CN112549786A

CN112549786A - Novel regulation of Prober point china ink ware is got ready and is stabilized device

Info

Publication number: CN112549786A
Application number: CN202011460367.3A
Authority: CN
Inventors: 谢巍; 翟松; 何木胜; 许健
Original assignee: Jiangsu Union Semiconductor Co Ltd
Current assignee: Jiangsu Union Semiconductor Co Ltd
Priority date: 2020-12-11
Filing date: 2020-12-11
Publication date: 2021-03-26
Anticipated expiration: 2040-12-11
Also published as: CN112549786B

Abstract

The invention discloses a novel adjusting and dotting stabilizing device of a Prober ink dotter, which comprises a connecting block and a positioning frame, wherein one end of the positioning frame is provided with the connecting block, the upper end of the positioning frame is sleeved with a threaded rod, the upper end of the connecting block is connected with a connecting sleeve in a sliding way, the connecting sleeve is internally and threadedly connected with a connecting rod, through the design of adding a striker limiting part on the ink dotter, the striker can be ensured not to fly away, the effective acting distance of the stressed part of the striker in a magnetic induction coil can be ensured, the work is continuous, the dotting output is uniform, the size of ink dots is uniform, and a roller capable of playing a counterforce for the striker is additionally arranged on the limiting part, so that when the striker is reset upwards, an elastic strip in the roller contracts to store energy, and can quickly recover and stabilize the striker, and when the striker is dotting downwards again, the striker can be dotting downwards quickly under the action of electromagnetic force and, so that the energy is saved when the firing pin is ignited.

Description

Novel regulation of Prober point china ink ware is got ready and is stabilized device

Technical Field

The invention belongs to the technical field related to wafer production and processing equipment, and particularly relates to a novel adjusting and dotting stabilizing device of a Prober ink dotter.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; the silicon wafer can be processed into various circuit element structures to become IC products with specific electrical functions, which is the basic raw material of an integrated circuit factory formed by cutting, barreling, slicing, chamfering, polishing, laser etching and packaging the silicon wafer bar.

The prior novel adjusting and dotting stabilizing device technology of the Prober ink dotter has the following problems: the Prober ink point device mainly relies on the coil to energize when dotting, then produces the magnetic field, produces the magnetic induction stress on the first half of firing pin, but the stability of dotting is relatively poor like this, the problem that the size of dotting is different appears easily, and the manual height adjustment part precision of ink point device is also relatively low moreover adjustable range is very little, it is not convenient enough to use.

Disclosure of Invention

The invention aims to provide a novel adjusting and dotting stabilizing device of a Prober ink dropper, which solves the problems of poor dotting stability of the Prober ink dropper and low precision and inconvenience of manual height adjustment in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: a novel adjusting and dotting stabilizing device of a Prober ink dotter comprises a connecting block and a positioning frame, wherein the connecting block is installed at one end of the positioning frame, a threaded rod is sleeved inside the upper end of the positioning frame, a connecting sleeve is slidably connected to the upper end of the connecting block, a connecting rod is connected to the inner thread of the connecting sleeve, the lower end of the connecting rod penetrates through the connecting sleeve and is arranged at the lower end of the connecting sleeve, a connecting frame is fixed to the lower end of the connecting rod, a fixing rod is sleeved at one end of the connecting frame, a base is fixed to one end of the fixing rod, an electromagnetic frame is sleeved at one end of the fixing rod, a firing pin is sleeved inside the upper end of the electromagnetic frame, a baffle is sleeved at the upper end of the firing pin in a sliding mode, a baffle ring is fixedly sleeved outside the firing pin, the lower end outer wall of the baffle and the baffle are, the adjusting mechanism comprises a base, a baffle plate, a base, a fixing shaft, a baffle plate, a return spring, a fixed shaft, a connecting ring, a support rod, a connecting rod, an elastic strip and a connecting rod, wherein the baffle plate is fixedly sleeved outside the adjusting rod, the return spring is arranged at the upper end of the electromagnetic frame, the lower end of the striker penetrates through the electromagnetic frame and is arranged on the upper side of the base, the upper end of the striker is fixedly provided with the fixed shaft, the upper end outer wall of the fixed shaft penetrates through the baffle plate and is arranged on the upper side of the baffle plate, the outer wall of the fixed shaft is fixedly provided with the toothed plate, one side of the fixed shaft is provided with a roller, the outer wall of the roller is fixedly provided with an alignment tooth, the roller is rotatably connected with the toothed plate through the alignment tooth, the connecting ring is sleeved inside, one end of the elastic strip is fixedly connected with the inner wall of the roller, and the other end of the elastic strip is fixedly connected with the outer wall of the connecting ring.

