CN112626608A - Carbon/carbon spliced heat-preservation cylinder for monocrystalline silicon straight pulling furnace and manufacturing method thereof - Google Patents
Carbon/carbon spliced heat-preservation cylinder for monocrystalline silicon straight pulling furnace and manufacturing method thereof Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Abstract
The invention discloses a carbon/carbon splicing heat-insulation cylinder for a monocrystalline silicon vertical pulling furnace, which comprises N carbon/carbon arc petals, wherein the N carbon/carbon arc petals are adjacent to each other and are connected with each other through a mortise-tenon connection structure and around the axial lead of the carbon/carbon splicing heat-insulation cylinder along the circumferential direction, M carbon/carbon pins are arranged on the mortise-tenon connection parts of the adjacent carbon/carbon arc petals, one side of each carbon/carbon arc petal is provided with a tenon, and the other side of each carbon/carbon arc petal is provided with a mortise; the invention also discloses a manufacturing method of the carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon straight pulling furnace, which comprises the steps of filling tenons of carbon/carbon arc sections into mortises of adjacent carbon/carbon arc sections, then installing pins, preparing a coating and purifying to obtain the carbon/carbon spliced heat-preservation cylinder. The invention adopts the tenon-and-mortise connection structure to form separation at the splicing seam, avoids the erosion action of heat and erosion gas on splicing cracks and outer devices and parts of the heat-insulating cylinder, and is suitable for the monocrystalline silicon straight pulling furnace; the manufacturing method is simple and is beneficial to realizing mass production.
Description
Technical Field
The invention belongs to the technical field of silicon single crystal production equipment, and particularly relates to a carbon/carbon spliced heat-preservation cylinder for a single crystal silicon vertical pulling furnace and a manufacturing method thereof.
Background
A monocrystalline silicon pulling furnace of a monocrystalline silicon straight pulling furnace is a device for producing monocrystalline silicon by a Czochralski method, and the working principle of the monocrystalline silicon pulling furnace is that a polycrystalline silicon material is placed in a thermal field of the monocrystalline silicon straight pulling furnace, the polycrystalline silicon material is melted by heating to 1400-1700 ℃ under the protection of inert gas, and crystal grains grow under the traction of seed crystals to form a monocrystalline silicon rod.
The heat preservation cylinder is one of core thermal field components in a monocrystalline silicon straight pulling furnace, and in the preparation process of the monocrystalline silicon, the heat preservation cylinder mainly plays a role in supporting the whole thermal field, only bears the pressure in the height direction, and is not stressed in the circumferential direction. The heat preservation cylinder used by the existing monocrystalline silicon straight pulling furnace generally uses high-purity graphite or carbon/carbon composite materials, and requires high purity, high strength and high density, and does not volatilize free ions at high temperature.
Under the large background of photovoltaic power generation flat-price internet access, in order to further reduce the manufacturing cost of silicon wafers, the size of a thermal field of a monocrystalline silicon straight-pull furnace is continuously enlarged, so that the charging amount of a single furnace is further increased. With the increase of the size of the monocrystalline silicon straight pulling furnace, the carbon/carbon composite material gradually replaces graphite with excellent designability and mechanical property, and becomes a main material of a thermal field system of the monocrystalline silicon straight pulling furnace. The integral carbon/carbon heat-insulating cylinder has good structural integrity, but has the defects of low furnace body space utilization rate, waste of raw materials and the like in the preparation process, and the split type spliced carbon/carbon heat-insulating cylinder enables the size of a blank to be greatly reduced through a split structure, so that the problems are naturally and thoroughly solved, but the problems of low mechanical splicing efficiency and poor integrity of spliced products exist.
The utility model with application number 201721801104.8 provides a heat preservation device, which comprises an upper hoop, a middle face part, N middle hoops and a lower hoop; because the heat preservation device subassembly is complicated, assembles the inefficiency, and the concatenation gap does not carry out the separation and handles, thereby heat and erosion gas can overflow from the concatenation gap and erode outside heat preservation device and external component, cause the concatenation seam easily to erode the increase and the inefficacy phenomenon in long-term use. The utility model with application number 201821300403.8 provides a heat preservation cylinder for a vacuum high-temperature furnace, which comprises a plurality of carbon/carbon composite material spiles, an upper carbon/carbon composite material ring, a lower carbon/carbon composite material ring and a plurality of carbon/carbon composite material screws; due to the adoption of the mode of adding the plugboard into the upper ring and the lower ring, the integrity of the product in the height direction is poor, the rigidity of the whole structure is low, the splicing gap is not subjected to blocking treatment, heat and corrosive gas can overflow from the splicing gap to corrode an external heat preservation device and external parts, and the splicing gap is easily corroded and increased to lose effectiveness in the long-term use process.
