CN112629642B - Optical fiber sensing system for vibration test of flow channel in engine - Google Patents

Optical fiber sensing system for vibration test of flow channel in engine Download PDF

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CN112629642B
CN112629642B CN202011430054.3A CN202011430054A CN112629642B CN 112629642 B CN112629642 B CN 112629642B CN 202011430054 A CN202011430054 A CN 202011430054A CN 112629642 B CN112629642 B CN 112629642B
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vibration
frequency sensitive
sensitive structure
optical fiber
frequency
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CN112629642A (en
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陈爽
隋广慧
张欣颖
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M15/00Testing of engines
    • G01M15/02Details or accessories of testing apparatus
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T90/00Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation

Abstract

The invention relates to an optical fiber sensing system for vibration testing of an internal flow passage of an engine, and belongs to the field of engine testing. The method adopts a composite sensitive structure as a core device of the optical fiber vibration sensor, and is connected with an optical fiber demodulator through an optical cable to construct an optical fiber vibration sensing system, so that the large g value (1 g-500 g) and the wide frequency (5 Hz-20 kHz) vibration measurement of a structural part at high temperature (less than or equal to 500 ℃) are realized. Through the parameter design of the composite sensitive structure of the optical fiber vibration sensor, the mutual connection of the high-frequency large-g-value sensitive structure and the low-frequency small-g-value sensitive structure in the g-value measurement range, the frequency response and the resolution is realized, and therefore the requirement of the engine vibration test with the wide frequency response and the wide range is met. The sensing system has the characteristics of high temperature resistance, wide frequency response and large measuring range, can solve the problems of narrow space, high temperature and the like of a measured part, can transfer the vibration measurement of the engine from the outer box to the inside of the engine closer to a vibration source, and improves the accuracy of the vibration measurement of the engine.

Description

Optical fiber sensing system for vibration test of flow channel in engine
Technical Field
The invention relates to an optical fiber sensing system for vibration testing of an engine inner flow passage, belongs to the technical field of engine testing, and can be used for high-temperature vibration testing of narrow spaces such as the engine inner flow passage.
Background
The vibration problem of the whole aircraft engine is always a prominent problem which puzzles the production and use of the engine, and according to statistics, more than 60% of faults of the aircraft engine are vibration faults, so that the change condition of the operation condition of the aircraft engine needs to be monitored, identified and predicted in real time in the development and use processes of the aircraft engine, the reason and the possible position of the fault are ensured to be found out before the accident occurs through vibration measurement, the hidden danger is eliminated in time, and the operation reliability and the safety of the engine are improved. The causes of the vibrations of aircraft engines generally include two cases, one belonging to the group of sources of regular vibrations related to the speed of rotation of the rotor: the most direct is the excitation force caused by rotor imbalance; in addition, there are other structures driven by the rotor, such as a transmission gear train, cascade wake, etc., which cause regular excitation forces, which are usually harmonic to the rotor speed; the other category belongs to the irregular exciting force independent of the rotating speed: their vibration sources are complex and appear in different forms and with different probabilities. Such as rotor and stator collision and abrasion, compressor surge, oscillation combustion and the like, which cause extremely wide frequency domain and different excitation force, and are difficult to estimate. One of the key technologies of the development trend of the current foreign high-temperature vibration measurement is the selection of vibration measuring points, the traditional vibration measurement on an external casing is limited by the technical level of a sensor, a vibration source is far away, the interference of the structural vibration of an engine is easy to occur, and the measurement error is large. Therefore, the vibration measurement of foreign engines is transferred from the outside of the engine to the rotor supporting point in the engine, and because the vibration measuring point is close to the vibration source, the vibration signal measured by the sensor can more accurately reflect the vibration condition of the rotor.
At present, piezoelectric acceleration sensors are used more in engine vibration measurement, and the piezoelectric acceleration sensors are designed according to the piezoelectric effect principle of certain materials. When the whole aircraft engine works, the piezoelectric acceleration sensor is generally arranged on the mounting edge or an accessory of a casing, and cannot be directly arranged on an internal part (such as a bearing) of the engine due to the constraint of larger volume and mounting mode, so that the sensor can only carry out indirect measurement in a region close to a measured region to obtain related vibration information. But the measured signal contains a great deal of background vibration noise such as vibration caused by misalignment and unbalance of other components and fault information of other bearings, and even submerges a fault signal which is wanted to be captured.
