CN112582553A - Advanced special equipment for large-area preparation of perovskite solar cell - Google Patents
Advanced special equipment for large-area preparation of perovskite solar cell Download PDFInfo
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- CN112582553A CN112582553A CN202011280769.5A CN202011280769A CN112582553A CN 112582553 A CN112582553 A CN 112582553A CN 202011280769 A CN202011280769 A CN 202011280769A CN 112582553 A CN112582553 A CN 112582553A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 85
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 73
- 238000010438 heat treatment Methods 0.000 claims abstract description 71
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 35
- 239000011521 glass Substances 0.000 claims abstract description 22
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000001301 oxygen Substances 0.000 claims abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 230000009977 dual effect Effects 0.000 claims description 3
- 230000005622 photoelectricity Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 239000002346 layers by function Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses advanced special equipment for preparing a perovskite solar cell in a large area, and belongs to the technical field of photoelectricity. It consists of a preparation chamber, a sample preparation chamber, a heating chamber, a glass cavity, a heating plate and a panel control module. The preparation chamber includes a sample transporter and an air inlet. The sample preparation chamber comprises a scraper, a nitrogen air knife, a solution funnel, a sample transmitter and a heating plate. The solution funnel has double functions of storing and heating the solution, and the temperature is controllable from room temperature to 80 ℃. The heating plate of the sample preparation chamber has the double functions of heating and fixing a sample and consists of a resistance wire, an air hole and an air pump. The panel control module consists of modules for temperature control, sample transmission, scraper control, nitrogen cutter control, solution control and the like. The invention overcomes the property that perovskite is afraid of water and oxygen and is difficult to prepare, and provides good equipment for industrial development.
Description
Technical Field
The invention relates to solar cell preparation equipment, in particular to novel perovskite solar cell technology and equipment manufacturing, and belongs to the technical field of photoelectricity.
Background
The solar cell has the advantages of inexhaustibility and inexhaustibility, and thus is a research hotspot in the field of new energy. The solar cell which is most popular in the industry at present still belongs to a silicon-based solar cell, and occupies most of the photovoltaic market. Then, despite technical research for decades, silicon-based solar cells still cannot be compared with traditional hydroelectric power generation cost, wherein the main reason is that silicon-based refining cost is high, and based on the situation, the scientific community continuously searches for new consensus of scientists of photovoltaic material cost.
2009 Japanese scientist Miyasaka et al utilized organic-inorganic hybrid CH3NH3PbI3And CH3NH3PbBr3The perovskite solar cell with the photoelectric conversion efficiency of about 4% is prepared as a dye agent. After strategies such as material improvement, preparation method improvement, interface regulation and other technical optimization, the perovskite solar cell has a recent photoelectric conversion efficiency reaching a level of 25.6%. The preparation method for preparing the perovskite solar cell comprises a plurality of methods such as a one-step method, a two-step continuous deposition method, a vacuum evaporation method and the like, the methods still stay in the preparation of small areas in a laboratory at present, the common equipment is a spin coater, and the small-area preparation is carried out by a rotary coating method. In addition, the preparation of the perovskite solar cell material has severe environmental requirements, and the perovskite solar cell material can generate chemical reaction when meeting water, oxygen and the like to generateThe resulting perovskite raw material is decomposed. The manufacturing environment for such cells is typically conducted in a glove box filled with nitrogen. In order to prepare a large-area perovskite solar cell, development of a novel special device with a small cavity has very important scientific and industrial significance.
Disclosure of Invention
The invention aims to solve the technical problem of inventing advanced equipment for preparing a perovskite solar cell on a large surface and solving the problem of preparing a small-area perovskite thin film in a glove box by spin coating by using a spin coater in a laboratory.
The technical scheme adopted by the invention is advanced equipment for preparing the perovskite solar cell on a large surface, and the equipment comprises a preparation chamber, a sample preparation chamber, a heating chamber, a glass cavity, a heating plate, a panel control module and the like.