Therefore, when the carbon/carbon spliced heat-insulating cylinder is used for improving the early-stage densification efficiency and reducing the cost, how to improve the machining splicing efficiency and enhance the connection strength of the splicing units and ensure the integrity of the spliced heat-insulating cylinder product and the separation treatment of splicing gaps are key technical problems facing the production of the carbon/carbon spliced heat-insulating cylinder.
Disclosure of Invention
The invention aims to solve the technical problem of providing a carbon/carbon spliced heat-preservation cylinder for a monocrystalline silicon czochralski furnace, aiming at overcoming the defects of the prior art. This charcoal/charcoal concatenation heat preservation section of thick bamboo is connected the formation along the circumferencial direction by charcoal/charcoal arc lamella between adjacent and assembles inseparable overall structure to form the separation at concatenation seam crossing, avoided the erosion action of heat and erosion gas to concatenation crack and heat preservation section of thick bamboo outer device and part, solved the drawback that charcoal/charcoal concatenation heat preservation section of thick bamboo concatenation gap does not have the separation, made it be applicable to monocrystalline silicon vertical pulling stove.
In order to solve the technical problems, the invention adopts the technical scheme that: the utility model provides a monocrystalline silicon is charcoal/charcoal concatenation heat preservation section of thick bamboo for czochralski furnace, its characterized in that, includes N piece charcoal/charcoal arc lamella, N piece charcoal/charcoal arc lamella is adjacent between connect through tenon fourth of twelve earthly branches connection structure and along the axial lead of the charcoal/charcoal concatenation heat preservation section of thick bamboo of circumferencial direction, wherein, N is the positive integer that is not less than 2, all is provided with M charcoal/charcoal pin on the charcoal/charcoal arc lamella mortise-tenon joint part between adjacent, one side of N piece charcoal/charcoal arc lamella all is provided with the tenon, and the opposite side all is provided with the tongue-and-groove.
The carbon/carbon spliced heat-insulation cylinder is formed by connecting carbon/carbon arc petals, one side of which is provided with a tenon and the other side of which is provided with a mortise, adjacently through a tenon-and-mortise connecting structure along the circumferential direction, and limits the displacement of the carbon/carbon arc petals through the tenon-and-mortise connecting structure to form a tightly spliced integral structure; meanwhile, the carbon/carbon arc petal mortise-tenon joint parts between adjacent carbon/carbon arc petals are fixed by pins, so that the integrity of the carbon/carbon spliced heat-preservation cylinder is further improved, and the carbon/carbon spliced heat-preservation cylinder has better structural rigidity; in addition, the carbon/carbon spliced heat-preservation cylinder assembly is simple and easy to assemble, and the preparation efficiency is improved.
The carbon/carbon spliced heat-insulating cylinder for the monocrystalline silicon czochralski furnace is characterized in that M is 2-100. In the in-service use process, carry out the preferred of above-mentioned scope to the pin quantity on the charcoal/charcoal concatenation heat preservation section of thick bamboo according to the production requirement, convenient and fast has effectively improved the structural rigidity of a charcoal/charcoal concatenation heat preservation section of thick bamboo, has avoided extravagant.
In addition, the invention also provides a method for manufacturing the carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon czochralski furnace, which is characterized by comprising the following steps:
step one, preparing carbon/carbon arc petals;
step two, preparing carbon/carbon pins;
step three, the tenon of the carbon/carbon arc valve prepared in the step one is arranged in the mortise of the adjacent carbon/carbon arc valve, so that the adjacent carbon/carbon arc valve is connected with the axial lead of the carbon/carbon spliced heat-insulation cylinder along the circumferential direction by the tenon-and-mortise joint, and then the carbon/carbon pin prepared in the step two is arranged on the tenon-and-mortise joint part of each adjacent carbon/carbon arc valve for fixing, so as to obtain a carbon/carbon spliced heat-insulation cylinder blank;
and step four, preparing coatings on the inner surface and the outer surface of the carbon/carbon spliced heat-preservation cylinder blank obtained in the step three, and then carrying out purification treatment to obtain the carbon/carbon spliced heat-preservation cylinder.
