presence or absence of the blast treatment as a pretreatment. Some of the samples were very smooth films having a surface roughness Ra of 1.0 μm or less.
Fig. 6 is a table showing one of the cross-sectional tissue observation images and the skin components. The presence ratio (mass%) of each component in the coating film is N:23.52, O:17.58, al:58.89, it was found that the nitride and the oxide exist in a well-balanced manner. The film had a hardness of Hv472, a thermal conductivity of 7.4W/m.K, a porosity of 0.1%, a dielectric breakdown voltage (dielectric breakdown voltage) of 135kV/mm, and a volume resistivity of 5.2X 10 13 Omega cm. From this, it was confirmed that the thermal spray coating film formed in the present example had a dense coating film structure and exhibited high electrical insulation properties.
The skin tissue was observed under magnification using FE-SEM. The cross-sectional structure observation image in the FE-SEM is shown in FIG. 7. An oxide layer is formed at the boundaries of the aluminum nitride particles, which becomes an adhesion layer. That is, although the nitride is mainly used, it is known that the uniform and random presence of the nitride and the oxide without a large variation is an important factor for forming a dense thermal spray coating film having high adhesion.
The method of forming the thermal spray coating of the above embodiments and examples is illustrative and not limiting. The method for forming the thermal spray coating may further include other steps depending on the object to be formed and the application form of the thermal spray coating. The structure and the steps described in the above embodiments may be changed without impairing the effects of the present invention, and the form of other structures and steps provided as necessary is not limited.
-description of symbols-
1: thermal spraying device
2: thermal spraying gun
3: slurry supply nozzle
4: combustion chamber
5: combustion container part
6: thermal spray nozzle
7: ignition device
10: flame(s)
11: slurry
100: base material

Claims (5)

1. A method for forming a thermal spray coating, which comprises forming a film by colliding a non-oxide ceramic material with a substrate by a high-speed flame spraying method,
the average grain diameter of the non-oxide ceramic material is 0.1-5.0 μm,
the particle size distribution of the non-oxide ceramic material has one or more peaks in the range of 0.1 μm or more and less than 1.0 μm and in the range of 1.0 μm or more and less than 10.0 μm, respectively;
wherein the porosity of the thermal spray coating is less than or equal to 5%.
2. The method for forming a thermal spray coating according to claim 1,
in the non-oxide ceramic material, the volume ratio of a material having a particle diameter in a range of 1.0 μm or more and less than 10.0 μm to a material having a particle diameter in a range of 0.1 μm or more and less than 10.0 μm is 60% or more.
3. The method for forming a thermal spray coating according to claim 1 or 2,
the non-oxide ceramic material is supplied to the flame as a suspension dispersed in a solvent.
4. The method for forming a thermal spray coating according to claim 3,
the suspension is fed into a flame sprayed from the tip of a thermal spray nozzle.
5. The method for forming a thermal spray coating according to claim 1 or 2,
the non-oxide ceramic material is composed of a material containing one or more ceramics selected from carbide ceramics, nitride ceramics, and boride ceramics.
CN201980055731.7A 2018-08-27 2019-07-23 Method for forming thermal spray coating Active CN112639155B (en)

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JP2018158054 2018-08-27
JP2018-158054 2018-08-27
PCT/JP2019/028730 WO2020044864A1 (en) 2018-08-27 2019-07-23 Method for forming thermal spray coating

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CN112639155B true CN112639155B (en) 2023-03-14

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US20220090251A1 (en) 2022-03-24
JP6683902B1 (en) 2020-04-22
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KR20210039464A (en) 2021-04-09

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