CN112604324A - Degassing device and method for development concentration control system and development concentration control system - Google Patents
Degassing device and method for development concentration control system and development concentration control system Download PDFInfo
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- CN112604324A CN112604324A CN202011447280.2A CN202011447280A CN112604324A CN 112604324 A CN112604324 A CN 112604324A CN 202011447280 A CN202011447280 A CN 202011447280A CN 112604324 A CN112604324 A CN 112604324A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0031—Degasification of liquids by filtration
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/02—Foam dispersion or prevention
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
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Abstract
The invention discloses a degassing device and a degassing method of a developing concentration control system and the developing concentration control system, wherein the degassing device comprises a degassing module, a linkage valve and a diaphragm vacuum pump, the degassing module is connected with a sampling pump through a pipeline and receives a developing solution sample transmitted by the sampling pump, and the degassing module is connected with a developing solution concentration monitoring module and transmits the degassed developing solution to the developing solution concentration monitoring module; the linkage valve is arranged on a pipeline connecting the degassing module and the diaphragm vacuum pump, when the diaphragm vacuum pump stops, the linkage valve is opened, the pipeline between the degassing module and the linkage valve loses a vacuum state, and when the diaphragm vacuum pump starts, the linkage valve is closed. The technical scheme of the invention can improve the accuracy of monitoring the developing concentration and avoid the fault when the diaphragm pump is restarted.
Description
Technical Field
The invention relates to the technical field of flat panel display, in particular to a degassing device, a degassing method and a developing concentration control system of a developing concentration control system.
Background
Due to the rise of the global information society and the development of technology, the field of display technology is changing day by day, and the variety of display technologies is increasing, for example, the display technologies include the conventional liquid crystal display technology, the blue phase liquid crystal display technology, the Organic Light Emitting Diode (OLED) display technology, the electrophoretic display technology, and the like. In the field of display technology, the manufacturing process of liquid crystal substrates, printed circuit boards, and the like requires a developing process in which monitoring and control of the concentration of a developing solution are important. Tetramethylammonium hydroxide (TMAH, molecular formula C4H13NO), is a major component of the developer used in semiconductor process photolithography. In the wet etching process, more and more semiconductor chip factories or panel factories gradually tend to use TMAH as a main component of the developing solution, and monitoring the concentration of the TMAH in the developing solution can help users to control the etching effect and improve the quality and the efficiency of the etching effect. The sampling process of the current development concentration Control System (DCS) is as follows: the Sampling Pump (Sampling Pump) draws the developer in the developer box (tank) for circulation, and the parallel branch pipeline samples the developer, and the micro-bubbles in the developer can be attached to the concentration meter component sensor (sensor), which can affect the detection precision, so the bubbles must be removed by the degassing device and then respectively sent to the absorbance meter component and the tetramethylammonium hydroxide (TMAH, molecular formula C4H13NO) concentration meter component for concentration measurement. Since the TMAH concentration in the developer changes to cause the change of the conductivity and the transmission rate of the sound wave, the conventional concentration meter generally obtains the TMAH concentration by detecting the conductivity or the speed of the sound wave in the developer. The method for measuring the concentration by ultrasonic waves mainly comprises the following processes and principles: the ultrasonic wave transmitting end sends out ultrasonic waves, the ultrasonic waves pass through the liquid in the slit with the fixed interval and are reflected back, and the reflecting speed of the ultrasonic waves is measured due to the fact that the ultrasonic wave propagation speeds of the liquids with different concentrations are different, and then the concentration of the liquid can be calculated; however, when the liquid passing through the gap contains bubbles, the ultrasonic transmission speed is directly affected, the detected concentration is rapidly changed, and the measured value of the TMAH is distorted, so that the liquid sample must pass through a degassing device to remove the contained bubbles.
