CN112629782A - Self-sealing type vacuum detection system and vacuumizing leak detection method - Google Patents
Self-sealing type vacuum detection system and vacuumizing leak detection method Download PDFInfo
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- CN112629782A CN112629782A CN202011602181.7A CN202011602181A CN112629782A CN 112629782 A CN112629782 A CN 112629782A CN 202011602181 A CN202011602181 A CN 202011602181A CN 112629782 A CN112629782 A CN 112629782A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/34—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines
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Abstract
The invention discloses a self-sealing vacuum detection system and a vacuumizing leak detection method. The method comprises the following steps: installing a module to be detected at an opening of a box body; step two: covering the cover cap to enable the circumferential edge of the pressing plate to be in contact with the module to be detected; step three: vacuumizing the box body and the cover cap by using a vacuum pump, extending the flexible deformation part under the action of pressure difference and driving the pressing plate to downwards extrude the module to be detected, so that the module to be detected and the box body are sealed; step four: filling helium into the cover cap to a preset value; step five: and (4) measuring whether helium permeates into the box body by using a leak detector. The beneficial effects are that: the module to be detected can be quickly and automatically sealed in the vacuum sealing cavity, and sealing performance detection is completed.
Description
Technical Field
The invention belongs to the technical field of detection of sealing performance of vacuum sealing components, and particularly relates to a self-sealing type vacuum detection system and a vacuumizing leak detection method.
Background
In the field of optics, many physical devices are used in a vacuum environment where the components are often hermetically assembled to mount the physical devices. For the sealing installation of the components, the traditional technical means needs manual intervention, namely, a screw connection mode is adopted to apply pretightening force to the components needing to be sealed, the mode has the defects of low efficiency, easy dust generation and limited operation space, and meanwhile, the risk of component cracking caused by uneven pretightening force of the screws exists. Such as: ray apparatus module among the laser device, before the online installation of ray apparatus module, need be connected it with off-line vacuum leak hunting platform and seal, then carry out vacuum seal performance and detect, because optical element in the ray apparatus module is thinner, it is breakable, surface cleanliness requires highly, it is connected sealed efficiency and success rate requirement height with vacuum leak hunting platform, so reuse traditional screw connection mode seal then can not satisfy the operation requirement, for this, an convenient and fast's sealed mode is urgently sought.
Disclosure of Invention
In view of the above, the present invention provides a self-sealing vacuum detection system, in which a module to be detected can be automatically sealed in a vacuum sealing chamber.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a self-sealing type vacuum detection system is characterized in that: the box body with an open upper end is included, a cover cap is detachably mounted at the open end of the box body, a pressing plate capable of moving up and down is arranged at the bottom of the cover cap, a sealing ring is fixedly mounted at the top of the cover cap, an avoiding hole is formed in the cover cap, a flexible deformation part is arranged in the avoiding hole, the lower end of the flexible deformation part is connected to the pressing plate, and the upper end of the flexible deformation part is connected with the sealing ring;
after the cover cap is buckled on the box body, the flexible deformation part can be deformed by changing the pressure difference between the inside and the outside of the cover cap, so that the pressing plate is controlled to move upwards or downwards.
Adopt above-mentioned structure, when the system uses, the module that waits to detect is placed on the uncovered end of box earlier, then detain the shroud cover on the box again, the inside sealed chamber down that forms of box this moment, the inside sealed chamber that forms of shroud, then to last sealed chamber and lower sealed chamber evacuation simultaneously again, make inside pressure be less than external atmospheric pressure, because the effect of pressure differential, flexible deformation part expands downwards and drives the clamp plate downstream this moment, make the clamp plate compress tightly the module that waits to detect, guarantee to wait to examine the sealed between module and the lower sealed chamber, just so avoided utilizing the screw to fasten and wait to examine the module. The module to be detected is fixed at the open end of the box body by utilizing pressure difference, and then helium is filled into the upper sealing cavity, so that the vacuum sealing performance detection of the module to be detected can be realized.
Preferably, the method comprises the following steps: the flexible deformation part is a corrugated pipe. By adopting the structure, when the pressure in the cover cap is smaller than the atmospheric pressure, the corrugated pipe can stretch longitudinally, so that the pressing plate is driven to wholly apply pressure to the periphery of the module to be detected.