Preferably, an electromagnetic coil is fixed inside the electromagnetic frame, the striker is sleeved inside the electromagnetic coil, and the electromagnetic coil is electrically connected with an external power supply.

Preferably, the elastic force of the elastic strip is less than one fourth of the elastic force of the return spring.

Preferably, the baffle is internally provided with a registration port, the inner wall of the registration port is sleeved with a ring, and the fixed shaft penetrates through the ring and is in sliding connection with the baffle.

Preferably, the outer wall of the upper end of the base is a smooth horizontal plane, and one end of the base is fixedly connected with the fixing rod in a welding mode.

Preferably, a screwing plate is fixed to the upper end of the connecting rod, and a convex pattern for increasing friction force is arranged on the outer wall of the screwing plate.

Compared with the prior art, the invention provides a novel adjusting and dotting stabilizing device of a Prober ink dotter, which has the following beneficial effects:

the invention adds the design of the firing pin limiting part on the ink dispenser, which can ensure that the firing pin can not fly away, can ensure the effective action distance of the stressed part of the firing pin in the magnetic induction coil, continuously works, has uniform striking output, uniform ink dot size and good stability, avoids the risk of the firing pin and the spring flying out, has strong applicability, is convenient to adjust and use, improves the adjusting precision and the adjusting distance, is additionally provided with the roller which can play a role in reacting the firing pin on the limiting part, ensures that the elastic strip in the roller contracts after the resetting and deformation of the resetting spring of the firing pin without electromagnetic force, provides a downward acting force for the firing pin, ensures that the firing pin can rapidly strike down after receiving the electromagnetic force, reduces the time for the firing pin to overcome the elastic force of the resetting spring, and effectively reduces the delay effect of the firing pin when striking, the dotting precision of the firing pin is more accurate, the adjustable range is enlarged by the manual adjusting device, the adjustment is more convenient, and the ink dispenser is more convenient and accurate to use by the novel adjusting and dotting stabilizing device of the Prober ink dispenser.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention without limiting the invention in which:

FIG. 1 is a schematic front structural view of a novel adjustment and dotting stabilizing device of a Prober ink-drop device according to the present invention;

FIG. 2 is an enlarged schematic view of A in FIG. 1 according to the present invention;

FIG. 3 is an enlarged cross-sectional view of B in FIG. 2 according to the present invention;

fig. 4 is a schematic top view of the fixing shaft and the roller according to the present invention.

