CN108258129A - Perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof - Google Patents
Perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof Download PDFInfo
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- CN108258129A CN108258129A CN201810086953.2A CN201810086953A CN108258129A CN 108258129 A CN108258129 A CN 108258129A CN 201810086953 A CN201810086953 A CN 201810086953A CN 108258129 A CN108258129 A CN 108258129A
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- nozzle
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
- B05B13/0228—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the movement of the objects being rotative
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
- B05B16/20—Arrangements for spraying in combination with other operations, e.g. drying; Arrangements enabling a combination of spraying operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
- B05B16/90—Spray booths comprising conveying means for moving objects or other work to be sprayed in and out of the booth, e.g. through the booth
- B05B16/95—Spray booths comprising conveying means for moving objects or other work to be sprayed in and out of the booth, e.g. through the booth the objects or other work to be sprayed lying on, or being held above the conveying means, i.e. not hanging from the conveying means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/10—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
- H10K30/15—Sensitised wide-bandgap semiconductor devices, e.g. dye-sensitised TiO2
- H10K30/151—Sensitised wide-bandgap semiconductor devices, e.g. dye-sensitised TiO2 the wide bandgap semiconductor comprising titanium oxide, e.g. TiO2
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/50—Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention relates to technical field of solar batteries, especially a kind of perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof and goes out specimen chamber at the Sample Room arranged including transmission mechanism and successively, sample preparation chamber；There is nozzle component and pallet component in sample preparation chamber, nozzle component includes nozzle and the elevating mechanism for nozzle to be driven to rise or fall, pallet component includes the pallet for placing substrate and the actuating unit for pallet to be driven to rotate, and nozzle is located at the surface of pallet；The lower section of nozzle has to spray the first spray orifice of perovskite precursor liquid, the third spray orifice for the second spray orifice for spraying crystallization promoter and for spraying hole transmission layer precursor liquid, the present invention's is integrated in by using by the first spray orifice, the second spray orifice and third spray orifice on same nozzle, the disposable deposition from perovskite thin film to hole transmission layer is realized with reference to rotatable temperature control substrate, and then realizes chain type production.
Description
Technical field
The present invention relates to technical field of solar batteries, especially a kind of perovskite solar cell system based on the nozzle that is nested
Standby equipment and preparation method thereof.
Background technology
The development of perovskite thin film solar cell is very fast, cheap, can be processed efficiently and by solwution method.It is making
Using crystallization promoter in standby perovskite cell process, quality of forming film can be effectively improved, improves perovskite solar cell
Efficiency has had some as sprayed at present, and the methods such as blade coating are for industrialized production, but these methods can not all use crystallization
Accelerating agent will such as need preparation high quality perovskite thin film solar cell to need to spray perovskite precursor liquid successively on substrate
Body, crystallization promote liquid and hole transmission layer precursor liquid, due to that cannot use same nozzle, and each nozzle between different liquid
When being sprayed on substrate, positive substrate is required to, therefore, current perovskite thin film solar cell Preparation equipment is using more
A independent nozzle sprays substrate, often sprays a kind of medicament and is required to the nozzle corresponding to the medicament passing through complexity
Mobile mechanism be moved to substrate face, cause whole equipment structure and control system complicated, it is of high cost.
Invention content
The technical problem to be solved by the present invention is to：It is set to solve perovskite thin film solar cell preparation in the prior art
It is standby that substrate is sprayed using multiple independent nozzles, it often sprays a kind of medicament and is required to the nozzle corresponding to the medicament
By complicated mobile mechanism be moved to substrate face, lead to that whole equipment structure and control system are complicated, and of high cost asks
Topic, now provides a kind of perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof.
The technical solution adopted by the present invention to solve the technical problems is：A kind of perovskite sun electricity based on the nozzle that is nested
Pond Preparation equipment, the Sample Room arranged including transmission mechanism and successively, sample preparation chamber and goes out specimen chamber；
There is nozzle component and pallet component, the nozzle component includes nozzle and for driving nozzle in the sample preparation chamber
The elevating mechanism risen or fallen, the pallet component are dynamic including the pallet for placing substrate and for pallet to be driven to rotate
Force mechanisms, the nozzle are located at the surface of pallet；
The transmission mechanism is used to the indoor substrate of sample introduction being delivered on the pallet of sample preparation chamber and by sample preparation chamber inner pallet
On substrate be delivered to out specimen chamber；
The lower section of the nozzle has for spraying the first spray orifice of perovskite precursor liquid, for spraying crystallization promoter
Second spray orifice and the third spray orifice for spraying hole transmission layer precursor liquid, first spray orifice, the second spray orifice and third spray orifice
It is respectively provided with several.
