CN112547148A - Micro-fluidic target capture chip based on micro dam array, preparation method and application - Google Patents
Micro-fluidic target capture chip based on micro dam array, preparation method and application Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
Abstract
The invention belongs to the technical field of micro-fluidic chips, and particularly relates to a micro-fluidic target capturing chip based on a micro dam array, a preparation method and application. The chip is made by thermally bonding a transparent glass cover plate carved with micro-channels and a transparent glass substrate carved with a micro dam array; by adjusting the key size parameters of the chip internal microstructure, target cells with different sizes can be efficiently captured and sorted. After the etched surface of the glass cover plate and the etched surface of the glass bottom plate are aligned and attached, the bonding of the upper glass sheet and the lower glass sheet is realized through a thermal bonding process, a closed microfluidic channel with a fluid inlet and a fluid outlet is formed, and the prepared microfluidic chip has a fine three-dimensional structure.
Description
Technical Field
The invention belongs to the technical field of micro-fluidic chips, and particularly relates to a micro-fluidic target capturing chip based on a micro dam array, a preparation method and application.
Background
Cell capture and sorting is a technique for separating one or more specific cells from blood or other fluids by physical, chemical or biological means. The efficient and rapid cell capture and sorting has important application value in the fields of cell biology, tissue engineering, drug toxicology monitoring and the like, is always a research hotspot in related fields, and is also a problem which is urgently needed to be solved in the field of cell-based medical detection. The micro-fluidic chip technology is characterized in that basic operation processes of biological experiments, chemical experiments and the like are integrated on a chip, and the chip has at least a structure with a micron or even nanometer scale in an internal structure, so that the whole process of the experiments and analysis can be automatically completed. The microfluidic chip has the advantages of integration, high flux, rapid detection, convenient operation, small required sample amount, low energy consumption, low cost and the like, so the microfluidic chip has wide application prospect in the fields of drug screening, environmental detection, judicial detection, clinical diagnosis, biomedical research and the like in recent years.
The preparation method of the micro-fluidic chip micro-structure comprises a molding method, a chemical etching method, a laser ablation method, a 3D printing method and the like. The preparation materials of the micro-fluidic chip mainly comprise quartz, glass, high polymer and the like. In the prior art (patent number: CN102174369A), a micro-structure on a mold is transferred to polymer materials such as PDMS through a molding method, and then the micro-fluidic chip is prepared through a bonding process, but the PDMS has good air permeability and deformation capability, so that the micro-structure of the PDMS in a micro-fluidic channel is easily deformed under the influence of fluid pressure, and the high-precision requirement of cell capture and sorting on the size of the micro-structure cannot be met. In the prior art (patent number: CN201510279518), a high polymer is prepared into a microfluidic chip through 3D printing, but due to the limitation of factors such as physicochemical properties of the high polymer and 3D printing precision, the dimensional precision of a three-dimensional structure formed by printing is not high, the structure is not compact enough, and the minimum printing size is in the range of hundreds of micrometers or even millimeters, so that the application of the three-dimensional structure in the field of cell capture and sorting is further limited.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a micro-fluidic target capturing chip based on a micro dam array, a preparation method and application, and aims to solve part of problems in the prior art or at least alleviate part of problems in the prior art. The chip is made by thermally bonding a transparent glass cover plate carved with micro-channels and a transparent glass substrate carved with a micro dam array; by adjusting the key size parameters of the chip internal microstructure, target cells with different sizes can be efficiently captured and sorted. After the etched surface of the glass cover plate and the etched surface of the glass bottom plate are aligned and attached, the bonding of an upper glass sheet and a lower glass sheet is realized through a thermal bonding process, a closed microfluidic channel with a fluid inlet and a fluid outlet is formed, the microfluidic channel consists of an etched cover plate groove and a substrate groove, and the prepared microfluidic chip has a fine three-dimensional structure, is simple and reliable in preparation method and low in cost, and is suitable for large-scale production. The micro-fluidic chip can be used as a tool for tumor diagnosis, auxiliary treatment and biochemical analysis.
