CN112629747A - Ion vacuum gauge for monitoring high-corrosivity vapor pressure - Google Patents
Ion vacuum gauge for monitoring high-corrosivity vapor pressure Download PDFInfo
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- CN112629747A CN112629747A CN202011592328.9A CN202011592328A CN112629747A CN 112629747 A CN112629747 A CN 112629747A CN 202011592328 A CN202011592328 A CN 202011592328A CN 112629747 A CN112629747 A CN 112629747A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
Abstract
The invention relates to an ion vacuum gauge for monitoring high-corrosivity vapor pressure, which solves the problem that the conventional thermal anion vacuum gauge cannot be used for monitoring the high-corrosivity vapor pressure in real time at present. This device includes hot cathode ionization gauge and measuring circuit, its characterized in that: the hot cathode ionization gauge comprises a spiral grid, a collector extending along the spiral axis direction of the grid is arranged on the inner side of the spiral grid, hot cathode filaments are arranged on one or more sides of the outer side of the grid, the hot cathode filaments are uniformly arranged around the grid when the hot cathode filaments are arranged on multiple sides of the outer side of the grid, an electric heating device is arranged on the outer side of the hot cathode ionization gauge in a winding mode, and a thermocouple is arranged on the electric heating device. The vapor pressure is continuously and stably monitored in a high-temperature and high-corrosion environment after the vacuum cavity reaches a higher vacuum degree; and under the state that the vacuum chamber stops working, the pressure is increased and the temperature is reduced, the electric heating device is used for preventing the selenium steam from depositing on the surface of the hot cathode ionization gauge tube.
Description
Technical Field
The invention belongs to the field of solar cell production, relates to a monitoring device for vacuum coating equipment, and particularly relates to an ion vacuum gauge for monitoring high-corrosivity vapor pressure.
Background
The flexible solar cell sheet is formed by forming a solar photovoltaic material coating on a flexible windable substrate. The Copper Indium Gallium Selenide (CIGS) thin film cell is a solar photovoltaic material with high mass-power ratio and good stability, and is generally considered as a flexible solar cell material with the greatest development prospect. The multi-element co-evaporation method is the most widely applied CIGS film coating method, film coating is completed in a vacuum environment, and a polycrystalline coating is formed on the surface of a substrate through reaction by co-evaporation of elements such as copper, indium, gallium and selenium. The steam coating mode cannot be directly interfered, and the quality of the coating layer can be indirectly controlled only by controlling the evaporation gas. Therefore, the temperature and vapor pressure of the vapor must be monitored in real time during the vapor deposition process.
In the existing vacuum coating equipment manufacturing industry, a composite vacuum gauge of the pinani and the thin film is a main vacuum gauge selection type, and the vacuum gauge has the defects of use in some special working environments: firstly, when the detection temperature of a vacuum gauge exceeds 150 ℃ during film coating, the material of the vacuum gauge is deformed, and the vacuum value is abnormal; secondly, when corrosive gas molecules such as tungsten, selenium and the like appear in the film coating working condition, the film coating device can seriously damage the existing film vacuum gauge and reduce the service life.
There is also a hot cathode ion vacuum gauge for measuring high vacuum degree, which is composed of a hot cathode ionization gauge and a measuring circuit. The measuring circuit consists of a gauge working power supply, an emission current voltage stabilizer, an ion flow measuring amplifier and the like. The hot cathode ionization gauge is communicated with a tested vacuum system. The hot cathode ionization gauge is a triode, and a cathode, a grid and a collector are arranged in the triode. The working principle is as follows: the collector potential is negative relative to the cathode; the gate is at a positive potential with respect to the cathode. The cathode adopts a hot cathode filament, and after the hot cathode filament is heated, the hot cathode filament emits electrons, and the electrons collide with gas molecules to generate ionization phenomena of positive ions and electrons in the process of reaching the grid electrode. When the emission current is fixed, the number of positive ions is in direct proportion to the pressure of the gas to be detected. After the positive ions are collected by the collector, the positive ions are amplified by the measuring circuit, and then the vacuum value to be measured can be read.
