CN112553602A - Chemical vapor deposition equipment for boron nitride composite fibers - Google Patents
Chemical vapor deposition equipment for boron nitride composite fibers Download PDFInfo
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- CN112553602A CN112553602A CN202011412642.4A CN202011412642A CN112553602A CN 112553602 A CN112553602 A CN 112553602A CN 202011412642 A CN202011412642 A CN 202011412642A CN 112553602 A CN112553602 A CN 112553602A
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- cavity
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- boron nitride
- releasing
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- 239000000835 fiber Substances 0.000 title claims abstract description 39
- 229910052582 BN Inorganic materials 0.000 title claims abstract description 29
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 239000002131 composite material Substances 0.000 title claims abstract description 27
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 25
- 239000010431 corundum Substances 0.000 claims abstract description 36
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 36
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 230000008021 deposition Effects 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 63
- 239000002657 fibrous material Substances 0.000 claims description 19
- 238000004804 winding Methods 0.000 claims description 11
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 9
- 238000005192 partition Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 5
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000009730 filament winding Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 abstract description 6
- 150000004767 nitrides Chemical class 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/342—Boron nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Abstract
The invention discloses chemical vapor deposition equipment for boron nitride composite fibers, wherein a vacuum cavity comprises a corundum tube, and a wire collecting cavity and a wire releasing cavity which are arranged at two ends of the corundum tube, two ends of the corundum tube are fixedly and hermetically connected with the wire collecting cavity and the wire releasing cavity through flange plates, a boron nitride deposition device comprises an electric furnace for heating the corundum tube and a gas supply system, the corundum tube is arranged in the electric furnace, two ends of the corundum tube penetrate through the electric furnace, the output end of the gas supply system is connected with the wire releasing cavity through a pipeline, a fiber transmission device comprises a wire releasing shaft and a wire releasing roller which are positioned in the wire releasing cavity, and a material receiving shaft and a wire receiving roller which are positioned in the wire collecting cavity, a wire collecting protection device is arranged on the wire collecting cavity, and a vacuum pump group is connected with the wire collecting cavity, the invention realizes that a nitride film is continuously prepared on the surface of the fibers, and by arranging the wire collecting protection device, the pollution of impurities to finished products is avoided, and the batch preparation of the boron nitride composite fiber is realized.
Description
Technical Field
The invention belongs to the technical field of composite fiber treatment, and particularly relates to chemical vapor deposition equipment for boron nitride composite fibers.
Background
Fiber materials, such as carbon fibers, silicon carbide fibers, and the like, have increasingly wide application ranges due to the characteristics of high strength, low mass density, and the like. In some usage scenarios, in order to further improve the performance of the fiber material, it is often necessary to compound a layer of other two-dimensional material on the surface of the fiber material. The chemical vapor deposition method is an ideal method for preparing uniform two-dimensional materials, and the roll-to-roll chemical vapor deposition preparation method can realize batch preparation. In the process, the fiber materials pass through the reaction zone in the winding transmission of the unwinding roller and the winding roller. In the reaction zone, the gas molecules are thermally decomposed and deposited on the surface of the fiber to form the desired two-dimensional material.
In the existing roll-to-roll preparation mode, the surface of the composite fiber material is easily polluted by side reaction products, so that the quality of a finished product is low.
Disclosure of Invention
The present invention is directed to a chemical vapor deposition apparatus for boron nitride composite fibers, which solves the above problems of the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a boron nitride composite fiber's chemical vapor deposition equipment, includes vacuum cavity, boron nitride deposition device, fibre transmission, receives a protection device, vacuum cavity includes the alundum pipe and sets up receipts silk chamber and the silk chamber of putting at the alundum pipe both ends, the both ends of alundum pipe and receive a chamber and put through the fixed sealing connection of ring flange between the silk chamber, boron nitride deposition device is including carrying out the electric stove and the gas supply system that heat to the alundum pipe, the alundum pipe is installed and the both ends of alundum pipe run through the electric stove setting in the inside of electric stove, gas supply system's output passes through the pipeline and is connected with the silk chamber of putting, fibre transmission is including the silk axle of putting that is located the silk intracavity and put the silk roller and receive the material axle and receive the silk roller in the silk intracavity, it is provided with on the silk chamber and receives a.