The structure and the principle of the prior degasser are as follows: a Degassing device in a development concentration control system (DCS) consists of a Degassing module (Degassing Model) and a diaphragm Vacuum pump (Vacuum pump), wherein a filter of the Degassing module comprises a hollow fiber filter membrane, and the hollow fiber filter membrane has selective permeability, so that general gas in liquid can permeate through the hollow fiber filter membrane, but liquid molecules cannot permeate through the hollow fiber filter membrane. The vacuum environment is manufactured by the operation of the diaphragm vacuum pump, and pressure difference is generated at two ends of the hollow fiber filter membrane, so that bubbles contained in the liquid flowing through the degassing filter are pumped away, and the aim of removing gas or bubbles is fulfilled.
The prior art is widely applied to the industry, but the practical use has the following disadvantages:
the Diaphragm Vacuum Pump is abnormally restarted again, bubbles can not be normally removed, and the Diaphragm Vacuum Pump can be overloaded due to long-time idling, the currently used Diaphragm Vacuum Pump is a Diaphragm Pump (Diapthragm-type Vacuum Pump), air is extracted by using the repeated motion of a Diaphragm, when the Diaphragm Vacuum Pump stops running, a pipeline of a degassing device is just in a Vacuum state, the Diaphragm (Diapthragm) can be tightly attached to the lower part of a cylinder, the pipeline between the degassing device and the Diaphragm Vacuum Pump maintains the Vacuum state, the Diaphragm can not move when the Diaphragm is restarted in a short time (during the period that the Vacuum state is not automatically relieved), bubbles in a developing solution can not be removed, the concentration of TMAH can be rapidly fluctuated, the developing machine can not be repeatedly produced, and the Diaphragm (Diapthrgm) can be melted and damaged due to the overload of an engine due to the long-time running of the Diaphragm Vacuum Pump.
Disclosure of Invention
In view of the above, the present invention provides a degassing apparatus, a degassing method and a developing concentration control system of a developing concentration control system, wherein a correlation valve is arranged between a degassing module and a diaphragm vacuum pump, the correlation valve is automatically closed and opened along with the operation and the stop of the diaphragm vacuum pump, when the diaphragm vacuum pump stops, the correlation valve is automatically opened to destroy the vacuum state of a pipeline, a diaphragm of the diaphragm vacuum pump cannot be attached to the lower part of an air cylinder due to the pressure difference of the vacuum environment, and when the diaphragm vacuum pump starts, the diaphragm can normally move to evacuate and the correlation valve can be automatically closed, so that the problems that bubbles cannot be removed due to the incapability of moving the diaphragm when the diaphragm vacuum pump starts, and the diaphragm vacuum pump idles for a long time to.
Therefore, the embodiment of the invention provides the following technical scheme:
according to one aspect of the invention, a degassing device of a developing concentration control system is provided, which comprises a degassing module, a linkage valve and a diaphragm vacuum pump,
the degassing module is connected with the sampling pump through a pipeline and used for receiving a developing solution sample transmitted by the sampling pump, and the degassing module is connected with the developing solution concentration monitoring module and used for transmitting the degassed developing solution to the developing solution concentration monitoring module;
the linkage valve is arranged on a pipeline connecting the degassing module and the diaphragm vacuum pump, when the diaphragm vacuum pump stops, the linkage valve is opened, the pipeline between the degassing module and the linkage valve loses a vacuum state, and when the diaphragm vacuum pump starts, the linkage valve is closed.
Further, the linkage valve is a timing valve.
According to one aspect of the invention, a developing concentration control system is provided, which comprises a degassing device, a sampling pump and a developing solution concentration monitoring module;
the sampling pump is connected with the developing solution box through a pipeline and extracts a developing solution sample from the developing solution box;
the degassing device comprises a degassing module, a linkage valve and a diaphragm vacuum pump,
the degassing module is connected with the sampling pump through a pipeline and receives a developing solution sample transmitted by the sampling pump, the degassing module is connected with the developing solution concentration monitoring module and transmits the degassed developing solution to the developing solution concentration monitoring module,
the linkage valve is arranged on a pipeline connecting the degassing module and the diaphragm vacuum pump, when the diaphragm vacuum pump stops, the linkage valve is opened to enable the pipeline between the degassing module and the linkage valve to lose a vacuum state, and when the diaphragm vacuum pump starts, the linkage valve is closed;
the developing solution concentration monitoring module monitors the concentration of the developing solution.