The invention is realized in this way, a micro-fluidic target capture chip based on a miniature dam array, which comprises a glass cover plate and a glass substrate corresponding to the glass cover plate, wherein one surface of the glass cover plate is provided with a groove area, and one end of the groove area penetrates through the thickness of the glass cover plate and is provided with a fluid inlet; one surface of the glass substrate is provided with a groove channel corresponding to the groove area of the glass cover plate, and the groove channel sequentially comprises an inlet area, a diffusion area, a capture area and an outlet area which correspond to the fluid inlet; the diffusion area is a cylindrical array consisting of a plurality of cylinders, the capture area is a dam array consisting of a plurality of miniature dams, the outlet area is a trapezoidal closed channel, and a fluid outlet is formed in the outlet area in a way of penetrating through the thickness of the glass substrate; the groove surface of the glass cover plate and the groove surface of the glass substrate are oppositely attached and fixed.
Further, the cylinder is perpendicular to the glass substrate, and the opening of the miniature dam faces the direction of the cylinder.
Further, the vertical distance between the top surface of the miniature dike and the bottom surface of the groove of the glass cover plate is smaller than the diameter of the target object to be captured; the minimum distance between the micro dam and the side wall of the capture area is smaller than the left-right spacing distance between two adjacent micro dams.
Further, the plurality of miniature dams are arranged in a staggered manner.
Further, the distance between the outer walls of adjacent cylinders is greater than the diameter of the target to be captured.
Further, the groove depth of the glass cover plate is 4 micrometers, the groove depth of the glass substrate is 6 micrometers, and the distance between adjacent cylinders is 200 micrometers.
Furthermore, the thickness of the transparent glass cover plate and the transparent glass substrate is H3, and the value range of H3 is between 0.2 and 1.5 mm.
Furthermore, a groove with the same shape as the channel on the glass substrate is carved on the transparent glass cover plate, the etching depth of the channel on the cover plate is H1, the value range of H1 is between 3 and 10 microns, and a through hole is chiseled as a fluid inlet.
Furthermore, a groove with the same shape as the channel on the glass cover plate is formed in the glass substrate, an inlet area, a diffusion area, a capture area and an outlet area are sequentially arranged in the channel, the etching depth of the substrate channel is H2, and the value range of H2 is 3-15 micrometers.
The invention also provides a preparation method of the micro-fluidic target capturing chip based on the micro dam array, which comprises the following steps:
s1: magnetron sputtering chromium plating, namely sputtering a layer of metal chromium film on the single surface of each of the glass cover plate and the glass substrate by a magnetron sputtering method;
s2: coating a layer of photoresist on the surface of the glass sheet with the chromium layer;
s3: soft baking, namely transferring the glass sheet after glue homogenizing to a heating table for baking;
s4: exposing, namely placing the baked photoresist mask on an ultraviolet exposure platform, aligning a cover plate mask and a substrate mask with the photoresist mask respectively, and exposing for 22 seconds after exposure readings of a photoetching machine are stable;
s5: developing, soaking the exposed slide into a developing solution, washing with deionized water for three times after the developing is finished, and drying with nitrogen for later use;
s6: removing chromium for the first time, putting the developed glass sheet into a ceric ammonium nitrate solution, slightly shaking, taking out the glass sheet after the chromium layer of the exposed area is completely dissolved, washing the glass sheet with deionized water for three times, and drying the glass sheet with nitrogen for later use;
s7: wet etching, namely putting the glass sheet subjected to primary dechromization into the calibrated glass etching solution, quickly removing the glass sheet after the etching time is up, washing the glass sheet by using a large amount of tap water, washing the glass sheet by using deionized water for three times, and drying the glass sheet by using nitrogen for later use;
s8: removing the photoresist, putting the etched glass sheet into an acetone solution, slightly shaking, washing with deionized water for three times after the photoresist on the surface of the glass sheet is completely dissolved and removed, and drying with nitrogen for later use;
s9: performing secondary dechroming, namely putting the glass sheet after the glue is removed into a ceric ammonium nitrate solution, slightly vibrating, taking out the glass sheet after the residual chromium layer on the surface of the glass sheet is completely dissolved, washing the glass sheet with deionized water for three times, and drying the glass sheet with nitrogen for later use;
s10: chip punching, namely, punching a fluid inlet and a fluid outlet at the corresponding positions of the glass cover plate and the glass substrate by using a numerical control machine;
s11: and thermally bonding the chip, namely cleaning the glass cover plate and the substrate by using a detergent, washing the glass cover plate and the substrate by using deionized water for several times, aligning and attaching the etched surfaces of the glass cover plate and the substrate in the deionized water, taking out the glass cover plate and the substrate, putting the glass cover plate and the substrate on a hot table, drying a water film in a glass gap, putting the preliminarily bonded glass chip into a high-temperature muffle furnace with a set temperature parameter curve for chip thermal bonding, and taking out the bonded chip for later use after the temperature is restored to normal temperature.