As a still further scheme of the invention: the wire collecting protection device comprises an air inlet system and a wire collecting pipe, one end of the wire collecting pipe is located in a heating area of the corundum pipe, the other end of the wire collecting pipe penetrates through a wire collecting cavity and is arranged inside the wire collecting cavity, and the output end of the air inlet system is connected with the wire collecting cavity through a pipeline.
As a still further scheme of the invention: and the air outlet end of the wire coiling cavity is connected with a vacuum pump set through a pipeline.
As a still further scheme of the invention: the electric furnace is electrically connected with the controller through a lead.
As a still further scheme of the invention: and a gas flow control meter is arranged on a pipeline connecting the gas supply system and the filament discharging cavity.
As a still further scheme of the invention: and a gas flow control meter is arranged on a pipeline connecting the gas inlet system and the wire collecting cavity.
As a still further scheme of the invention: the wire releasing roller is fixedly arranged on a wire releasing shaft, and the wire releasing shaft is connected with a rotating motor on a wire releasing cavity.
As a still further scheme of the invention: the yarn collecting roller is fixedly arranged on a yarn collecting shaft, and the yarn collecting shaft is connected with a rotating motor on a yarn collecting cavity.
As a still further scheme of the invention: the wire collecting tube is made of quartz.
As a still further scheme of the invention: the working steps of the chemical vapor deposition equipment are as follows: one end of a fiber material is wound on the filament placing roller, the other end of the fiber material penetrates through the corundum tube and is wound on the filament collecting roller, the filament placing roller and the filament collecting roller rotate under the action of the motor, the fiber material can pass through the corundum tube at a constant speed, the electric furnace is controlled by the controller to heat the corundum tube to a set temperature, the gas supply system supplies three gases including ammonia, boron chloride and hydrogen into the filament placing cavity, the amount of the supplied gas is controlled by the gas flow controller, the set amount of inert gas is supplied into the filament collecting cavity by the gas supply system, the amount of the supplied gas is controlled by the gas flow controller, chemical vapor deposition of composite fibers is completed, and the vacuum pump set can discharge tail gas.
Compared with the prior art, the invention has the beneficial effects that: winding one end of a fiber material on a filament placing roller, winding the other end of the fiber material on a filament receiving roller after penetrating through a corundum tube, rotating the filament placing roller and the filament receiving roller under the action of a motor to enable the fiber material to pass through the corundum tube at a constant speed, controlling an electric furnace by a controller to heat the corundum tube to a set temperature, introducing three gases of ammonia, boron chloride and hydrogen into a filament placing cavity by a gas supply system, controlling the introduced gas amount by a gas flow controller, introducing a set amount of inert gas into a filament receiving cavity by a gas inlet system, controlling the introduced gas amount by the gas flow controller to complete chemical vapor deposition of the composite fiber, enabling the fiber to continuously pass through a boron nitride deposition area by a fiber transmission device, depositing a boron nitride film on the surface to obtain the boron nitride composite fiber, and arranging a filament receiving protection device in the filament receiving cavity to effectively avoid pollution of an obtained composite fiber by side reactant in the cavity, the continuous preparation of the nitride film on the surface of the fiber is realized, and the batch preparation of the boron nitride composite fiber is realized.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic view of the overall structure of a chemical vapor deposition apparatus for boron nitride composite fibers.