Further, the developing solution concentration monitoring module comprises a TMAH concentration monitoring device.
Further, the developing solution concentration monitoring module comprises an absorbance meter.
Further, the developing solution concentration monitoring module monitors the concentration of the developing solution TMAH by an ultrasonic method.
Further, the developing solution concentration monitoring module monitors the concentration of the developing solution TMAH by detecting the conductivity of the developing solution.
Further, the linkage valve is a timing valve.
According to an aspect of the present invention, there is provided a degassing method of a developing concentration control system including the steps of:
acquiring the working state of the diaphragm vacuum pump, wherein the working state comprises a starting state and a stopping state;
when the working state is a stop state, controlling a linkage valve to close so that a pipeline between the degassing module and the linkage valve loses a vacuum state, wherein the linkage valve is arranged on the pipeline connecting the degassing module and the diaphragm vacuum pump;
and when the working state is a starting state, controlling the linkage valve to close. Further, the linkage valve is a timing valve.
According to the degassing device of the developing concentration control system, the phenomena that bubbles cannot be removed due to obstacles when the diaphragm vacuum pump is restarted and overheating damage is caused due to long-time idling of the diaphragm vacuum pump can be avoided. Of course, not all of the above-described advantages need to be achieved in the practice of any one product or method of the present invention.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the invention. For purposes of illustrating and describing some portions of the present invention, corresponding parts may be exaggerated in the drawings, i.e., made larger relative to other components in an exemplary apparatus actually manufactured according to the present invention. Similarly, the distances between the individual components or modules in the drawings, whether the connecting lines are curved or not, do not represent the distances between the components or the shapes of the connecting lines. In the drawings, the same or similar technical features or components will be denoted by the same or similar reference numerals.
Fig. 1 shows a schematic view of a degasser of a development concentration control system according to an embodiment of the present invention.
Fig. 2 shows a schematic diagram of a degassing method of the development concentration control system according to an embodiment of the present invention.
Fig. 3 shows a schematic diagram of a development density control system according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
First embodiment
According to a first embodiment of the present invention, there is provided a deaerator of a development concentration control system. For convenience of explanation, fig. 1 shows a schematic view of a degasser of a developing concentration control system and a related developing concentration control system according to an embodiment of the present invention. As shown in fig. 1, the degassing apparatus 1 includes a degassing module 11, a linkage valve 12, and a diaphragm vacuum pump 13 as a part of a developing concentration control system.
The degassing module 11 may comprise a hollow fiber membrane having selectively permeable characteristics, which allow the passage of general gases, but not of liquid molecules. Degassing module 11 passes through pipe connection sampling pump 2, receives the developer solution sample of the transmission of sampling pump 2, degassing module 11 connects developer solution concentration monitoring module 3 and transmits the developer solution after the degasification processing for developer solution concentration monitoring module 3, sampling pump 2 extracts the developer solution sample from developer solution box (tank)4 and carries for degassing module 11.