The method is characterized in that in the step one, the carbon/carbon arc valve is obtained by machining a carbon/carbon composite square stock or a carbon/carbon composite arc valve blank. The carbon/carbon arc valve of the invention has various manufacturing methods and is easy to obtain.
The method is characterized in that the carbon/carbon composite material arc petal blank is prepared from an arc petal-shaped carbon fiber preform through a densification process, and the density of the carbon/carbon composite material arc petal blank is not less than 1.0g/cm3(ii) a The densification process is chemical vapor infiltration or/and liquid phase impregnation densification. The optimized preparation process and the corresponding parameters of the carbon/carbon composite material arc segment blank effectively realize quick densification, are suitable for mass production, and are economical and applicable.
The method is characterized in that the preparation method of the arc petal-shaped carbon fiber preform comprises one or more than two of fiber winding, cloth bag winding, carbon cloth/net tire layering needling and 3D weaving, and the density of the arc petal-shaped carbon fiber preform is not less than 0.35g/cm3. Production of the preferred segmented carbon fiber preformThe preparation method is simple, suitable for mass production, economical and applicable.
The method is characterized in that the carbon/carbon pins in the step two are obtained by machining carbon/carbon composite square stock, and the density of the carbon/carbon composite square stock is not less than 1.40g/cm3. The carbon pins are used as auxiliary connecting structures and mainly subjected to shearing force, the density of the preferred carbon/carbon pins is high, sufficient shearing force is provided, and the improvement of the structural rigidity of the carbon/carbon spliced heat-insulating cylinder is facilitated.
The method is characterized in that the preparation method of the coating in the fourth step is chemical vapor deposition, plasma spraying or reaction sintering. The optimal coating preparation method is suitable for mass production, has low production cost, effectively provides protection for the carbon/carbon spliced heat-preservation cylinder blank body from silicon vapor erosion, and prolongs the service life of the carbon/carbon spliced heat-preservation cylinder.
The method described above, wherein the purification treatment in step four is high-temperature purification or halogen purification. The optimized purification treatment method is suitable for mass production and has good economical efficiency.
Compared with the prior art, the invention has the following advantages:
1. according to the carbon/carbon spliced heat-insulation cylinder, the adjacent carbon/carbon arc petals are connected in the circumferential direction through the tenon-and-mortise connection structure to form a tightly spliced integral structure, separation is formed at the splicing seam, the corrosion effect of heat and corrosion gas on splicing cracks and outer-layer devices and components of the heat-insulation cylinder is avoided, the defect that the splicing gaps of the carbon/carbon spliced heat-insulation cylinder are free of separation is overcome, and the carbon/carbon spliced heat-insulation cylinder is suitable for a monocrystalline silicon vertical pulling furnace.
2. The invention adopts pin fixation on the basis of the mortise-tenon joint structure, further improves the integrity of the carbon/carbon spliced heat-insulation cylinder, has better structural rigidity and enhances the supporting function of the carbon/carbon spliced heat-insulation cylinder.
3. The whole carbon/carbon spliced heat-insulation cylinder is designed into a split structure, the whole is broken into parts, the splicing preparation efficiency and the space utilization rate of the carbon/carbon spliced heat-insulation cylinder are improved, and the production cost of the carbon/carbon spliced heat-insulation cylinder is greatly reduced; meanwhile, the size of the carbon/carbon spliced heat-insulating cylinder is convenient to adjust according to the use requirements of the carbon/carbon spliced heat-insulating cylinder, such as performance and capacity requirements.
4. The invention adopts the mode of respectively molding the arc petals, the arc petals are prepared by the carbon/carbon composite material, and then the carbon/carbon spliced heat-preservation cylinder is formed by machining, assembling and coating.
The technical solution of the present invention is further described in detail by the accompanying drawings and examples.