In the figure: 101. a corundum tube; 102. a filament releasing cavity; 103. a filament collecting cavity; 201. an electric furnace; 202. an air supply system; 301. a wire releasing roller; 302. a wire collecting roller; 401. a wire winding pipe; 402. a partition plate; 403. an air intake system; 5. a vacuum pump set; 6. and a controller.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, in the embodiment of the present invention, a chemical vapor deposition apparatus for boron nitride composite fibers includes a vacuum chamber, a boron nitride deposition apparatus, a fiber transmission apparatus, and a wire-receiving protection apparatus, where the vacuum chamber includes a corundum tube 101, and a wire-receiving chamber 103 and a wire-releasing chamber 102 that are disposed at two ends of the corundum tube 101, and two ends of the corundum tube 101 are fixedly connected to the wire-receiving chamber 103 and the wire-releasing chamber 102 through flanges, so that the connection between the corundum tube 101 and the wire-receiving chamber 103 and the wire-releasing chamber 102 is more secure.
The boron nitride deposition device comprises an electric furnace 201 for heating the corundum tube 101 and an air supply system 202, wherein the corundum tube 101 is arranged in the electric furnace 201, two ends of the corundum tube 101 penetrate through the electric furnace 201, and the corundum tube 101 is heated through the electric furnace 201.
The output end of the gas supply system 202 is connected with the filament-releasing cavity 102 through a pipeline, three gases of ammonia gas, boron chloride and hydrogen gas are introduced through the gas supply system 202, and the amount of introduced gas is controlled through a gas flow controller.
The fiber transmission device comprises a wire releasing shaft and a wire releasing roller 301 which are positioned in the wire releasing cavity 102 and a material receiving shaft and a wire receiving roller 302 which are positioned in the wire receiving cavity 103, and the wire receiving cavity 103 is provided with a wire receiving protection device.
The wire collecting protection device comprises a wire collecting pipe 401, a partition plate 402 and an air inlet system 403, one end of the wire collecting pipe 401 is located in a heating area of the corundum pipe 101, the other end of the wire collecting pipe 401 is located in a wire collecting cavity 103 and is connected with the partition plate 402 arranged in the wire collecting cavity 103 in a sealing mode, the partition plate 402 divides the wire collecting cavity 103 into a near heating area and a far heating area, the two parts are not communicated with each other, a wire collecting roller 302 is located in the far heating area, and the output end of the air inlet system 403 is connected with the far heating area of the wire collecting cavity 103 through a pipeline, so that air introduced into the wire collecting cavity 103 can be discharged only through the open end of the wire collecting pipe 401.
The output end of the gas inlet system 403 is connected with the filament collecting cavity 103 through a pipeline, inert gas such as argon is introduced through the gas inlet system 403, and the flow of the gas introduced from the gas inlet is adjusted by measuring a vacuum gauge of the filament collecting cavity 103 and a vacuum gauge of the reaction zone, so that the gas pressure in the filament collecting cavity 103 is not lower than the gas pressure in the reaction zone.
And the air outlet end of the wire collecting cavity 103 is connected with a vacuum pump set 5 through a pipeline, and tail gas is discharged through the vacuum pump set 5.
And a gas flow control meter is arranged on a pipeline connecting the gas supply system 202 and the wire releasing cavity 102.
And a gas flow control meter is arranged on a pipeline connecting the gas inlet system 403 and the wire collecting cavity 103.
The wire releasing roller 301 is fixedly arranged on a wire releasing shaft, and the wire releasing shaft is connected with a rotating motor on the wire releasing cavity 102.
The wire winding roller 302 is fixedly arranged on a wire winding shaft, and the wire winding shaft is connected with a rotating motor on the wire winding cavity 103.
The electric furnace 201 is electrically connected with a controller 6 through a lead, and the controller 6 is connected with a rotating motor of the wire releasing roller 301, a rotating motor of the wire receiving roller 302, a gas flow controller of the gas supply system 202 and a gas flow controller of the gas inlet system 403 to control the reaction temperature, the introduced gas flow and the transmission rate of the fiber material.
The wire-collecting tube 401 is made of quartz.
