CN112630530B - A kind of optical fiber sensing device and realization method based on ultrasonic detection frequency - Google Patents
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 52
- 238000001514 detection method Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims description 14
- 238000012545 processing Methods 0.000 claims abstract description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 40
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 36
- 239000010453 quartz Substances 0.000 claims description 36
- 229910021389 graphene Inorganic materials 0.000 claims description 25
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 22
- 239000010931 gold Substances 0.000 claims description 22
- 229910052737 gold Inorganic materials 0.000 claims description 22
- 239000011521 glass Substances 0.000 claims description 16
- 238000005520 cutting process Methods 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 239000000835 fiber Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000012065 filter cake Substances 0.000 claims description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 238000003756 stirring Methods 0.000 claims description 5
- 238000005406 washing Methods 0.000 claims description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 4
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 4
- 239000012498 ultrapure water Substances 0.000 claims description 4
- 238000001354 calcination Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- -1 ammonia fluorosilicate Chemical compound 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 239000000706 filtrate Substances 0.000 claims description 2
- 239000003292 glue Substances 0.000 claims description 2
- 239000007791 liquid phase Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229910021382 natural graphite Inorganic materials 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 claims description 2
- 230000001007 puffing effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims description 2
- 239000000725 suspension Substances 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000005538 encapsulation Methods 0.000 claims 1
- 238000004299 exfoliation Methods 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 238000001228 spectrum Methods 0.000 abstract description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 25
- 239000012528 membrane Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000003139 buffering effect Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 241000234314 Zingiber Species 0.000 description 1
- 235000006886 Zingiber officinale Nutrition 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000012295 chemical reaction liquid Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000004108 freeze drying Methods 0.000 description 1
- 235000008397 ginger Nutrition 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/22—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-emitting devices, e.g. LED, optocouplers
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Abstract
本发明专利提供了一种基于超声波检测频率的光纤传感装置，它包括ASE光源、光纤耦合器、传感单元、超声波发生装置、光电转换器、信号处理模块。本发明专利通过光纤进行传感，利用法珀腔原理，使ASE光源发出的光在法珀腔中产生干涉光谱，通过对干涉光谱的检测，测量超声波频率，并且通过信号处理模块，实现数字输出，达到可以在计算机上显示的目的。本发明降低了传感单元的尺寸，增加了传感的灵敏度，实现了监测超声波频率的目的。同时可以在主机上输出，实现了对超声波频率的实时监测。
The patent of the present invention provides an optical fiber sensing device based on ultrasonic detection frequency, which includes an ASE light source, an optical fiber coupler, a sensing unit, an ultrasonic generating device, a photoelectric converter, and a signal processing module. The patent of the invention uses optical fiber for sensing, and uses the principle of the Fa-Per cavity to make the light emitted by the ASE light source generate an interference spectrum in the Fa-Per cavity. Through the detection of the interference spectrum, the ultrasonic frequency is measured, and the digital output is realized through the signal processing module. , so that it can be displayed on the computer. The invention reduces the size of the sensing unit, increases the sensing sensitivity, and realizes the purpose of monitoring the ultrasonic frequency. At the same time, it can be output on the host, which realizes the real-time monitoring of the ultrasonic frequency.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensing, and particularly relates to an optical fiber sensing device based on ultrasonic detection frequency.
Background
At present, the optical fiber sensing technology is gradually improved, and the monitoring device of optical fiber sensing is also gradually improved, wherein in the optical fiber sensing device, the medium material and the structure of the sensing device can generate great influence on the optical fiber sensing. At present, there are many devices and methods for realizing ultrasonic monitoring by using an optical method.
Huangjun et al (handsome, overflow, ginger flying, Zhang Chang Sheng, Zhao Gao, Lichuan. optical fiber F-P cavity sensor characteristic research [ J ] sensor and microsystem, 2017, 36 (04): 68-70.) propose a sensor structure based on optical fiber FP cavity, utilize the deformation of quartz diaphragm to change FP cavity length, judge whether there is ultrasonic wave to produce. Ni et al (Ni, WJ; Lu, P; Fu, X; et al. ultra high graphene diaphragm-based extreme Fabry-Peror interferometer for ultra-wideband optical sensing [ J ]. Optics Express, 2018, 26 (16): 20758-20767) proposed an ultra-wideband fiber optic acoustic sensor based on a graphene film with a thickness of 10nm, which changes the Fabry-Perot cavity by the action of sound waves on the graphene film to measure the sound wave band range. A fiber Fabry-Perot interferometer (FPI) with improved ultrasonic sensitivity is proposed by Shao, ZH, Qiao, XG, Chen, FY, et al, ultrasonic sensitive-amplified fiber-optical Fabry-Perot interferometer using a beam color and an its application for ultrasonic imaging of a semi-chemical physical model [ J ]. Chinese Physics B, 2018, 27 (9): 094218), which includes a flexible ultrathin gold film and an end face of a graded-index multimode fiber (MMF), both of which are encapsulated in a ceramic tube. A given length of MMF can collimate the diverging beam, compensating for light loss in the cavity, and increasing the visibility of the spectral fringes.
