CN112600528A - Weak coupling resonator - Google Patents
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Abstract
The invention discloses a weak coupling resonator, which relates to the technical field of micro-electro-mechanical systems and comprises the following components: the fixed support straight beam is fixed by a first fixed end and a second fixed end; the mass adsorption block is adsorbed on the fixed support straight beam; the fixed support cosine curved beam is fixed by a third fixed end and a fourth fixed end; the fixed-branch cosine curved beam is driven by a driving voltage source through a fixed electrode; the first fixed end is connected with a straight beam coupling voltage source; the third fixed end is connected with a cosine curved beam coupling voltage source; the direct current voltage coupling is carried out between the fixed-support straight beam and the fixed-support cosine curved beam through electrostatic force generated by a straight beam coupling voltage source and a cosine curved beam coupling voltage source; by adjusting the driving voltage and the coupling voltage, the function of the weak coupling resonator is switched between the micro mass sensor and the MEMS band-pass filter. The MEMS band-pass filter can be switched randomly between the micro-mass sensor and the MEMS band-pass filter, and has the advantages of simple process, stable configuration, easiness in processing and the like.
Description
Technical Field
The invention relates to the technical field of micro-electro-mechanical systems, in particular to a weakly coupled resonator.
Background
Today, micro-system (MEMS) resonators have been applied to various fields such as sensors, filters, switches, etc. by virtue of their small size, light weight, low cost, high reliability, and mass producibility.
An existing MEMS resonator, such as the one in "a new sensitivity improving approach for mass Sensors through integrated timing of volume resonator surface and cross-section" (Sensors and Actuators B: Chemical,2015.206: p.343-350), proposes a new sensitivity improving method, that is, by simultaneously changing the profile and cross-sectional structure of a cantilever beam, a comprehensive optimization of effective stiffness and mass distribution is realized. Then, different from the traditional rectangular cantilever beam sensor, a novel piezoelectric resonance mass sensor which takes the groove trapezoidal cantilever beam as a key elastic element is designed. The analog sensitivity is approximately 387.8% higher compared to a rectangular cantilever sensor of the same geometry. But this solution can only be used as a mass sensor. Luming et al in "expanding nonlinear sensor to enhance the sensitivity of mode-localized mass sensor based on electrostatic coupled MEMS detectors" (International Journal of Non-Linear Mechanics:2020.121: p.103455) combine the advantages of nonlinear dynamics and electrostatic coupling, introduce modal localization into two weakly coupled micro-beams of the same length, and propose an ultra-sensitive mass sensor. This solution is a weak coupling between two straight beams and thus it has non-linear characteristics, but it is much less non-linear than curved beams. Meanwhile, the model with two coupled straight beams in the scheme can only be used as a mass sensor. Ami Iquubal et al, in "Bandpass filter based on asymmetric metric fuel filters with ultra wide band upper stores and characteristics" (AEU-International Journal of Electronics and Communications,2020.116: p.153062), proposed a novel microstrip Bandpass filter that utilizes asymmetric funnel resonators to achieve broadband, excellent skirt selectivity and good passband reflection characteristics. But this scheme can only be used for filtering.
Therefore, in many MEMS resonators, the MEMS resonators are only devices with single functions, and cannot be adapted to and satisfy complicated and variable use conditions, and the design and manufacturing costs are increased. There is a need for a resonator that is multifunctional and has superior performance.
Disclosure of Invention
Aiming at the problems that various existing resonators are only single-function devices and cannot be applied to occasions which are complicated and changeable and need multifunctional application, the invention provides a weak coupling resonator which innovatively combines a mode localization theory with strong nonlinearity of a cosine curved beam. When the driving voltage is small and the coupling voltage is not equal to zero, the mass of the mass adsorption block is detected through the change of the amplitude ratio based on the modal localization theory, and the sensitivity of the mass adsorption block is greatly improved compared with the sensitivity of the existing single-degree-of-freedom resonant sensor. When the driving voltage is larger and the coupling voltage is equal to zero, the strong nonlinear characteristic of the cosine curved beam can be excited, so that a flat and wide band-pass is generated and can be used for filtering. The micro mass sensor and the MEMS band-pass filter are simple in structure, easy to adjust in driving mode, capable of switching between the micro mass sensor and the MEMS band-pass filter at will, simple in switching mode, free of any structural optimization, capable of achieving great improvement of the sensitivity of the sensor and great increase of the pass band frequency of the filter, simple in process, stable in configuration, easy to process and the like, can be widely used for detecting micro substances in the chemical and biological fields, and can also be used in a microwave communication system.