The conventional hot cathode ion vacuum gauge is usually used for instantaneous measurement of ultimate vacuum degree, if the vacuum degree is lower, the filament can be damaged, and the conventional hot cathode ion vacuum gauge mostly adopts a tungsten filament as a hot cathode filament, so that the electron emission of the filament can not be ensured to be stable for a long time under a high-corrosion environment. And vapor pressure monitoring in the multi-element co-evaporation method of copper, indium, gallium and selenium elements, because the evaporation temperature of the elements is high, when production is finished each time, the evaporation amount of corrosive gas is reduced due to other evaporation sources, residue caused by insufficient reaction is obviously generated, the environmental pressure value is obviously increased, and at the moment, the power supply of the hot cathode ion vacuum gauge needs to be closed in time to protect a hot cathode filament. In the process, corrosive gas has an obvious clustering phenomenon, corrosive steam can be cooled, deposited and attached on the surface of the hot cathode ionization gauge tube, fittings of the hot cathode ionization gauge tube are continuously corroded, and the deposited material forms a surface coating, so that the electron emission of the hot cathode filament can be influenced, and the collection of the collector on positive ions can also be influenced.
In addition, in a hot cathode ionization gauge in a traditional hot cathode ion vacuum gauge, a hot cathode filament of the hot cathode ionization gauge adopts an extremely fine tungsten filament as electron emission, and in a highly corrosive gas environment, the emission time of the hot cathode filament cannot be ensured, so that the data display of a collector is abnormal.
Disclosure of Invention
The invention aims to solve the problems that the conventional hot cathode ion vacuum gauge cannot be used for monitoring high-corrosivity vapor pressure at present, and corrosive vapor is cooled, deposited and attached on the surface of a hot cathode ionization gauge tube in the end stage of production to form continuous corrosion and influence the normal use of the hot cathode ion vacuum gauge, and provides the ion vacuum gauge for monitoring the high-corrosivity vapor pressure.
The technical scheme adopted by the invention for solving the technical problems is as follows: an ion vacuum gauge for monitoring high-corrosivity vapor pressure, which is used for monitoring the vapor pressure in a vacuum cavity and comprises a hot cathode ionization gauge and a measuring circuit, and is characterized in that: the hot cathode ionization gauge comprises a spiral grid, a collector extending along the spiral axis direction of the grid is arranged on the inner side of the spiral grid, hot cathode filaments are arranged on one or more sides of the outer side of the grid, and the hot cathode filaments are arranged on the outer side of the gridWhen the outer sides of the grids are arranged in multiple directions, all the hot cathode filament wires are uniformly arranged around the grids, the outer sides of the hot cathode ionization gauge tubes are wound with electric heating devices, and the electric heating devices are provided with thermocouples. The device is used in a vacuum cavity of a CIGS co-evaporation method coating film of a CIGS flexible solar cell and used for monitoring vapor pressure, a hot cathode ionization gauge tube extends into the vacuum cavity, and a measuring circuit is arranged outside the vacuum cavity. The vacuum cavity is filled with high-temperature selenium steam, the high-temperature and high-corrosion environment is realized, and selenium element deposition is easily generated when the pressure in the vacuum cavity is increased and the temperature is reduced. The extreme value of the vacuum degree in the vacuum cavity can reach 1.0E-7Torr, when the vacuum in the vacuum chamber reaches 1.0E-2When the temperature is Torr, the ion gauge is lighted, and if the vacuum degree is too low, namely the pressure in the vacuum chamber is too high, the ion gauge is not suitable to be lighted to avoid the damage of the filament. When the ion vacuum gauge is lighted, the environment of the hot cathode ionization gauge is selenium steam environment, and the vapor pressure changes from 1.0E- 7Torr to 1.0E-2Torr. The ion vacuum gauge can display the numerical value of the vapor pressure and output and display the numerical value. During operation, the hot cathode filament heats, the ion vacuum gauge is heated by the hot cathode filament to be in a high-temperature state, and selenium deposition cannot be generated. When the production is finished, the evaporation capacity of the selenium steam is reduced due to other evaporation sources of elements such as copper, indium and gallium, so that residue caused by insufficient reaction can be obviously generated, the pressure value can be obviously increased, meanwhile, the selenium steam can have an obvious clustering phenomenon, and at the moment, the filament can be obviously damaged when the ion meter is lightened. At the moment, the ion vacuum gauge needs to be closed in time, the electric heating device surrounding the hot cathode ionization gauge is electrified and heated, the temperature is stably controlled to 300 ℃ through the thermocouple, selenium steam can be influenced by high temperature at the position of the hot cathode ionization gauge to keep an evaporation state, gas molecules are far away from the electric heating device, and the selenium steam is prevented from depositing on the hot cathode ionization gauge to influence the working precision of the ion vacuum gauge.