Although the researchers adopt the principle of the Fabry-Perot cavity to judge whether ultrasonic waves exist or not, or utilize one surface of the Fabry-Perot cavity formed by the graphene or the gold film to be sensitive to sound waves, the length of the Fabry-Perot cavity is changed, and further the optical path difference is changed, compared with the traditional ultrasonic monitoring device, the measuring range, the measuring precision and the portability of the device are greatly improved; the FP cavity proposed by Ni et al is composed of two fixed reflectors, is easily affected by external vibration, and the sensor head must be left standing upright at room temperature of 25 ℃ for 48 hours, because it is the graphene membrane sheet taken out of water that adheres strongly to the end faces of the ceramic ferrule due to strong van der waals forces. Namely, the end face of the ceramic ferrule is integrated with the graphene membrane. The gold membrane proposed by Shao et al as part of the fabry-perot chamber, most of the ultrasonic power is reflected at the air membrane interface due to the large acoustic impedance difference between the gold membrane and air. The interaction force periodically causes the gold film to undergo axial tensile or compressive deformation, resulting in a change in the length of the gold cavity. Therefore, the optical fiber sensing device for detecting the frequency of the ultrasonic wave, which has higher sensitivity and good stability and can operate for a long time, is provided for solving the problems of low sensitivity, poor stability in long-term operation, easy influence of external environment and the like in the prior art.
Disclosure of Invention
The technical scheme adopted by the invention for solving the technical problems is as follows:
the technical scheme is as follows: an optical fiber sensing device based on ultrasonic detection frequency is characterized by comprising an ASE light source (1), an optical fiber coupler (2), a sensing unit (3), an ultrasonic generating device (4), a photoelectric converter (5) and a signal processing module (6);
the sensing unit (3) comprises a single-mode fiber (3-1), a glass ferrule (3-2), a silicon ring (3-3), a quartz diaphragm (3-4), graphene (3-5) and a gold film (3-6), wherein:
an air Fabry-Perot cavity is formed by the inner surfaces of the single-mode optical fiber (3-1) and the quartz diaphragm (3-4), the cavity length of the air Fabry-Perot cavity is about 26 mu m, the quartz diaphragm (3-4) forms a silicon Fabry-Perot cavity, and the cavity length of the silicon Fabry-Perot cavity is 40 mu m of the thickness of the quartz diaphragm (3-4);
the silicon ring (3-3) is formed by cutting a monocrystalline silicon wafer by using an ultraviolet cutting machine;
the quartz membrane (3-4) is prepared by placing (NH 4) 2 SiF 6 purified liquid into a water bath kettle, stirring and heating to a certain temperature, adding ammonium fluorosilicate solution and 26 wt% of ammonia water, adding the ammonia water when the reaction end point is reached, stirring and aging, filtering, reserving filtrate, washing a filter cake for multiple times by using ultrapure water, adding a proper amount of ultrapure water into the filter cake, heating to 85 ℃, washing for 0.6h, separating solid and liquid while hot, drying the filter cake for 2.5h at 120 ℃, calcining to obtain silicon dioxide, placing the silicon dioxide into a muffle furnace for calcining at 1310 ℃ and preserving heat for 3h for crystallization, and cutting crystals to obtain the quartz membrane;
the graphene (3-5) is prepared by adopting a liquid phase stripping method, and natural graphite, sulfuric acid and potassium dichromate are mixed according to a mass ratio of 1.5: 3: 0.2, uniformly mixing, fully reacting in a water bath at 100 ℃, then adding ionized water into reaction liquid for washing, filtering, drying at 50 ℃, puffing dried powder at 1200 ℃ for 10s, then putting the powder into an N-methylpyrrolidone solvent, stirring at a low speed for fully mixing, stripping the suspension by a high-pressure homogenizing device, circulating for 8 times under the pressure of 80MPa to obtain a graphene solution, and freeze-drying and pressurizing the graphene solution to prepare a graphene sheet;