Compared with the traditional electromagnetic sensor, the optical fiber vibration sensor has the advantages of wide measurement range, high sensitivity, corrosion resistance, high temperature resistance and electromagnetic interference resistance, and by combining the optical fiber measurement with the MEMS sensitive structure manufacturing technology, the miniaturization of the mass block is solved by using the MEMS technology, and the electromagnetic interference problem is solved by using the optical fiber. The patent "a high temperature resistant biax fiber grating vibration sensor" has proposed a fiber vibration sensor structure based on four constant strength cantilever beams, quality piece and fiber grating constitute, and this structure converts the quality piece displacement into the change of fiber grating wavelength, realizes the detection of vibration. The patent "a high temperature resistant optical fiber vibration sensor" has proposed a high temperature resistant optical fiber vibration sensor structure based on transmission optic fibre, receiving optical fibre, collimating lens and transmission optical cable, and this structure passes through transmission optical cable and connects photoelectric converter, realizes vibration detection.
A common MEMS vibration sensor mainly adopts a supporting beam-mass block sensitive structure, the mass block generates displacement under the action of acceleration load, the size of the acceleration load is finally detected, the vibration sensor with the supporting beam-mass block structure has higher sensitivity, the sensitivity of the sensor is high, the resolution is high, but the relationship of mutual restriction exists among the working range, the frequency response range and the sensitivity, and different performance indexes can be generated by different structural sizes. Therefore, the optical fiber vibration sensor with a composite sensitive structure is used as a core device and is connected with the high-frequency dynamic signal optical fiber demodulator through the optical cable, an optical fiber vibration sensing system is constructed, and high-temperature vibration testing in narrow spaces such as an engine inner flow channel is achieved.
Disclosure of Invention
The invention provides an optical fiber sensing system for vibration testing of an engine inner flow passage, which is mainly applied to but not limited to high-temperature vibration testing of narrow spaces such as an aircraft engine inner flow passage. The invention takes an optical fiber vibration sensor with a composite sensitive structure as a core device, and is connected with a high-frequency dynamic signal optical fiber demodulator through an optical cable to construct an optical fiber vibration sensing system. By changing the geometric dimension of the sensitive structure of the optical fiber F-P vibration sensor, the acceleration measurement range, the frequency response range and the resolution of the high-frequency sensitive structure and the low-frequency sensitive structure are mutually connected, and the optimal frequency response range and sensitivity are obtained. The optical fiber vibration sensor and the high-frequency dynamic demodulator jointly form an optical fiber sensing system which can realize the vibration measurement of the large g value (1 g-500 g) and the wide frequency working range (5 Hz-20 kHz) of the structural part to be measured at high temperature (less than or equal to 500 ℃).
The purpose of the invention is realized by the following technical scheme:
an optical fiber sensing system for testing vibration of an internal flow passage of an engine comprises an optical fiber vibration sensor, a transmission optical cable, a high-frequency dynamic signal optical fiber demodulator and a computer.
The optical fiber vibration sensor includes: the device comprises a substrate, a low-frequency sensitive structure layer, a limiting layer, a high-frequency sensitive structure layer and a protective layer; the substrate is of a groove structure; the middle of the low-frequency sensitive structure layer is provided with a mass block, and the mass block is fixedly connected through a cantilever beam; the limiting layer is of a structure with grooves at the upper part and the lower part and a through hole in the middle; the middle of the high-frequency sensitive structure layer is provided with a mass block, and the mass block is fixedly connected through a cantilever beam; the protective layer is of a groove structure with two through holes.
The distance between the upper surface of the mass block of the low-frequency sensitive structure layer and the lower surface of the limiting layer is as follows: (60-100) nm. The distance between the lower surface of the low-frequency sensitive structure layer and the upper surface of the substrate is as follows: (60-1000) nm. The distance between the lower surface of the high-frequency sensitive structure layer and the upper surface of the limiting layer is as follows: (550-600) nm. The distance between the upper surface of the mass block of the high-frequency sensitive structure layer and the lower surface of the protective layer is as follows: (550-1000) nm.
The low-frequency sensitive structure layer and the high-frequency sensitive structure layer are the same in number and different in length, and the distance between the low-frequency sensitive structure layer and the distance between the high-frequency sensitive structure layer can be controlled by adjusting the double-sided etching depth of the limiting layer.
The acceleration measuring range of the low-frequency sensitive structure of the optical fiber vibration sensor is (1-10) g, the resolution is 0.1g, the frequency response range is 5 Hz-7 kHz, and a limit structure is added for preventing the low-frequency structure from being damaged due to resonance; the acceleration measuring range of the high-frequency sensitive structure is (10-500) g, the resolution is 1g, and the frequency response range is 5 Hz-20 kHz.