Preferably, the hot cathode ionization gauge is installed on the cavity wall of the vacuum cavity through a flange frame, a collector extends out of the flange frame along the central axis, two grid support frames are arranged on two sides of the central axis at equal intervals, the grid support frames are parallel to the central axis of the flange frame, the spiral grid is located between the two grid support frames, and two ends of the grid are respectively welded with the two grid support frames.
Preferably, the two grid supports are arranged in a long-short mode, and two ends of the spiral grid are welded to the ends of the two grid supports in the long-short mode respectively. The two grid supports can support two ends of the spiral grid and are used as a part of a grid loop at the same time.
Preferably, two sets of cathode supporting frames are symmetrically arranged on two sides of the outer side of the grid, and hot cathode filaments are erected on the side faces, facing the grid, of the cathode supporting frames.
Preferably, each group of cathode supporting frames comprises two long cathode supporting rods and two short cathode supporting rods, the hot cathode filament is spiral, and two ends of the hot cathode filament are respectively welded with the end parts of the two cathode supporting rods of the same group of cathode supporting frames. The cathode support rod is used as a part of a cathode loop and is conductive to the hot cathode filament.
Preferably, the electric heating device is arranged around the outer sides of the grid support frame and the cathode support frame.
Preferably, the electric heating device extends spirally into the vacuum cavity, and the extending distance of the electric heating device to the vacuum cavity is not less than the extending distance of the hot cathode ionization gauge tube to the vacuum cavity. The electric heating device is ensured to be in a cover shape and completely cover the outer side of the hot cathode ionization gauge tube, a high-temperature environment is formed, and the selenium steam is prevented from agglomerating and depositing on the surface of the hot cathode ionization gauge tube in the states of boosting and cooling the vacuum cavity.
Preferably, the hot cathode filament adopts iridium filament with the diameter of 0.05-0.1mm, and the surface of the iridium filament is provided with an yttrium oxide coating. The iridium wire with the coating is used as the hot cathode filament, so that the filament can continuously work.
Preferably, the grid electrode is formed by spirally winding a tungsten wire with the diameter of 0.5-2mm, a gap is reserved between adjacent spiral sections, and the collector electrode is formed by a tungsten wire with the diameter of 0.1-2 mm.
Preferably, the resistance of the hot cathode filament is less than 0.5 ohm, the bias voltage of the hot cathode filament is +25V, the grid voltage is +170V, the collector voltage is-170V, and the working voltage and current of the hot cathode filament are +4.7V and 1.8A respectively.
In a vacuum cavity of a CIGS co-evaporation method, the vapor pressure is continuously and stably monitored by an ion vacuum gauge in a high-temperature and high-corrosion environment after the vacuum cavity reaches a higher vacuum degree, the stability of a coating environment is ensured, and the product quality is improved; and the electric heating device is arranged outside the hot cathode ionization gauge pipe positioned in the vacuum cavity in a surrounding manner, the ion vacuum gauge is closed in the state that the vacuum cavity stops working, the pressure is increased and the temperature is reduced, the electric heating device is used for maintaining the high temperature of the position of the hot cathode ionization gauge pipe, the selenium steam is prevented from agglomerating and depositing on the surface of the hot cathode ionization gauge pipe, and the working precision of the ion vacuum gauge is ensured.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of an embodiment of the present invention.
FIG. 2 is a schematic view of the hot cathode ionization gauge of FIG. 1 of the present invention at another angle.
Fig. 3 is a left side view of the fig. 1 structure of the present invention.
In the figure: 1. the device comprises a flange frame, 2, a collector, 3, a grid, 4, a hot cathode filament, 5, a short grid support frame, 6, a long grid support frame, 7, an electric heating device, 8, a thermocouple, 9, a short cathode support rod, 10 and a long cathode support rod.
Detailed Description
The invention is further illustrated by the following specific examples in conjunction with the accompanying drawings.