The invention also provides application of the micro-fluidic target capturing chip based on the micro dam array in micro-scale target capturing.
Further, the micro-scale target includes a cell.
Further, the cells include leukocytes and/or tumor cells.
In summary, the advantages and positive effects of the invention are:
aiming at the defects and improvement requirements of the prior art, the invention provides a micro-fluidic cell capture chip based on a micro dam array and a preparation method thereof, the chip structure and the preparation method are simple and ingenious, the serious defect that the key size of a glass chip based on photoetching and wet etching preparation processes is not easy to control is overcome, the micro-fluidic cell capture chip is suitable for large-scale production, and target cells can be captured efficiently and quickly.
The glass-based microfluidic chip combines two technologies of photoetching and wet chemical etching in the preparation process, has high critical dimension precision, excellent optical performance, stable structure, difficult deformation and reusability, and is widely applied to the fields of trace substance detection, cell capture and sorting and the like.
The chip has simple structural design and convenient cell capture operation, does not need to carry out complex pretreatment on samples of sample addition, and can directly realize capture and sorting of target cells after being injected into the chip from an inlet.
For the traditional dam-shaped structure design which is completely closed, target cells are difficult to realize stable interception at the U-shaped structure of the micro dam due to the characteristics of fluid, and the target cells are easy to be flushed away again even if the target cells are intercepted for a short time. And the gap with the height of H2 is arranged above the miniature dam structure, the design of the dam-shaped structure which is not completely closed can enable target cells to more easily and directly flow to the position of the micro dam to be intercepted, and the water pressure difference is borne by the front and the back of the target cells along the water flow direction, so that the intercepted cells can be effectively inhibited from being washed away again, and efficient and stable cell capture can be realized.
For the traditional U-shaped dam structure design with embedded notches, in order to achieve effective capture of target cells, the height is generally required to be more than 10 micrometers, and the width is generally required to be less than 6 micrometers, but the wet etching process cannot overcome the undercutting phenomenon (edge gradient etching effect) of a glass material, so that the U-shaped dam structure with embedded notches cannot be prepared on the glass material through one-time etching. The dam structure of the microfluidic chip is a non-completely closed dam structure formed by combining the groove (with the height of H1) on the cover plate and the U-shaped dam structure (with the height of H2) on the substrate, so that the problem of size error caused by edge gradient etching effect of wet etching is solved in the preparation process.
The design can realize the capture and sorting of target cells with different sizes by adjusting the key parameters (gap height H1 and micro dam height H2) of the miniature dam, and the capture target of the design is not limited to cells, can be other target substances with different sizes, and has excellent design universality.
The invention is to carry out wet etching on glass, and the material and process principle of the invention are completely different from the traditional technology of molding and forming a U-shaped structure on a silicon chip by PDMS in a die casting way. The dam structure of this application is more flat, and length-width ratio is obviously great, more like a shallow bowl molding, utilizes dam structure to intercept a plurality of cells that are screened, and the specific size of catching is determined by the top clearance, and the single cell of catch is selected to catch through U type aperture width generally to traditional technique.
