CN112630530B - Optical fiber sensing device based on ultrasonic detection frequency and implementation method - Google Patents
Optical fiber sensing device based on ultrasonic detection frequency and implementation method Download PDFInfo
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Abstract
The invention provides an optical fiber sensing device based on ultrasonic detection frequency, which comprises an ASE light source, an optical fiber coupler, a sensing unit, an ultrasonic generating device, a photoelectric converter and a signal processing module. The invention carries out sensing through the optical fiber, utilizes the principle of the Fabry-Perot cavity to enable the light emitted by the ASE light source to generate an interference spectrum in the Fabry-Perot cavity, measures the frequency of ultrasonic waves through detecting the interference spectrum, and realizes digital output through the signal processing module, thereby achieving the purpose of displaying on a computer. The invention reduces the size of the sensing unit, increases the sensitivity of sensing and realizes the purpose of monitoring the ultrasonic frequency. Meanwhile, the ultrasonic frequency monitoring device can output on a host, and real-time monitoring of the ultrasonic frequency is realized.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensing, and particularly relates to an optical fiber sensing device based on ultrasonic detection frequency.
Background
At present, the optical fiber sensing technology is gradually improved, and the monitoring device of optical fiber sensing is also gradually improved, wherein in the optical fiber sensing device, the medium material and the structure of the sensing device can generate great influence on the optical fiber sensing. At present, there are many devices and methods for realizing ultrasonic monitoring by using an optical method.
Huangjun et al (handsome, overflow, ginger flying, Zhang Chang Sheng, Zhao Gao, Lichuan. optical fiber F-P cavity sensor characteristic research [ J ] sensor and microsystem, 2017, 36 (04): 68-70.) propose a sensor structure based on optical fiber FP cavity, utilize the deformation of quartz diaphragm to change FP cavity length, judge whether there is ultrasonic wave to produce. Ni et al (Ni, WJ; Lu, P; Fu, X; et al. ultra high graphene diaphragm-based extreme Fabry-Peror interferometer for ultra-wideband optical sensing [ J ]. Optics Express, 2018, 26 (16): 20758-20767) proposed an ultra-wideband fiber optic acoustic sensor based on a graphene film with a thickness of 10nm, which changes the Fabry-Perot cavity by the action of sound waves on the graphene film to measure the sound wave band range. A fiber Fabry-Perot interferometer (FPI) with improved ultrasonic sensitivity is proposed by Shao, ZH, Qiao, XG, Chen, FY, et al, ultrasonic sensitive-amplified fiber-optical Fabry-Perot interferometer using a beam color and an its application for ultrasonic imaging of a semi-chemical physical model [ J ]. Chinese Physics B, 2018, 27 (9): 094218), which includes a flexible ultrathin gold film and an end face of a graded-index multimode fiber (MMF), both of which are encapsulated in a ceramic tube. A given length of MMF can collimate the diverging beam, compensating for light loss in the cavity, and increasing the visibility of the spectral fringes.
Although the researchers adopt the principle of the Fabry-Perot cavity to judge whether ultrasonic waves exist or not, or utilize one surface of the Fabry-Perot cavity formed by the graphene or the gold film to be sensitive to sound waves, the length of the Fabry-Perot cavity is changed, and further the optical path difference is changed, compared with the traditional ultrasonic monitoring device, the measuring range, the measuring precision and the portability of the device are greatly improved; the FP cavity proposed by Ni et al is composed of two fixed reflectors, is easily affected by external vibration, and the sensor head must be left standing upright at room temperature of 25 ℃ for 48 hours, because it is the graphene membrane sheet taken out of water that adheres strongly to the end faces of the ceramic ferrule due to strong van der waals forces. Namely, the end face of the ceramic ferrule is integrated with the graphene membrane. The gold membrane proposed by Shao et al as part of the fabry-perot chamber, most of the ultrasonic power is reflected at the air membrane interface due to the large acoustic impedance difference between the gold membrane and air. The interaction force periodically causes the gold film to undergo axial tensile or compressive deformation, resulting in a change in the length of the gold cavity. Therefore, the optical fiber sensing device for detecting the frequency of the ultrasonic wave, which has higher sensitivity and good stability and can operate for a long time, is provided for solving the problems of low sensitivity, poor stability in long-term operation, easy influence of external environment and the like in the prior art.