The vibration test principle of the optical fiber sensing system is as follows: the sensor is arranged on a bearing, a casing, a support and other tested structural parts of the engine, the engine works, the tested structural parts vibrate, and the cantilever beam drives the mass block structure to move up and down along with the vibration, so that displacement is generated. According to the optical model for measuring the vibration of the optical fiber vibration sensor, incident light is respectively incident to the upper surfaces of the low-frequency sensitive structure mass block and the high-frequency sensitive structure mass block and forms a double-beam interference output signal with the end face of the optical fiber, cavity length change is transmitted to a demodulator through emergent light, the output signal of the sensitive structure layer of the corresponding vibration sensor is subjected to photoelectric conversion and is transmitted to a computer, and the amplitude and the frequency of vibration are calculated through built-in processing software.
The data acquisition and processing method of the high-frequency dynamic signal optical fiber demodulator comprises the following steps: firstly, a rotor-support-casing-mounting joint system model is established. The 1 st order is a low-pressure turbine rotor pitching vibration mode represented by the vibration of a turbine rear casing and a rear fulcrum of the engine; the 2 nd order is the pitching vibration mode of the outer casing expressed by the vibration of the fan casing and the turbine rear casing; the 3 rd order is the fan pitching type critical rotating speed represented by the vibration of the fan casing and the front pivot; and the 4 th order is the pitching vibration mode of the high-pressure compressor expressed by the vibration of the intermediate casing. According to the sampling frequency requirement of the vibration signal to be measured, the optical fiber sensing demodulator respectively collects the output signals of the low-frequency sensitive structure and the high-frequency sensitive structure. The demodulation output of the low-frequency sensitive structure is Ya (A-C-O), and the demodulation output of the high-frequency sensitive structure is Yb (B-E). During testing, the corresponding sensitive structure signal can be selected and output according to the source and the vibration mode characteristics of the vibration signal to be tested; or according to the design principle of the sensor, selecting a signal with a large indication value as an actual vibration measurement value, namely selecting the value of the optical fiber vibration sensor as Yc (A-B-C-E), and selecting the maximum value as the measurement value Yc of the optical fiber vibration sensor by comparing the two output signals Ya and Yb in real time.
Advantageous effects
The invention relates to an optical fiber sensing system for vibration testing of an internal flow passage of an engine, and belongs to the technical field of engine testing. The method takes an optical fiber vibration sensor with a composite sensitive structure as a core device, and is connected with a high-frequency dynamic signal optical fiber demodulator through an optical cable to construct an optical fiber vibration sensing system, so that the vibration measurement of the large g value (1 g-500 g) and the wide-frequency working range (5 Hz-20 kHz) of the structural part to be measured at high temperature (less than or equal to 500 ℃) is realized. The sensing system has the characteristics of high temperature resistance, wide frequency response range and wide acceleration measurement range, and can transfer the vibration measurement of the engine from the outside of the engine to a rotor supporting point in the engine so as to enable a vibration measuring point to be close to a vibration source, so that a vibration signal measured by the sensor can more accurately reflect the vibration condition of the rotor. The device can be finally used for high-temperature vibration testing in narrow spaces such as an engine inner flow passage and the like, effective measurement of the vibration state of the test equipment is realized, and important data support is provided for monitoring the running state of the test equipment.
Drawings
FIG. 1 is a schematic diagram of an optical fiber vibration sensing system according to the present invention;
FIG. 2 is a schematic structural diagram of an optical fiber vibration sensor according to the present invention;
FIG. 3 is a diagram of an optical model for vibration measurement of an optical fiber vibration sensor according to the present invention;
FIG. 4 is a schematic diagram of a signal acquisition and processing method according to the present invention;
the optical fiber sensor comprises a substrate 1, a low-frequency sensitive structure layer 2, a limiting layer 3, a high-frequency sensitive structure layer 4, a protective layer 5, an optical fiber penetrating hole 6, a low-frequency sensitive structure mass block 7, a low-frequency sensitive structure spring beam 8, a high-frequency sensitive structure mass block 2, a high-frequency sensitive structure spring beam 10, incident light 2, 11, a first reflecting surface 12, a second reflecting surface 13, a cavity length 14 and emergent light 15.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Example 1:
an optical fiber sensing system for testing vibration of an internal flow passage of an engine comprises an optical fiber vibration sensor, a transmission optical cable, a high-frequency dynamic signal optical fiber demodulator and a computer.
