CN112530285A

CN112530285A - Display device and method for manufacturing the same

Info

Publication number: CN112530285A
Application number: CN202011386302.9A
Authority: CN
Inventors: 刘展睿; 郑君丞; 刘品妙
Original assignee: AU Optronics Corp
Current assignee: AU Optronics Corp
Priority date: 2020-01-14
Filing date: 2020-12-01
Publication date: 2021-03-19

Abstract

A display device comprises a flexible substrate, a first lead, a second lead and a plurality of oblique conductive structures. The flexible substrate has a first surface and a second surface opposite to the first surface. The flexible substrate comprises a display area and a flexible area. The first lead is located on the first surface of the flexible substrate. The first conductive lines extend from the display region to the flexible region. The second lead is located on the second surface of the flexible substrate. The second lead is at least arranged in the flexible area. The plurality of oblique conductive structures are at least arranged in the flexible area and at least penetrate through the flexible substrate. The plurality of oblique conductive structures are electrically connected with the first lead and the second lead. A method for manufacturing a display device is also provided.

Description

Display device and method for manufacturing the same

Technical Field

The present invention relates to a display device and a method for manufacturing the same, and more particularly, to a display device having a plurality of oblique conductive structures and a method for manufacturing the same.

Background

In a display device having a flexible substrate, the flexible substrate may need to be forced to be curled or bent correspondingly according to application requirements. Therefore, it is an important objective of the present invention to provide a flexible substrate with a good transmission capability, which can reduce the possibility of damage or breakage of the circuit on the flexible substrate when the flexible substrate is curled or bent, or the circuit on the flexible substrate can have a good transmission capability.

Disclosure of Invention

The invention provides a display device and a manufacturing method thereof, which have better quality.

The display device comprises a flexible substrate, a first lead, a second lead and a plurality of oblique conductive structures. The flexible substrate has a first surface and a second surface opposite to the first surface. The flexible substrate comprises a display area and a flexible area. The first lead is located on the first surface of the flexible substrate. The first conductive lines extend from the display region to the flexible region. The second lead is located on the second surface of the flexible substrate. The second lead is at least arranged in the flexible area. The plurality of oblique conductive structures are at least arranged in the flexible area and at least penetrate through the flexible substrate. The plurality of oblique conductive structures are electrically connected with the first lead and the second lead.

The manufacturing method of the display device of the invention comprises the following steps: providing a flexible substrate, wherein the flexible substrate is provided with a first surface and a second surface opposite to the first surface, and the flexible substrate comprises a display area and a flexible area; forming first conducting wires on the first surface of the flexible substrate, wherein the first conducting wires extend from the display area to the flexible area; forming a plurality of inclined through holes penetrating through the flexible substrate, wherein the inclined through holes are at least positioned in the flexible area; and forming a conductive material on the second surface and in the plurality of oblique through holes to form at least a second lead and a plurality of oblique conductive structures.

In view of the above, in the display device or the manufacturing method thereof, the plurality of oblique conductive structures disposed in the flexible region and penetrating through the flexible substrate are used, and the plurality of oblique conductive structures are electrically connected to the first conductive lines and the second conductive lines on the two opposite surfaces of the flexible substrate. Therefore, the display device has better quality.

The invention is described in detail below with reference to the drawings and specific examples, but the invention is not limited thereto.

Drawings

Fig. 1A to 1C are schematic top views of a part of a method for manufacturing a display device according to a first embodiment of the invention.

Fig. 2A to 2C are schematic partial cross-sectional views illustrating a method for manufacturing a display device according to a first embodiment of the invention.

Fig. 3 is a schematic partial cross-sectional view of a display device according to a first embodiment of the present invention.

Fig. 4 is a schematic bottom view of a part of a display device according to a first embodiment of the invention.

Fig. 5 is a schematic top view of a display device according to a first embodiment of the invention.

Fig. 6A to 6B are schematic top views of a part of a method for manufacturing a display device according to a second embodiment of the invention.

Fig. 7A to 7B are schematic partial sectional views illustrating a method for manufacturing a display device according to a second embodiment of the present invention.

Fig. 8 is a schematic partial cross-sectional view of a display device according to a second embodiment of the present invention.

Fig. 9A and 9B are schematic partial cross-sectional views of a display device according to a third embodiment of the invention.

Fig. 10 is a schematic partial cross-sectional view of a display device according to a fourth embodiment of the present invention.

Fig. 11 is a schematic partial cross-sectional view of a display device according to a fifth embodiment of the present invention.

Fig. 12A is a schematic partial cross-sectional view of a display device according to a sixth embodiment of the present invention.

Fig. 12B is a schematic partial cross-sectional view of a display device according to a sixth embodiment of the present invention.

Fig. 13 is a schematic partial cross-sectional view of a display device according to a seventh embodiment of the present invention.