Drawings
FIG. 1 is a schematic structural diagram of a carbon/carbon spliced heat-preservation cylinder for a monocrystalline silicon czochralski furnace.
Fig. 2 is a sectional view a-a in fig. 1.
FIG. 3 is a flow chart of the preparation process of the carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon czochralski furnace.
FIG. 4 is a schematic diagram of the assembling process of the carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon czochralski furnace.
Description of reference numerals:
1-charcoal/charcoal arc lobe; 2-charcoal/charcoal pin.
Detailed Description
Example 1
As shown in fig. 1 and 2, the carbon/carbon splicing heat-preserving cylinder for the monocrystalline silicon czochralski furnace in the embodiment comprises N carbon/carbon arc petals 1, wherein the N carbon/carbon arc petals 1 are connected with each other through a mortise-tenon connection structure and around the axial lead of the carbon/carbon splicing heat-preserving cylinder along the circumferential direction, N is a positive integer not less than 2, M carbon/carbon pins 2 are arranged on the mortise-tenon connection parts of the adjacent carbon/carbon arc petals, a tenon is arranged on one side of each carbon/carbon arc petal 2, and a mortise is arranged on the other side of each carbon/carbon arc petal 2.
As shown in figures 3 and 4, the specific manufacturing process of the carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon czochralski furnace comprises the following steps: firstly, preparing a carbon/carbon arc petal, then assembling the carbon/carbon arc petal and a carbon/carbon pin to obtain a carbon/carbon spliced heat-preservation cylinder blank, and then sequentially performing coating preparation and purification treatment on the surface of the carbon/carbon spliced heat-preservation cylinder blank to obtain the carbon/carbon spliced heat-preservation cylinder.
Example 1
The single crystal silicon czochralski crystal silicon is charcoal/charcoal concatenation heat preservation section of thick bamboo for stove includes 4 charcoal/charcoal arc lamellas, 4 charcoal/charcoal arc lamellas are adjacent between through mortise-tenon joint structure, and encircle the axial lead of a charcoal/charcoal concatenation heat preservation section of thick bamboo along the circumferencial direction and connect, and all be provided with 3 charcoal/charcoal pins on the charcoal/charcoal arc lamella mortise-tenon joint position between adjacent, one side of 4 charcoal/charcoal arc lamellas all is provided with the tenon, and the opposite side all is provided with the tongue-and-groove.
The manufacturing method of the carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon czochralski furnace comprises the following steps:
step one, setting the density to be 1.25g/cm3The carbon/carbon composite material arc petal blank is machined to prepare a carbon/carbon arc petal; the arc-shaped petal blank of the carbon/carbon composite material has the density of 0.45g/cm3The arc petal-shaped carbon fiber preform is prepared by a chemical vapor infiltration process, and the arc petal-shaped carbon fiber preform is prepared by a carbon cloth/net tire laying needling process;
step two, adopting the density of 1.65g/cm3The carbon/carbon composite material square stock is machined to prepare carbon/carbon pins;
step three, the tenon of the carbon/carbon arc valve prepared in the step one is arranged in the mortise of the adjacent carbon/carbon arc valve, so that the adjacent carbon/carbon arc valve surrounds the axial lead of the carbon/carbon spliced heat-insulation cylinder along the circumferential direction and is connected through a tenon-and-mortise joint, and then 3 carbon/carbon pins prepared in the step two are arranged on the tenon-and-mortise joint part of each adjacent carbon/carbon arc valve for fixing, so as to obtain a carbon/carbon spliced heat-insulation cylinder blank;
and step four, preparing a pyrolytic carbon coating on the surface of the carbon/carbon spliced heat-preservation cylinder blank obtained in the step three by adopting a chemical vapor deposition process, and then carrying out high-temperature purification treatment to obtain the carbon/carbon spliced heat-preservation cylinder.
The density of the material can be not less than 1.0g/cm3And is not 1.25g/cm3The carbon/carbon arc valve blank or the carbon/carbon composite square stock is machined to prepare the carbon/carbon arc valve; optionally, the density is not less than 0.35g/cm3And is not 0.45g/cm3The arc-shaped carbon fiber preform is used for preparing a carbon/carbon composite material arc-shaped blank.