Disclosure of Invention
The technical scheme adopted by the invention for solving the technical problems is as follows:
the technical scheme is as follows: an optical fiber sensing device based on ultrasonic detection frequency is characterized by comprising an ASE light source (1), an optical fiber coupler (2), a sensing unit (3), an ultrasonic generating device (4), a photoelectric converter (5) and a signal processing module (6);
the sensing unit (3) comprises a single-mode fiber (3-1), a glass ferrule (3-2), a silicon ring (3-3), a quartz diaphragm (3-4), graphene (3-5) and a gold film (3-6), wherein:
an air Fabry-Perot cavity is formed by the inner surfaces of the single-mode optical fiber (3-1) and the quartz diaphragm (3-4), the cavity length of the air Fabry-Perot cavity is about 26 mu m, the quartz diaphragm (3-4) forms a silicon Fabry-Perot cavity, and the cavity length of the silicon Fabry-Perot cavity is 40 mu m of the thickness of the quartz diaphragm (3-4);
the silicon ring (3-3) is formed by cutting a monocrystalline silicon wafer by using an ultraviolet cutting machine;
the quartz membrane (3-4) is prepared by placing (NH 4) 2 SiF 6 purified liquid into a water bath kettle, stirring and heating to a certain temperature, adding ammonium fluorosilicate solution and 26 wt% of ammonia water, adding the ammonia water when the reaction end point is reached, stirring and aging, filtering, reserving filtrate, washing a filter cake for multiple times by using ultrapure water, adding a proper amount of ultrapure water into the filter cake, heating to 85 ℃, washing for 0.6h, separating solid and liquid while hot, drying the filter cake for 2.5h at 120 ℃, calcining to obtain silicon dioxide, placing the silicon dioxide into a muffle furnace for calcining at 1310 ℃ and preserving heat for 3h for crystallization, and cutting crystals to obtain the quartz membrane;
the graphene (3-5) is prepared by adopting a liquid phase stripping method, and natural graphite, sulfuric acid and potassium dichromate are mixed according to a mass ratio of 1.5: 3: 0.2, uniformly mixing, fully reacting in a water bath at 100 ℃, then adding ionized water into reaction liquid for washing, filtering, drying at 50 ℃, puffing dried powder at 1200 ℃ for 10s, then putting the powder into an N-methylpyrrolidone solvent, stirring at a low speed for fully mixing, stripping the suspension by a high-pressure homogenizing device, circulating for 8 times under the pressure of 80MPa to obtain a graphene solution, and freeze-drying and pressurizing the graphene solution to prepare a graphene sheet;
the gold film (3-6) is obtained by an electron beam evaporation method, a standard silicon wafer is selected as a growing substrate, photoresist is coated on the silicon wafer, the electron beam evaporation method is adopted to grow the gold film (3-6) with the thickness of 200nm on the photoresist, then a gold film (3-6) sample is adhered to a sensing device and is placed in an acetone solution containing 99.7% of analytical purity, after standing for 13h, the photoresist is corroded, the gold film (3-6) is completely separated from the silicon wafer substrate, and film coating is completed;
the single-mode optical fiber (3-1) in the sensing unit (3) is inserted into the glass ferrule (3-2), and the glass ferrule (3-2), the silicon ring (3-3), the quartz diaphragm (3-4), the graphene (3-5) and the gold film (3-6) are sequentially stacked, bonded and packaged to form the sensing unit (3);
the specific preparation process of the sensing unit (3) comprises the steps of selecting the size of a component, dividing the component, placing the component and packaging the component;
wherein: the size selection of the parts comprises selecting a circular diaphragm with the thickness of 61 mu m and the diameter of 4mm of a quartz diaphragm (3-4), and selecting a silicon ring (3-3) with the outer diameter of 3mm, the inner diameter of 2mm and the thickness of 40 mu m;
the part segmentation comprises the cutting of a silicon ring (3-3) and the cutting of a quartz diaphragm (3-3), firstly, a circular ring with the outer diameter of 3mm, the inner diameter of 2mm and the thickness of 40 mu m is cut in monocrystalline silicon of the silicon ring (3-3), and the quartz diaphragm with the diameter of 5mm is cut on a quartz diaphragm with the thickness of 22 mu m and two polished surfaces;
the placement position of the components comprises the steps that a quartz diaphragm (3-4) and a silicon ring (3-3) are sequentially stacked on a high-temperature heating table, a glass insertion core (3-2) with the outer diameter of 3mm is placed on the silicon ring (3-3), and the glass insertion core (3-2) is aligned with the centers of the silicon ring (3-3), the quartz diaphragm (3-4) and graphene (3-5);
the packaging of the component comprises the steps of sealing a glass ferrule (3-2), a silicon ring (3-3) and a quartz diaphragm (3-4) with graphene (3-5) by using an adhesive, then inserting a cut and flat single-mode optical fiber (3-1) into a proper position of the glass ferrule (3-2), pre-fixing by using ultraviolet glue, then completely fixing by using epoxy resin, and standing for 48 hours;
the silicon ring (3-3) in the sensing unit (3) is made of monocrystalline silicon and is cut by an ultraviolet cutting machine.
