CN112525781A - Particle size spectrum measuring device and method, and separation air chamber and light path assembly thereof - Google Patents
Particle size spectrum measuring device and method, and separation air chamber and light path assembly thereof Download PDFInfo
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Abstract
The invention provides a particle size spectrum measuring device and method, a separation air chamber and a light path component thereof, wherein the whole inner chamber of the separation air chamber is a flat cuboid; two electrodes with opposite polarities are respectively arranged on the left side and the right side of the upper portion of the inner cavity of the air chamber, a stable electric field with the electric field direction perpendicular to the height direction of the inner cavity of the air chamber is formed in the space between the two electrodes, and the width range of the electric field between the two electrodes can cover the width range of the inner cavity of the air chamber. According to the particle size spectrum measuring method, the particles are classified according to the particle size through the electric field, and then the particle size particles are measured in parallel through the linear array CCD, so that the particle size spectrum measuring efficiency is improved; the signal amplitude of the particles with different particle sizes is limited, so that the particles generated by signal noise are prevented from being calculated by mistake; by the method for measuring the particle size in parallel after grading and the method for identifying the pulse waveform of the single-pixel unit particle, the overlapped particles can be easily measured, and the measurement accuracy is improved.
Description
Technical Field
The invention belongs to the technical field of dust and atmospheric particulate measurement, and particularly relates to a particulate particle size spectrum measuring device and method.
Background
In recent years, with the continuous expansion of environmental protection strength and range, atmospheric pollution is greatly improved, and atmospheric pollution monitoring and treatment methods are developed towards accurate monitoring and treatment. Careful analysis of atmospheric particulate characteristics and sources is becoming increasingly important.
The existing particle size spectrum analysis equipment mainly comprises a light scattering method, an electromigration method, an inertia impact method and a filtering method. For real-time measurements, light scattering and electromigration are the main methods. However, in the conventional light scattering method, there are errors in the overlapping and repeating calculation of particles and errors in the shape of particles. The electromigration method requires scanning operation, slow reaction, low time efficiency, and an additional particle counter, and is mainly used in a laboratory. This brings more inconvenience and limitation to the tracing and component analysis of atmospheric pollution.
Disclosure of Invention
In view of this, the present invention provides a particle size spectrum measuring apparatus and method, and a separation gas chamber and a light path component thereof, specifically:
the separation gas chamber is used for a particle size spectrum measuring device, and an inner cavity of the gas chamber inside the separation gas chamber is a flat cuboid with the height larger than the width and the width larger than the thickness; the whole separation air chamber is assembled into a whole by an upper cavity wall body and a lower cavity wall body in a sealing way, the upper cavity wall body encloses the upper part of the air outlet chamber inner cavity, the lower cavity wall body encloses the lower part of the air outlet chamber inner cavity, and the upper cavity wall body and the lower cavity wall body are in insulation sealing connection through an insulation connecting part; two electrodes with opposite polarities and symmetrical length, width and position are respectively arranged on the upper part of the inner cavity of the air chamber close to two side walls in the width direction of the inner cavity of the air chamber, a stable electric field with the electric field direction vertical to the height direction of the inner cavity of the air chamber is formed in the space between the two electrodes on the upper part of the inner cavity of the air chamber, and the width range of the electric field between the two electrodes can cover the width range of the inner cavity of the air chamber; the two electrodes are insulated from the cavity wall body at the upper part of the inner cavity of the air chamber.
Further, the two electrodes are arranged in the air chamber cavity.
Further, the cavity wall body at the lower part of the inner cavity of the air chamber is made of stainless steel and is grounded.
Further, the clean gas entry is located the ascending roof positive center of direction of height of air chamber inner chamber, and the air chamber gas outlet is located the ascending diapire positive center of direction of height of air chamber inner chamber, and the air chamber particulate matter entry then is located the air chamber inner chamber roof and closes on one side lateral wall department on the width direction, perhaps is the linking corner of roof and one side lateral wall to, the gas injection direction of air chamber particulate matter entry sets to the slope towards the inside center of air chamber inner chamber.