The linkage valve 12 is arranged on a pipeline connecting the degassing module 11 and the diaphragm vacuum pump 13 and is communicated with a pipeline between the degassing module 11 and the diaphragm vacuum pump 13. The linkage valve 12 is opened when the diaphragm vacuum pump 13 is stopped so that the pipe between the degassing module 11 and the linkage valve 12 loses a vacuum state, and the linkage valve 12 is closed when the diaphragm vacuum pump 13 is started. The opening of the linkage valve 12 when the diaphragm vacuum pump 13 is stopped can be realized by a general conventional means, such as by using a timing valve, or by detecting the operation state of the diaphragm vacuum pump 13 and giving an instruction to the linkage valve 12, or giving an instruction to open and close the linkage valve 12 when the diaphragm vacuum pump 13 is started or stopped. The single-headed arrows in the figures before the developer cartridge 4 and the sampling pump 2 indicate that the developer cartridge 4 is communicated with the sampling pump 2 through a pipeline, and the developer flows from the developer cartridge 4 to the sampling pump along the pipeline, although the situation that the developer flows reversely from the sampling pump 2 to the developer cartridge in a special case is not excluded. The situation is similar for other components or modules connected by unidirectional arrows in the figure. It should be noted that the lines between the linkage valve 12 and the degassing module 11 and the diaphragm vacuum pump 13 are also in communication. In fig. 1, the degassing device 1 is schematically enclosed by a dashed box, but is not limited to a degassing module 11, a linkage valve 12 and a diaphragm vacuum pump 13, and also comprises necessary pipes for connection; the diaphragm vacuum pump or the like also includes necessary electrical connections or the like, which are not described in detail herein.
When the degassing device 1 works, the sampling pump 2 is started to convey a developing solution sample to the degassing module 11, the diaphragm vacuum pump 13 is started, the linkage valve 12 is closed at the moment, along with the operation of the diaphragm vacuum pump 13, a pipeline between the degassing module 11 and the diaphragm vacuum pump 13 is in a vacuum state, so that gas or bubbles in the developing solution sample in the degassing module 11 are sucked out, the developing solution sample with the gas or bubbles sucked out is transmitted from the degassing module 11 to the developing solution concentration monitoring module 3, and the developing solution concentration monitoring module 3 monitors the concentration of the developing solution sample; if the diaphragm vacuum pump 13 stops, the linkage valve 12 is opened, the vacuum state of the pipeline between the degassing module 11 and the diaphragm vacuum pump 13 is damaged, the diaphragm of the diaphragm vacuum pump 13 is not tightly attached to the lower part of the cylinder, and the diaphragm vacuum pump 13 can normally operate when the diaphragm vacuum pump is started again.
Compared with the prior art, according to the degassing device of the development concentration control system, if the linkage valve 12 is opened when the diaphragm vacuum pump 13 stops, the vacuum state of the pipeline between the degassing module 11 and the diaphragm vacuum pump 13 is damaged, and the diaphragm of the diaphragm vacuum pump 13 is not tightly attached to the lower part of the cylinder, when the diaphragm vacuum pump 13 is restarted, the diaphragm vacuum pump 13 can normally operate, so that the accuracy of monitoring the concentration of the developing solution is enhanced, the production efficiency is improved, and the phenomenon that the engine is overloaded and overheated due to long-time operation of the diaphragm vacuum pump is avoided.
In one embodiment, the linkage valve 12 is a timed valve. The linkage valve 12 is a timing valve, so that the linkage valve 12 can be opened and closed conveniently according to the working state of the diaphragm vacuum pump 13.