An implementation method of an optical fiber sensing device based on ultrasonic detection frequency is characterized in that:
the ASE light source (1) emits light beams to be transmitted to the optical fiber coupler (2), the optical fiber coupler (2) outputs the light beams to be transmitted to the sensing unit (3), the light beams are reflected and transmitted in the sensing unit (3), when the sensing unit (3) is placed in the ultrasonic generating device (4), the gold film (3-6), the graphene (3-5) and the quartz diaphragm (3-4) in the sensing unit (3) deform, so that the silicon ring (3-3) changes correspondingly, the air Fabry-Perot cavity changes, the optical path of reflected light is influenced, and then generates the interference of light, the interference light returns to the optical fiber coupler (2) through the single-mode optical fiber (3-1) and is transmitted to the photoelectric converter (5) through the optical fiber coupler (2), the photoelectric converter (5) generates an analog signal and transmits the analog signal to the signal processing module (6) for data processing.
Further, the ASE light source (1) is a broadband light source having a center wavelength of 1550nm for generating an optical signal.
Further, the ultrasonic wave generating device (4) is a device that generates ultrasonic waves.
Furthermore, the signal processing module (6) comprises an A/D module (6-1), a data buffer module (6-2), an IIC serial port (6-3) and a host (6-4) which are connected in sequence.
Furthermore, in the signal processing module (6), an analog signal generated by the photoelectric converter (5) enters the signal processing module (6), the analog signal and a digital signal are converted through the A/D module (6-1) in the signal processing module (6), the output digital signal is input to the data buffer module (6-2) for buffering of the digital signal, and then the signal is transmitted to the host (6-4) through the IIC serial port (6-3), and data is displayed in the host (6-4).
The invention has the structure that: optical fiber sensing device based on ultrasonic detection frequency
Compared with the prior art, the invention has the beneficial effects that:
the invention realizes the frequency measurement of ultrasonic waves, has convenient and simple structure, improves the sensitivity and the operation period of equipment, and greatly reduces the problems of low sensitivity and easy influence of external environmental factors of detection equipment.
According to the invention, the strain of the gold film and the graphene to the sound pressure of the ultrasonic wave causes the quartz diaphragm to deform, so that the length of the Fabry-Perot cavity is directly changed, and the change is irrelevant to the binder, so that the measurement sensitivity is improved, and the measurement sensitivity is improved by 30% after the implementation of the invention.
The invention monitors the frequency of the ultrasonic wave, increases the accuracy of measurement and the stability of long-term operation, and improves the stability of long-term operation by 40 percent after the invention is implemented.
Drawings
Fig. 1 is a structural view of an optical fiber sensing apparatus for detecting a frequency based on ultrasonic waves.
Fig. 2 is a structural view of a sensing unit of an optical fiber sensing device for detecting a frequency based on ultrasonic waves.
Fig. 3 is a detailed diagram of a signal processing module of an optical fiber sensing device based on ultrasonic detection frequency.
Detailed Description
The following embodiments will describe specific implementations of an optical fiber sensing device based on ultrasonic detection frequency according to the present invention with reference to the accompanying drawings.
As shown in FIG. 1, for the structure diagram of the optical fiber sensing device based on ultrasonic detection frequency provided by the invention, ASE light source (1) emits light beam to transmit to optical fiber coupler (2), optical fiber coupler (2) outputs light beam to transmit to sensing unit (3), light beam is reflected and transmitted in sensing unit (3), when sensing unit (3) is placed in ultrasonic generating device (4), under the action of ultrasonic generating device (4), quartz diaphragm (3-4) of sensing unit (3) is deformed, air Fabry-Perot cavity formed by silicon ring (3-3) is changed, optical path of reflected light is affected, interference of light is generated, interference light returns to optical fiber coupler (2) through single mode optical fiber (3-1) and is transmitted to photoelectric converter (5) through optical fiber coupler (2), photoelectric converter (5) generates analog signal and transmits to signal processing module (6) for data processing.