Drawings
FIG. 1 is a top view of the etched side of a transparent cover glass trench;
FIG. 2 is an isometric view of a transparent cover glass;
FIG. 3 is a top view of the trench etching surface of a transparent glass substrate;
FIG. 4 is a diagram of the dimensions of an etched channel in a transparent glass substrate;
FIG. 5 is an isometric view of a transparent glass substrate;
FIG. 6 is an isometric view of a microfluidic chip after thermal bonding;
FIG. 7 is a flow chart of microfluidic chip processing;
FIG. 8 is a schematic diagram of microfluidic chip cell capture;
FIG. 9 is a bright field microscopic magnification picture of a dykes and dams array capture leukocytes in a blood sample;
figure 10 is a partial bright field micrograph of a micro dam array.
In the figure, 1, a glass cover sheet; 2. a fluid inlet; 3. a recessed region; 4. a glass substrate; 5. a fluid outlet; 6. an inlet region; 7. a diffusion region; 8. a capture area; 9. an outlet region; 10. a cylindrical array; 11. and (4) a dam array.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples, and the equipment and reagents used in the examples and test examples are commercially available without specific reference. The specific embodiments described herein are merely illustrative of the invention and are not intended to be limiting.
Various modifications to the precise description of the invention will be readily apparent to those skilled in the art from the information contained herein without departing from the spirit and scope of the appended claims. It is to be understood that the scope of the invention is not limited to the procedures, properties, or components defined, as these embodiments, as well as others described, are intended to be merely illustrative of particular aspects of the invention. Indeed, various modifications of the embodiments of the invention which are obvious to those skilled in the art or related fields are intended to be covered by the scope of the appended claims.
For a better understanding of the invention, and not as a limitation on the scope thereof, all numbers expressing quantities, percentages, and other numerical values used in this application are to be understood as being modified in all instances by the term "about". Accordingly, unless expressly indicated otherwise, the numerical parameters set forth in the specification and attached claims are approximations that may vary depending upon the desired properties sought to be obtained. At the very least, each numerical parameter should at least be construed in light of the number of reported significant digits and by applying ordinary rounding techniques. In the present invention, "about" means within 10%, preferably within 5% of a given value or range.
The invention discloses a micro-fluidic target capturing chip based on a micro dam array, a preparation method and application thereof, and the specific embodiment is shown in the following embodiment.
Example 1 preparation of microfluidic target Capture chip
1. Chip design and parameters
A micro-fluidic target capture chip based on micro dam array comprises at least a transparent glass substrate 4 and a transparent glass cover plate 1 as shown in figure 1, figure 2 and figure 6. The thickness H3 of the transparent cover glass sheet 1 and the transparent base glass sheet 4 were each 1.1 mm.
The transparent cover glass 1 was engraved with a recessed area 3 of the same shape as the channel of the transparent glass substrate 4, with a channel etching depth H1 of 4 microns and a through hole with a radius R1 of 1000 microns as the fluid inlet 2. The transparent glass substrate 4 is engraved with a groove area 3 having the same shape as the channel of the transparent cover glass 1, and the channel etching depth H2 is 6 μm. As shown in fig. 3 and 5, the channel interior is, in turn, an inlet region 6, a diffusion region 7, a capture region 8, and an outlet region 9.
Referring to fig. 4 and 5, the diffusion area 7 of the transparent glass substrate 4 is a trapezoidal channel engraved with an array of circular microcolumns, the radius of the cylinder R2 is 100 micrometers, three cylinders adjacent to each other are distributed in an equilateral triangle, and the cylinder interval D1 is 200 micrometers. The cylinder is disposed perpendicular to the glass substrate 4.