Wherein the reference numerals

100. 200, 300, 400, 500, 600, 700: display device

110. 111, 112, 113: first conductive line

110 w: line width

119: first patterned conductive layer

120. 121, 122, 123: second conductive line

129: second patterned conductive layer

120 w: line width

130: third conducting wire

130 w: line width

140. 141, 142, 143, 240: oblique conductive structure

341. 441, 541, 641: first oblique conductive structure

342. 442, 542, 642: second oblique conductive structure

140a, 140b, 240a, 240 b: radial width

140d, 240d, 441d, 442d, 641d, 642 d: direction of extension

641e, 642 e: direction of projection

140 e: projection (projector)

140s, 240 s: side wall

541 w: first diameter width

542 w: second diameter width

P1: first interval

P2: second pitch

150: flexible substrate

150 a: first surface

150 b: second surface

150 c: section plane

151: display area

152: first connection region

153: deflectable region

154: second connecting region

160: insulating layer

180. 280: oblique through hole

180a, 180 b: bore diameter

180 d: direction of extension

91. 92: laser device

A1, A2, A3, A4, A5, A6: included angle

C1, C2, C3, C4, C5, C6: midpoint

D1: direction of rotation

Detailed Description

The following detailed description of the embodiments of the present invention with reference to the drawings and specific examples is provided for further understanding the objects, aspects and effects of the present invention, but not for limiting the scope of the appended claims.

In the drawings, the thickness of various elements and the like are exaggerated for clarity. Like reference numerals refer to like elements throughout the specification. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" or "overlapping" another element, it can be directly on or connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to physically and/or electrically connected.

It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a "first element," "component," "region," "layer," or "portion" discussed below could be termed a second element, component, region, layer, or portion without departing from the teachings herein.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms, including "at least one", unless the content clearly indicates otherwise. "or" means "and/or". As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, regions, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, regions integers, steps, operations, elements, components, and/or groups thereof.

Furthermore, relative terms, such as "lower" or "bottom" and "upper" or "top," may be used herein to describe one element's relationship to another element, as illustrated. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures. For example, if the device in one of the figures is turned over, elements described as being on the "lower" side of other elements would then be oriented on "upper" sides of the other elements. Thus, the exemplary term "lower" can include both an orientation of "lower" and "upper," depending on the particular orientation of the figure. Similarly, if the device in one of the figures is turned over, elements described as "below" or "beneath" other elements would then be oriented "above" the other elements. Thus, the exemplary terms "below" or "beneath" can encompass both an orientation of above and below.

As used herein, "substantially" or "substantially" includes the stated value and the average value within an acceptable range of deviation of the specified value as determined by one of ordinary skill in the art, taking into account the measurement in question and the specified amount of error associated with the measurement (i.e., the limitations of the measurement system). For example, "about" may mean within one or more standard deviations of the stated value, or within ± 30%, ± 20%, ± 10%, ± 5%.

Unless defined otherwise, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present invention and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

Exemplary embodiments are described herein with reference to cross-sectional views that are schematic illustrations of idealized embodiments. Thus, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, the embodiments described herein should not be construed as limited to the particular shapes of regions as illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, a region shown or described as flat may generally have rough and/or nonlinear features. Further, the acute angles shown may be rounded. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region and are not intended to limit the scope of the claims.

Fig. 1A to 1C are schematic top views of a part of a method for manufacturing a display device according to a first embodiment of the invention. Fig. 2A to 2C are schematic partial cross-sectional views illustrating a method for manufacturing a display device according to a first embodiment of the invention. For example, FIG. 2A may be a schematic cross-sectional view taken along section line I-I ' of FIG. 1A, FIG. 2B may be a schematic cross-sectional view taken along section line II-II ' of FIG. 1B, and FIG. 2C may be a schematic cross-sectional view taken along section line III-III ' of FIG. 1C.

Referring to fig. 1A and fig. 2A, a flexible substrate 150 is provided. The flexible substrate 150 has a first surface 150a and a second surface 150b opposite to the first surface 150 a. The flexible substrate 150 includes a display region 151, a first connection region 152, a flexible region 153, and a second connection region 154. The first connection region 152 may be located between the display region 151 and the flexible region 153. The flexible regions 153 may be located between the first connection regions 152 and the second connection regions 154.

With reference to fig. 1A and fig. 2A, the first conductive lines 110 are formed on the first surface 150a of the flexible substrate 150. The first conductive lines 110 may extend from the display region 151 to the flexible region 153 through the first connection region 152.

In one embodiment, the first patterned conductive layer 119 may be formed on the first surface 150a of the flexible substrate 150 by sputtering. A portion of the patterned lines in the first patterned conductive layer 119 may constitute the first conductive line 110.

In one embodiment, the first patterned conductive layer 119 may have an opening 119 a. In one embodiment, the opening 119a may extend through a portion of the first conductive line 110.

In an embodiment, a driving device (not shown) adapted to drive the light emitting device may be formed on the first surface 150a of the flexible substrate 150. For example, a Thin Film Transistor (TFT) suitable for driving a light emitting device (e.g., a light emitting diode; not shown) or an electrode (e.g., a pixel electrode; not shown) can be formed on the first surface 150a of the display region 151 by a conventional semiconductor process.