the gold film (3-6) is obtained by an electron beam evaporation method, a standard silicon wafer is selected as a growing substrate, photoresist is coated on the silicon wafer, the electron beam evaporation method is adopted to grow the gold film (3-6) with the thickness of 200nm on the photoresist, then a gold film (3-6) sample is adhered to a sensing device and is placed in an acetone solution containing 99.7% of analytical purity, after standing for 13h, the photoresist is corroded, the gold film (3-6) is completely separated from the silicon wafer substrate, and film coating is completed;
the single-mode optical fiber (3-1) in the sensing unit (3) is inserted into the glass ferrule (3-2), and the glass ferrule (3-2), the silicon ring (3-3), the quartz diaphragm (3-4), the graphene (3-5) and the gold film (3-6) are sequentially stacked, bonded and packaged to form the sensing unit (3);
the specific preparation process of the sensing unit (3) comprises the steps of selecting the size of a component, dividing the component, placing the component and packaging the component;
wherein: the size selection of the parts comprises selecting a circular diaphragm with the thickness of 61 mu m and the diameter of 4mm of a quartz diaphragm (3-4), and selecting a silicon ring (3-3) with the outer diameter of 3mm, the inner diameter of 2mm and the thickness of 40 mu m;
the part segmentation comprises the cutting of a silicon ring (3-3) and the cutting of a quartz diaphragm (3-3), firstly, a circular ring with the outer diameter of 3mm, the inner diameter of 2mm and the thickness of 40 mu m is cut in monocrystalline silicon of the silicon ring (3-3), and the quartz diaphragm with the diameter of 5mm is cut on a quartz diaphragm with the thickness of 22 mu m and two polished surfaces;
the placement position of the components comprises the steps that a quartz diaphragm (3-4) and a silicon ring (3-3) are sequentially stacked on a high-temperature heating table, a glass insertion core (3-2) with the outer diameter of 3mm is placed on the silicon ring (3-3), and the glass insertion core (3-2) is aligned with the centers of the silicon ring (3-3), the quartz diaphragm (3-4) and graphene (3-5);
the packaging of the component comprises the steps of sealing a glass ferrule (3-2), a silicon ring (3-3) and a quartz diaphragm (3-4) with graphene (3-5) by using an adhesive, then inserting a cut and flat single-mode optical fiber (3-1) into a proper position of the glass ferrule (3-2), pre-fixing by using ultraviolet glue, then completely fixing by using epoxy resin, and standing for 48 hours;
the silicon ring (3-3) in the sensing unit (3) is made of monocrystalline silicon and is cut by an ultraviolet cutting machine.
An implementation method of an optical fiber sensing device based on ultrasonic detection frequency is characterized in that:
the ASE light source (1) emits light beams to be transmitted to the optical fiber coupler (2), the optical fiber coupler (2) outputs the light beams to be transmitted to the sensing unit (3), the light beams are reflected and transmitted in the sensing unit (3), when the sensing unit (3) is placed in the ultrasonic generating device (4), the gold film (3-6), the graphene (3-5) and the quartz diaphragm (3-4) in the sensing unit (3) deform, so that the silicon ring (3-3) changes correspondingly, the air Fabry-Perot cavity changes, the optical path of reflected light is influenced, and then generates the interference of light, the interference light returns to the optical fiber coupler (2) through the single-mode optical fiber (3-1) and is transmitted to the photoelectric converter (5) through the optical fiber coupler (2), the photoelectric converter (5) generates an analog signal and transmits the analog signal to the signal processing module (6) for data processing.
Further, the ASE light source (1) is a broadband light source having a center wavelength of 1550nm for generating an optical signal.
Further, the ultrasonic wave generating device (4) is a device that generates ultrasonic waves.
Furthermore, the signal processing module (6) comprises an A/D module (6-1), a data buffer module (6-2), an IIC serial port (6-3) and a host (6-4) which are connected in sequence.
Furthermore, in the signal processing module (6), an analog signal generated by the photoelectric converter (5) enters the signal processing module (6), the analog signal and a digital signal are converted through the A/D module (6-1) in the signal processing module (6), the output digital signal is input to the data buffer module (6-2) for buffering of the digital signal, and then the signal is transmitted to the host (6-4) through the IIC serial port (6-3), and data is displayed in the host (6-4).