Preferably, the method comprises the following steps: and guide pins extending downwards are distributed on the inner side of the cover cap, and the pressure plate is connected to the guide pins in a sliding manner. By adopting the structure, the pressing plate is conveniently assembled inside the cover in a sliding way.
Preferably, the method comprises the following steps: the circumferential edge of the cover cap is provided with a side baffle plate extending downwards, and a sealing ring is arranged at the position of the box body corresponding to the lower end of the side baffle plate. By adopting the structure, after the cover cap is buckled on the box body, the upper sealing cavity formed inside the cover cap can be ensured.
Preferably, the method comprises the following steps: and downward extending pressing blocks are distributed on the circumferential edge of the pressing plate. By adopting the structure, the pressing plate can be pressed tightly at the edge of the module to be detected when moving downwards so as to avoid the pressing of the element in the middle of the module to be detected.
Preferably, the method comprises the following steps: the box is provided with the stopper in the circumference outside of its upper end uncovered position. Adopt above-mentioned structure to the module is examined in the location installation.
Preferably, the method comprises the following steps: and the box body and the cover cap are both provided with air pipe connecting joints. By adopting the structure, the box body and the cover cap are vacuumized and filled with helium gas when the sealing performance is detected.
Preferably, the method comprises the following steps: the lower end of the guide pin is connected with a nut. Adopt above-mentioned structure to the installation clamp plate is convenient for.
The invention also provides a vacuumizing leak detection method, which utilizes the self-sealing type vacuum detection system to carry out vacuum leak detection on the module to be detected and is characterized by comprising the following steps:
the method comprises the following steps: installing a module to be detected at an opening of a box body;
step two: covering the cover cap to enable the circumferential edge of the pressing plate to be in contact with the module to be detected;
step three: vacuumizing the box body and the cover cap by using a vacuum pump, extending the flexible deformation part under the action of pressure difference and driving the pressing plate to downwards extrude the module to be detected, so that the module to be detected and the box body are sealed;
step four: filling helium into the cover cap to a preset value;
step five: and (4) measuring whether helium permeates into the box body by using a leak detector.
By adopting the method, the leak detector can detect the sealing performance of the module to be detected in the vacuum environment according to the concentration of the permeated helium.
Compared with the prior art, the invention has the beneficial effects that:
1. the scalability of the corrugated pipe is ingeniously utilized, the quick automatic sealing of the module to be detected and the cavity is realized by means of the pressure difference between the inner environment and the outer environment, the pretightening force is not required to be manually applied, and the method is simple and effective.
2. The pressing plate integrally extrudes the circumferential edge of the module to be detected by means of pressure, the module to be detected is uniformly stressed, middle elements cannot be damaged, dust cannot be generated, and the sealing success rate is high.
3. The separation of waiting to examine the module can be realized through the pressure release and demolishs convenient to use.
4. The vacuum sealing device can be widely applied to the vacuum sealing fields of aviation, aerospace, underwater, laser and the like, and has extremely high popularization value.
Drawings
FIG. 1 is a schematic structural view of the present invention (cover and cabinet process separated state);
FIG. 2 is a schematic structural diagram of a case;
FIG. 3 is a cross-sectional view of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 3 at I;
fig. 5 is a schematic diagram of vacuum sampling.
Detailed Description
The present invention will be further described with reference to the following examples and the accompanying drawings.
As shown in fig. 1 to 4, a self-sealing vacuum detection system, the main components of the system include a box 1 and a cover cap 2, wherein, the upper end of the box 1 is open, the circumferential edge of the cover cap 2 has a side baffle 2c extending downward, the box 1 is provided with a sealing ring 6 corresponding to the position of the lower end of the side baffle 2c, the inner side of the cover cap 2 is provided with four downward extending guide pins 2b, a pressing plate 3 is slidably sleeved on the four guide pins 2b, a sealing ring 4 is fixedly installed outside the cover cap 2, a avoiding hole 2a is formed in the cover cap 2, a flexible deformation component 5 penetrates through the avoiding hole 2a, the lower end of the flexible deformation component 5 is fixedly connected with the pressing plate 3, and the upper end is connected to the sealing ring.