In one embodiment, a portion of the first conductive lines 110 in the display region 151 may be electrically connected to a corresponding driving element (not shown) or a corresponding light emitting element (not shown). For example, the first conductive line 110 may be electrically connected to the corresponding driving device or the light emitting device through a corresponding scan line (scan line), a corresponding data line (data line), or a corresponding power line (power line).

In the embodiment, the insulating layer 160 may be disposed between the first conductive lines 110 and the flexible substrate 150, but the invention is not limited thereto.

In one embodiment, the insulating layer 160 may be the same or similar to an insulating film layer called a buffer layer (buffer layer), an insulating film layer called a Gate insulating layer (GI), an insulating film layer called a Planar Layer (PL), or a combination including one or more of the above, but the invention is not limited thereto.

Referring to fig. 1A to 1B and fig. 2A to 2B, a plurality of oblique through holes 180 penetrating the flexible substrate 150 are formed. The slanted via 180 is at least located in the flexible region 153. For example, the laser device 91 may be used to form an oblique through hole 180 penetrating the flexible substrate 150 from the first surface 150a to the second surface 150b of the flexible substrate 150 by laser ablation.

In this embodiment, the position of the oblique via 180 may correspond to a portion of the opening of the first patterned conductive layer 119. That is, structurally, a portion of the opening of the first patterned conductive layer 119 may be a portion of the slanted via 180.

In the embodiment, a portion of the oblique via 180 may be further located at the first connection region 152, but the invention is not limited thereto.

In this embodiment, the aperture 180a of the opening (which may be referred to as an upper opening) of the oblique through hole 180 on the first surface 150a may be larger than the aperture 180b of the opening (which may be referred to as a lower opening) on the second surface 150 b.

In the present embodiment, an angle a1 between the extending direction 180d of the oblique through hole 180 and the first surface 150a is substantially between 30 degrees (degree;) and 60 ° (i.e., greater than or equal to 30 °, and less than or equal to 60 °), and/or an angle a2 between the extending direction 180d of the oblique through hole 180 and the second surface 150b is substantially between 30 ° and 60 °.

In the embodiment, the first surface 150a and the second surface 150b are substantially parallel, but the invention is not limited thereto.

In one embodiment, the extending direction 181d of the oblique through hole 180 may be substantially the direction of a line connecting the midpoint C1 of the upper opening to the midpoint C2 of the lower opening (e.g., the dashed line connecting the midpoint C1 and the midpoint C2 in fig. 2B).

In this embodiment, the inclined through hole 180 may further penetrate the insulating layer 160.

Referring to fig. 1B to 1C and fig. 2B to 2C, after the oblique through hole 180 is formed, a second patterned conductive layer 129 may be formed on the second surface 150B of the flexible substrate 150. A portion of the patterned lines in the second patterned conductive layer 129 may constitute the second conductive line 120. In addition, a portion of the conductive material for forming the second patterned conductive layer 129 may further fill the oblique via 180, so as to form the oblique conductive structure 140 penetrating at least the flexible substrate 150.

In one embodiment, a seed layer (seed layer) may be formed on the second surface 150b of the flexible substrate 150, and then the seed layer is plated with an electroplating layer by an electroplating method. The plating layer may further fill the oblique through-hole 180. After the seed layer is subjected to the patterning step and after the seed layer is subjected to the patterning step, the patterned seed layer and the patterned plating layer may constitute the second patterned conductive layer 129.

In the present embodiment, the shape of the inclined conductive structure 140 may substantially correspond to the contour of the inclined via 180.

In this embodiment, the oblique conductive structure 140 may have a top end and a bottom end opposite to each other. The bottom end of the slanted conductive structure 140 may contact the second conductive line 120. The radial width 140a of the top end of the slanted conductive structure 140 (the radial width 140a may be referred to as a top radial width) may be greater than the radial width 140b of the bottom end of the slanted conductive structure 140 (the radial width 140b may be referred to as a bottom radial width).

In the present embodiment, an angle A3 between the extending direction 140d of the oblique conductive structure 140 and the first surface 150a is substantially between 30 ° and 60 °, and/or an angle a4 between the extending direction 140d of the oblique conductive structure 140 and the second surface 150b is substantially between 30 ° and 60 °. That is, the extending direction 140d of the oblique conductive structure 140 is not perpendicular to the first surface 150a and/or the second surface 150 b.

In one embodiment, the extending direction 140d of the oblique conductive structure 140 may be substantially a direction from a midpoint C3 of the top end thereof to a midpoint C4 of the bottom end thereof (e.g., a dashed line connecting the midpoints C3 and C4 in fig. 2C).

In an embodiment, an angle between the extending direction 140d of the oblique conductive structure 140 and the first surface 150a or the second surface 150b (e.g., the angle A3 or the angle a4) may be substantially between 40 ° and 50 °, but the invention is not limited thereto.

In the present embodiment, the oblique conductive structure 140 may further penetrate through the film layer between the first conductive line 110 and the second conductive line 120. For example, the oblique conductive structure 140 may further penetrate the insulating layer 160 between the first conductive line 110 and the second conductive line 120.