Example (b): an ion vacuum gauge for monitoring high corrosive vapor pressure is shown in figures 1 and 2. The device is used for monitoring the vapor pressure in a vacuum cavity and comprises a hot cathode ionization gauge and a measuring circuit. The hot cathode ionization gauge is installed on the cavity wall of the vacuum cavity through the flange frame 1, extends into the vacuum cavity, and the measuring circuit is located outside the vacuum cavity and connected with the hot cathode ionization gauge on the flange frame. The hot cathode ionization gauge comprises a spiral grid 3, a collector 2 extending along the spiral axis direction of the grid is arranged on the inner side of the spiral grid, and hot cathode filaments 4 are arranged on two sides of the outer side of the grid. The hot cathode filament 4 is made of 0.05-0.1mm iridium filament, and the surface of the iridium filament is provided with an yttrium oxide coating. The grid 3 is formed by spirally winding a tungsten wire with the diameter of 0.5-2mm, a gap is reserved between adjacent spiral sections, and the collector 2 is formed by a tungsten wire with the diameter of 0.1-2 mm. The resistance of the hot cathode filament is less than 0.5 ohm, the bias voltage of the hot cathode filament is +25V, the grid voltage is +170V, the collector voltage is-170V, and the working voltage and the current of the hot cathode filament are +4.7V and 1.8A respectively.
As shown in fig. 1, a collector 2 extends from a flange frame 1 along a central axis, and an outer end of the collector passes through the flange frame 1 for connecting a measurement circuit. The flange frame is provided with two grid support frames at equal intervals on two sides of the central axis, the grid support frames are parallel to the central axis of the flange frame, the two grid support frames are respectively a short grid support frame 5 and a long grid support frame 6, the spiral grid 3 is positioned between the short grid support frame 5 and the long grid support frame 6, and two ends of the grid 3 are respectively welded with the short grid support frame 5 and the long grid support frame 6. The outer ends of the short grid support frame 5 and the long grid support frame 6 are sealed and penetrate through the flange frame 1 to be connected with a measuring circuit.
As shown in fig. 2, two sets of cathode supporting frames are symmetrically arranged on two sides of the outer side of the grid 3, each set of cathode supporting frame comprises a short cathode supporting rod 9 and a long cathode supporting rod 10, the hot cathode filament 4 is spiral, two ends of the hot cathode filament 4 are respectively welded with the end parts of the two cathode supporting rods of the same set of cathode supporting frame, as shown in fig. 2, the end parts of the short cathode supporting rod 9 and the long cathode supporting rod 10 are bent towards the adjacent sides, and the hot cathode filament 4 is ensured to be parallel to the central axis of the grid 3. As shown in fig. 3, the short grid support 5 and the long grid support 6 and the two sets of cathode supports are arranged at 90 degrees intervals.
As shown in fig. 1 and 3, an electric heating device 7 is wound around the outside of the hot cathode ionization gauge, and a thermocouple 8 is inserted into the flange frame 1 inside the electric heating device. The electric heating device 7 extends out spirally in the vacuum cavity, and the extending distance of the electric heating device in the vacuum cavity is not less than the extending distance of the hot cathode ionization gauge tube in the vacuum cavity.
The extreme value of the vacuum degree in the vacuum cavity can reach 1.0E-7Torr, when the vacuum in the vacuum chamber reaches 1.0E-2When Torr, ion vacuumThe ion gauge is not suitable to be lighted to avoid filament damage if the vacuum degree is too low, namely the pressure in the vacuum cavity is too high. When the ion vacuum gauge is lighted, the environment of the hot cathode ionization gauge is selenium steam environment, and the vapor pressure changes from 1.0E- 7Torr to 1.0E-2Torr. The ion vacuum gauge can display the numerical value of the vapor pressure and output and display the numerical value. During operation, the hot cathode filament heats, the ion vacuum gauge is heated by the hot cathode filament to be in a high-temperature state, and selenium deposition cannot be generated. When the production is finished, the evaporation capacity of the selenium steam is reduced due to other evaporation sources of elements such as copper, indium and gallium, so that residue caused by insufficient reaction can be obviously generated, the pressure value can be obviously increased, meanwhile, the selenium steam can have an obvious clustering phenomenon, and at the moment, the filament can be obviously damaged when the ion meter is lightened. At the moment, the ion vacuum gauge needs to be closed in time, the electric heating device surrounding the hot cathode ionization gauge is electrified and heated, the temperature is stably controlled to 300 ℃ through the thermocouple, selenium steam can be influenced by high temperature at the position of the hot cathode ionization gauge to keep an evaporation state, gas molecules are far away from the electric heating device, and the selenium steam is prevented from depositing on the hot cathode ionization gauge to influence the working precision of the ion vacuum gauge.