The invention has the structure that: optical fiber sensing device based on ultrasonic detection frequency
Compared with the prior art, the invention has the beneficial effects that:
the invention realizes the frequency measurement of ultrasonic waves, has convenient and simple structure, improves the sensitivity and the operation period of equipment, and greatly reduces the problems of low sensitivity and easy influence of external environmental factors of detection equipment.
According to the invention, the strain of the gold film and the graphene to the sound pressure of the ultrasonic wave causes the quartz diaphragm to deform, so that the length of the Fabry-Perot cavity is directly changed, and the change is irrelevant to the binder, so that the measurement sensitivity is improved, and the measurement sensitivity is improved by 30% after the implementation of the invention.
The invention monitors the frequency of the ultrasonic wave, increases the accuracy of measurement and the stability of long-term operation, and improves the stability of long-term operation by 40 percent after the invention is implemented.
Drawings
Fig. 1 is a structural view of an optical fiber sensing apparatus for detecting a frequency based on ultrasonic waves.
Fig. 2 is a structural view of a sensing unit of an optical fiber sensing device for detecting a frequency based on ultrasonic waves.
Fig. 3 is a detailed diagram of a signal processing module of an optical fiber sensing device based on ultrasonic detection frequency.
Detailed Description
The following embodiments will describe specific implementations of an optical fiber sensing device based on ultrasonic detection frequency according to the present invention with reference to the accompanying drawings.
As shown in FIG. 1, for the structure diagram of the optical fiber sensing device based on ultrasonic detection frequency provided by the invention, ASE light source (1) emits light beam to transmit to optical fiber coupler (2), optical fiber coupler (2) outputs light beam to transmit to sensing unit (3), light beam is reflected and transmitted in sensing unit (3), when sensing unit (3) is placed in ultrasonic generating device (4), under the action of ultrasonic generating device (4), quartz diaphragm (3-4) of sensing unit (3) is deformed, air Fabry-Perot cavity formed by silicon ring (3-3) is changed, optical path of reflected light is affected, interference of light is generated, interference light returns to optical fiber coupler (2) through single mode optical fiber (3-1) and is transmitted to photoelectric converter (5) through optical fiber coupler (2), photoelectric converter (5) generates analog signal and transmits to signal processing module (6) for data processing.
As shown in fig. 2, for the structure diagram of the sensing unit of the optical fiber sensing device for detecting frequency based on ultrasonic waves, a single-mode optical fiber (3-1) in the sensing unit (3) is inserted into a glass ferrule (3-2), the glass ferrule (3-2), a silicon ring (3-3), a quartz diaphragm (3-4), graphene (3-5) and a gold film (3-6) are sequentially stacked, bonded and encapsulated to form the sensing unit (3), and the sensing unit (3) is an air Fabry-Perot cavity formed by the inner surface of the quartz diaphragm (3-4), the end surface of the single-mode optical fiber (3-1), the silicon ring (3-3) and air in the sensing unit (3) and detects the change of the frequency of the ultrasonic waves; when light is transmitted into the single-mode optical fiber (3-1), the light is reflected and transmitted on the inner surface of the quartz diaphragm (3-4), the air Fabry-Perot cavity is changed due to the action of the silicon ring (3-3), the optical path of the reflected light is changed to form interference, an interference spectrum is generated, the transmitted light generated on the inner surface of the quartz diaphragm (3-4) generates the reflected light in the quartz diaphragm (3-4), and when the frequency of ultrasonic waves is changed, the optical path of the reflected light is changed to generate the interference spectrum, and then the frequency of the ultrasonic waves is measured.
As shown in fig. 3, a detailed diagram of a signal processing module of an optical fiber sensing device based on ultrasonic detection frequency is provided for the present invention. The signal processing module (6) is used for enabling an analog signal generated by the photoelectric converter (5) to enter the signal processing module (6), converting the analog signal and a digital signal through the A/D module (6-1) in the signal processing module (6), inputting the digital signal output by the signal processing module into the data buffering module (6-2) for buffering the digital signal, then transmitting the signal to the host (6-4) through the IIC serial port (6-3), and displaying data in the host (6-4). The output of the host (6-4) is realized, and real-time monitoring is carried out.
Claims (6)
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