Second embodiment
According to a second embodiment of the present invention, a development density control system is provided. Referring to fig. 1 and 3, the developing concentration control system 5 includes a degasser 1, a sampling pump 2, and a developing solution concentration monitoring module 3;
the sampling pump 2 is connected with the developer box 4 through a pipeline and extracts a developer sample from the developer box 4;
the degassing device 1 comprises a degassing module 11, a linkage valve 12 and a diaphragm vacuum pump 13,
the degassing module 11 may comprise a hollow fiber membrane having selectively permeable characteristics, which allow the passage of general gases, but not of liquid molecules. The degassing module 11 is connected with the sampling pump 2 through a pipeline to receive the developer sample transmitted by the sampling pump 2, the degassing module 11 is connected with the developer concentration monitoring module 3 and transmits the degassed developer to the developer concentration monitoring module 3, the sampling pump 2 extracts the developer sample from the developer box (tank)4 and transmits the developer sample to the degassing module 11,
the linkage valve 12 is arranged on a pipeline connecting the degassing module 11 and the diaphragm vacuum pump 13 and is communicated with a pipeline between the degassing module 11 and the diaphragm vacuum pump 13. The linkage valve 12 is opened when the diaphragm vacuum pump 13 is stopped so that the pipe between the degassing module 11 and the linkage valve 12 loses a vacuum state, and the linkage valve 12 is closed when the diaphragm vacuum pump 13 is started. The opening of the linkage valve 12 when the diaphragm vacuum pump 13 is stopped can be realized by a general conventional means, such as by using a timing valve, or by detecting the operation state of the diaphragm vacuum pump 13 and giving an instruction to the linkage valve 12, or giving an instruction to open and close the linkage valve 12 when the diaphragm vacuum pump 13 is started or stopped. The single-headed arrows in the figures before the developer cartridge 4 and the sampling pump 2 indicate that the developer cartridge 4 is communicated with the sampling pump 2 through a pipeline, and the developer flows from the developer cartridge 4 to the sampling pump along the pipeline, although the situation that the developer flows reversely from the sampling pump 2 to the developer cartridge in a special case is not excluded. The situation is similar for other components or modules connected by unidirectional arrows in the figure. It should be noted that the lines between the linkage valve 12 and the degassing module 11 and the diaphragm vacuum pump 13 are also in communication. In fig. 1, the degassing device 1 is schematically enclosed by a dashed box, but is not limited to a degassing module 11, a linkage valve 12 and a diaphragm vacuum pump 13, and also comprises necessary pipes for connection; diaphragm vacuum pumps and the like also include the necessary electrical connections and the like. In fig. 3, the developer concentration control system 5 is schematically enclosed by a dashed line box, but the developer concentration control system is not limited to the illustrated components or modules, and includes necessary pipes for connection and necessary electrical connections, and the like, which are not described in detail herein.
When the degassing device 1 in the developing solution concentration control system 5 works, the sampling pump 2 is started to convey a developing solution sample to the degassing module 11, the diaphragm vacuum pump 13 is started, the linkage valve 12 is closed at the moment, a pipeline between the degassing module 11 and the diaphragm vacuum pump 13 is in a vacuum state along with the operation of the diaphragm vacuum pump 13, so that gas or bubbles in the developing solution sample in the degassing module 11 are sucked out, the developing solution sample with the gas or bubbles sucked out is transmitted to the developing solution concentration monitoring module 3 from the degassing module 11, and the developing solution concentration monitoring module 3 monitors the concentration of the developing solution sample; if the diaphragm vacuum pump 13 stops, the linkage valve 12 is opened, the vacuum state of the pipeline between the degassing module 11 and the diaphragm vacuum pump 13 is damaged, the diaphragm of the diaphragm vacuum pump 13 is not tightly attached to the lower part of the cylinder, and the diaphragm vacuum pump 13 can normally operate when the diaphragm vacuum pump is started again.
The developing solution concentration monitoring module 3 monitors the concentration of the developing solution so as to control the concentration of the developing solution by a developing concentration control system (DCS).
In one embodiment, the developer concentration monitoring module 3 includes a TMAH concentration monitoring device.
In one embodiment, the developer concentration monitoring module 3 includes an absorbance meter.
In one embodiment, the developer concentration monitoring module 3 monitors the concentration of the developer TMAH by an ultrasonic method.
In one embodiment, the developer concentration monitoring module 3 monitors the developer TMAH concentration by detecting the conductivity of the developer.
In one embodiment, the linkage valve 12 is a timed valve. The linkage valve 12 is a timing valve, so that the linkage valve 12 can be opened and closed conveniently according to the working state of the diaphragm vacuum pump 13.