The capture region 8 of the transparent glass substrate 4 is a rectangular channel engraved with a micro dam array 11; the length L1 of the miniature dam is 60 microns, the width L2 is 20 microns, the width L3 of the U-shaped structure is 50 microns, and the depth L4 is a rectangular dam body of the U-shaped structure of 6 microns. The micro bank left-right interval L5 is 25 micrometers, the front-rear interval L6 is 25 micrometers, the bank height is H2, and the bank array 11 is formed by 50 rows and 50 columns of micro banks arranged in a staggered manner (for display effect, only some of the banks are shown in the drawings of the present application). The openings of the miniature dams are oriented in the direction of the cylindrical array 10.
The outlet region 9 of the transparent glass substrate 4 is a trapezoidal, closed channel and is perforated with a 500 micron radius through hole, R3, as the fluid outlet 5.
The micro-fluidic chip is prepared by aligning and attaching the etched surface of the glass cover plate 1 and the etched surface of the glass substrate 4 and then thermally bonding, and the micro-fluidic channel consists of an etched cover plate groove and a substrate groove.
2. Chip processing and parameters
The microfluidic chip processing flow is shown in fig. 7.
(1) Magnetic control film coating: two transparent glass slides (75 mm long and 25 mm wide) were selected as the transparent cover glass 1 and the transparent glass substrate 4, respectively.
(2) A layer of metal chromium film is sputtered on one side of the two glass slide glass by a magnetron sputtering method, and the thickness of the metal chromium film is about 300 microns.
(3) Glue homogenizing: coating a layer of AZ5214 photoresist on the surface of the glass slide with the chromium layer by a spin coater, wherein the spin parameters are as follows: the forward rotation speed is 800 rpm, the forward rotation time is 15 seconds, the backward rotation speed is 3000 rpm, and the backward rotation time is 30 seconds.
(4) Soft baking: and transferring the glass slide after glue homogenizing to a heating table at 110 ℃ for baking for 2 minutes.
(5) Exposure: placing the baked photoresist mask on an ultraviolet exposure platform, aligning a cover plate mask (namely an optical mask and a template used for pattern transfer in the photoetching process, namely a negative film used for substrate exposure) and a substrate mask with the photoresist mask respectively, and exposing for 22 seconds after the exposure reading of a photoetching machine is stable.
(6) And (3) developing: the exposed slide was immersed in 5214E developer (NMD-32.38%), rinsed three times with deionized water after development was complete, and blown dry with nitrogen for use.
(7) Primary chromium removal: and (3) placing the developed glass slide into a ceric ammonium nitrate solution, slightly shaking (avoiding scratching), taking out the glass slide after the chromium layer in the exposed area is completely dissolved, washing the glass slide with deionized water for three times, and drying the glass slide with nitrogen for later use.
(8) Wet etching: and (3) putting the glass slide subjected to primary dechromization into the calibrated glass etching solution, quickly removing the glass slide after the etching time is up, washing the glass slide with a large amount of tap water, washing the glass slide with deionized water for three times, and drying the glass slide with nitrogen for later use. The groove, the cylinder and the dam are all formed in one step in the step.
(9) Removing the photoresist: and (3) placing the etched glass slide into an acetone solution, slightly oscillating, washing with deionized water for three times after the photoresist on the surface of the glass slide is completely dissolved and removed, and drying with nitrogen for later use.
(10) Secondary chromium removal: and (3) placing the glass slide glass after the glue is removed into a ceric ammonium nitrate solution, slightly shaking (to avoid scratching), taking out the glass slide glass after the residual chromium layer on the surface of the glass slide glass is completely dissolved, washing the glass slide glass with deionized water for three times, and drying the glass slide glass with nitrogen for later use.
(11) Chip hole drilling: through holes with the radius of 1000 microns and 500 microns are respectively chiseled at the corresponding positions of the glass cover plate 1 and the glass substrate 4 by using a numerical control machine.