The technical scheme provided by the invention is as follows:
a weakly coupled resonator comprising:
a fixed support straight beam (2) fixed by a first fixed end (1-1) and a second fixed end (1-2); a mass adsorption block (8) adsorbed on the fixed support straight beam (2); and a fixed-support cosine curved beam (3) fixed by a third fixed end (1-3) and a fourth fixed end (1-4);
the fixed-support cosine curved beam (3) is driven by a driving voltage source (5) through a fixed electrode (4); the first fixed end (1-1) is connected with a straight beam coupling voltage source (6); the third fixed end (1-3) is connected with a cosine curved beam coupling voltage source (7);
the direct-current voltage coupling is carried out between the fixed-support straight beam (2) and the fixed-support cosine curved beam (3) through electrostatic force generated by a straight beam coupling voltage source (6) and a cosine curved beam coupling voltage source (7); and the weak coupling resonator switches the functions between the micro-mass sensor and the MEMS band-pass filter by adjusting the driving voltage and the coupling voltage.
Further, the span of the clamped cosine curved beam (3) is equal to the length of the clamped straight beam (2) and equal to the length of the fixed electrode (4).
Furthermore, the widths of the clamped cosine curved beam (3), the clamped straight beam (2) and the fixed electrode (4) are equal.
Furthermore, the distance between the fixed support straight beam (2) and the top end of the fixed support cosine curved beam (3) is smaller than the distance between the bottom end of the fixed support cosine curved beam (3) and the fixed electrode (4).
Further, the fixed electrode (4) is completely fixed, and the fixed electrode (4) is driven by both alternating current and direct current generated by the driving voltage source (5).
Further, the weak coupling resonator switches functions between the micro mass sensor and the MEMS band-pass filter by adjusting the magnitudes of the driving voltage and the coupling voltage, including:
when the driving voltage is smaller than a preset value and the coupling voltage is not equal to zero, based on a modal localization theory, the weak coupling resonator is used as a micro-mass sensor, and the mass of the mass adsorption block is detected through the amplitude ratio of the straight beam of the fixed support and the curved beam of the fixed support cosine;
and when the driving voltage is greater than a preset value and the coupling voltage is equal to zero, the weak coupling resonator is used as the MEMS band-pass filter based on the strong nonlinear characteristic of the cosine curved beam.
Compared with the prior art, the invention has the following advantages:
1. the MEMS band-pass filter has the characteristic of function switching between the micro-mass sensor and the MEMS band-pass filter, the switching mode is simple, and the switching between the functions can be realized only by adjusting the driving voltage and the coupling voltage;
2. the invention adopts a modal localization theory and senses the quality through the change of the amplitude ratio;
3. the invention fully utilizes the strong nonlinear characteristic of the cosine curved beam to generate a wider band-pass for filtering.
The invention provides a weak coupling resonator based on multifunctional purposes, which has the advantages of simple structure, easy adjustment of a driving mode, capability of carrying out random switching between a micro-mass sensor and an MEMS band-pass filter, simple switching mode, no need of any structural optimization, capability of greatly improving the sensitivity of the sensor and greatly increasing the pass-band frequency of the filter, simple process, stable configuration, easy processing and the like, and can be widely applied to various aspects.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a weakly coupled resonator according to an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating variation of characteristic values with variation of thickness of a clamped-in straight beam under a certain driving voltage according to an embodiment of the present invention;
fig. 3 is a schematic diagram of frequency response curves of the weak coupled resonator under different additional masses when the dc driving voltage is 10.27V, the ac driving voltage is 0.001V, and the coupling voltage is 2V in a balanced state according to the embodiment of the present invention;
FIG. 4 is a diagram illustrating the sensitivity variation of a weakly coupled resonator with different added masses according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a displacement-voltage curve of a cosine curved beam when an AC driving voltage is 0V and a coupling voltage is 0V for the weakly coupled resonator according to the embodiment of the present invention;
FIG. 6 is a schematic diagram of a frequency response curve of a weakly coupled resonator according to an embodiment of the present invention when an AC driving voltage is 40V, an AC driving voltage is 30V, and a coupling voltage is 0V;
in the figure: 1-1, a first fixed end, 1-2, a second fixed end, 1-3, a third fixed end, 1-4, a fourth fixed end, 2, a fixed support straight beam, 3, a fixed support cosine curved beam, 4, a fixed electrode, 5, a driving voltage source, 6, a straight beam coupling voltage source, 7, a cosine curved beam coupling voltage source, 8 and a mass adsorption block.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention fully combines the modal localization theory and the strong nonlinear characteristic of the cosine curved beam, designs a weak coupling resonator which can be used as a micro mass sensor with ultrahigh sensitivity and an MEMS band-pass filter with large bandwidth, can freely switch the functions of the resonator only by changing the driving voltage and the coupling voltage, has simple switching, and can be suitable for complex and changeable occasions needing multifunctional application.