In the present embodiment, the conductive material filled in the oblique via 180 may further cover the first surface 150a of the flexible substrate 150, so as to form the third conductive line 130 covering the first conductive line 110. That is, the materials of the second conductive lines 120, the oblique conductive structures 140, and the third conductive lines 130 may be substantially the same.

The manufacturing of the display device 100 of the present embodiment can be substantially completed by at least the above-mentioned manufacturing method.

Fig. 1C may be a schematic top view of a portion of a display device 100 according to a first embodiment of the invention. Fig. 2C may be a schematic partial cross-sectional view of a display device 100 according to a first embodiment of the invention. Fig. 3 is a schematic partial cross-sectional view of a display device 100 according to a first embodiment of the invention. Fig. 4 is a partial bottom view of a display device 100 according to a first embodiment of the invention. Fig. 5 is a schematic top view of a display device 100 according to a first embodiment of the invention. For example, fig. 1C may be a top view corresponding to the region R1 in fig. 5, fig. 3 may be a cross-sectional view corresponding to the section line IV-IV' in fig. 1C, and fig. 4 may be a bottom view corresponding to the region R1 in fig. 5. In addition, the oblique conductive structure 140 may not be completely located exactly on the cross section formed by the section line IV-IV', but for clarity, fig. 3 schematically illustrates a possible projection of the oblique conductive structure 140 on the cross section by a dotted line.

Referring to fig. 1C, fig. 2C and fig. 3 to fig. 5, the display device 100 includes a flexible substrate 150, a first conductive line 110, a second conductive line 120 and a plurality of oblique conductive structures 140. The first conductive lines 110 are disposed on the first surface 150a of the flexible substrate 150. The first conductive lines 110 extend from the display region 151 to at least the flexible region 153. The second conductive lines 120 are disposed on the second surface 150b of the flexible substrate 150. The second conductive traces 120 are disposed at least in the flexible region 153. The plurality of oblique conductive structures 140 are disposed at least in the flexible region 153. The oblique conductive structures 140 penetrate the flexible substrate 150, and the oblique conductive structures 140 are electrically connected to the first conductive wires 110 and the second conductive wires 120.

In this embodiment, a projection 140e of the extending direction 140d of the oblique conductive structure 140 on the first surface 150a or the second surface 150b is substantially parallel to a projection 110e of the extending direction 110d of the first conductive line 110 on the first surface 150a or the second surface 150b, and/or a projection 140e of the extending direction 140d of the oblique conductive structure 140 on the first surface 150a or the second surface 150b is substantially parallel to a projection 120e of the extending direction 120d of the second conductive line 120 on the first surface 150a or the second surface 150 b. That is, the oblique conductive structures 140 may overlap the first conductive lines 110 and/or the second conductive lines 120 in a direction perpendicular to the first surface 150a or the second surface 150b (e.g., the direction shown in fig. 1C or fig. 4). In an application of the display device 100, an external force may be applied to cause the flexible substrate 150 to generate a corresponding curl or deflection in the flexible region 153. When the flexible substrate 150 is curled or flexed correspondingly, a corresponding stress (e.g., compressive stress) or tensile stress) may be generated inside the flexible substrate 150 or the device thereon located in the flexible region 153. In this way, under the same acting force, by making the extending direction 140d not perpendicular to the oblique conductive structure 140 of the first surface 150a or the second surface 150b, the stress (i.e., the acting force applied per unit area) applied to the oblique conductive structure 140 can be reduced, and the possibility of damage or damage to the oblique conductive structure 140 can be reduced. Therefore, the display device 100 can have good line transmission quality.

In the present embodiment, the first conductive lines 110 and the second conductive lines 120 can be electrically connected to each other by a plurality of oblique conductive structures 140. Thus, the quality of the electronic signal or the power supply can be improved. For example, it may be possible to reduce the voltage drop (IR drop). For example, if some of the first conductive lines 110, the second conductive lines 120, or the oblique conductive structures 140 are unexpectedly damaged or damaged, the transmission of the electrical signals or the power may be performed through other parallel lines. Thus, the display device 100 has good line transmission quality.

In the embodiment, the line width 120w of the second conductive line 120 may be greater than the line width 110w of the first conductive line 110, but the invention is not limited thereto.

In one embodiment, the first surface 150a of the flexible substrate 150 may have the first conductive traces 110 and other devices (e.g., driving devices, light emitting devices, etc.), and the second surface 150b of the flexible substrate 150 may have the second conductive traces 120. Therefore, the line width 120w of the second conductive line 120 may be greater than the line width 110w of the first conductive line 110, and the stresses applied to the two opposite sides (i.e., the first surface 150a and the second surface 150b) of the flexible substrate 150 may be more uniform, so that the possibility of the display device 100 being deformed without external force may be reduced.

In this embodiment, the display device 100 may further include the third conductive line 130, but the invention is not limited thereto.

In the embodiment, the line width 130w of the third conductive line 130 may be greater than the line width 110w of the first conductive line 110, but the invention is not limited thereto.