Preferably, first spray orifice, the second spray orifice and third spray orifice are uniformly distributed along the circumferencial direction of nozzle.
Specifically, it is provided with halogen lamp for heating in the sample preparation chamber.
Further, the second spray spray orifice is atomization spray orifice.
Further, there is the nitrogen inlet for controlling pressure on the sample preparation chamber.
Also a kind of preparation method using the above-mentioned perovskite solar cell Preparation equipment based on the nozzle that is nested of the invention,
The preparation method includes the following steps：
A, substrate is formed in FTO deposition on glass titanium oxide layer；
B, it places the substrate on the transmission mechanism of Sample Room, then vacuumizes Sample Room simultaneously with sample preparation chamber, Ran Houli
It will be in substrate transport to the indoor pallet of sample introduction with transmission mechanism；
C, nitrogen is passed through into sample preparation chamber, restores the indoor pressure of sample preparation, then elevating mechanism drives nozzle to move down, and realizes
Nozzle is drawn close to substrate, and pallet rotation is driven, while the first spray orifice on nozzle starts to spray to substrate followed by actuating unit
Go out perovskite precursor liquid；
D, pallet is kept to rotate, the second spray orifice on nozzle starts to spray crystallization promoter to substrate, when the second spray orifice knot
When beam sprays, pallet is stopped operating；
E, nozzle is driven to rise using elevating mechanism, then indoor substrate heats to sample preparation, while by sample preparation chamber
It vacuumizes, so as to form perovskite thin film on substrate；
F, nitrogen is passed through into sample preparation chamber, restores the indoor pressure of sample preparation, treats that substrate cooling rear lifting mechanism drives nozzle
It moves down, realizes that nozzle is drawn close to substrate, pallet is driven to rotate, while the third spray orifice on nozzle starts to lining using actuating unit
Bottom sprays hole transmission layer precursor liquid, forms sample；
G, specimen chamber will be gone out to vacuumize simultaneously with sample preparation chamber, the sample on pallet is then sent into out sample using transmission mechanism
Room then to going out to be passed through nitrogen in specimen chamber, recovers the indoor pressure of sample, and take out sample；
H, the sample evaporation electrode prepared, is packaged later, so as to prepare perovskite solar cell.
Specifically, each first spray orifice sprays the perovskite precursor liquid of 25 ± 5 μ L in step c, and pallet is every with 1000 turns
After the speed of second rotates 10-15 seconds, 4000 revolution per seconds are accelerated to, and maintain 15-20 seconds with the speed of 4000 revolution per seconds.
Specifically, pallet continues to maintain 5-10 seconds with the speed of 4000 revolution per seconds in step d, and each second spray orifice sprays
The crystallization promoter of 5-10 μ L.
Specifically, step prevents that middle pallet is maintained 20-30 seconds with the speed of 4000 revolution per seconds, and each third spray orifice sprays
The hole transmission layer precursor liquid of 30-50 μ L.
The beneficial effects of the invention are as follows：Preparation equipment of titanium ore thin-film solar cells of the present invention and preparation method thereof is logical
It crosses using the first spray orifice, the second spray orifice and third spray orifice are integrated on same nozzle, is realized with reference to rotatable temperature control substrate
Disposable deposition from perovskite thin film to hole transmission layer, and then realize chain type production, and entirely simplify equipment, lower
Production cost.
Description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the schematic diagram of the perovskite solar cell Preparation equipment the present invention is based on the nozzle that is nested；
Fig. 2 is the schematic diagram of nozzle in the perovskite solar cell Preparation equipment the present invention is based on the nozzle that is nested.
In figure：1st, Sample Room, 2, sample preparation chamber, 3, go out specimen chamber, 4, transmission mechanism, 5, nozzle, 5-1, the first spray orifice, 5-2,
Two spray orifices, 5-3, third spray orifice, 6, elevating mechanism, 7, pallet, 8, actuating unit, 9, halogen lamp, 10, feed gate, 11, discharging
Gate, 12, nitrogen inlet, 13, substrate.