Compared with the prior art, the developing concentration control system has the advantages that if the linkage valve 12 is opened when the diaphragm vacuum pump 13 stops, the vacuum state of the pipeline between the degassing module 11 and the diaphragm vacuum pump 13 is damaged, and the diaphragm of the diaphragm vacuum pump 13 is not tightly attached to the lower part of the cylinder, when the diaphragm vacuum pump 13 is started again, the diaphragm vacuum pump 13 can normally operate, so that the accuracy of monitoring the concentration of the developing solution is enhanced, the production efficiency is improved, and the phenomenon that the engine is overloaded and overheated due to long-time operation of the diaphragm vacuum pump is avoided.
Third embodiment
According to a third embodiment of the present invention, there is provided a degassing method of a development concentration control system, including the steps of:
acquiring the working state of the diaphragm vacuum pump, wherein the working state comprises a starting state and a stopping state;
when the working state is a stop state, controlling a linkage valve to close so that a pipeline between the degassing module and the linkage valve loses a vacuum state, wherein the linkage valve is arranged on the pipeline connecting the degassing module and the diaphragm vacuum pump;
and when the working state is a starting state, controlling the linkage valve to close.
And the degassing module is used for receiving the developing solution sample transmitted by the sampling pump and carrying out degassing treatment when the vacuum diaphragm pump is in a starting state.
In one embodiment, the linkage valve is a timing valve. The linkage valve is a timing valve, and can be opened and closed conveniently according to the working state of the diaphragm vacuum pump.
In specific implementation, for convenience of description, referring to fig. 2, steps related to the above method are described as S01, S02, S031, and S032, respectively, but it should be noted that the above steps are not necessarily performed in the order shown in the figure, and are not necessarily performed once, and some steps are steps in the prior art. In practice, the following cases (but not limited to) may be used:
case 1:
degassing treatment is carried out by a membrane vacuum pump starting-linkage valve closing-degassing module
Case 2:
stopping the diaphragm vacuum pump, opening the linkage valve, restarting the diaphragm vacuum pump, closing the linkage valve, and degassing by the degassing module
Therefore, according to the degassing method of the developing concentration control system, if the linkage valve is opened when the diaphragm vacuum pump stops, the vacuum state of the pipeline between the degassing module and the diaphragm vacuum pump is damaged, and the diaphragm of the diaphragm vacuum pump is not tightly attached to the lower part of the cylinder, the diaphragm vacuum pump can normally operate when the diaphragm vacuum pump is restarted, so that the accuracy of monitoring the concentration of the developing solution is enhanced, the production efficiency is improved, and the phenomenon that the engine is overloaded and overheated due to long-time operation of the diaphragm vacuum pump is avoided.
According to the above description, the technical effects of the present invention are: the degassing device, the degassing method and the developing concentration control system of the developing concentration control system are provided, a correlation valve is arranged between a degassing module and a diaphragm vacuum pump, the linkage valve is opened when the diaphragm vacuum pump stops, the vacuum state of a pipeline between the degassing module and the diaphragm vacuum pump is damaged, a diaphragm of the diaphragm vacuum pump is not tightly attached to the lower part of a cylinder, and when the diaphragm vacuum pump is restarted, the diaphragm vacuum pump can normally run, so that the accuracy of monitoring the concentration of a developing solution is enhanced, the production efficiency is improved, and the phenomenon that the engine is overloaded and overheated due to long-time running of the diaphragm vacuum pump is avoided.
The above description is only exemplary of the present application and should not be taken as limiting the present application, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present application should be included in the scope of the present application.
Those skilled in the art will appreciate that the above description is not meant to be limiting of the apparatus and may include more or less components, or combinations of certain components, or different arrangements of components.