In this embodiment, an off-line vacuum pumping and leak detection of the optical-mechanical module in the laser device is taken as an example for description, and the optical-mechanical module 7 is composed of a frame body 7a, a pressing frame 7b, and an optical element 7 c. When the system is used for carrying out vacuum tightness detection on the optical mechanical module 7, the frame body 7a is supported at the open end of the box body 1 through the first sealing piece 7e, the second sealing piece 7d is arranged between the pressing frame 7b and the optical element 7c, the cover 2 covers and buckles the box body 1, the cover 2 and the box body 1 are sealed through the sealing ring 4, the lower sealing cavity 8 is formed inside the box body 1 at the moment, the upper sealing cavity 9 is formed inside the cover 2, the upper sealing cavity 9 and the lower sealing cavity 8 are simultaneously vacuumized, along with gradual increase of internal and external pressure difference, the flexible deformation part 5 can be downwards expanded and drives the pressing plate 3 to downwards move, the pressing plate 3 compresses the frame body 7a of the optical mechanical module 7, so that the quick sealing of the module to be detected under a vacuum environment is realized, and the module to be detected is prevented from being fastened by screws.
In this embodiment, in order to ensure the effectiveness of the pressure transmission along the longitudinal direction, the flexible deformation component 5 preferably adopts a corrugated pipe, and when the pressure in the cover 2 is lower than the atmospheric pressure, the corrugated pipe can stretch and contract along the longitudinal direction, so as to drive the pressing plate 3 to apply pressure to the periphery of the optical-mechanical module 7 as a whole.
As shown in fig. 4, to facilitate the assembly of the pressure plate 3, a nut 2d is attached to the lower end of the guide pin 2 b. The peripheral edge distribution of clamp plate 3 has downwardly extending's compact heap 3a, and clamp plate 3 can compress tightly it at framework 7a edge of ray apparatus module 7 when moving down to avoid middle optical element 7c pressurized.
As shown in fig. 2, in order to facilitate positioning and installation of the optical-mechanical module 7, the opening of the box body 1 is a rectangular hole, and the upper surface of the box body 1 on three sides corresponding to the rectangular hole is provided with a limit block 1 a.
As shown in fig. 5, the working steps of the self-sealing vacuum detection system for off-line vacuum pumping and leak detection of the opto-mechanical module 7 are as follows:
the method comprises the following steps: the optical machine module 7 to be detected is arranged at the opening of the box body 1, and the side surface of the frame body 7a is tightly attached to the limiting block 1 a;
step two: covering the cover 2, and enabling the pressing block 3a at the circumferential edge of the pressing plate 3 to be in contact with the frame body 7 a;
step three: the air pipe h is communicated with the upper sealing cavity 9, the air pipe k is communicated with the lower sealing cavity 8, and the corresponding position is connected with an upper vacuum pump f, a leak detector g and a helium bag a;
step four: closing the electromagnetic valve b, disconnecting the electromagnetic valve c and the electromagnetic valve e, communicating the upper sealing cavity 9, the lower sealing cavity 8, the leak detector g and the vacuum pump f, opening the vacuum pump and the leak detector g, vacuumizing the upper sealing cavity 9 and the lower sealing cavity 8 at the same time, extending the corrugated pipe under the action of pressure difference and driving the pressing plate 3 to downwards extrude the frame body 7a along the guide pin 2b, and ensuring that the space between the optical machine module 7 to be detected and the lower sealing cavity 8 is sealed;
step five: and closing the electromagnetic valve c and the electromagnetic valve e, disconnecting the electromagnetic valve b, filling helium gas into the upper sealed cavity 9 by the helium gas bag a to a set value, and monitoring the set value by a vacuum gauge d. (the set value is far less than the atmospheric pressure, and basically does not affect the extrusion force of the pressure plate 3 to the frame body 7a, for example, the helium is filled at 1000Pa, the caliber of the corrugated pipe is 300mm, the pressure can be generated at 700kg, and the pressing force is enough).