The working principle is as follows: one end of a fiber material is wound on a filament releasing roller 301, the other end of the fiber material penetrates through a corundum tube 101 and is wound on a filament receiving roller 302, the filament releasing roller 301 and the filament receiving roller 302 rotate under the action of a motor, so that the fiber material can pass through the corundum tube 101 at a constant speed, a controller 6 controls an electric furnace 201 to heat the corundum tube 101 to a set temperature, an air supply system 202 supplies three gases of ammonia, boron chloride and hydrogen into a filament releasing cavity 102, the amount of the supplied gas is controlled by a gas flow control meter, a set amount of inert gas is supplied into a filament receiving cavity 103 by an air supply system 403, the amount of the supplied gas is controlled by the gas flow control meter, chemical vapor deposition of composite fibers is completed, and a vacuum pump set 5 can exhaust tail gas.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.
Claims (9)
1. A chemical vapor deposition equipment of boron nitride composite fiber is characterized in that: the device comprises a vacuum cavity, a boron nitride deposition device, a fiber transmission device and a wire collecting protection device, wherein the vacuum cavity comprises a corundum tube (101), and a wire collecting cavity (103) and a wire releasing cavity (102) which are arranged at two ends of the corundum tube (101), the two ends of the corundum tube (101) are fixedly and hermetically connected with the wire collecting cavity (103) and the wire releasing cavity (102) through flange plates, the boron nitride deposition device comprises an electric furnace (201) for heating the corundum tube (101) and an air supply system (202), the corundum tube (101) is arranged in the electric furnace (201), two ends of the corundum tube (101) penetrate through the electric furnace (201), an output end of the air supply system (202) is connected with the wire releasing cavity (102) through a pipeline, the fiber transmission device comprises a wire releasing shaft and a wire releasing roller (301) which are positioned in the wire releasing cavity (102), and a material collecting shaft and a wire collecting roller (302) which are positioned in the wire collecting cavity (103), and a wire winding protection device is arranged on the wire winding cavity (103).
2. The chemical vapor deposition equipment for boron nitride composite fibers according to claim 1, wherein the filament collecting protection device comprises a filament collecting tube (401), a partition plate (402) and an air inlet system (403), one end of the filament collecting tube (401) is located in a heating zone of the corundum tube (101), the other end of the filament collecting tube (401) is located in a filament collecting cavity (103) and is in sealing connection with the partition plate (402) arranged in the filament collecting cavity (103), the partition plate (402) divides the filament collecting cavity (103) into a near heating zone and a far heating zone, the two zones are not communicated with each other, the filament collecting roller (302) is located in the far heating zone, and an output end of the air inlet system (403) is connected with the far heating zone of the filament collecting cavity (103) through a pipeline. An air outlet is arranged at a near heating area of the filament collecting cavity (103) and is connected with a vacuum pump set (5).
3. The chemical vapor deposition equipment of boron nitride composite fibers according to claim 2, wherein the filament-collecting tube (401) is made of quartz.
4. The chemical vapor deposition equipment for boron nitride composite fibers according to claim 1, wherein a gas flow control meter is arranged on a pipeline connecting the gas supply system (202) and the filament discharging cavity (102).
5. The chemical vapor deposition equipment for boron nitride composite fibers according to claim 2, wherein a gas flow control meter is arranged on a pipeline connecting the gas inlet system (403) and the filament collecting cavity (103).
6. The chemical vapor deposition equipment for boron nitride composite fibers according to claim 1, wherein the filament-releasing roller (301) is fixedly arranged on a filament-releasing shaft, and the filament-releasing shaft is connected with a rotating motor on the filament-releasing cavity (102).
7. The chemical vapor deposition equipment for boron nitride composite fibers according to claim 1, wherein the take-up roll (302) is fixedly arranged on a take-up shaft, and the take-up shaft is connected with a rotating motor on the take-up cavity (103).
8. The chemical vapor deposition equipment for boron nitride composite fibers according to claim 1, wherein the electric furnace (201) is electrically connected with a controller (6) through a lead, and the controller (6) is connected with a rotating motor of the filament unwinding roller (301), a rotating motor of the filament winding roller (302), a gas flow control meter of the gas supply system (202) and a gas flow control meter of the gas supply system (403) to control the reaction temperature, the introduced gas flow and the transmission rate of the fiber material.