It should be noted that the terms "first" and "second" in the description of the present application are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. The term "comprising" is used to specify the presence of stated elements, but not to preclude the presence or addition of additional like elements in a process, method, article, or apparatus that comprises the stated elements. All the embodiments in the present specification are described in a related manner, and the same and similar parts among the embodiments may be referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the device and electronic apparatus embodiments, since they are substantially similar to the method embodiments, the description is relatively simple, and reference may be made to some descriptions of the method embodiments for relevant points. The above description is only an example of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention shall fall within the protection scope of the present invention. In the foregoing description of specific embodiments of the invention, features described and/or illustrated with respect to one embodiment may be used in the same or similar manner in one or more other embodiments, in combination with or instead of the features of the other embodiments.
In this application, the word "exemplary" is used to mean "serving as an example, instance, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments. The following description is presented to enable any person skilled in the art to make and use the application. In the following description, details are set forth for the purpose of explanation. It will be apparent to one of ordinary skill in the art that the present application may be practiced without these specific details. In other instances, well-known structures and processes are not set forth in detail in order to avoid obscuring the description of the present application with unnecessary detail. Thus, the present application is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.
It should be emphasized that the term "comprises/comprising" when used herein, is taken to specify the presence of stated features, elements, steps or components, but does not preclude the presence or addition of one or more other features, elements, steps or components. The terms "a," "an," "two," "1," "2," "n-" and the like, as they relate to ordinal numbers, do not necessarily denote the order of execution or importance of the features, elements, steps, or components identified by the terms, but are used merely for identification among the features, elements, steps, or components for clarity of description.
Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope defined by the appended claims.
Claims (10)
1. A degassing device (1) of a developing concentration control system is characterized by comprising a degassing module (11), a linkage valve (12) and a diaphragm vacuum pump (13),
the degassing module (11) is connected with the sampling pump (2) through a pipeline and receives a developing solution sample transmitted by the sampling pump (2), and the degassing module (11) is connected with the developing solution concentration monitoring module (3) and transmits the degassed developing solution to the developing solution concentration monitoring module (3);
the linkage valve (12) is arranged on a pipeline connecting the degassing module (11) and the diaphragm vacuum pump (13), when the diaphragm vacuum pump (13) stops, the linkage valve (12) is opened so that the pipeline between the degassing module (11) and the linkage valve (12) loses a vacuum state, and when the diaphragm vacuum pump (13) starts, the linkage valve (12) is closed.
2. The degassing device of a development concentration control system according to claim 1, wherein the linkage valve (12) is a timing valve.
3. A developing concentration control system (5) is characterized by comprising a degassing device (1), a sampling pump (2) and a developing solution concentration monitoring module (3);
the sampling pump (2) is connected with the developing solution box (4) through a pipeline and extracts a developing solution sample from the developing solution box (4);
the degassing device (1) comprises a degassing module (11), a linkage valve (12) and a diaphragm vacuum pump (13),
the degassing module (11) is connected with the sampling pump (2) through a pipeline to receive a developing solution sample transmitted by the sampling pump (2), the degassing module (11) is connected with the developing solution concentration monitoring module (3) and transmits the developing solution subjected to degassing treatment to the developing solution concentration monitoring module (3),
the linkage valve (12) is arranged on a pipeline connecting the degassing module (11) and the diaphragm vacuum pump (13), when the diaphragm vacuum pump (13) is stopped, the linkage valve (12) is opened so that the pipeline between the degassing module (11) and the linkage valve (12) loses a vacuum state, and when the diaphragm vacuum pump (13) is started, the linkage valve (12) is closed;
the developing solution concentration monitoring module (3) monitors the concentration of the developing solution.
4. The developing concentration control system according to claim 3, wherein the developing solution concentration monitoring module (3) includes a TMAH concentration monitoring device.
5. Developer concentration control system according to claim 3, characterized in that the developer concentration monitoring module (3) comprises an absorbance meter.
6. The developing concentration control system according to claim 3, wherein the developing solution concentration monitoring module (3) monitors the developing solution TMAH concentration by an ultrasonic method.