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates the basic structure of the present invention, therefore it only shows composition related to the present invention, direction and with reference to (for example,
Upper and lower, left and right, etc.) can be only used for helping the description to the feature in attached drawing.Therefore, it is not adopted in restrictive, sense
With detailed description below, and claimed theme is only limited by appended claims and its equivalent form
Range.
Embodiment 1
As shown in Figs. 1-2, a kind of perovskite solar cell Preparation equipment based on the nozzle that is nested, including transmission mechanism 4 and
The Sample Room 1 arranged successively, sample preparation chamber 2 and go out specimen chamber 3；
There is nozzle component and pallet component, the nozzle component includes nozzle 5 and sprayed for driving in the sample preparation chamber 2
First 5 elevating mechanisms 6 risen or fallen, the pallet component are included for placing the pallet 7 of substrate 13 and for driving pallet 7
The actuating unit 8 of rotation, the nozzle 5 are located at the surface of pallet 7；
The transmission mechanism 4 is used to the substrate 13 in Sample Room 1 being delivered on the pallet 7 of sample preparation chamber 2 and by sample preparation chamber 2
Substrate 13 on inner pallet 7 is delivered to out specimen chamber 3；
The lower section of the nozzle 5 has to spray the first spray orifice 5-1 of perovskite precursor liquid, for spraying crystallization promote
Second spray orifice 5-2 of agent and for spray third the spray orifice 5-3, the first spray orifice 5-1 of hole transmission layer precursor liquid, second spray
Hole 5-2 and third spray orifice 5-3 are respectively provided with several, concretely the first spray orifice 5-1 all with equipped with perovskite precursor liquid tank
Body connects, and the second spray orifice 5-2 is all connected with the tank body equipped with crystallization promoter, and third spray orifice 5-3 equipped with hole all with passing
The tank body connection of defeated layer precursor liquid, Sample Room 1, sample preparation chamber 2 and is gone out specimen chamber 3 and is vacuumized using vacuum pump.
The first spray orifice 5-1, the second spray orifice 5-2 and third spray orifice 5-3 are uniformly distributed along the circumferencial direction of nozzle 5.
Halogen lamp 9 for heating is provided in the sample preparation chamber 2.
The second spray spray orifice 5-2 is atomization spray orifice.
Specifically, feed gate 10 between Sample Room 1 and sample preparation chamber 2 is set, sample preparation chamber 2 and goes out between specimen chamber 3 to be provided with
Discharge gate 11 is fixed with the vacuum suction component for vacuum suction substrate 13 on pallet 7.
There is the nitrogen inlet 12 for controlling pressure on the sample preparation chamber 2.
The present invention also provides a kind of preparations using the above-mentioned perovskite solar cell Preparation equipment based on the nozzle that is nested
Method, the preparation method include the following steps：
A, using solwution method or sputtering method in the titanium oxide layer that FTO deposition on glass thickness is 50nm, formation substrate 13；
B, substrate 13 is put on the transmission mechanism 4 of Sample Room 1, then vacuumizes Sample Room 1 and sample preparation chamber 2 simultaneously,
Sample Room 1 and the pressure in sample preparation chamber 2 to≤0.1torr are maintained, opens feed gate 10, it then will using transmission mechanism 4
Substrate 13 is transferred on the pallet 7 in Sample Room 1, and substrate 13 is sucked using the vacuum suction component on pallet 7；
C, nitrogen is then passed through into sample preparation chamber 2 from the nitrogen inlet 12 of sample preparation chamber 2, restores the pressure in sample preparation chamber 2, so
Rear lifting mechanism 6 drives nozzle 5 to be displaced downwardly to and is drawn close with 13 1 ± 0.5cm of distance of substrate, realization nozzle 5 to substrate 13, followed by
Actuating unit 8 drives pallet 7 to rotate, while the first spray orifice 5-1 on nozzle 5 starts to spray perovskite precursor liquid to substrate 13,
Wherein, each first spray orifice 5-1 sprays the perovskite precursor liquid of 25 ± 5 μ L, and pallet 7 is rotated with the speed of 1000 revolution per seconds
After 10-15 seconds, 4000 revolution per seconds are accelerated to, and maintain 15-20 seconds with the speed of 4000 revolution per seconds；
D, pallet 7 is kept to rotate, the second spray orifice 5-2 on nozzle 5 starts to spray the crystallization promoter of atomization to substrate 13,