The preparation method of the carbon/carbon composite material arc-shaped valve blank can also be liquid-phase impregnation densification or a combination of chemical vapor infiltration and liquid-phase impregnation densification.
The preparation method of the arc petal-shaped carbon fiber preform in the embodiment can also be one or more than two of fiber winding, cloth bag winding, carbon cloth/mesh tire layer needling and 3D weaving except for carbon cloth/mesh tire layer needling.
The density of the material can be not less than 1.40g/cm3And is not 1.65g/cm3The carbon/carbon composite square stock is machined to prepare the carbon/carbon pin.
The preparation method of the coating of the embodiment can also be plasma spraying or reaction sintering.
The purification method of this example can also be halogen purification.
Example 2
The single crystal silicon czochralski crystal silicon is charcoal/charcoal concatenation heat preservation section of thick bamboo for stove includes 4 charcoal/charcoal arc lamellas, 4 charcoal/charcoal arc lamellas are adjacent between through mortise-tenon joint structure, and encircle the axial lead of a charcoal/charcoal concatenation heat preservation section of thick bamboo along the circumferencial direction and connect, and all be provided with 3 charcoal/charcoal pins on the charcoal/charcoal arc lamella mortise-tenon joint position between adjacent, one side of 4 charcoal/charcoal arc lamellas all is provided with the tenon, and the opposite side all is provided with the tongue-and-groove.
The manufacturing method of the carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon czochralski furnace comprises the following steps:
step one, setting the density to be 1.35g/cm3The carbon/carbon composite material arc petal blank is machined to prepare a carbon/carbon arc petal; the arc-shaped petal blank of the carbon/carbon composite material has the density of 0.55g/cm3The arc petal-shaped carbon fiber preform is prepared by a chemical vapor infiltration process, and the arc petal-shaped carbon fiber preform is prepared by a carbon cloth winding process;
step two, adopting the density of 1.65g/cm3The carbon/carbon composite material square stock is machined to prepare carbon/carbon pins;
step three, the tenon of the carbon/carbon arc valve prepared in the step one is arranged in the mortise of the adjacent carbon/carbon arc valve, so that the adjacent carbon/carbon arc valve surrounds the axial lead of the carbon/carbon spliced heat-insulation cylinder along the circumferential direction and is connected through a tenon-and-mortise joint, and then 3 carbon/carbon pins prepared in the step two are arranged on the tenon-and-mortise joint part of each adjacent carbon/carbon arc valve for fixing, so as to obtain a carbon/carbon spliced heat-insulation cylinder blank;
and step four, preparing a silicon carbide coating on the surface of the carbon/carbon spliced heat-preservation cylinder blank obtained in the step three by adopting a reaction sintering process, and then carrying out high-temperature purification treatment to obtain the carbon/carbon spliced heat-preservation cylinder.
The density of the material can be not less than 1.0g/cm3And is not 1.35g/cm3The carbon/carbon arc valve blank or the carbon/carbon composite square stock is machined to prepare the carbon/carbon arc valve; optionally, the density is not less than 0.35g/cm3And is not 0.55g/cm3The arc-shaped carbon fiber preform is used for preparing a carbon/carbon composite material arc-shaped blank.
The preparation method of the carbon/carbon composite material arc-shaped valve blank can also be liquid-phase impregnation densification or a combination of chemical vapor infiltration and liquid-phase impregnation densification.
The preparation method of the arc petal-shaped carbon fiber preform in the embodiment can also be one or more than two of fiber winding, cloth bag winding, carbon cloth/net tire laying needling and 3D weaving except for carbon cloth winding.
The density of the material can be not less than 1.40g/cm3And is not 1.65g/cm3The carbon/carbon composite square stock is machined to prepare the carbon/carbon pin.
The preparation method of the coating of the embodiment can also be plasma spraying or chemical vapor deposition.
The purification method of this example can also be halogen purification.