Step six: the electromagnetic valve b is closed, the leak detector g starts to leak, after helium is filled, the pressure of the upper sealing cavity 9 is larger than the pressure of the lower sealing cavity 8, if the optical machine module 7 separated in the middle leaks, the helium filled into the upper sealing cavity 9 can permeate into the lower sealing cavity 9 and further enter the leak detector g, and the leak detector g can detect the sealing performance of the optical machine module 7 in a vacuum environment according to the concentration of the permeated helium.
Finally, it should be noted that the above-mentioned description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.
Claims (10)
1. A self-sealing vacuum detection system is characterized in that: the box body comprises a box body (1) with an open upper end, wherein a cover (2) is detachably mounted at the open end of the box body (1), a pressing plate (3) capable of moving up and down is arranged at the bottom of the cover (2), a sealing ring (4) is fixedly mounted at the top of the cover (2), an avoiding hole (2a) is formed in the cover (2), a flexible deformation component (5) is arranged in the avoiding hole (2a), the lower end of the flexible deformation component (5) is connected to the pressing plate (3), and the upper end of the flexible deformation component is connected with the sealing ring (4);
after the cover cap (2) is buckled on the box body (1), the flexible deformation part (5) can be deformed by changing the pressure difference between the inside and the outside of the cover cap (2) so as to control the pressing plate (3) to move upwards or downwards.
2. The self-sealing vacuum detection system according to claim 1, wherein: the flexible deformation part (5) is a corrugated pipe.
3. The self-sealing vacuum detection system according to claim 1, wherein: the inner side of the cover cap (2) is distributed with guide pins (2b) extending downwards, and the pressing plate (3) is connected to the guide pins (2b) in a sliding mode.
4. The self-sealing vacuum detection system according to claim 1, wherein: the peripheral edge of shroud (2) has downwardly extending's side shield (2c), box (1) is equipped with sealing washer (6) corresponding side shield (2c) lower extreme position.
5. The self-sealing vacuum detection system according to claim 1, wherein: and downward extending pressing blocks (3a) are distributed on the circumferential edge of the pressing plate (3).
6. The self-sealing vacuum detection system according to claim 1, wherein: a limiting block (1a) is arranged on the circumferential outer side of the upper end opening position of the box body (1).
7. The self-sealing vacuum detection system according to claim 1, wherein: and the box body (1) and the cover cap (2) are both provided with air pipe connecting joints.
8. The self-sealing vacuum detection system according to claim 3, wherein: the lower end of the guide pin (2b) is connected with a nut (2 d).
9. An evacuation leak detection method for performing vacuum leak detection of a module to be detected by using the self-sealing type vacuum detection system as claimed in any one of claims 1 to 8, comprising the steps of:
the method comprises the following steps: the module to be detected is arranged at the opening of the box body (1);
step two: covering the cover cap (2) to enable the circumferential edge of the pressing plate (3) to be in contact with the module to be detected;
step three: vacuumizing the box body (1) and the cover cap (2) by using a vacuum pump (f), extending the flexible deformation part (5) under the action of pressure difference and driving the pressing plate (3) to downwards extrude the module to be detected, so that the module to be detected and the box body (1) are sealed;
step four: helium is filled into the cover cap (2) to a preset value;
step five: and (3) measuring whether helium permeates into the box body (1) by using a leak detector (g).
10. The vacuum pumping leak detection method according to claim 9, characterized in that: monitoring the preset value in the fourth step by using a vacuum gauge (d).
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Cited By (2)
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| CN113916462A (en) * | 2021-10-12 | 2022-01-11 | 深圳华尔升智控技术有限公司 | Explosion-proof vacuum detection cover for helium mass spectrometer leak detector |
| CN115524042A (en) * | 2022-10-11 | 2022-12-27 | 中国工程物理研究院激光聚变研究中心 | Optical machine module manual operation box |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113916462A (en) * | 2021-10-12 | 2022-01-11 | 深圳华尔升智控技术有限公司 | Explosion-proof vacuum detection cover for helium mass spectrometer leak detector |
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| CN115524042A (en) * | 2022-10-11 | 2022-12-27 | 中国工程物理研究院激光聚变研究中心 | Optical machine module manual operation box |
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| CN112629782B (en) | 2022-09-06 |
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