In the figure: 1. a threaded rod; 2. a connecting frame; 3. fixing the rod; 4. a base; 5. a striker; 6. adjusting a rod; 7. a baffle plate; 8. a support bar; 9. a return spring; 10. a connecting rod; 11. connecting sleeves; 12. connecting blocks; 13. a positioning frame; 14. aligning teeth; 15. a limiting plate; 16. a roller; 17. a toothed plate; 18. a fixed shaft; 19. a connecting ring; 20. an elastic strip; 21. an electromagnetic frame.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a novel adjusting and dotting stabilizing device of a Prober ink dotter comprises a connecting block 12 and a positioning frame 13, wherein the connecting block 12 is installed at one end of the positioning frame 13, a threaded rod 1 is sleeved inside the upper end of the positioning frame 13, the upper end of the connecting block 12 is slidably connected with a connecting sleeve 11, the inner thread of the connecting sleeve 11 is connected with a connecting rod 10, the lower end of the connecting rod 10 penetrates through the connecting sleeve 11 and is arranged at the lower end of the connecting sleeve 11, a connecting frame 2 is fixed at the lower end of the connecting rod 10, a screwing plate is fixed at the upper end of the connecting rod 10, a convex pattern for increasing friction force is arranged on the outer wall of the screwing plate, the connecting rod 10 can be screwed more conveniently through the screwing plate with the convex pattern to adjust the position of the connecting frame 2, a fixing rod 3 is sleeved at one end of the connecting frame 2, a base 4 is fixed at one end of the fixing rod 3, the, the smooth and horizontal base 4 enables the overall dotting effect to be better, one end of the fixed rod 3 is sleeved with the electromagnetic frame 21, the upper end of the electromagnetic frame 21 is sleeved with the firing pin 5, the electromagnetic coil is fixed inside the electromagnetic frame 21, the firing pin 5 is sleeved inside the electromagnetic coil, the electromagnetic coil is electrically connected with an external power supply, a magnetic field is generated by electrifying the electromagnetic coil, the firing pin 5 is pulled to move downwards to dotting on the base 4 by the acting force of the magnetic field, the upper end of the firing pin 5 is slidably connected with the baffle 7, the outer part of the firing pin 5 is fixedly sleeved with the baffle ring, the baffle ring is driven to be attached to the outer wall of the lower end of the baffle 7 when the firing pin 5 moves upwards, the upper end of the electromagnetic frame 21 is spirally connected with the adjusting rod 6, the baffle 7 is fixedly sleeved outside the adjusting rod 6, the upper end of the baffle 7 is fixed with the fixed shaft 18, the outer wall of the, the ring is sleeved on the inner wall of the aligning opening, the fixing shaft 18 penetrates through the ring and is in sliding connection with the baffle 7, friction force between the fixing shaft 18 and the baffle 7 can be reduced through the ring, the baffle 7 can move up and down more smoothly outside the fixing shaft 18, the reset spring 9 is sleeved outside the firing pin 5, the reset spring 9 is arranged at the upper end of the electromagnetic frame 21, and the lower end of the firing pin 5 penetrates through the electromagnetic frame 21 and is arranged on the upper side of the base 4.

A novel adjusting and dotting stabilizing device of a Prober ink dotter comprises a toothed plate 17 fixed on the outer wall of a fixed shaft 18, a roller 16 is arranged on one side of the fixed shaft 18, aligning teeth 14 are fixed on the outer wall of the roller 16, the roller 16 is rotatably connected with the toothed plate 17 through the aligning teeth 14, a connecting ring 19 is sleeved inside the roller 16, a supporting rod 8 is fixed at one end of the connecting ring 19, the other end of the supporting rod 8 is fixedly connected with an electromagnetic frame 21, a limiting plate 15 is fixed on the outer wall of one end of the roller 16, a connecting groove is arranged inside the limiting plate 15, an elastic strip 20 is rotatably arranged inside the connecting groove, one end of the elastic strip 20 is fixedly connected with the inner wall of the roller 16, the other end of the elastic strip 20 is fixedly connected with the outer wall of the connecting ring 19, the elastic force of the elastic strip 20 is less than one fourth of the elastic force of a reset spring 9, this ensures that the resilient strip 20 does not interfere with the normal up and down movement of the flap 7 whilst providing a resilient restoring force.