The preparation chamber mainly comprises a preparation chamber sample transmitter, an air inlet of protective gas such as nitrogen or argon and the like.
The sample preparation chamber mainly comprises a sample preparation chamber heating plate, a scraper, a nitrogen air knife, a solution funnel, a sample preparation chamber sample transmitter and the like.
The heating chamber mainly comprises a heating chamber sample transmitter, a heating chamber heating plate and the like.
The heating plate comprises a preparation chamber heating plate, a sample preparation chamber heating plate, a heating chamber heating plate and the like, the temperatures of the three chambers are mutually independent and do not interfere with each other, and the temperatures of the three chambers can be adjusted and controlled from room temperature to 200 ℃.
The glass cavity is mainly used for controlling gas in the cavity, so that the gas is nitrogen or inert gas and is prevented from being communicated with the atmosphere.
Further, the scraper controls the height of the edge and the glass substrate through a scraper lifter so that the scraper can move upwards and downwards.
Furthermore, the nitrogen knife controls the speed of the nitrogen inlet flow and the nitrogen outlet flow through a gas control device.
Furthermore, the heating plate of the sample preparation chamber has the double functions of heating and fixing a sample and comprises a resistance wire, an air hole, an air pump and the like.
Further, the solution funnel has two functions, one function is to provide the existence of the solution and to drip and sprinkle on the glass substrate of the solar cell according to the requirement, and the other function is to heat the stored solution, and the heating temperature can be adjusted from room temperature to 100 ℃.
The panel control module comprises a temperature control module, a sample transmission module, a scraper control module, a nitrogen air knife control module, a solution control module and the like.
Furthermore, the temperature control module is composed of a preparation chamber temperature, a sample preparation chamber temperature, a heating chamber temperature and the like.
Furthermore, the sample transmission module comprises a preparation chamber sample transmission module, a sample preparation chamber sample transmission module, a heating chamber sample transmission module and the like.
Further, the scraper control module is composed of speed control, position control and the like.
Furthermore, the nitrogen cutter module is composed of speed control, air volume control and the like.
Principles and advantages
The principle of the invention is as follows: the invention uses the door-opening button in the panel control module, after the door is opened, the glass substrate to be prepared is placed in the preparation chamber, the air inlet switch of the preparation chamber is opened, nitrogen or inert gas is flowed into the preparation chamber, the sample preparation chamber and the heating chamber (three chambers are communicated, the door is not arranged in the middle), after the box body is fully filled with protective gas, the glass substrate is transmitted to the sample preparation chamber by the sample transmitter of the preparation chamber, after the substrate reaches the sample preparation chamber, the heating switch of the sample preparation chamber in the panel control module is opened, the temperature of the heating switch is controlled at the preset temperature, the temperature switch in the solution funnel is opened, the temperature is controlled between 40 ℃ and 70 ℃, after the temperature reaches the set temperature, the solution is automatically dropped onto the glass substrate by the solution automatic opening switch, the scraper, the nitrogen and other switches are opened, when the scraper speed and the nitrogen air volume are moderate, and (3) carrying out scraper coating at a set speed to finish the preparation of the film, after the film is formed, transferring the glass substrate to a heating chamber through a sample actuator, controlling the temperature and time of the heating chamber to be the set annealing temperature and time of the film, and after the film is formed, transferring the film to a preparation chamber through the sample actuator of the heating chamber to prepare a functional layer below the perovskite film. And circulating in this way to finish the preparation of each functional layer of the perovskite solar cell.