Referring to fig. 1, there is shown a schematic diagram of a weakly coupled resonator structure, the resonator comprising: the mass adsorption device comprises a first fixed end 1-1, a second fixed end 1-2, a third fixed end 1-3, a fourth fixed end 1-4, a fixed support straight beam 2, a fixed support cosine curved beam 3, a fixed electrode 4, a driving voltage source 5, a straight beam coupling voltage source 6, a cosine curved beam coupling voltage source 7 and a mass adsorption block 8.
Wherein, the fixed support straight beam 2 is fixed between the first fixed end 1-1 and the second fixed end 1-2; the mass adsorption block 8 is adsorbed on the fixed support straight beam 2;
the fixed-support cosine curved beam 3 is fixed between the third fixed end 1-3 and the fourth fixed end 1-4;
the clamped cosine curved beam 3 is driven by a driving voltage source 5 through a fixed electrode 4; the first fixed end 1-1 is connected with a straight beam coupling voltage source 6; the third fixed end 1-3 is connected with a cosine curved beam coupling voltage source 7;
the direct current voltage coupling is carried out between the fixed support straight beam 2 and the fixed support cosine curved beam 3 through electrostatic force generated by a straight beam coupling voltage source 6 and a cosine curved beam coupling voltage source 7; and the weak coupling resonator switches the functions between the micro-mass sensor and the MEMS band-pass filter by adjusting the driving voltage and the coupling voltage.
When the driving voltage is smaller than a preset value and the coupling voltage is not equal to zero, the weak coupling resonator is used as a micro-mass sensor by utilizing a modal localization theory, and the mass of the mass adsorption block is detected through the amplitude ratio of the straight beam of the fixed support and the curved beam of the fixed support cosine; when the driving voltage is larger than the preset value and the coupling voltage is equal to zero, the weak coupling resonator is used as the MEMS band-pass filter by utilizing the strong nonlinear characteristic of the cosine curved beam. Wherein, for dynamic response (the filter is based on dynamic analysis), the DC voltage VdcWith an alternating current source VacThe sum of which reaches 70V can trigger a dynamic jump and is used to design a filter, i.e. Vdc+Vac70V, which is calculated based on multiple simulations, preferably Vdc＝40V，VacThis results in better bandwidth at 30V. Based on this, the preset value is preferably a driving voltage of 40V, an alternating voltage of 30V.
Preferably, the span of the clamped cosine curved beam 3 is equal to the length of the clamped straight beam 2 and equal to the length of the fixed electrode 4. When the weak coupling resonator is used as a micro mass sensor, only the first-order mode coupling is utilized, and the lengths are equal, so that the first-order mode can be conveniently excited. The length of the driving electrode needs to be changed only when the high-order mode is excited.
The widths of the clamped cosine curved beam 3, the clamped straight beam 2 and the fixed electrode 4 are equal.
The clamped cosine curved beam 3 and the clamped straight beam 2 interact with each other through electrostatic force generated by a straight beam coupling voltage source 6 and a cosine curved beam coupling voltage source 7.
The distance between the fixed support straight beam 2 and the top end of the fixed support cosine curved beam 3 is smaller than the distance between the bottom end of the fixed support cosine curved beam 3 and the fixed electrode 4.
The fixed electrode 4 is completely fixed, and the fixed electrode 4 is driven by both alternating current and direct current generated by the driving voltage source 5.
The invention provides a multifunctional-purpose-based weak coupling resonator, which is simple in structure, easy to adjust in driving mode, capable of switching between a micro mass sensor and an MEMS (micro-electromechanical system) band-pass filter at will, simple in switching mode, free of any structural optimization, capable of greatly improving the sensitivity of the sensor and greatly increasing the pass-band frequency of the filter, simple in process, stable in configuration, easy to process and the like, and therefore, the multifunctional-purpose-based weak coupling resonator can be widely applied to various aspects.
The weakly coupled resonator provided by the present invention is described below as a specific example.