When the second spray orifice 5-2 terminates to spray, pallet 7 is stopped operating, wherein, pallet 7 continues the speed maintenance with 4000 revolution per seconds
5-10 seconds, each second spray orifice 5-2 sprayed the crystallization promoter of 5-10 μ L；
E, nozzle 5 is driven to rise using elevating mechanism 6, is then turned on halogen lamp 9 and the substrate 13 in sample preparation chamber 2 is added
Heat continues 5-10min, while sample preparation chamber 2 is vacuumized, so as to form perovskite thin film on substrate 13；
F, nitrogen is passed through into sample preparation chamber 2 from the nitrogen inlet 12 of sample preparation chamber 2, restores the pressure in sample preparation chamber 2, substrate 13
Temperature is reduced to 20 ± 5 DEG C by way of semiconductor refrigerating or water cooling, treats that the cooling rear lifting mechanism 6 of substrate 13 drives spray
First 5 be displaced downwardly to 13 1 ± 0.5cm of distance of substrate, realize nozzle 5 drawn close to substrate 13, using actuating unit 8 drive pallet 7 revolve
Turn, while the third spray orifice 5-3 on nozzle 5 starts to spray hole transmission layer precursor liquid to substrate 13, forms sample, wherein, support
Disk 7 is maintained 20-30 seconds with the speed of 4000 revolution per seconds, and each third spray orifice 5-3 sprays the hole transmission layer forerunner of 30-50 μ L
Liquid；
G, specimen chamber 3 will be gone out to vacuumize simultaneously with sample preparation chamber 2, maintain pressure in Sample Room 1 and sample preparation chamber 2 to≤
0.1torr opens discharge gate 11, the sample on pallet 7 then is sent into out specimen chamber 3 using transmission mechanism 4, is then switched off out
Expect gate 11, be passed through nitrogen then to going out in specimen chamber 3, recover the pressure in specimen chamber 3, and take out sample；
H, the sample evaporation electrode prepared, is packaged later, so as to prepare perovskite solar cell.
Above-mentioned desirable embodiment according to the present invention is enlightenment, and by above-mentioned description, relevant staff is complete
Can various changes and amendments be carried out without departing from the scope of the technological thought of the present invention'.This invention it is technical
Range is not limited to the content on specification, it is necessary to determine its technical scope according to right.
Claims (9)
1. a kind of perovskite solar cell Preparation equipment based on the nozzle that is nested, it is characterised in that：Including transmission mechanism (4) and according to
The Sample Room (1) of secondary arrangement, sample preparation chamber (2) and go out specimen chamber (3)；
There is nozzle component and pallet component, the nozzle component includes nozzle (5) and sprayed for driving in the sample preparation chamber (2)
The elevating mechanism (6) that head (5) rises or falls, the pallet component include placing the pallet (7) of substrate (13) and being used for
The actuating unit (8) that pallet (7) is driven to rotate, the nozzle (5) is positioned at the surface of pallet (7)；
The transmission mechanism (4) for by the substrate (13) in Sample Room (1) be delivered on the pallet (7) of sample preparation chamber (2) and will
Substrate (13) on sample preparation chamber (2) inner pallet (7) is delivered to out specimen chamber (3)；
The lower section of the nozzle (5) has to spray the first spray orifice (5-1) of perovskite precursor liquid, for spraying crystallization promote
The second spray orifice (5-2) of agent and the third spray orifice (5-3) for spraying hole transmission layer precursor liquid, first spray orifice (5-1),
Second spray orifice (5-2) and third spray orifice (5-3) are respectively provided with several.
2. the perovskite solar cell Preparation equipment according to claim 1 based on the nozzle that is nested, it is characterised in that：It is described
First spray orifice (5-1), the second spray orifice (5-2) and third spray orifice (5-3) are uniformly distributed along the circumferencial direction of nozzle (5).
3. the perovskite solar cell Preparation equipment according to claim 1 based on the nozzle that is nested, it is characterised in that：It is described
Halogen lamp for heating (9) is provided in sample preparation chamber (2).
4. the perovskite solar cell Preparation equipment according to claim 1 based on the nozzle that is nested, it is characterised in that：It is described
Second spray spray orifice (5-2) is atomization spray orifice.
5. the perovskite solar cell Preparation equipment according to claim 1 based on the nozzle that is nested, it is characterised in that：It is described
There is the nitrogen inlet (12) for controlling pressure on sample preparation chamber (2).