The invention has the beneficial effects that: the area of the perovskite solar cell prepared by the special equipment is far larger than that of the perovskite solar cell prepared by the spin coater, and the area of the solar cell prepared by the spin coater is usually 0.1cm2The area of the solar cell prepared by the invention is from 0.1cm2To 243cm2Is adjustable. Meanwhile, the glass cavity used by the invention is far smaller than that of the glove box, so that a large amount of nitrogen is saved. Compared with a non-perovskite solar cell blade coater, the special equipment invents the nitrogen protection device, the nitrogen knife device, the sample preparation chamber, the heating chamber, the sample automatic driver and the sample fixer, can continuously realize the preparation of each functional layer of the perovskite solar cell, does not need a high-power dehumidification system, saves energy cost, improves quality and provides good special equipment for the industrial development of the perovskite solar cell.
Detailed description and examples
An embodiment of the present invention will be described in detail below with reference to fig. 1-4, but the scope of the invention is not limited thereto.
Drawings
FIG. 1: structural schematic diagram of special equipment for perovskite solar cell
FIG. 2: schematic view of heating plate structure of sample preparation chamber
FIG. 3: schematic view of scraper structure
FIG. 4: schematic structure of panel control module
1-preparation chamber, 2-sample preparation chamber, 3-heating chamber, 4-preparation chamber heating plate, 5-glass cavity, 6-control panel module, 7-air inlet, 8-preparation chamber sample transmitter, 9-scraper, 10-nitrogen air knife, 11-solution funnel, 12-door, 13-water oxygen meter, 14-sample preparation chamber heating plate, 15-heating chamber sample transmitter, 16-heating chamber heating plate, 17-sample preparation chamber sample transmitter, 18-air pump, 19-heating wire, 20-air hole, 21-knife edge, 22-scraper lifting controller, 23-support frame
Example 1
The invention relates to advanced special equipment for preparing a perovskite solar cell on a large surface, which comprises a preparation chamber 1, a sample preparation chamber 2, a heating chamber 3, a glass cavity 15, a control panel module 6 and the like, as shown in figure 1.
The preparation chamber 1 mainly comprises a preparation chamber sample transmitter 8, an air inlet 7 of protective gas such as nitrogen or argon and the like. The device is mainly used for storing various solutions, glass substrates and other necessary articles before experimental preparation.
Preferably, the pre-chamber sample transfer 8 is used primarily to transfer glass substrates between the preparation chamber 2 and the pre-chamber 1.
Preferably, the air inlet 7 is communicated with external nitrogen or inert gas, and the nitrogen or inert gas is mainly used for protecting functional layers of the perovskite solar cell from being oxidized or corroded and deteriorated by air during preparation. When the concentration of the nitrogen gas charged reaches the standard of the water oxygen meter 13, the preparation is considered to be completed.
The sample preparation chamber 2 mainly comprises a sample preparation chamber heating plate 14, a scraper 9, a nitrogen knife 10, a solution funnel 11, a sample preparation chamber sample transmission device 17 and the like.
Further, as shown in FIG. 2, the heating plate 14 of the sample preparation chamber has dual functions of heating and sample fixing. It is composed of an air pump 18, a resistance wire 19 and an air hole 20. After the sample is placed on the heating plate 14 of the sample chamber, the air pump 18 is started to suck the sample glass substrate, so as to prevent the glass substrate from moving due to liquid viscous force in the scraping process of the scraper, and further prevent the quality of the deposited film from being influenced.
Further, as shown in fig. 3, the doctor blade 9 is composed of a blade 21, a blade lift controller 22, and a holder 23. The height of the blade 21 and the glass substrate is adjusted by a blade elevation controller 22. The blade 21 determines the thickness of the film to be coated, together with the height of the glass, the concentration of the solution, the speed of the doctor blade, and the like.
Further, the nitrogen knife 10 controls the speed of the nitrogen inlet flow and the nitrogen outlet flow through a gas control device. The nitrogen air knife 10 of the invention is designed to accelerate the drying of wet perovskite thin films by nitrogen gas, thereby obtaining high quality perovskite thin films. Other functional layers of the perovskite solar cell optionally turn on the nitrogen gas knife 10.