The optical fiber vibration sensor includes: the device comprises a substrate 1, a low-frequency sensitive structure layer 2, a limiting layer 3, a high-frequency sensitive structure layer 4 and a protective layer 5; the substrate 1 is of a groove structure; the middle of the low-frequency sensitive structure layer 2 is provided with a mass block 9, and the mass block 9 is fixedly connected through a cantilever beam 10; the limiting layer 3 is of a structure with grooves at the upper and lower parts and a through hole 6 in the middle; the middle of the high-frequency sensitive structure layer 4 is provided with a mass block 7, and the mass block 7 is fixedly connected through a cantilever beam 8; the protective layer 5 is a groove structure with two through holes 6.
The acceleration measuring range of the low-frequency sensitive structure is (1-10) g, the resolution is 0.1g, the sensitivity is 5nm/g, the frequency response range is 5 Hz-7 kHz, and the distance between the upper surface of the mass block 9 of the low-frequency sensitive structure layer 2 and the lower surface of the limiting layer 3 is as follows: and 55 nm. The distance between the lower surface of the low-frequency sensitive structure layer 2 and the upper surface of the substrate 1 is as follows: 100 nm.
The acceleration measuring range of the high-frequency sensitive structure is (10-500) g, the resolution is 1g, the sensitivity is 1nm/g, and the frequency response range is 5 kHz-20 kHz. The distance between the lower surface of the high-frequency sensitive structure layer 4 and the upper surface of the limiting layer 3 is as follows: 550 nm. The distance between the upper surface of the mass block 7 of the high-frequency sensitive structural layer 4 and the lower surface of the protective layer 5 is as follows: 1000 nm.
The test process of the optical fiber sensing system comprises the following steps: the optical fiber vibration sensor is arranged on a fan casing and a front supporting point of an engine, the vibration characteristic of the low-voltage rotor is tracked, and a demodulator of a laser interference demodulation principle is selected for signal acquisition of the optical fiber vibration sensor. When the rotating speed of the low-voltage rotor is 6000 +/-400 rpm, the vibration monitoring value at the fan bearing is larger, and the vibration monitoring value is expressed as the 3 rd-order fan pitching type critical rotating speed, so that the output data Yb (B-E) of the high-frequency sensitive structure 4 is used as the output indicating value of the sensor.
Example 2:
an optical fiber sensing system for testing vibration of an internal flow passage of an engine comprises an optical fiber vibration sensor, a transmission optical cable, a high-frequency dynamic signal optical fiber demodulator and a computer.
The optical fiber vibration sensor includes: the device comprises a substrate 1, a low-frequency sensitive structure layer 2, a limiting layer 3, a high-frequency sensitive structure layer 4 and a protective layer 5; the substrate 1 is of a groove structure; the middle of the low-frequency sensitive structure layer 2 is provided with a mass block 9, and the mass block 9 is fixedly connected through a cantilever beam 10; the limiting layer 3 is of a structure with grooves at the upper and lower parts and a through hole 6 in the middle; the middle of the high-frequency sensitive structure layer 4 is provided with a mass block 7, and the mass block 7 is fixedly connected through a cantilever beam 8; the protective layer 5 is a groove structure with two through holes 6.
The acceleration measuring range of the low-frequency sensitive structure is (1-10) g, the resolution is 0.1g, the sensitivity is 5nm/g, the frequency response range is 5 Hz-7 kHz, and the distance between the upper surface of the mass block 9 of the low-frequency sensitive structure layer 2 and the lower surface of the limiting layer 3 is as follows: 60 nm. The distance between the lower surface of the low-frequency sensitive structural layer 2 and the upper surface of the substrate 1 is as follows: 60 nm.
The acceleration measuring range of the high-frequency sensitive structure is (10-500) g, the resolution is 1g, the sensitivity is 1nm/g, and the frequency response range is 5 kHz-20 kHz. The distance between the lower surface of the high-frequency sensitive structure layer 4 and the upper surface of the limiting layer 3 is as follows: 600 nm. The distance between the upper surface of the mass block 7 of the high-frequency sensitive structural layer 4 and the lower surface of the protective layer 5 is as follows: 800 nm.
The test process of the optical fiber sensing system comprises the following steps: the optical fiber vibration sensor is arranged at the rear casing and the rear fulcrum of the engine turbine, the vibration characteristic tracking of the engine slow vehicle speed is carried out, and a demodulator of a white light interference demodulation principle is selected to carry out signal acquisition of the optical fiber vibration sensor. At the moment, the engine speed passes through, the bending deformation of the rotor is small, and the parts such as the bearing, the casing and the like have large vibration damping, so that the vibration is small, and the output data Ya (A-C-O) of the low-frequency sensitive structure 7 is used as an output indicating value of the sensor.
The above detailed description is provided for further explaining the objects, technical solutions and advantages of the present invention, and it should be understood that the above described are only exemplary embodiments of the present invention and are not intended to limit the scope of the present invention, and any modifications, equivalents, improvements and the like, which can be easily made by those skilled in the art within the technical scope of the present invention as disclosed within the spirit and principle of the present invention, should be included in the scope of the present invention.