(12) Chip thermal bonding: cleaning the glass cover plate 1 and the substrate by using a degreasing detergent, washing the glass cover plate 1 and the substrate for several times by using deionized water, aligning and attaching the etched surface of the glass cover plate 1 and the etched surface of the substrate in the deionized water, taking out the glass cover plate 1 and the etched surface of the substrate, drying a water film in a glass gap on a 85 ℃ hot bench, putting a preliminarily bonded glass chip into a high-temperature muffle furnace with a set temperature parameter curve for chip thermal bonding, and taking out the bonded chip for later use after the temperature is restored to normal temperature. The temperature parameters were as follows:
| time t (min) | Temperature (. degree.C.) |
| 0 | 20 |
| 10 | 50 |
| 35 | 100 |
| 65 | 100 |
| 90 | 150 |
| 115 | 200 |
| 165 | 200 |
| 190 | 250 |
| 220 | 250 |
| 270 | 500 |
| 300 | 500 |
| 400 | 540 |
| 520 | 540 |
| 620 | 445 |
| 720 | 345 |
| 820 | 245 |
| 1035 | 30 |
Example 2 application of microfluidic target Capture chip
In order to verify the performance of the chip for capturing cells, the microfluidic chip prepared by the parameters and the process is used for carrying out the capture experiment of the white blood cells in the peripheral blood sample, and the specific experimental steps and results are as follows:
(1) blood sample pretreatment: and adding 20 microliter of fresh blood sample into 180 microliter of 20% methanol solution by using a pipette gun, slowly blowing and sucking the mixture for several times by using the pipette gun to uniformly mix the mixture, and standing the mixture for 10 to 15 minutes to finish the pre-fixing treatment of the blood cells.
(2) Injecting a blood sample (with the volume of 200 microliters) which is subjected to pre-fixing treatment into the microfluidic channel from the chip fluid inlet 2 by using a micro-injection pump, wherein the sample injection speed is 10 microliters/minute; and injecting PBS solution to clean the microfluidic channel after sample injection is finished, wherein the sample injection speed is 10 microliter/min, and the sample injection time is 5 minutes.
(3) And injecting DAPI solution into the microfluidic chip to perform cell nucleus staining on the captured cells, wherein the sample injection speed is 10 microliters/minute, the sample injection time is 15 minutes, and the cells are protected from light.
The fluid inlet 2 and the fluid outlet 5 are both connected on the chip by a needle tube and a capillary plastic tube, a certain positive pressure is applied to the inlet to push, and the outlet is in a natural outflow form.
(4) The microfluidic chip which completes the leukocyte capture is placed on a microscope stage for observation and photographing.
The cell capture principle is demonstrated in figure 8.
Brightfield photographs of the channel interior micro-dams capturing leukocytes as shown in fig. 9 and 10, approximately 100% of the micro-dams capture leukocytes, each dam capturing an average of 3.93 leukocytes, and the ratio of captured leukocytes to red blood cells is about 60: 1, and the ratio of white blood cells to red blood cells in the normal blood sample before capture is about (4-10). times.109/(3.5～5.5)×1012The ratio of the number of the white blood cells to the number of the red blood cells captured by the micro dam array 11 is increased by about (2.1-8.25) × 104And (4) doubling.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A micro-fluidic target capture chip based on a micro dam array is characterized by comprising a glass cover plate and a glass substrate corresponding to the glass cover plate, wherein one surface of the glass cover plate is provided with a groove area, and one end of the groove area penetrates through the thickness of the glass cover plate and is provided with a fluid inlet; one surface of the glass substrate is provided with a groove channel corresponding to the groove area of the glass cover plate, and the groove channel sequentially comprises an inlet area, a diffusion area, a capture area and an outlet area which correspond to the fluid inlet; the diffusion area is a cylindrical array consisting of a plurality of cylinders, the capture area is a dam array consisting of a plurality of miniature dams, the outlet area is a trapezoidal closed channel, and a fluid outlet is formed in the outlet area in a way of penetrating through the thickness of the glass substrate; the groove surface of the glass cover plate and the groove surface of the glass substrate are oppositely attached and fixed.
2. The microfluidic target capture chip based on the miniature dam array of claim 1, wherein: the cylinder is perpendicular to the glass substrate, and the opening of the miniature dam faces the direction of the cylinder.
