CN112542913A - Driving sealing mechanism of vacuum chamber power shaft - Google Patents

Driving sealing mechanism of vacuum chamber power shaft Download PDF

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Publication number
CN112542913A
CN112542913A CN202011602532.4A CN202011602532A CN112542913A CN 112542913 A CN112542913 A CN 112542913A CN 202011602532 A CN202011602532 A CN 202011602532A CN 112542913 A CN112542913 A CN 112542913A
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CN
China
Prior art keywords
locking
vacuum chamber
power shaft
rear end
annular
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Pending
Application number
CN202011602532.4A
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Chinese (zh)
Inventor
李宏廷
董苏
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Shantou Jiaxin Packing Material Co ltd
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Shantou Jiaxin Packing Material Co ltd
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Publication date
Application filed by Shantou Jiaxin Packing Material Co ltd filed Critical Shantou Jiaxin Packing Material Co ltd
Priority to CN202011602532.4A priority Critical patent/CN112542913A/en
Publication of CN112542913A publication Critical patent/CN112542913A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/124—Sealing of shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/08—Rigid support of bearing units; Housings, e.g. caps, covers for spindles
    • F16C35/12—Rigid support of bearing units; Housings, e.g. caps, covers for spindles with ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/10—Casings or enclosures characterised by the shape, form or construction thereof with arrangements for protection from ingress, e.g. water or fingers

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Sealing Devices (AREA)

Abstract

The invention relates to a driving sealing mechanism of a vacuum chamber power shaft, which comprises a vacuum chamber, a power shaft, a cylindrical shell, a stator, a rotor and a rear end cover, wherein an annular flanging is arranged at the front end port of the cylindrical shell and is fixedly arranged on the outer side wall of the vacuum chamber through a first locking assembly; the rear end cover is fixedly arranged at the rear port of the cylindrical shell through a second locking assembly, and a second sealing element is arranged between the rear end cover and the rear port of the cylindrical shell; the rear part of the power shaft penetrates through the stator, the rear end of the power shaft is rotatably connected to the rear end cover through a first bearing, the rotor is sleeved at the rear part of the power shaft, and the front end of the power shaft penetrates through the outer side wall of the vacuum chamber and extends into the vacuum chamber. The driving sealing mechanism has the characteristics of simple structure, good sealing performance and long service life, so that the sealing performance of the vacuum chamber is ensured during long-time rotary operation of the power shaft.