Claims (5)

1. The utility model provides an optical fiber sensing system of runner vibration test in engine which characterized in that: the device comprises an optical fiber vibration sensor, a transmission optical cable, a high-frequency dynamic signal optical fiber demodulator and a computer;
the optical fiber vibration sensor includes: the device comprises a substrate, a low-frequency sensitive structure layer, a limiting layer, a high-frequency sensitive structure layer and a protective layer; the substrate is of a groove structure; the middle of the low-frequency sensitive structure layer is a low-frequency sensitive structure mass block, and the low-frequency sensitive structure mass block is fixedly connected through a cantilever beam; the limiting layer is of a structure with grooves at the upper part and the lower part and a through hole in the middle; the middle of the high-frequency sensitive structure layer is provided with a high-frequency sensitive structure mass block, and the high-frequency sensitive structure mass block is fixedly connected through a cantilever beam; the protective layer is of a groove structure with two through holes;
when the tested structural member vibrates, the low-frequency sensitive structural cantilever beam drives the low-frequency sensitive structural mass block structure to move up and down along with the low-frequency sensitive structural mass block structure, and the high-frequency sensitive structural cantilever beam drives the high-frequency sensitive structural mass block structure to move up and down along with the high-frequency sensitive structural mass block structure to generate displacement; incident light is respectively incident to the upper surfaces of the low-frequency sensitive structure mass block and the high-frequency sensitive structure mass block and forms a double-beam interference output signal with the end face of the optical fiber, cavity length change is transmitted to a demodulator through emergent light, the output signal of the sensitive structure layer of the corresponding vibration sensor is subjected to photoelectric conversion, and the amplitude and the frequency of vibration are obtained through calculation.
2. The fiber optic sensing system of claim 1, wherein: the distance between the upper surface of the low-frequency sensitive structure mass block and the lower surface of the limiting layer is as follows: 60nm-100 nm; the distance between the lower surface of the low-frequency sensitive structure layer and the upper surface of the substrate is as follows: 60nm-1000 nm; the distance between the lower surface of the high-frequency sensitive structure layer and the upper surface of the limiting layer is as follows: 550nm-600 nm; the distance between the upper surface of the high-frequency sensitive structure mass block and the lower surface of the protective layer is as follows: 550nm-1000 nm.
3. The fiber optic sensing system of claim 1, wherein: the low-frequency sensitive structure layer and the high-frequency sensitive structure layer are the same in number and different in length, and the distance between the low-frequency sensitive structure layer and the distance between the high-frequency sensitive structure layer can be controlled by adjusting the double-sided etching depth of the limiting layer.
4. The fiber optic sensing system of claim 1, wherein: the acceleration measuring range of the low-frequency sensitive structure of the optical fiber vibration sensor is 1 g-10 g, the resolution is 0.1g, and the frequency response range is 5 Hz-7 kHz; the acceleration measuring range of the high-frequency sensitive structure is 10 g-500 g, the resolution is 1g, and the frequency response range is 5 Hz-20 kHz.
5. A method for data acquisition and processing using the optical fiber sensing system according to any one of claims 1 to 4, wherein: firstly, establishing a rotor-support-casing-mounting joint system model; the 1 st order is a low-pressure turbine rotor pitching vibration mode represented by the vibration of a turbine rear casing and a rear fulcrum of the engine; the 2 nd order is the pitching vibration mode of the outer casing expressed by the vibration of the fan casing and the turbine rear casing; the 3 rd order is the fan pitching type critical rotating speed represented by the vibration of the fan casing and the front pivot; the 4 th order is the pitching vibration mode of the high-pressure compressor expressed by the vibration of the intermediary casing; according to the sampling frequency requirement of the vibration signal to be measured, the high-frequency dynamic signal optical fiber demodulator respectively collects the output signals of the low-frequency sensitive structural layer and the high-frequency sensitive structural layer; the demodulation output of the low-frequency sensitive structure layer is Ya (A-C-O), and the demodulation output of the high-frequency sensitive structure layer is Yb (B-E); during testing, the corresponding sensitive structure signal can be selected and output according to the source and the vibration mode characteristics of the vibration signal to be tested; or according to the design principle of the sensor, selecting a signal with a large indication value as an actual vibration measurement value, namely selecting the value of the optical fiber vibration sensor as Yc (A-B-C-E), and selecting the maximum value as the measurement value Yc of the optical fiber vibration sensor by comparing the two output signals Ya and Yb in real time.
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