3. The microfluidic target capture chip based on the miniature dam array of claim 1, wherein: the vertical distance between the top surface of the miniature dam and the bottom surface of the groove of the glass cover plate is smaller than the diameter of the target object to be captured; the minimum distance between the micro dam and the side wall of the capture area is smaller than the left-right spacing distance between two adjacent micro dams.
4. The microfluidic target capture chip based on the miniature dam array of claim 1, wherein: the miniature dams are arranged in a staggered mode.
5. The microfluidic target capture chip based on the miniature dam array of claim 1, wherein: the distance between the outer walls of adjacent cylinders is greater than the diameter of the target to be captured.
6. The microfluidic target capture chip based on the miniature dam array of claim 1, wherein: the groove depth of the glass cover plate is 3-10 microns, and the groove depth of the glass substrate is 3-15 microns.
7. The method for preparing a microfluidic target capture chip based on a miniature dam array as claimed in any one of claims 1 to 6, comprising:
s1: magnetron sputtering chromium plating, namely sputtering a layer of metal chromium film on the single surface of each of the glass cover plate and the glass substrate by a magnetron sputtering method;
s2: coating a layer of photoresist on the surface of the glass sheet with the chromium layer;
s3: soft baking, namely transferring the glass sheet after glue homogenizing to a heating table for baking;
s4: exposing, namely placing the baked photoresist mask on an ultraviolet exposure platform, aligning a cover plate mask and a substrate mask with the photoresist mask respectively, and exposing for 22 seconds after exposure readings of a photoetching machine are stable;
s5: developing, soaking the exposed slide into a developing solution, washing with deionized water for three times after the developing is finished, and drying with nitrogen for later use;
s6: removing chromium for the first time, putting the developed glass sheet into a ceric ammonium nitrate solution, slightly shaking, taking out the glass sheet after the chromium layer of the exposed area is completely dissolved, washing the glass sheet with deionized water for three times, and drying the glass sheet with nitrogen for later use;
s7: wet etching, namely putting the glass sheet subjected to primary dechromization into the calibrated glass etching solution, quickly removing the glass sheet after the etching time is up, washing the glass sheet by using a large amount of tap water, washing the glass sheet by using deionized water for three times, and drying the glass sheet by using nitrogen for later use;
s8: removing the photoresist, putting the etched glass sheet into an acetone solution, slightly shaking, washing with deionized water for three times after the photoresist on the surface of the glass sheet is completely dissolved and removed, and drying with nitrogen for later use;
s9: performing secondary dechroming, namely putting the glass sheet after the glue is removed into a ceric ammonium nitrate solution, slightly vibrating, taking out the glass sheet after the residual chromium layer on the surface of the glass sheet is completely dissolved, washing the glass sheet with deionized water for three times, and drying the glass sheet with nitrogen for later use;
s10: chip punching, namely, punching a fluid inlet and a fluid outlet at the corresponding positions of the glass cover plate and the glass substrate by using a numerical control machine;
s11: and thermally bonding the chip, namely cleaning the glass cover plate and the substrate by using a detergent, washing the glass cover plate and the substrate by using deionized water for several times, aligning and attaching the etched surfaces of the glass cover plate and the substrate in the deionized water, taking out the glass cover plate and the substrate, putting the glass cover plate and the substrate on a hot table, drying a water film in a glass gap, putting the preliminarily bonded glass chip into a high-temperature muffle furnace with a set temperature parameter curve for chip thermal bonding, and taking out the bonded chip for later use after the temperature is restored to normal temperature.
8. The use of the microfluidic target capture chip based on a dykes and dams of any of claims 1-6 for micro-scale target capture.
9. The use of the microfluidic target capture chip based on a dykes and dams of claim 6 for cell capture.
10. Use according to claim 9, characterized in that: the cells include leukocytes and/or tumor cells.
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| EP4170146A1 (en) * | 2021-10-22 | 2023-04-26 | Hamilton Sundstrand Corporation | Coke catching screen |
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