Description

Driving sealing mechanism of vacuum chamber power shaft
Technical Field
The invention relates to a sealing mechanism, in particular to a driving sealing mechanism of a vacuum chamber power shaft.
Background
At present, a driving mechanism of a vacuum chamber power shaft generally comprises a motor, a coupler and the power shaft, wherein one end of the power shaft is connected with an output shaft of the motor through the coupler, the other end of the power shaft extends into the vacuum chamber, a shaft sealing structure is adopted between the power shaft and the outer wall of the vacuum chamber, a sealing shaft sleeve is sleeved between the outer wall of the vacuum chamber and the power shaft, oil seal frameworks are arranged at two ends of the sealing shaft sleeve, and a plurality of groups of bearings and sealing rings are arranged in the middle of the sealing shaft sleeve to ensure the sealing performance of the vacuum chamber. The current shaft seal is complicated on the one hand, and the processing assembly requires highly, and on the other hand under the continuous operation of power shaft, the oil blanket skeleton takes place wearing and tearing, and the lubricated effect between bearing and sealing washer and the power shaft reduces for whole shaft seal structure's sealing performance takes place to degrade, thereby leads to vacuum chamber's leakproofness to reduce. For example, in vacuum aluminum plating, the vacuum degree requirement of the vacuum aluminum plating chamber is very high, a coil is fed from one side of the vacuum aluminum plating chamber, and is fed out from the other side of the vacuum aluminum plating chamber, a power shaft is required in the vacuum aluminum plating chamber to ensure the flat conveying of the coil, and at the moment, the sealing performance is often reduced due to the abrasion of the power shaft, so that the vacuum degree of the vacuum aluminum plating chamber is reduced, and the aluminum plating quality is reduced.
In order to reduce the influence of the abrasion of the shaft seal structure on the sealing performance of the vacuum chamber, some manufacturers have improved the shaft seal structure. For example, chinese patent document CN207246415U discloses a vacuum rotary sealing structure, in which a first pressing sleeve and a second pressing sleeve are respectively added on two sides of an installation seat to reinforce the installation seat, and a skeleton sealing ring is provided to ensure the sealing performance of the entire sealing structure. However, although this improvement can extend the service life of the shaft seal structure, it is still necessary to ensure the sealing performance of the power shaft during rotation.
Disclosure of Invention
The invention aims to solve the problem of providing a driving sealing mechanism of a vacuum chamber power shaft, which has the characteristics of simple structure, good sealing performance and long service life, so that the vacuum chamber can keep good sealing performance in long-time rotating operation of the power shaft. The technical scheme is as follows:
a drive sealing mechanism of a vacuum chamber power shaft is characterized in that: the vacuum pump comprises a vacuum chamber, a power shaft, a cylindrical shell, a stator, a rotor and a rear end cover, wherein an annular flanging is arranged at the front end port of the cylindrical shell and is fixedly arranged on the outer side wall of the vacuum chamber through a first locking assembly, and a first sealing element is arranged between the annular flanging and the outer side wall of the vacuum chamber; the rear end cover is fixedly arranged at the rear port of the cylindrical shell through a second locking assembly, and a second sealing element is arranged between the rear end cover and the rear port of the cylindrical shell; the stator is arranged on the inner side wall of the cylindrical shell, the rear portion of the power shaft penetrates through the stator, the rear end of the power shaft is rotatably connected onto the rear end cover through a first bearing, the rotor is connected to the rear portion of the power shaft in a sleeved mode, the front end of the power shaft penetrates through the outer side wall of the vacuum chamber and extends into the vacuum chamber, a shaft sleeve is arranged between the power shaft and the outer side wall of the vacuum chamber, and at least one second bearing is arranged between the shaft sleeve and the power shaft.
In the front-back direction, the power shaft horizontally extends from the outside of the vacuum chamber to the inside of the vacuum chamber as a reference, one end of the power shaft, which is positioned outside the vacuum chamber, is regarded as a back end, and one end of the power shaft, which is positioned inside the vacuum chamber, is regarded as a front end.
The front port of the cylindrical shell is directly locked on the outer side wall of the vacuum chamber through the annular flanging and the first locking component, and a first sealing element is arranged between the annular flanging and the outer side wall of the vacuum chamber, so that no air leakage exists between the front port of the cylindrical shell and the outer side wall of the vacuum chamber; on the other hand, the rear end opening of the cylindrical shell is connected with the rear end cover through the second locking assembly, and a second sealing element is arranged between the cylindrical shell and the rear end cover, so that the inside of the whole cylindrical shell is completely sealed with the outside. The power shaft directly extends into the vacuum chamber from the outside of the vacuum chamber, and only a shaft sleeve and a bearing are arranged between the outer side wall of the vacuum chamber and the power shaft, so that the cylindrical shell is communicated with the vacuum chamber and reaches consistent vacuum degree. When the power shaft rotates, the first sealing element and the second sealing element do not rotate, the first sealing element and the second sealing element are not influenced by the rotation of the power shaft, and the first sealing element and the second sealing element are not abraded along with the long-time rotation of the power shaft, so that the vacuum chamber can keep good sealing performance in the long-time rotation operation of the power shaft.