Claims (10)
1. An ion vacuum gauge for monitoring high-corrosivity vapor pressure, which is used for monitoring the vapor pressure in a vacuum cavity and comprises a hot cathode ionization gauge and a measuring circuit, and is characterized in that: the hot cathode ionization gauge comprises a spiral grid, a collector extending along the spiral axis direction of the grid is arranged on the inner side of the spiral grid, hot cathode filaments are arranged on one or more sides of the outer side of the grid, the hot cathode filaments are uniformly arranged around the grid when the hot cathode filaments are arranged on multiple sides of the outer side of the grid, an electric heating device is arranged on the outer side of the hot cathode ionization gauge in a winding mode, and a thermocouple is arranged on the electric heating device.
2. An ion gauge for high corrosive vapor pressure monitoring according to claim 1, wherein: the hot cathode ionization gauge is installed on the cavity wall of the vacuum cavity through the flange frame, the flange frame is provided with a collector which extends along the central axis, two grid support frames are arranged on two sides of the central axis at equal intervals, the grid support frames are parallel to the central axis of the flange frame, the spiral grid is located between the two grid support frames, and two ends of the grid are respectively welded with the two grid support frames.
3. An ion gauge for high corrosive vapor pressure monitoring according to claim 2, wherein: two grid support frames are arranged in a long and short mode, and two ends of the spiral grid are welded with the end portions of the two grid support frames in the long and short mode respectively.
4. An ion vacuum gauge for high corrosive vapor pressure monitoring according to claim 2 or 3, wherein: two groups of cathode supporting frames are symmetrically arranged at two sides of the outer side of the grid, and hot cathode filaments are erected on the side faces, facing the grid, of the cathode supporting frames.
5. An ion gauge for high corrosive vapor pressure monitoring according to claim 4, wherein: each group of cathode support frames comprises two cathode support rods with one long cathode and one short cathode, the hot cathode filament is spiral, and the two ends of the hot cathode filament are respectively welded with the end parts of the two cathode support rods of the same group of cathode support frames.
6. An ion gauge for high corrosive vapor pressure monitoring according to claim 4, wherein: the electric heating device is arranged on the outer sides of the grid support frame and the cathode support frame in a surrounding mode.
7. An ion vacuum gauge for high corrosive vapor pressure monitoring according to claim 1, 2 or 3, wherein: the electric heating device extends out spirally into the vacuum cavity, and the extending distance of the electric heating device to the vacuum cavity is not less than the extending distance of the hot cathode ionization gauge tube to the vacuum cavity.
8. An ion vacuum gauge for high corrosive vapor pressure monitoring according to claim 1, 2 or 3, wherein: the hot cathode filament adopts 0.05-0.1mm diameter iridium filament, and the surface of the iridium filament is provided with an yttrium oxide coating.
9. An ion vacuum gauge for high corrosive vapor pressure monitoring according to claim 1, 2 or 3, wherein: the grid electrode is formed by spirally winding a tungsten wire with the diameter of 0.5-2mm, a gap is reserved between adjacent spiral sections, and the collector is formed by a tungsten wire with the diameter of 0.1-2 mm.
10. An ion vacuum gauge for high corrosive vapor pressure monitoring according to claim 1, 2 or 3, wherein: the resistance of the hot cathode filament is less than 0.5 ohm, the bias voltage of the hot cathode filament is +25V, the grid voltage is +170V, the collector voltage is-170V, and the working voltage and the current of the hot cathode filament are +4.7V and 1.8A respectively.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011592328.9A CN112629747A (en) | 2020-12-29 | 2020-12-29 | Ion vacuum gauge for monitoring high-corrosivity vapor pressure |
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| CN202011592328.9A CN112629747A (en) | 2020-12-29 | 2020-12-29 | Ion vacuum gauge for monitoring high-corrosivity vapor pressure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018468A (en) * | 2021-11-24 | 2022-02-08 | 华科电子股份有限公司 | Digital output atmospheric pressure sensor |
| CN114326482A (en) * | 2021-12-06 | 2022-04-12 | 兰州空间技术物理研究所 | Vacuum gauge control system |
| CN114354058A (en) * | 2021-12-06 | 2022-04-15 | 兰州空间技术物理研究所 | Gauge tube of wide-range ionization vacuum gauge |
| CN116059533A (en) * | 2023-02-20 | 2023-05-05 | 湖南安泰康成生物科技有限公司 | Active heat dissipation electrode slice and electrode device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018468A (en) * | 2021-11-24 | 2022-02-08 | 华科电子股份有限公司 | Digital output atmospheric pressure sensor |
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| CN116059533B (en) * | 2023-02-20 | 2023-11-21 | 湖南安泰康成生物科技有限公司 | Active heat dissipation electrode slice and electrode device |
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