9. The chemical vapor deposition apparatus of boron nitride composite fiber according to claim 1, wherein the chemical vapor deposition apparatus comprises the following steps: one end of a fiber material is wound on a filament releasing roller (301), the other end of the fiber material penetrates through a corundum tube (101) and is wound on a filament receiving roller (302), the filament releasing roller (301) and the filament receiving roller (302) rotate under the action of a motor, so that the fiber material can pass through the corundum tube (101) at a constant speed, a controller (6) controls an electric furnace (201) to heat the corundum tube (101) to a set temperature, an air supply system (202) introduces three-way gases of ammonia, boron chloride and hydrogen into a filament releasing cavity (102), the amount of introduced gas is controlled by a gas flow control meter, a set amount of inert gas is introduced into a filament receiving cavity (103) by an air inlet system (403), the introduction is controlled by the gas flow control meter, the chemical vapor deposition of composite fibers is completed, and a vacuum pump set (5) can discharge tail gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011412642.4A CN112553602A (en) | 2020-12-04 | 2020-12-04 | Chemical vapor deposition equipment for boron nitride composite fibers |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011412642.4A CN112553602A (en) | 2020-12-04 | 2020-12-04 | Chemical vapor deposition equipment for boron nitride composite fibers |
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| Publication Number | Publication Date |
|---|---|
| CN112553602A true CN112553602A (en) | 2021-03-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011412642.4A Pending CN112553602A (en) | 2020-12-04 | 2020-12-04 | Chemical vapor deposition equipment for boron nitride composite fibers |
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| CN (1) | CN112553602A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114790113A (en) * | 2022-05-05 | 2022-07-26 | 浙江理工大学 | Device and method for preparing continuous ceramic fibers by precursor conversion |
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|---|---|---|---|---|
| GB1334476A (en) * | 1971-05-11 | 1973-10-17 | France Etat Defense | Coated boron filament and production thereof |
| US3811940A (en) * | 1969-10-09 | 1974-05-21 | United Aircraft Corp | High frequency heating method for vapor deposition of coatings onto filaments |
| US3850689A (en) * | 1966-07-18 | 1974-11-26 | United Aircraft Corp | Procedures for coating substrates with silicon carbide |
| US6344232B1 (en) * | 1998-07-30 | 2002-02-05 | The United States Of America As Represented By The Secretary Of The Air Force | Computer controlled temperature and oxygen maintenance for fiber coating CVD |
| US20040089237A1 (en) * | 2002-07-17 | 2004-05-13 | Pruett James Gary | Continuous chemical vapor deposition process and process furnace |
| CN207891422U (en) * | 2018-02-12 | 2018-09-21 | 中南大学 | A kind of equipment of SiC fiber surfaces deposition BN boundary layers |
-
2020
- 2020-12-04 CN CN202011412642.4A patent/CN112553602A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3850689A (en) * | 1966-07-18 | 1974-11-26 | United Aircraft Corp | Procedures for coating substrates with silicon carbide |
| US3811940A (en) * | 1969-10-09 | 1974-05-21 | United Aircraft Corp | High frequency heating method for vapor deposition of coatings onto filaments |
| GB1334476A (en) * | 1971-05-11 | 1973-10-17 | France Etat Defense | Coated boron filament and production thereof |
| US6344232B1 (en) * | 1998-07-30 | 2002-02-05 | The United States Of America As Represented By The Secretary Of The Air Force | Computer controlled temperature and oxygen maintenance for fiber coating CVD |
| US20040089237A1 (en) * | 2002-07-17 | 2004-05-13 | Pruett James Gary | Continuous chemical vapor deposition process and process furnace |
| CN207891422U (en) * | 2018-02-12 | 2018-09-21 | 中南大学 | A kind of equipment of SiC fiber surfaces deposition BN boundary layers |
Non-Patent Citations (1)
| Title |
|---|
| 韦鑫等: "高性能碳化硅纤维研究进展", 《棉纺织技术》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114790113A (en) * | 2022-05-05 | 2022-07-26 | 浙江理工大学 | Device and method for preparing continuous ceramic fibers by precursor conversion |
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Application publication date: 20210326 |