In the present embodiment, in a direction D1 perpendicular to the extending direction 110D of the first conductive line 110 or the extending direction 120D of the second conductive line 120, the oblique conductive structure 140 electrically connected to a first conductive line 110 or a second conductive line 120 does not substantially completely overlap with other oblique conductive structures 140 electrically connected to the adjacent first conductive line 110 or the adjacent second conductive line 120. In this way, in the process of forming the oblique conductive structure 140, a process window (process window) may be increased, and thus the yield and quality of the display device 100 may be improved.

For example, the first conductive line 110 includes a first conductive line 111 (which may be referred to as a second sub-conductive line), a first conductive line 112 (which may be referred to as a first sub-conductive line), and a first conductive line 113 (which may be referred to as a third sub-conductive line), where the first conductive line 111 and the first conductive line 113 are respectively located on two opposite sides of the first conductive line 112 and are adjacent to the first conductive line 112. The oblique conductive structure 141 (which may be referred to as a second sub-oblique conductive structure) is electrically connected to the first conductive line 111, the oblique conductive structure 142 (which may be referred to as a first sub-oblique conductive structure) is electrically connected to the first conductive line 112, and the oblique conductive structure 143 (which may be referred to as a third sub-oblique conductive structure) is electrically connected to the first conductive line 113. In a direction D1 perpendicular to the extending direction 110D of the first conductive line 110, the oblique conductive structure 141 does not substantially completely overlap the oblique conductive structure 142, and the oblique conductive structure 143 does not substantially completely overlap the oblique conductive structure 142. That is, the oblique conductive structure 142 is not substantially located on the connection line of the oblique

conductive structures

141 and 143.

For another example, the second conductive line 120 includes a second conductive line 121, a second conductive line 122, and a second conductive line 123, wherein the second conductive line 121 and the second conductive line 123 are respectively located at two opposite sides of the second conductive line 122 and adjacent to the second conductive line 122. The inclined conductive structure 141 is electrically connected to the second conductive line 121, the inclined conductive structure 142 is electrically connected to the second conductive line 122, and the inclined conductive structure 143 is electrically connected to the second conductive line 123. In a direction D1 perpendicular to the extending direction 120D of the second conductive line 120, the oblique conductive structure 141 does not substantially completely overlap the oblique conductive structure 142, and the oblique conductive structure 143 does not substantially completely overlap the oblique conductive structure 142.

In one embodiment, in a direction D1 perpendicular to the extending direction 110D of the first conductive line 110 or the extending direction 120D of the second conductive line 120, the oblique conductive structure 140 electrically connected to a first conductive line 110 or a second conductive line 120 may not substantially overlap with other oblique conductive structures 140 adjacent to the first conductive line 110 or the second conductive line 120.

In an embodiment, the display device 100 may further include a circuit board (not shown) disposed on the second connection region 154 of the flexible substrate 150. The Circuit board may be, for example, a Flexible Printed Circuit (FPC), but the invention is not limited thereto. For example, the circuit board may include a circuit board called a Chip On Film (COF) circuit board.

Fig. 6A to 6B are schematic top views of a part of a method for manufacturing a display device according to a second embodiment of the invention. Fig. 7A to 7B are schematic partial sectional views illustrating a method for manufacturing a display device according to a second embodiment of the present invention. For example, FIG. 7A may be a schematic cross-sectional view taken along the line V-V 'of FIG. 6A, and FIG. 7B may be a schematic cross-sectional view taken along the line VI-VI' of FIG. 6B. The manufacturing method of the display device 200 of the second embodiment is similar to that of the display device 100 of the first embodiment, and similar components are denoted by the same reference numerals, and have similar functions, materials, or formation manners, and description thereof is omitted.

Referring to fig. 6A and 7A, a plurality of oblique through holes 280 penetrating the flexible substrate 150 are formed. The slanted via 280 is at least located in the flexible region 153. For example, the laser device 92 may be used to form an oblique through hole 280 penetrating the flexible substrate 150 from the second surface 150b to the first surface 150a of the flexible substrate 150 by laser ablation.

In the present embodiment, the inclined through hole 280 may not penetrate through the first conductive line 110. That is, the inclined through hole 280 may be regarded as a blind hole of the first conductive line 110 with a bottom portion being a portion in terms of overall structure.

In the present embodiment, the aperture 280a of the opening (which may be referred to as an upper opening) of the oblique through hole 280 on the first surface 150a may be smaller than the aperture 280b of the opening (which may be referred to as a lower opening) on the second surface 150 b.

Referring to fig. 6A to 6B and fig. 7A to 7B, after the oblique via 280 is formed, a second patterned conductive layer 129 may be formed on the second surface 150B of the flexible substrate 150. A portion of the patterned lines in the second patterned conductive layer 129 may constitute the second conductive line 120. In addition, a portion of the conductive material for forming the second patterned conductive layer 129 may further fill the oblique via 280, so as to form the oblique conductive structure 240 penetrating at least the flexible substrate 150.