Further, the section of the particle inlet of the air chamber is flat and rectangular.
Further, two sections of arc-shaped curved surfaces with gradually reduced height are formed on the top wall of the inner cavity of the air chamber from the clean air inlet to the side walls on the two sides, or two sections of inclined planes which extend obliquely and downwards are formed on the top wall of the inner cavity of the air chamber from the clean air inlet to the side walls on the two sides; the bottom wall of the inner cavity of the air chamber forms two sections of arc-shaped curved surfaces with gradually reduced height from the side walls at two sides to the air outlet of the air chamber, or forms two sections of inclined planes which are inclined and extend downwards from the side walls at two sides to the air outlet of the air chamber.
Further, the lower part of the inner cavity of the air chamber is provided with an optical path component; the light path component comprises an incident light unit and a scattered light unit, the incident light unit comprises a light source, a convex lens, a first diaphragm, a first cylindrical lens, a sheet-shaped light diaphragm and a light trap which are sequentially arranged along the same direction, the scattered light collection unit comprises a scattered light diaphragm, a second cylindrical lens and a linear array CCD which are sequentially arranged along the same scattered light direction, the scattered light direction and the incident light direction of the incident light unit are obliquely intersected between the sheet-shaped light diaphragm and the light trap, and the incident light direction of the incident light unit is intersected with the height of the inner cavity of the air chamber in a perpendicular mode.
The particle size spectrum measuring device comprises the separation air chamber and a vacuum pump, wherein an air inlet of the vacuum pump is connected with an air chamber air outlet of the separation air chamber through a pipeline and a first filter; the external air flow to be measured enters through the sampling inlet, sequentially flows through the heating pipe and the ionization module, and then enters into the air chamber inner cavity of the separation air chamber through the air chamber particle inlet.
The light path component is used for a particle size spectrum measuring device and comprises an incident light unit and a scattered light unit, wherein the incident light unit comprises a light source, a convex lens, a first diaphragm, a first cylindrical lens, a sheet-shaped light diaphragm and a light trap which are sequentially arranged along the same direction, the scattered light collecting unit comprises the scattered light diaphragm, a second cylindrical lens and a linear array CCD which are sequentially arranged along the same scattered light direction, and the scattered light direction and the incident light direction of the incident light unit are obliquely intersected between the sheet-shaped light diaphragm and the light trap.
The particle size spectrum measuring method adopts the particle size spectrum measuring device; classifying particles according to particle size by an electric field between two electrodes at the upper part of an inner cavity of an air chamber, then carrying out parallel measurement on scattered light of the particles by a linear array CCD, equivalently obtaining the number of the particles with corresponding particle size by utilizing photosensitive information obtained by a photosensitive unit at a corresponding photosensitive position on the linear array CCD, setting a single standard amplitude range and a standard duration range of a waveform corresponding to a single normal particle, and when the waveform amplitude of the photosensitive information is in an integral multiple range of the single standard amplitude range and the duration belongs to the standard duration range, distinguishing that the corresponding waveform is a normal particle waveform, and identifying the number of the particles represented by the corresponding waveform as the integral multiple number; otherwise, the corresponding waveform is identified as an abnormal waveform, and the particle number represented by the corresponding waveform is zero.
Based on the technical scheme, compared with the prior art, the invention at least has the following beneficial effects:
1. the particle size spectrum measurement efficiency is improved by adopting a method of classifying particles according to particle size through an electric field and then performing parallel measurement on the particles with the particle sizes through a linear array CCD (charge coupled device);
2. the signal amplitude of the particles with different particle sizes is limited, so that the particles generated by signal noise are prevented from being calculated by mistake;
3. by the method for measuring the particle size in parallel after grading and the method for identifying the pulse waveform of the single-pixel unit particle, the overlapped particles can be easily measured, and the measurement accuracy is improved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of the gas path structure of the measuring device of the present invention;
FIG. 2 is a schematic view of a gas cell;
FIG. 3 is a schematic front view of an optical path structure;
FIG. 4 is a schematic top view of an optical path structure;
FIG. 5 is a schematic view of particle classification and scattering principles;
FIG. 6 is a schematic diagram of the scattered light of particles and the corresponding positions of the linear CCD array;
FIG. 7 is a schematic view of overlapping particle identification;
FIG. 8 is a schematic diagram of anomalous particle identification;
fig. 9 is a particle size spectrum formed by the device according to the number of particles corresponding to different particle sizes.