As shown in fig. 2, it shows the variation of the characteristic value with the thickness of the clamped straight beam only under the action of the dc driving voltage and the coupling voltage when implemented according to the structural parameter dimensions shown in table 1, where the abscissa is the thickness (m) of the clamped straight beam and the ordinate is the frequency (KHz). Wherein, ω isi,jThe natural frequency is shown, i represents the ith clamped beam, and j represents the jth order natural frequency. The first-order mode vibration-based micro-mass sensor structure of the present invention is a symmetric structure, and therefore, the anti-symmetric mode (e.g., second-order mode) cannot be excited,while the proposed structure is capable of exciting its vibrations in the vicinity of the first and third order modes, in this embodiment only the vibrations in the vicinity of the first order mode are used, i.e. the mode transition point 1 is chosen for the parameter configuration. By applying V between a straight beam coupled voltage source 6 and a cosine curved beam coupled voltage source 7cWhen there is no mass disturbance, the ac voltage of the driving voltage source 5 is first selected to be Vac0.001V, bias voltage Vdc10.27V. After the above parameter configuration, the system can reach an equilibrium state. Fig. 3 is a series of frequency response curves for different disturbance masses added to the mass adsorption mass 8 in the embodiment of the present invention. Fig. 4 shows relative changes of frequency and amplitude ratio at different natural frequencies under different disturbance qualities, and compared with the conventional method in which relative changes of frequency are used as sensitivity outputs, the sensitivity of the mass sensor can be greatly improved by using the amplitude ratio as a sensitivity output mode, and the sensitivity can be improved by more than 2 orders of magnitude under the same quality disturbance.
No coupling voltage, i.e. V, is applied between the straight beam coupled voltage source 6 and the cosine curved beam coupled voltage source 7c0V. With simultaneous cancellation of the AC voltage in the drive voltage source, i.e. Vac0V. Fig. 5 shows the variation of the displacement of the midpoint of the cosine curved beam with the magnitude of the dc driving voltage, and when the voltage reaches 74.45V, the cosine curved beam jumps and rapidly changes from one stable state to another stable state. Research shows that for dynamic excitation, namely alternating current voltage is not equal to zero, the cosine curved beam jumps when the driving voltage is less than 74.45V. FIG. 6 shows the DC driving voltage Vdc40V, AC drive voltage VacThe frequency response curve obtained at 30V has a large vibration amplitude due to the jump of the cosine curved beam in the middle frequency band, and the vibration amplitude outside the middle frequency band is small, so that the middle frequency band can be set as a band pass and used as a MEMS band pass filter.
TABLE 1
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the absence of any contrary indication, these directional terms are not intended to indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (6)
1. A weakly coupled resonator, comprising:
a fixed support straight beam (2) fixed by a first fixed end (1-1) and a second fixed end (1-2); a mass adsorption block (8) adsorbed on the fixed support straight beam (2); and a fixed-support cosine curved beam (3) fixed by a third fixed end (1-3) and a fourth fixed end (1-4);
the fixed-support cosine curved beam (3) is driven by a driving voltage source (5) through a fixed electrode (4); the first fixed end (1-1) is connected with a straight beam coupling voltage source (6); the third fixed end (1-3) is connected with a cosine curved beam coupling voltage source (7);
the direct-current voltage coupling is carried out between the fixed-support straight beam (2) and the fixed-support cosine curved beam (3) through electrostatic force generated by a straight beam coupling voltage source (6) and a cosine curved beam coupling voltage source (7); and the weak coupling resonator switches the functions between the micro-mass sensor and the MEMS band-pass filter by adjusting the driving voltage and the coupling voltage.
2. The weakly coupled resonator according to claim 1, characterized in that the span of the clamped cosine curved beam (3) is equal to the length of the clamped straight beam (2) and equal to the length of the fixed electrode (4).
3. The weakly coupled resonator according to claim 1, characterized in that the widths of the clamped cosine curved beam (3) and the clamped straight beam (2) and the fixed electrode (4) are equal.
4. The weakly coupled resonator according to claim 1, characterized in that the distance between the straight beam (2) and the top end of the curved beam (3) is smaller than the distance between the bottom end of the curved beam (3) and the fixed electrode (4).
5. The weakly coupled resonator according to claim 1, characterized in that the fixed electrode (4) is completely fixed, the fixed electrode (4) being driven jointly by an alternating current and a direct current generated by the driving voltage source (5).
6. The weakly coupled resonator of claim 1, wherein the weakly coupled resonator is functionally switched between the micro-mass sensor and the MEMS band-pass filter by adjusting magnitudes of the driving voltage and the coupling voltage, and comprises:
when the driving voltage is smaller than a preset value and the coupling voltage is not equal to zero, based on a modal localization theory, the weak coupling resonator is used as a micro-mass sensor, and the mass of the mass adsorption block is detected through the amplitude ratio of the straight beam of the fixed support and the curved beam of the fixed support cosine;
and when the driving voltage is greater than a preset value and the coupling voltage is equal to zero, the weak coupling resonator is used as the MEMS band-pass filter based on the strong nonlinear characteristic of the cosine curved beam.
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| US20200412325A1 (en) * | 2019-06-27 | 2020-12-31 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | Differential resonator and mems sensor |
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