Fig. 6B may be a schematic top view of a portion of a display device according to a second embodiment of the invention. Fig. 7B may be a schematic partial cross-sectional view of a display device according to a second embodiment of the present invention. Fig. 8 is a schematic partial cross-sectional view of a display device 200 according to a second embodiment of the invention. For example, the area corresponding to fig. 6B may be similar to the area R1 in fig. 5, and fig. 8 may be a schematic cross-sectional view corresponding to the section line VII-VII' in fig. 6B. In addition, the oblique conductive structure 240 may not be completely located on the cross section formed by the VII-VII' cross section, but for clarity, fig. 8 schematically shows a possible projection of the oblique conductive structure 240 on the cross section by using a dashed line.

Referring to fig. 6B, fig. 7B and fig. 8, the display device 200 includes a flexible substrate 150, a first conductive line 110, a second conductive line 120 and a plurality of oblique conductive structures 240. The oblique conductive structures 240 penetrate through the flexible substrate 150, and the oblique conductive structures 240 are electrically connected to the first conductive wires 110 and the second conductive wires 120.

In this embodiment, the oblique conductive structure 240 may have a top end and a bottom end opposite to each other. The bottom end of the slanted conductive structure 240 may contact the second conductive line 120. The top end of the slanted conductive structure 240 may contact the first wire 110. A radial width 240a of the top end of the slanted conductive structure 240 (the radial width 240a may be referred to as a top radial width) may be smaller than a radial width 240b of the bottom end of the slanted conductive structure 240 (the radial width 240b may be referred to as a bottom radial width).

In the present embodiment, an angle a5 between the extending direction 240d of the oblique conductive structure 240 and the first surface 150a is substantially between 30 ° and 60 °, and/or an angle a6 between the extending direction 240d of the oblique conductive structure 240 and the second surface 150b is substantially between 30 ° and 60 °.

In one embodiment, the extending direction 240d of the oblique conductive structure 240 may be substantially a direction from a midpoint C5 of the top end thereof to a midpoint C6 of the bottom end thereof (e.g., a dashed line connecting the midpoints C5 and C6 in fig. 7B).

In an embodiment, an angle between the extending direction 240d of the oblique conductive structure 240 and the first surface 150a or the second surface 150b (e.g., the angle a5 or the angle a6) may be substantially between 40 ° and 50 °, but the invention is not limited thereto.

Fig. 9A and 9B are schematic partial cross-sectional views of a display device according to a third embodiment of the invention. The display device 300 of the third embodiment is similar to the display device 100 of the first embodiment, and similar components are denoted by the same reference numerals, and have similar functions, materials, formation or manufacturing manners, and description thereof is omitted. For example, the area corresponding to fig. 6B may be similar to the area illustrated in fig. 2C.

Referring to fig. 9A and 9B, the display device 300 includes a flexible substrate 150, a first conductive line 110, a second conductive line 120, and a plurality of oblique conductive structures 140.

The plurality of oblique conductive structures 140 may include a plurality of first oblique conductive structures 341 and a plurality of second oblique conductive structures 342. The first oblique conductive structures 341 may be disposed on the flexible region 153, and the second oblique conductive structures 342 may be disposed on the first connection region 152 or the second connection region 154. The first oblique conductive structures 341 have a first pitch P1 therebetween, the second oblique conductive structures 342 have a second pitch P2 therebetween, and the first pitch P1 is smaller than the second pitch P2.

Fig. 10 is a schematic partial cross-sectional view of a display device according to a fourth embodiment of the present invention. The display device 400 of the fourth embodiment is similar to the display device 100 of the first embodiment, and similar components are denoted by the same reference numerals, and have similar functions, materials, formation or manufacturing manners, and descriptions thereof are omitted. For example, the corresponding region in fig. 10 may be similar to the region illustrated in fig. 2C.

Referring to fig. 10, the display device 400 includes a flexible substrate 150, a first conductive line 110, a second conductive line 120, and a plurality of oblique conductive structures 140.

The plurality of oblique conductive structures 140 may include a first oblique conductive structure 441 and a second oblique conductive structure 442. The first oblique conductive structure 441 may be disposed on the flexible region 153, and the second oblique conductive structure 442 may be disposed on the first connection region 152 or the second connection region 154. A first included angle a7 is formed between the extending direction 441d of the first oblique conductive structure 441 and the first surface 150a or the second surface 150 b. A second included angle A8 is formed between the extending direction 442d of the second oblique conductive structure 442 and the first surface 150a or the second surface 150b, and the angle of the first included angle a7 is smaller than the angle of the second included angle A8.

In the present embodiment, the number of the first oblique conductive structures 140 or the number of the second oblique conductive structures 140 is not limited.

In the present embodiment, the angle of the first included angle a7 and/or the angle of the second included angle A8 is substantially between 30 ° and 60 °.

Fig. 11 is a schematic partial cross-sectional view of a display device according to a fifth embodiment of the present invention. The display device 500 of the fifth embodiment is similar to the display device 100 of the first embodiment, and similar components are denoted by the same reference numerals, and have similar functions, materials, formation or manufacturing manners, and description thereof is omitted. For example, the area corresponding to fig. 11 may be similar to the area illustrated in fig. 2C.

Referring to fig. 11, the display device 500 includes a flexible substrate 150, a first conductive line 110, a second conductive line 120, and a plurality of oblique conductive structures 140.