The working principle and the using process of the invention are as follows: after the ink dispenser is installed, the principle of the ink dispenser of the Prober ink dispenser is that magnetic field force generated after an electromagnetic coil is electrified is utilized to drive a striker 5 to move and dispense dots in an electromagnetic frame 21, when the ink dispenser is not electrified, the striker 5 is recovered to the position through the elasticity of a return spring 9 so as to perform repeated dispensing, when the ink dispenser is used, the ink dispenser is installed at the position for dispensing through a threaded rod 1, the electromagnetic frame 21 is electrically connected with an external power supply, a connecting rod 10 is screwed to adjust the height of a connecting frame 2 at one end of a connecting block 12, the ink dispenser station of a wafer can be dispensed after the adjustment is completed, when the ink dispenser is dispensed, the electromagnetic frame 21 is electrified to generate a magnetic field to drive the striker 5 to move downwards and a base 4 to contact the dispensing, at the moment, a fixed shaft 18 passes through a baffle 7 to move downwards, a roller 16 rotates outside a connecting ring 19 through an alignment tooth 14, the roller 16 rotates to enable an elastic strip, the downward auxiliary force is provided for the fixed shaft 18, the auxiliary force and the electromagnetic force overcome the elastic force of the reset spring 9 together, so that the energy is saved when the striker 5 is used for dotting, the electromagnetic frame 21 stops electrifying after the dotting is finished, the elastic force of the reset spring 9 recovers and deforms after the magnetic field disappears to drive the striker 5 to move upwards, the elastic strip 20 is driven to tighten when the striker 5 moves upwards, the elastic strip 20 can play a role in buffering the striker 5 on one hand to enable the striker 5 to be rapidly static, and the energy can be stored on the other hand to provide the auxiliary force for the next dotting of the striker 5, so that the dotting can be repeated.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A novel regulation of Prober point china ink ware is got ready stabilising arrangement, includes connecting block (12) and locating frame (13), its characterized in that: the improved structure of the electromagnetic hammer is characterized in that a connecting block (12) is installed at one end of the positioning frame (13), a threaded rod (1) is sleeved inside the upper end of the positioning frame (13), a connecting sleeve (11) is connected at the upper end of the connecting block (12) in a sliding manner, a connecting rod (10) is connected inside the connecting sleeve (11), the lower end of the connecting rod (10) penetrates through the connecting sleeve (11) and is arranged at the lower end of the connecting sleeve (11), a connecting frame (2) is fixed at the lower end of the connecting rod (10), a fixing rod (3) is sleeved at one end of the connecting frame (2), a base (4) is fixed at one end of the fixing rod (3), an electromagnetic frame (21) is sleeved at one end of the fixing rod (3), a striker (5) is sleeved inside the upper end of the electromagnetic frame (21), a baffle (7) is sleeved at the upper end of the striker (5), the device comprises a striker (5), a baffle ring, a return spring (9), a fixing shaft (18), a positioning tooth (14), a toothed plate (17), a roller (16), a positioning tooth (14), a return spring (9), a gear plate (17), a roller (16), a positioning tooth (14), a gear box (14), a gear plate (17), a roller (16), a gear box (14), a gear box (7), a gear plate (4), a gear plate (17), a gear plate (4) and a return spring (9), wherein the stop ring is driven to be attached to the outer wall of the baffle (7) when the striker (5) moves upwards, gyro wheel (16) rotate through counterpoint tooth (14) and pinion rack (17) and connect, go-between (19) have been cup jointed to the inside of gyro wheel (16), the one end of go-between (19) is fixed with bracing piece (8), the other end and electromagnetism frame (21) fixed connection of bracing piece (8), be fixed with limiting plate (15) on the one end outer wall of gyro wheel (16), limiting plate (15) inside is provided with the spread groove, the inside rotation of spread groove is provided with elasticity strip (20), the one end of elasticity strip (20) and the inner wall fixed connection of gyro wheel (16), the other end of elasticity strip (20) and the outer wall fixed connection of go-between (19).

2. The new regulating and dotting stabilizing device of the Prober ink-drop device as claimed in claim 1, characterized in that: an electromagnetic coil is fixed inside the electromagnetic frame (21), the firing pin (5) is sleeved inside the electromagnetic coil, and the electromagnetic coil is electrically connected with an external power supply.

3. The new regulating and dotting stabilizing device of the Prober ink-drop device as claimed in claim 1, characterized in that: the elasticity of the elastic strip (20) is less than one fourth of the elasticity of the return spring (9).

4. The new regulating and dotting stabilizing device of the Prober ink-drop device as claimed in claim 1, characterized in that: the inner part of the baffle (7) is provided with an alignment port, the inner wall of the alignment port is sleeved with a circular ring, and the fixed shaft (18) penetrates through the circular ring to be connected with the baffle (7) in a sliding mode.

5. The new regulating and dotting stabilizing device of the Prober ink-drop device as claimed in claim 1, characterized in that: the outer wall of the upper end of the base (4) is a smooth horizontal plane, and one end of the base (4) is fixedly connected with the fixing rod (3) in a welding mode.

6. The new regulating and dotting stabilizing device of the Prober ink-drop device as claimed in claim 1, characterized in that: and a screwing plate is fixed at the upper end of the connecting rod (10), and the outer wall of the screwing plate is provided with a convex pattern for increasing friction force.