7. The developing concentration control system according to claim 3, wherein the developing solution concentration monitoring module (3) monitors the developing solution TMAH concentration by detecting conductivity of the developing solution.
8. Developer concentration control system according to any of claims 3 to 7, characterized in, that the linkage valve (12) is a timing valve.
9. A degassing method of a development concentration control system, characterized by comprising the steps of:
acquiring the working state of the diaphragm vacuum pump, wherein the working state comprises a starting state and a stopping state;
when the working state is a stop state, controlling a linkage valve to close so that a pipeline between the degassing module and the linkage valve loses a vacuum state, wherein the linkage valve is arranged on the pipeline connecting the degassing module and the diaphragm vacuum pump;
and when the working state is a starting state, controlling the linkage valve to close.
10. The degassing method of the development concentration control system according to claim 9, wherein the linkage valve is a timing valve.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011447280.2A CN112604324A (en) | 2020-12-09 | 2020-12-09 | Degassing device and method for development concentration control system and development concentration control system |
| PCT/CN2020/140596 WO2022121022A1 (en) | 2020-12-09 | 2020-12-29 | Degassing device and method of developer concentration control system, and developer concentration control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011447280.2A CN112604324A (en) | 2020-12-09 | 2020-12-09 | Degassing device and method for development concentration control system and development concentration control system |
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| Publication Number | Publication Date |
|---|---|
| CN112604324A true CN112604324A (en) | 2021-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011447280.2A Pending CN112604324A (en) | 2020-12-09 | 2020-12-09 | Degassing device and method for development concentration control system and development concentration control system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112604324A (en) |
| WO (1) | WO2022121022A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5205844A (en) * | 1990-11-30 | 1993-04-27 | Uniflows Co., Ltd. | Degassing apparatus |
| CN103376714A (en) * | 2012-04-18 | 2013-10-30 | 株式会社宫腰 | Apparatus for detecting a toner density of a liquid developer |
| CN204684909U (en) * | 2015-06-09 | 2015-10-07 | 白山发电厂 | Sulfur hexafluoride gas retracting device |
| CN105829110A (en) * | 2013-12-26 | 2016-08-03 | 柯尼卡美能达株式会社 | Inkjet printing apparatus and control method therefor |
| CN109445254A (en) * | 2018-11-16 | 2019-03-08 | 福建省福联集成电路有限公司 | A kind of device reducing development pipeline bubble |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0568808A (en) * | 1991-06-17 | 1993-03-23 | Dainippon Ink & Chem Inc | Equipment and method for diaphragm vacuum deaeration |
| EP2877841A4 (en) * | 2012-07-24 | 2016-07-27 | Univ Columbia | Mems-based isothermal titration calorimetry |
| DE202014104979U1 (en) * | 2014-10-17 | 2014-12-08 | Bürkert Werke GmbH | degassing |
-
2020
- 2020-12-09 CN CN202011447280.2A patent/CN112604324A/en active Pending
- 2020-12-29 WO PCT/CN2020/140596 patent/WO2022121022A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5205844A (en) * | 1990-11-30 | 1993-04-27 | Uniflows Co., Ltd. | Degassing apparatus |
| CN103376714A (en) * | 2012-04-18 | 2013-10-30 | 株式会社宫腰 | Apparatus for detecting a toner density of a liquid developer |
| CN105829110A (en) * | 2013-12-26 | 2016-08-03 | 柯尼卡美能达株式会社 | Inkjet printing apparatus and control method therefor |
| CN204684909U (en) * | 2015-06-09 | 2015-10-07 | 白山发电厂 | Sulfur hexafluoride gas retracting device |
| CN109445254A (en) * | 2018-11-16 | 2019-03-08 | 福建省福联集成电路有限公司 | A kind of device reducing development pipeline bubble |
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| Publication number | Publication date |
|---|---|
| WO2022121022A1 (en) | 2022-06-16 |
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Application publication date: 20210406 |