The plurality of oblique conductive structures 140 may include a first oblique conductive structure 541 and a second oblique conductive structure 542. The first oblique conductive structure 541 may be disposed in the flexible region 153, and the second oblique conductive structure 542 may be disposed in the first connection region 152 or the second connection region 154. On a cross section 150c parallel to the first surface 150a or the second surface 150b, the first oblique conductive structure 541 has a first radial width 541w, the second oblique conductive structure 542 has a second radial width 542w, and the first radial width 541w is greater than the second radial width 542 w.

In the present embodiment, the number of the first oblique conductive structures 541 or the number of the second oblique conductive structures 542 is not limited.

Fig. 12A is a schematic bottom view of a display device according to a sixth embodiment of the invention. Fig. 12B is a schematic partial cross-sectional view of a display device according to a sixth embodiment of the present invention. The display device 600 of the sixth embodiment is similar to the display device 100 of the first embodiment, and similar components are denoted by the same reference numerals, and have similar functions, materials, formation or manufacturing manners, and description thereof is omitted. For example, the area corresponding to fig. 12A may be similar to the area shown in fig. 2C, and fig. 12B may be a schematic cross-sectional view corresponding to the sectional line VIII-VIII' in fig. 12A.

Referring to fig. 12A and 12B, the display device 600 includes a flexible substrate 150, a first conductive line 110, a second conductive line 120, and a plurality of oblique conductive structures 140. The plurality of oblique conductive structures 140 may include a first oblique conductive structure 641 and a second oblique conductive structure 642. The first slanted conductive structure 641 has a first extending direction 641d, the second slanted conductive structure 642 has a second extending direction 642d, and a projection direction 641e of the first extending direction 641d on the first surface 150a or the second surface 150b (the projection direction 641e may be referred to as a first direction) is substantially different from a projection direction 642e of the second extending direction 642d on the first surface 150a or the second surface 150b (the projection direction 642e may be referred to as a second direction).

In the present embodiment, the projection direction 641e and the projection direction 642e may be opposite.

In this embodiment, a distance between the first oblique conductive structure 641 and the display area 151 is smaller than a distance between the second oblique conductive structure 642 and the display area 151, a projection direction 641e of the first extending direction 641d on the first surface 150a or the second surface 150b faces the display area 151, and a projection direction 642e of the second extending direction 642d on the first surface 150a or the second surface 150b is far away from the display area 151. The distance may be a physical distance between the corresponding oblique conductive structure 140 (e.g., the first oblique conductive structure 641 or the second oblique conductive structure 642) and the display region 151, or a current path (current path) of an electrical signal between the corresponding oblique conductive structure and the display region 151.

In this embodiment, the first oblique conductive structure 641 and the second oblique conductive structure 642 may be located on two opposite sides of a virtual surface 150 d. The dummy surface 150d may be perpendicular to the extending direction 110d of the first conductive trace 110 or the extending direction 120d of the second conductive trace 120, and the dummy surface 150d may be located in the flexible region 153.

In this embodiment, the first extending direction 641d and the second extending direction 642d can be mirror-symmetrical on two opposite sides of the virtual surface 150 d.

In an unillustrated embodiment, the oblique conductive structures 240 in the foregoing embodiments may be configured in the same or similar manner as the first oblique conductive structure 341, the second oblique conductive structure 342, and/or the second oblique conductive structure 342.

Fig. 13 is a schematic partial cross-sectional view of a display device according to a seventh embodiment of the present invention. The display device 700 of the seventh embodiment is similar to the display device 100 of the first embodiment or the display device 100 of the second embodiment, like components are denoted by the same reference numerals, and have similar functions, materials, formation or manufacturing manners, and description thereof is omitted. For example, the corresponding region in fig. 13 may be similar to the region illustrated in fig. 2C.

Referring to fig. 13, the display device 700 includes a flexible substrate 150, a first conductive line 110, a second conductive line 120, a plurality of oblique conductive structures 140, and a plurality of oblique conductive structures 240.

In the present embodiment, the oblique conductive structures 140 and the oblique conductive structures 240 may be disposed in a staggered manner. For example, the plurality of oblique conductive structures 140 and the plurality of oblique conductive structures 240 electrically connected to the same first conductive line 110 or the same second conductive line 120 may be disposed in a staggered manner along the extending direction 110d of the first conductive line 110 or the extending direction 120d of the second conductive line 120. As a result, the number of the entire oblique conductive structures (including the oblique conductive structures 140 and the oblique conductive structures 240) can be increased. In addition, in the process of forming the oblique conductive structure 140 and/or the oblique conductive structure 240, a process margin may be improved, and thus, a yield and quality of the display device 700 may be improved.

In the present embodiment, between the adjacent oblique

conductive structures

140 and 240, the sidewalls adjacent to each other may be substantially parallel to each other. For example, the sidewall 140s of the oblique conductive structure 140 and the sidewall 240s of the oblique conductive structure 240 may be substantially parallel to each other.