Further, the solution hopper 10 has a dual function of heating the coated precursor solution and storing the solution. The perovskite precursor solution is generally heated to 50-80 ℃, and the precursor solution of other functional layers of the perovskite solar cell is determined according to specific conditions.
The heating chamber 3 mainly comprises a heating chamber sample transmitter 15, a heating chamber heating plate 16 and the like.
Further, the heating chamber heating plate 16 mainly functions to perform a heating annealing process on the film just coated in the sample preparation chamber. The heating temperature can be adjusted from room temperature to 200 ℃.
The heating temperatures of the preparation chamber heating plate 4, the sample preparation chamber heating plate 14 and the heating chamber heating plate 16 are independently controlled, the mutual influence is avoided, and the temperature is controllable from room temperature to 200 ℃.
The glass cavity 5 is made of toughened glass, and aims to ensure that the gas in the three chambers is nitrogen or inert gas so as to ensure that the perovskite film and other functional layer films are not damaged by humidity, oxygen and the like in the air. The three chambers are not provided with doors and are communicated with each other. A door 12 is opened in the preparation chamber 2 in order to facilitate the preparation of the various tasks for preparing the film.
Referring to fig. 4, the panel control module 6 is composed of a temperature control module, a sample transmission module, a scraper control module, a nitrogen knife control module, a solution control module, and the like.
Further, the temperature control module is composed of a preparation chamber temperature, a sample preparation chamber temperature, a heating chamber temperature and the like.
Furthermore, the sample transmission module comprises a preparation chamber sample transmission, a sample preparation chamber sample transmission, a hot chamber transmission and the like.
Further, the scraper control module is composed of speed control, position control and the like.
Furthermore, the nitrogen knife control module is composed of speed control, air volume control and the like.
Further, the solution control module is composed of capacity control, temperature control and the like.
The above disclosure is only for the specific embodiments of the present invention, but the embodiments of the present invention are not limited thereto, and any local variation of those skilled in the art should fall within the protection scope of the present invention.
Claims (6)
1. The invention discloses advanced special equipment for preparing a perovskite solar cell in a large area, which is characterized by providing advanced preparation equipment aiming at the extreme severe requirements of the perovskite solar cell on environments such as water, oxygen and the like. The equipment comprises a preparation chamber, a sample preparation chamber, a heating plate, a glass cavity, a panel control module and the like.
2. The preparation chamber of claim 1, further comprising a sample transfer unit in the preparation chamber and a gas inlet for a protective gas such as nitrogen or argon.
3. The sample preparation chamber of claim 1, which consists essentially of a doctor blade, a nitrogen air knife, a solution funnel, a sample preparation chamber sample transport, a sample preparation chamber heating plate, and the like. The doctor blade is controlled by a doctor blade elevation control so that it can move up and down. The nitrogen air knife controls the speed of the nitrogen gas inlet flow and outlet flow through a gas control device. The solution funnel has the dual functions of storing and heating the solution, and the temperature is controllable from room temperature to 80 ℃. The heating plate of the sample preparation chamber has the double functions of heating and fixing a sample and consists of an air pump, a resistance wire, an air hole and the like.
4. The heating plate of claim 1 is composed of a preparation chamber heating plate, a sample preparation chamber heating plate, a heating chamber heating plate and the like, the temperatures of the three chambers are independently operated, and the temperatures can be adjusted and controlled.
5. The glass chamber according to claim 1, wherein the gas inside the chamber is controlled to be nitrogen or inert gas to prevent the atmosphere from being exposed. The preparation chamber, the heating chamber and the sample preparation chamber in the glass cavity are not provided with doors, and can be interconnected.