As shown in fig. 2, for the structure diagram of the sensing unit of the optical fiber sensing device for detecting frequency based on ultrasonic waves, a single-mode optical fiber (3-1) in the sensing unit (3) is inserted into a glass ferrule (3-2), the glass ferrule (3-2), a silicon ring (3-3), a quartz diaphragm (3-4), graphene (3-5) and a gold film (3-6) are sequentially stacked, bonded and encapsulated to form the sensing unit (3), and the sensing unit (3) is an air Fabry-Perot cavity formed by the inner surface of the quartz diaphragm (3-4), the end surface of the single-mode optical fiber (3-1), the silicon ring (3-3) and air in the sensing unit (3) and detects the change of the frequency of the ultrasonic waves; when light is transmitted into the single-mode optical fiber (3-1), the light is reflected and transmitted on the inner surface of the quartz diaphragm (3-4), the air Fabry-Perot cavity is changed due to the action of the silicon ring (3-3), the optical path of the reflected light is changed to form interference, an interference spectrum is generated, the transmitted light generated on the inner surface of the quartz diaphragm (3-4) generates the reflected light in the quartz diaphragm (3-4), and when the frequency of ultrasonic waves is changed, the optical path of the reflected light is changed to generate the interference spectrum, and then the frequency of the ultrasonic waves is measured.
As shown in fig. 3, a detailed diagram of a signal processing module of an optical fiber sensing device based on ultrasonic detection frequency is provided for the present invention. The signal processing module (6) is used for enabling an analog signal generated by the photoelectric converter (5) to enter the signal processing module (6), converting the analog signal and a digital signal through the A/D module (6-1) in the signal processing module (6), inputting the digital signal output by the signal processing module into the data buffering module (6-2) for buffering the digital signal, then transmitting the signal to the host (6-4) through the IIC serial port (6-3), and displaying data in the host (6-4). The output of the host (6-4) is realized, and real-time monitoring is carried out.
Claims (6)
1. The utility model provides an optical fiber sensing device based on ultrasonic detection frequency which characterized in that: the ultrasonic sensor comprises an ASE light source (1), an optical fiber coupler (2), a sensing unit (3), an ultrasonic generating device (4), a photoelectric converter (5) and a signal processing module (6);
the sensing unit (3) comprises a single-mode fiber (3-1), a glass ferrule (3-2), a silicon ring (3-3), a quartz diaphragm (3-4), graphene (3-5) and a gold film (3-6), wherein:
an air Fabry-Perot cavity is formed by the inner surfaces of the single-mode optical fiber (3-1) and the silicon ring (3-3), the cavity length of the air Fabry-Perot cavity is about 26 mu m, the silicon ring (3-3) forms the silicon Fabry-Perot cavity, and the cavity length of the silicon Fabry-Perot cavity is 40 mu m of the height of the quartz diaphragm (3-4);
the silicon ring (3-3) is formed by cutting a monocrystalline silicon wafer by using an ultraviolet cutting machine;
the quartz diaphragm (3-4) is made of (NH)4)2SiF6Placing the purified solution in a water bath kettle, stirring and heating to a certain temperature, adding ammonium fluorosilicate solution and 26 wt% of ammonia water, adding the ammonia water when the reaction end point is reached, aging under stirring, filtering, keeping filtrate for later use, and washing a filter cake for multiple times by using ultrapure water; adding a proper amount of ultrapure water into the filter cake, heating to 85 ℃, washing for 0.6h, carrying out solid-liquid separation while the filter cake is hot, drying the filter cake for 2.5h at 120 ℃, and calcining to obtain silicon dioxide; placing the silicon dioxide in a muffle furnace, calcining at 1310 ℃, preserving heat for 3 hours to crystallize the silicon dioxide, and cutting crystals to obtain a quartz diaphragm;
the graphene (3-5) is prepared by adopting a liquid phase stripping method, and natural graphite, sulfuric acid and potassium dichromate are mixed according to a mass ratio of 1.5: 3: 0.2, uniformly mixing, fully reacting in a water bath at 100 ℃, then adding ionized water into reaction liquid for washing, filtering, drying at 50 ℃, puffing dried powder at 1200 ℃ for 10s, then putting the dried powder into an N-methylpyrimidine solvent, stirring at low speed for fully mixing, stripping the suspension by a high-pressure homogenizing device, circulating for 8 times under the pressure of 80MPa to obtain a graphene solution, and freeze-drying and pressurizing the graphene solution to prepare a graphene sheet;