It is 6. a kind of using such as perovskite solar cell Preparation equipment of the claim 1-5 any one of them based on the nozzle that is nested
Preparation method, it is characterised in that：The preparation method includes the following steps：
A, substrate (13) is formed in FTO deposition on glass titanium oxide layer；
B, substrate (13) is put on the transmission mechanism (4) of Sample Room (1), then takes out Sample Room (1) and sample preparation chamber (2) simultaneously
Substrate (13) is then transferred on the pallet (7) in Sample Room (1) by vacuum using transmission mechanism (4)；
C, nitrogen is passed through into sample preparation chamber (2), restores the pressure in sample preparation chamber (2), then elevating mechanism (6) drives nozzle (5)
It moves down, realizes that nozzle (5) is drawn close to substrate (13), pallet (7) is driven to rotate, while nozzle (5) followed by actuating unit (8)
On the first spray orifice (5-1) start to substrate (13) spray perovskite precursor liquid；
D, pallet (7) is kept to rotate, the second spray orifice (5-2) on nozzle (5) starts to spray crystallization promoter to substrate (13), when
When second spray orifice (5-2) terminates to spray, pallet (7) is stopped operating；
E, nozzle (5) is driven to rise using elevating mechanism (6), then the substrate (13) in sample preparation chamber (2) is heated, simultaneously
Sample preparation chamber (2) is vacuumized, so as to form perovskite thin film on substrate (13)；
F, nitrogen is passed through into sample preparation chamber (2), restores the pressure in sample preparation chamber (2), treats substrate (13) cooling rear lifting mechanism (6)
Nozzle (5) is driven to move down, realizes that nozzle (5) is drawn close to substrate (13), pallet (7) is driven to rotate using actuating unit (8), simultaneously
Third spray orifice (5-3) on nozzle (5) starts to spray hole transmission layer precursor liquid to substrate (13), forms sample；
G, specimen chamber (3) and sample preparation chamber (2) will be gone out while vacuumized, then sent the sample on pallet (7) using transmission mechanism (4)
Enter out specimen chamber (3), then to going out in specimen chamber (3) to be passed through nitrogen, recover the pressure in specimen chamber (3), and take out sample；
H, the sample evaporation electrode prepared, is packaged later, so as to prepare perovskite solar cell.
7. the preparation method of the perovskite solar cell Preparation equipment according to claim 6 based on the nozzle that is nested, special
Sign is：Each first spray orifice (5-1) sprays the perovskite precursor liquid of 25 ± 5 μ L in step c, and pallet (7) is every with 1000 turns
After the speed of second rotates 10-15 seconds, 4000 revolution per seconds are accelerated to, and maintain 15-20 seconds with the speed of 4000 revolution per seconds.
8. the preparation method of the perovskite solar cell Preparation equipment according to claim 7 based on the nozzle that is nested, special
Sign is：Pallet (7) continues to maintain 5-10 seconds with the speed of 4000 revolution per seconds in step d, and each second spray orifice (5-2) sprays
The crystallization promoter of 5-10 μ L.
9. the preparation method of the perovskite solar cell Preparation equipment according to claim 8 based on the nozzle that is nested, special
Sign is：Pallet (7) is maintained 20-30 seconds with the speed of 4000 revolution per seconds in step f, and each third spray orifice (5-3) sprays 30-
The hole transmission layer precursor liquid of 50 μ L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810086953.2A CN108258129A (en) | 2018-01-30 | 2018-01-30 | Perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810086953.2A CN108258129A (en) | 2018-01-30 | 2018-01-30 | Perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN108258129A true CN108258129A (en) | 2018-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810086953.2A Pending CN108258129A (en) | 2018-01-30 | 2018-01-30 | Perovskite solar cell Preparation equipment based on the nozzle that is nested and preparation method thereof |
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| CN112582553A (en) * | 2020-11-16 | 2021-03-30 | 新余学院 | Advanced special equipment for large-area preparation of perovskite solar cell |
| CN116390371A (en) * | 2021-10-13 | 2023-07-04 | 苏州康尼格电子科技股份有限公司 | PCBA (printed circuit board assembly) packaging equipment and packaging method thereof |
| CN116390371B (en) * | 2021-10-13 | 2024-01-09 | 苏州康尼格电子科技股份有限公司 | PCBA (printed circuit board assembly) packaging equipment and packaging method thereof |
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