6. The panel control module of claim 1, which is composed of a temperature control module, a sample transmission module, a scraper control module, a nitrogen knife control module, a solution control module, etc. The temperature control module is composed of a preparation chamber temperature, a sample preparation chamber temperature, a heating chamber temperature and the like. The sample transmission module is composed of a preparation chamber sample transmission module, a sample preparation chamber sample transmission module, a heating chamber sample transmission module and the like. The scraper control module is composed of speed control, position control and the like. The nitrogen cutter control module is composed of speed control, air volume control and the like. The solution control module is composed of capacity control, temperature control and the like.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011280769.5A CN112582553A (en) | 2020-11-16 | 2020-11-16 | Advanced special equipment for large-area preparation of perovskite solar cell |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011280769.5A CN112582553A (en) | 2020-11-16 | 2020-11-16 | Advanced special equipment for large-area preparation of perovskite solar cell |
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| CN112582553A true CN112582553A (en) | 2021-03-30 |
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| CN202011280769.5A Pending CN112582553A (en) | 2020-11-16 | 2020-11-16 | Advanced special equipment for large-area preparation of perovskite solar cell |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115867100A (en) * | 2023-03-03 | 2023-03-28 | 昆山晟成光电科技有限公司 | Perovskite film production line annealing crystallization equipment and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6338872B1 (en) * | 1995-08-28 | 2002-01-15 | Canon Kabushiki Kaisha | Film forming method |
| CN101958371A (en) * | 2010-10-13 | 2011-01-26 | 中国科学院深圳先进技术研究院 | Device for manufacturing copper indium gallium selenium (CIGS) thin-film solar cells |
| JP2011204972A (en) * | 2010-03-26 | 2011-10-13 | Mitsubishi Materials Corp | Method of manufacturing solar cell |
| US20120045533A1 (en) * | 2010-05-10 | 2012-02-23 | Ivano Gregoratto | Thin film buffer layer solution deposition assembly |
| US20120064660A1 (en) * | 2010-09-13 | 2012-03-15 | Cheol Hoon Yang | Apparatus and Method for Manufacturing of Thin Film Type Solar Cell |
| CN202516740U (en) * | 2012-01-16 | 2012-11-07 | 南京航空航天大学 | Successive ionic layer adsorption and reaction (SILAR) film preparation integrated instrument |
| CN108258129A (en) * | 2018-01-30 | 2018-07-06 | 常州大学 | Perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof |
| CN110571337A (en) * | 2019-08-05 | 2019-12-13 | 北京大学深圳研究生院 | Method for preparing perovskite thin film in air based on pre-nucleation control method and application |
-
2020
- 2020-11-16 CN CN202011280769.5A patent/CN112582553A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6338872B1 (en) * | 1995-08-28 | 2002-01-15 | Canon Kabushiki Kaisha | Film forming method |
| JP2011204972A (en) * | 2010-03-26 | 2011-10-13 | Mitsubishi Materials Corp | Method of manufacturing solar cell |
| US20120045533A1 (en) * | 2010-05-10 | 2012-02-23 | Ivano Gregoratto | Thin film buffer layer solution deposition assembly |
| US20120064660A1 (en) * | 2010-09-13 | 2012-03-15 | Cheol Hoon Yang | Apparatus and Method for Manufacturing of Thin Film Type Solar Cell |
| CN101958371A (en) * | 2010-10-13 | 2011-01-26 | 中国科学院深圳先进技术研究院 | Device for manufacturing copper indium gallium selenium (CIGS) thin-film solar cells |
| CN202516740U (en) * | 2012-01-16 | 2012-11-07 | 南京航空航天大学 | Successive ionic layer adsorption and reaction (SILAR) film preparation integrated instrument |
| CN108258129A (en) * | 2018-01-30 | 2018-07-06 | 常州大学 | Perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof |
| CN110571337A (en) * | 2019-08-05 | 2019-12-13 | 北京大学深圳研究生院 | Method for preparing perovskite thin film in air based on pre-nucleation control method and application |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115867100A (en) * | 2023-03-03 | 2023-03-28 | 昆山晟成光电科技有限公司 | Perovskite film production line annealing crystallization equipment and method |
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Application publication date: 20210330 |