the gold film (3-6) is obtained by an electron beam evaporation method, a standard silicon wafer is selected as a growing substrate, photoresist is coated on the silicon wafer, the electron beam evaporation method is adopted to grow the gold film (3-6) with the thickness of 200nm on the photoresist, then a gold film sample is adhered to a sensing device and is placed in an acetone solution containing 99.7% of analytical pure concentration, after standing for 13h, the photoresist is corroded, the gold film (3-6) is completely separated from the silicon wafer substrate, and coating is completed;
the single-mode optical fiber (3-1) in the sensing unit (3) is inserted into the glass ferrule (3-2), and the glass ferrule (3-2), the silicon ring (3-3), the quartz diaphragm (3-4), the graphene (3-5) and the gold film (3-6) are sequentially stacked, bonded and packaged to form the sensing unit (3);
the specific preparation process of the sensing unit (3) comprises the steps of selecting the size of a component, dividing the component, placing the component and packaging the component;
wherein: the size selection of the parts comprises selecting a circular diaphragm with the thickness of 61 mu m and the diameter of 4mm of a quartz diaphragm (3-4), and selecting a silicon ring (3-3) with the outer diameter of 3mm, the inner diameter of 2mm and the thickness of 40 mu m;
the part segmentation comprises the cutting of a silicon ring (3-3) and the cutting of a quartz diaphragm (3-4), firstly, a circular ring with the outer diameter of 3mm, the inner diameter of 2mm and the thickness of 40 mu m is cut in monocrystalline silicon of the silicon ring (3-3), and the quartz diaphragm with the diameter of 5mm is cut on a quartz diaphragm with the thickness of 22 mu m and two polished surfaces;
the placement position of the components comprises the steps that a quartz diaphragm (3-4) and a silicon ring (3-3) are sequentially stacked on a high-temperature heating table, a glass insertion core (3-2) with the outer diameter of 3mm is placed on the silicon ring (3-3), and the glass insertion core (3-2) is aligned with the centers of the silicon ring (3-3), the quartz diaphragm (3-4) and graphene (3-5);
the packaging of the component comprises the steps of sealing a glass ferrule (3-2), a silicon ring (3-3) and a quartz diaphragm (3-4) with graphene (3-5) by using an adhesive, then inserting a cut and flat single-mode optical fiber (3-1) into a proper position of the glass ferrule (3-2), pre-fixing by using ultraviolet glue, then completely fixing by using epoxy resin, and standing for 48 hours;
the silicon ring (3-3) in the sensing unit (3) is made of monocrystalline silicon and is cut by an ultraviolet cutting machine.
2. The method for implementing the optical fiber sensing device based on the ultrasonic detection frequency according to claim 1, wherein:
the ASE light source (1) emits light beams to be transmitted to the optical fiber coupler (2), the optical fiber coupler (2) outputs the light beams to be transmitted to the sensing unit (3), the light beams are reflected and transmitted in the sensing unit (3), when the sensing unit (3) is placed in the ultrasonic generating device (4), the gold film (3-6), the graphene (3-5) and the quartz diaphragm (3-4) in the sensing unit (3) deform, so that the silicon ring (3-3) changes correspondingly, the air Fabry-Perot cavity changes, the optical path of reflected light is influenced, and then generates the interference of light, the interference light returns to the optical fiber coupler (2) through the single-mode optical fiber (3-1) and is transmitted to the photoelectric converter (5) through the optical fiber coupler (2), the photoelectric converter (5) generates an analog signal and transmits the analog signal to the signal processing module (6) for data processing.
3. The method for implementing the optical fiber sensing device based on the ultrasonic detection frequency according to claim 2, wherein:
the ASE light source (1) is a broadband light source, and the central wavelength is 1550nm for generating light signals.
4. The method for implementing the optical fiber sensing device based on the ultrasonic detection frequency according to claim 2, wherein:
the ultrasonic wave generating device (4) is a device for generating ultrasonic waves.
5. The method for implementing the optical fiber sensing device based on the ultrasonic detection frequency according to claim 2, wherein:
the signal processing module (6) comprises an A/D module (6-1), a data buffer module (6-2), an IIC serial port (6-3) and a host (6-4) which are connected in sequence.
6. The method for implementing the optical fiber sensing device based on the ultrasonic detection frequency according to claim 2, wherein:
the signal processing module (6) is characterized in that an analog signal generated by the photoelectric converter (5) enters the signal processing module (6), the analog signal and a digital signal are converted through the A/D module (6-1) in the signal processing module (6), the output digital signal is input to the data buffering module (6-2) to buffer the digital signal, then the signal is transmitted to the host (6-4) through the IIC serial port (6-3), and data is displayed in the host (6-4).
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