In conclusion, the carbon/carbon spliced heat-insulation cylinder for the monocrystalline silicon czochralski furnace provided by the invention comprises two parts, namely the carbon/carbon arc-shaped valve and the carbon/carbon pin, wherein the carbon/carbon arc-shaped valve is circumferentially surrounded, the surrounding center of the carbon/carbon arc-shaped valve is positioned on the axis of the heat-insulation cylinder, the arc-shaped valves are tightly connected through a structure fixed by tenon-mortise and pin nails, and the arc-shaped valves can limit the displacement of the arc-shaped valves mutually. The whole is broken into parts due to the adoption of an assembling mode, so that the preparation efficiency and the equipment space utilization rate of the carbon/carbon spliced heat-preservation cylinder in the preparation process are improved, and the production cost of the whole product is greatly reduced; through the tenon fourth of twelve earthly branches structure with the fixed mode of pin for charcoal/charcoal concatenation heat preservation section of thick bamboo's wholeness is better, has better structural rigidity, has blockked effectively simultaneously that silicon steam passes through the erosion of concatenation gap butt joint and charcoal/charcoal concatenation heat preservation section of thick bamboo outer layer low density heat preservation soft felt, plays better energy-conserving effect.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Any simple modification, change and equivalent changes of the above embodiments according to the technical essence of the invention are still within the protection scope of the technical solution of the invention.
Claims (9)
1. The utility model provides a monocrystalline silicon is charcoal/charcoal concatenation heat preservation section of thick bamboo for czochralski furnace, its characterized in that, includes N piece charcoal/charcoal arc lamella, N piece charcoal/charcoal arc lamella is adjacent between connect through tenon fourth of twelve earthly branches connection structure and along the axial lead of the charcoal/charcoal concatenation heat preservation section of thick bamboo of circumferencial direction, wherein, N is the positive integer that is not less than 2, all is provided with M charcoal/charcoal pin on the charcoal/charcoal arc lamella mortise-tenon joint part between adjacent, one side of N piece charcoal/charcoal arc lamella all is provided with the tenon, and the opposite side all is provided with the tongue-and-groove.
2. The carbon/carbon spliced heat-preservation cylinder for the monocrystalline silicon czochralski furnace as claimed in claim 1, wherein M is 2-100.
3. A method for manufacturing a carbon/carbon spliced heat-preserving container for a single crystal silicon czochralski furnace as claimed in claim 1 or claim 2, which comprises the steps of:
step one, preparing carbon/carbon arc petals;
step two, preparing carbon/carbon pins;
step three, the tenon of the carbon/carbon arc valve prepared in the step one is arranged in the mortise of the adjacent carbon/carbon arc valve, so that the adjacent carbon/carbon arc valve is connected with the axial lead of the carbon/carbon spliced heat-insulation cylinder along the circumferential direction by the tenon-and-mortise joint, and then the carbon/carbon pin prepared in the step two is arranged on the tenon-and-mortise joint part of each adjacent carbon/carbon arc valve for fixing, so as to obtain a carbon/carbon spliced heat-insulation cylinder blank;
and step four, preparing coatings on the inner surface and the outer surface of the carbon/carbon spliced heat-preservation cylinder blank obtained in the step three, and then carrying out purification treatment to obtain the carbon/carbon spliced heat-preservation cylinder.
4. The method of claim 3, wherein the carbon/carbon arc segments in step one are machined from a carbon/carbon composite block stock or a carbon/carbon composite arc segment blank.
5. The method as claimed in claim 4, wherein the carbon/carbon composite material segment blank is prepared from a segment-shaped carbon fiber preform through a densification process, and the density of the carbon/carbon composite material segment blank is not less than 1.0g/cm3(ii) a The densification process is chemical vapor infiltration or/and liquid phase impregnation densification.
6. The method according to claim 5, wherein the arc petal-shaped carbon fiber preform is prepared by one or more of fiber winding, cloth bag winding, carbon cloth/net tire laying needling and 3D weaving, and the density of the arc petal-shaped carbon fiber preform is not less than 0.35g/cm3。
7. The method of claim 3, wherein the carbon/carbon pins in step two are machined from a carbon/carbon composite block, and the density of the carbon/carbon composite block is not less than 1.40g/cm3。
8. The method of claim 3, wherein the coating of step four is prepared by chemical vapor deposition, plasma spraying or reaction sintering.
9. The method according to claim 3, wherein the purification treatment in step four is high temperature purification or halogen purification.
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| CN113373505A (en) * | 2021-06-30 | 2021-09-10 | 内蒙古中晶科技研究院有限公司 | Single crystal furnace thermal field heat preservation cylinder and preparation method thereof |
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