As a preferable aspect of the present invention, the first locking assembly includes a plurality of first locking bolts, a plurality of first locking through holes, and a plurality of first locking screw holes; a plurality of first through-holes evenly set up along annular turn-ups's circumference, a plurality of first locking screw settings are in on the relevant position of real empty room's outer wall and with a plurality of first locking through-holes one-to-one, each first locking bolt pass corresponding first locking through-hole and with corresponding first locking screw threaded connection.
As a further preferable scheme of the invention, the front side surface of the annular flanging is provided with at least one first annular groove along the circumferential direction, and the first annular groove is positioned at the inner side of each first locking through hole; the outer side wall of the vacuum chamber is provided with second annular grooves which are matched with the first annular grooves and correspond to the first annular grooves one to one; the first sealing element comprises at least one first sealing ring, and each first sealing ring is correspondingly arranged between the first annular groove and the second annular groove.
As a preferred aspect of the present invention, the second locking assembly includes a plurality of second locking bolts, a plurality of second locking through holes, and a plurality of second locking screw holes; the plurality of second through holes are uniformly arranged along the circumferential direction of the rear end cover, the plurality of second locking screw holes are uniformly arranged on the rear side surface of the cylindrical shell along the circumferential direction of the rear port of the cylindrical shell, each second locking screw hole corresponds to each second locking through hole one to one, and each second locking bolt penetrates through the corresponding second locking through hole and is in threaded connection with the corresponding second locking screw hole.
As a further preferable scheme of the present invention, the second sealing element includes at least one second sealing ring, the front side surface of the rear end cap is provided with at least one third annular groove along the circumferential direction thereof, and the third annular groove is located inside each second locking through hole; the rear side wall of the cylindrical shell is provided with fourth annular grooves which are matched with the third annular grooves and correspond to the third annular grooves one to one; the second sealing element comprises at least one second sealing ring, and each second sealing ring is correspondingly arranged between the third annular groove and the fourth annular groove.
In each of the above preferred embodiments, the inner side and the outer side of each of the first locking through hole and the second locking through hole are based on the power shaft, and the side close to the power shaft is regarded as the inner side and the side far from the power shaft is regarded as the outer side.
Compared with the prior art, the invention has the following advantages:
(1) according to the driving sealing mechanism of the vacuum chamber power shaft, the front port of the cylindrical shell is directly locked on the outer side wall of the vacuum chamber through the annular flanging and the first locking component, and the first sealing element is arranged between the annular flanging and the outer side wall of the vacuum chamber, so that no air leakage exists between the front port of the cylindrical shell and the outer side wall of the vacuum chamber; the rear end opening of the cylindrical shell is connected with the rear end cover through a second locking assembly, and a second sealing element is arranged between the cylindrical shell and the rear end cover, so that the inside of the whole cylindrical shell is completely sealed with the outside;
(2) the power shaft directly extends into the vacuum chamber from the outside of the vacuum chamber, and only a shaft sleeve and a bearing are arranged between the outer side wall of the vacuum chamber and the power shaft, so that the cylindrical shell is communicated with the vacuum chamber and reaches consistent vacuum degree;
(3) when the power shaft rotates, the first sealing element and the second sealing element do not rotate, are not influenced by the power shaft and cannot be abraded along with long-time operation of the power shaft, so that the vacuum chamber can keep good sealing performance during the long-time rotation operation of the power shaft;
(4) the power shaft is directly driven to rotate through the matching of the stator and the rotor, and does not need a coupler for connection, so that the structure of the whole driving sealing mechanism is simpler, and the installation is easier.
Drawings
FIG. 1 is a schematic structural view of a preferred embodiment of the present invention;
FIG. 2 is an enlarged view of A in FIG. 1;
FIG. 3 is an enlarged view of B in FIG. 1;
wherein, each is marked as: 1-vacuum chamber, 101-outer side wall of vacuum chamber, 2-power shaft, 201-first bearing, 202-shaft sleeve, 203-second bearing, 3-cylindrical shell, 301-annular flange, 4-stator, 5-rotor, 6-rear end cover, 7-first locking component, 701-first locking bolt, 702-first locking through hole, 703-first locking screw hole, 8-first sealing ring, 81-first annular groove, 82-second annular groove, 9-second locking component, 901-second locking bolt, 902-second locking through hole, 903-second locking screw hole, 10-second sealing ring, 110-third annular groove and 120-fourth annular groove.
Detailed Description
The following further describes the preferred embodiments of the present invention with reference to the accompanying drawings.