The invention does not exclude a combination between the embodiments described above. For example, in one embodiment, the first oblique conductive structure 341 may have a tilt angle similar to that of the first oblique conductive structure 441, and the second oblique conductive structure 342 may have a tilt angle similar to that of the second oblique conductive structure 442. For another example, in an embodiment, the first oblique conductive structure 341 may have a diameter width similar to that of the first oblique conductive structure 541, and the second oblique conductive structure 342 may have a diameter width similar to that of the second oblique conductive structure 542. Also for example, the first oblique conductive structure 341 may have a tilt angle similar to the first oblique conductive structure 441 and may have a radial width similar to the first oblique conductive structure 541, and the second oblique conductive structure 342 may have a tilt angle similar to the second oblique conductive structure 442 and may have a radial width similar to the second oblique conductive structure 542.

In summary, in the display device or the manufacturing method thereof of the present invention, the plurality of oblique conductive structures disposed in the flexible region and penetrating through the flexible substrate are used, and the plurality of oblique conductive structures are electrically connected to the first conductive lines and the second conductive lines on the two opposite surfaces of the flexible substrate. Therefore, the display device has better quality.

The present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it should be understood that various changes and modifications can be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A display device, comprising:

the flexible substrate is provided with a first surface and a second surface opposite to the first surface, and comprises a display area and a flexible area;

the first lead is positioned on the first surface of the flexible substrate and extends from the display area to the flexible area;

the second lead is positioned on the second surface of the flexible substrate and at least arranged in the flexible area; and

and the plurality of oblique conductive structures are at least arranged in the flexible area and at least penetrate through the flexible substrate, and the plurality of oblique conductive structures are electrically connected with the first lead and the second lead.

2. The display device according to claim 1, wherein a line width of the second conductive line is larger than a line width of the first conductive line.

3. The display device of claim 1, further comprising:

and a third conductive line on the first surface of the flexible substrate and covering the first conductive line, wherein the plurality of oblique conductive structures further penetrate through the first conductive line, and the second conductive line, the plurality of oblique conductive structures and the third conductive line are made of substantially the same material.

4. The display device according to claim 1, wherein an angle between the extending direction of the plurality of oblique conductive structures and the first surface or the second surface is between 30 ° and 60 °.

5. The display device according to claim 1, wherein the flexible substrate further comprises a connection region between the display region and the flexible region, the first conductive lines extend from the display region to the flexible region through the connection region, the second conductive lines are further disposed at the connection region, the plurality of oblique conductive structures include at least one first oblique conductive structure disposed at the flexible region and at least one second oblique conductive structure disposed at the connection region, and wherein:

a first distance is reserved between the first oblique conductive structures, a second distance is reserved between the second oblique conductive structures, and the first distance is smaller than the second distance;

a first included angle is formed between the extending direction of the first oblique conductive structure and the first surface or the second surface, a second included angle is formed between the extending direction of the second oblique conductive structure and the first surface or the second surface, and the first included angle is smaller than the second included angle; or

The first oblique conductive structure has a first radial width, the second oblique conductive structure has a second radial width, and the first radial width is greater than the second radial width.

6. The display device according to claim 1, wherein the plurality of oblique conductive structures comprises a first oblique conductive structure and a second oblique conductive structure, a connection distance between the first oblique conductive structure and the display area is smaller than a connection distance between the second oblique conductive structure and the display area, a projection of the first oblique conductive structure onto the first surface or the second surface has a first direction, a projection of the second oblique conductive structure onto the first surface or the second surface has a second direction, and the first direction is substantially different from the second direction.

7. The display device of claim 1, wherein the plurality of oblique conductive structures comprises a first oblique conductive structure and a second oblique conductive structure that are adjacent, wherein opposing sides of the first oblique conductive structure have a first top diameter width and a first bottom diameter width, wherein opposing sides of the second oblique conductive structure have a second top diameter width and a second bottom diameter width, wherein the first top diameter width is greater than the first bottom diameter width, and wherein the second top diameter width is less than the second bottom diameter width.

8. The display device of claim 7, wherein adjacent sidewalls between the first oblique conductive structure and the second oblique conductive structure are substantially parallel.

9. The display device according to claim 1, wherein the first conductive line comprises a first sub-conductive line and a second sub-conductive line and a third sub-conductive line respectively located at two opposite sides of the first sub-conductive line and adjacent to each other, the plurality of oblique conductive structures comprise a first sub-oblique conductive structure connected to the first sub-conductive line, a second sub-oblique conductive structure connected to the second sub-conductive line, and a third sub-oblique conductive structure connected to the third sub-conductive line, and the first sub-oblique conductive structure is not completely located on a connection line of the second sub-oblique conductive structure and the third sub-oblique conductive structure.

10. A method of manufacturing a display device, comprising:

providing a flexible substrate, wherein the flexible substrate is provided with a first surface and a second surface opposite to the first surface, and the flexible substrate comprises a display area and a flexible area;

forming first conductive lines on the first surface of the flexible substrate, wherein the first conductive lines extend from the display region to the flexible region;

forming a plurality of oblique through holes penetrating through the flexible substrate, wherein the oblique through holes are at least positioned in the flexible area; and

and forming a conductive material on the second surface and in the plurality of inclined through holes so as to form at least a second lead and a plurality of inclined conductive structures.