As shown in fig. 1, a driving sealing mechanism for a power shaft 2 of a vacuum chamber 1 comprises the vacuum chamber 1, the power shaft 2, a cylindrical shell 3, a stator 4, a rotor 5 and a rear end cover 6; an annular flange 301 is arranged at the front port of the cylindrical shell 3, the annular flange 301 is fixedly arranged on the outer side wall 101 of the vacuum chamber 1 through a first locking assembly 7, and a first sealing element is arranged between the annular flange 301 and the outer side wall 101 of the vacuum chamber 1; the rear end cover 6 is fixedly arranged at the rear port of the cylindrical shell 3 through a second locking assembly 9, and a second sealing element is arranged between the rear end cover 6 and the rear port of the cylindrical shell 3; the stator 4 is arranged on the inner side wall of the cylindrical shell 3, the rear part of the power shaft 2 penetrates through the stator 4, the rear end of the power shaft 2 is rotatably connected to the rear end cover 6 through a first bearing 201, the rotor 5 is sleeved on the rear part of the power shaft 2, the front end of the power shaft 2 penetrates through the outer side wall 101 of the vacuum chamber 1 and extends into the vacuum chamber 1, a shaft sleeve 202 is arranged between the power shaft 2 and the outer side wall 101 of the vacuum chamber 1, and a second bearing 203 is arranged between the shaft sleeve 202 and the power shaft 2.
As shown in fig. 1 and 2, the first locking assembly 7 includes a plurality of first locking bolts 701, a plurality of first locking through holes 702, and a plurality of first locking screw holes 703; the plurality of first through holes are uniformly arranged along the circumferential direction of the annular flange 301, the plurality of first locking screw holes 703 are arranged at corresponding positions on the outer wall of the vacuum chamber 1 and correspond to the plurality of first locking through holes 702 one to one, and each first locking bolt 701 penetrates through the corresponding first locking through hole 702 and is in threaded connection with the corresponding first locking screw hole 703; the front side surface of the annular flange 301 is provided with two first annular grooves 81 along the circumferential direction, and the first annular grooves 81 are positioned at the inner sides of the first locking through holes 702; the outer side wall 101 of the vacuum chamber 1 is provided with second annular grooves 82 which are matched with the first annular grooves 81 and correspond to the first annular grooves one to one; the first sealing element comprises two first sealing rings 8, and the two first sealing rings 8 are respectively and correspondingly arranged between the first annular groove 81 and the second annular groove 82.
As shown in fig. 1 and 3, the second locking assembly 9 includes a plurality of second locking bolts 901, a plurality of second locking through holes 902, and a plurality of second locking screw holes 903; a plurality of second through holes are uniformly arranged along the circumferential direction of the rear end cover 6, a plurality of second locking screw holes 903 are uniformly arranged on the rear side surface of the cylindrical shell 3 along the circumferential direction of the rear port of the cylindrical shell 3, each second locking screw hole 903 corresponds to each second locking through hole 902 one by one, and each second locking bolt 901 penetrates through the corresponding second locking through hole 902 and is in threaded connection with the corresponding second locking screw hole 903; the second sealing element comprises a second sealing ring 10, the front side surface of the rear end cover 6 is provided with a third annular groove 110 along the circumferential direction, and the third annular groove 110 is positioned at the inner side of each second locking through hole 902; a fourth annular groove 120 which is matched with and corresponds to the third annular groove 110 is arranged on the rear side wall of the cylindrical shell 3; the second seal comprises a second seal ring 10, the second seal ring 10 being disposed between the third annular groove 110 and the fourth annular groove 120.
According to the driving sealing mechanism of the power shaft 2 of the vacuum chamber 1, the front port of the cylindrical shell 3 is directly locked on the outer side wall 101 of the vacuum chamber 1 through the annular flange 301 and the first locking component 7, and a first sealing element is arranged between the annular flange 301 and the outer side wall 101 of the vacuum chamber 1, so that no air leakage exists between the front port of the cylindrical shell 3 and the outer side wall 101 of the vacuum chamber 1; and the rear end opening of the cylindrical shell 3 is connected with the rear end cover 6 through a second locking assembly 9, and a second sealing element is arranged between the cylindrical shell 3 and the rear end cover 6, so that the inside of the whole cylindrical shell 3 is completely sealed from the outside. The power shaft 2 directly extends into the vacuum chamber 1 from the outside of the vacuum chamber 1, and only a shaft sleeve 202 and a bearing are arranged between the outer side wall 101 of the vacuum chamber 1 and the power shaft 2, so that the cylindrical shell 3 is communicated with the vacuum chamber 1 and reaches a consistent vacuum degree. When the power shaft 2 rotates, the first sealing element and the second sealing element do not rotate, are not influenced by the power shaft 2, and are not abraded along with long-time operation of the power shaft 2, so that the vacuum chamber 1 can keep good sealing performance during long-time rotation operation of the power shaft 2; on the other hand, the power shaft 2 is directly driven to rotate through the matching of the stator 4 and the rotor 5, and a coupler is not needed for connection, so that the whole driving sealing mechanism is simpler in structure and easier to install.
In addition, it should be noted that the names of the parts and the like of the embodiments described in the present specification may be different, and the equivalent or simple change of the structure, the characteristics and the principle described in the present patent idea is included in the protection scope of the present patent. Various modifications, additions and substitutions for the specific embodiments described may be made by those skilled in the art without departing from the scope of the invention as defined in the accompanying claims.

Claims (5)

1. A drive sealing mechanism of a vacuum chamber power shaft is characterized in that: the vacuum pump comprises a vacuum chamber, a power shaft, a cylindrical shell, a stator, a rotor and a rear end cover, wherein an annular flanging is arranged at the front end port of the cylindrical shell and is fixedly arranged on the outer side wall of the vacuum chamber through a first locking assembly, and a first sealing element is arranged between the annular flanging and the outer side wall of the vacuum chamber; the rear end cover is fixedly arranged at the rear port of the cylindrical shell through a second locking assembly, and a second sealing element is arranged between the rear end cover and the rear port of the cylindrical shell; the stator is arranged on the inner side wall of the cylindrical shell, the rear portion of the power shaft penetrates through the stator, the rear end of the power shaft is rotatably connected onto the rear end cover through a first bearing, the rotor is connected to the rear portion of the power shaft in a sleeved mode, the front end of the power shaft penetrates through the outer side wall of the vacuum chamber and extends into the vacuum chamber, a shaft sleeve is arranged between the power shaft and the outer side wall of the vacuum chamber, and at least one second bearing is arranged between the shaft sleeve and the power shaft.
2. The drive seal mechanism of claim 1, wherein: the first locking assembly comprises a plurality of first locking bolts, a plurality of first locking through holes and a plurality of first locking screw holes; a plurality of first through-holes evenly set up along annular turn-ups's circumference, a plurality of first locking screw settings are in on the relevant position of real empty room's outer wall and with a plurality of first locking through-holes one-to-one, each first locking bolt pass corresponding first locking through-hole and with corresponding first locking screw threaded connection.
3. The drive seal mechanism of claim 2, wherein: the front side surface of the annular flanging is provided with at least one first annular groove along the circumferential direction of the annular flanging, and the first annular grooves are positioned on the inner side of each first locking through hole; the outer side wall of the vacuum chamber is provided with second annular grooves which are matched with the first annular grooves and correspond to the first annular grooves one to one; the first sealing element comprises at least one first sealing ring, and each first sealing ring is correspondingly arranged between the first annular groove and the second annular groove.
4. The drive seal mechanism according to any one of claims 1 to 3, wherein: the second locking assembly comprises a plurality of second locking bolts, a plurality of second locking through holes and a plurality of second locking screw holes; the plurality of second through holes are uniformly arranged along the circumferential direction of the rear end cover, the plurality of second locking screw holes are uniformly arranged on the rear side face of the cylindrical stator along the circumferential direction of the rear port of the cylindrical stator, each second locking screw hole corresponds to each second locking through hole one to one, and each second locking bolt penetrates through the corresponding second locking through hole and is in threaded connection with the corresponding second locking screw hole.
5. The drive seal mechanism of claim 4, wherein: the second sealing element comprises at least one second sealing ring, the front side surface of the rear end cover is provided with at least one third annular groove along the circumferential direction, and the third annular groove is positioned on the inner side of each second locking through hole; the rear side wall of the cylindrical stator is provided with fourth annular grooves which are matched with the third annular grooves and correspond to the third annular grooves one by one; the second sealing element comprises at least one second sealing ring, and each second sealing ring is correspondingly arranged between the third annular groove and the fourth annular groove.
CN202011602532.4A 2020-12-30 2020-12-30 Driving sealing mechanism of vacuum chamber power shaft Pending CN112542913A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011602532.4A CN112542913A (en) 2020-12-30 2020-12-30 Driving sealing mechanism of vacuum chamber power shaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011602532.4A CN112542913A (en) 2020-12-30 2020-12-30 Driving sealing mechanism of vacuum chamber power shaft

Publications (1)

Publication Number Publication Date
CN112542913A true CN112542913A (en) 2021-03-23

Family

ID=75017939

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011602532.4A Pending CN112542913A (en) 2020-12-30 2020-12-30 Driving sealing mechanism of vacuum chamber power shaft

Country Status (1)

Country Link
CN (1) CN112542913A (en)

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