In the figure, 101-the upper part of the inner cavity of the gas chamber, 102-the particle inlet of the gas chamber, 103-the clean gas inlet, 104 and 105 are two electrodes with opposite polarities, 106-the insulating connecting part, 5-the optical path component, 108-the lower part of the inner cavity of the gas chamber, 109-the gas outlet of the gas chamber, 110-the particle moving track, 201-the vacuum pump, 202, 203 and 205-the first, the second, the third and the 204 of the filter-the clean gas flow controller, 206-the sampling flow controller, 301-the sampling inlet, 302-the heating pipe and 303-the ionization module; 3-separating the air flow plane in the air chamber; 502-light source, 503-convex lens, 504-first diaphragm, 505-first cylindrical lens, 506-plate diaphragm, 508-scattered light diaphragm, 509-second cylindrical lens, 510-linear CCD, 511-incident light, 512-scattered light, 515-light trap
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
Fig. 1 is a schematic diagram of a gas path structure principle of the particulate matter particle size spectrum measuring apparatus of the present invention, as shown in the figure, a vacuum pump 201 is a power source of a sampled gas flow, a gas inlet of the vacuum pump 201 pumps a gas flow from a gas chamber gas outlet 109 of a separation gas chamber in a negative pressure manner through a pipeline and a first filter 202, the gas outlet of the vacuum pump 201 is connected in parallel with two branches through a pipeline in a positive pressure manner, one branch passes through a second filter 203 and a clean gas flow controller 204 in sequence, the gas flow is introduced into a clean gas inlet 103 of the separation gas chamber, and the other branch passes through a third filter.
The first, second, third, and fourth filters 202, 203, 205 are used for filtering out particles, protecting the vacuum pump 201, the clean gas flow controller 204, the sampling flow controller 206, and the like. The gas flow entering the chamber through the clean gas inlet 103 is a particle-free clean gas flow. The clean gas flow controller 204 and the sampling flow controller 206 can control the flow of the branch passage.
Because there is only one path for the total inlet and outlet of the device, the flow rates into the sampling inlet 301 and out of the sampling flow controller 206 are equal, and the sampling inlet flow rate at the sampling inlet 301 can be precisely controlled by adjusting the sampling flow controller 206.
The external air flow to be measured enters the device through the sampling inlet 301, sequentially flows through the heating pipe 302 and the ionization module 303, and then enters the inner cavity of the air chamber of the separation air chamber through the air chamber particle inlet 102. The air current that awaits measuring flows through heating pipe 302 and carries out dehumidification processing, and the reduction humidity is favorable to guaranteeing the ionization effect of particulate matter at next step. The ionization module 303 can ionize a sampled airflow to be measured (hereinafter referred to as a sampled airflow), and a part of particulate matters are positively charged and a part of particulate matters are negatively charged in the ionization process, and the charged particulate matters are hereinafter referred to as particles.
With reference to fig. 1 and 2, the present invention provides a structure of a separation gas chamber, which is not very important in terms of the external shape, but the whole chamber cavity inside the separation gas chamber is a flat cuboid with a height larger than the width and a width larger than the thickness, so that irregular flight of particles in the horizontal direction can be reduced.
Two electrodes 104 and 105 which are opposite in polarity and symmetrical in length, width and position are respectively arranged on the upper part 101 of the air chamber inner cavity and are close to two side walls in the width direction of the upper part, a stable electric field with the electric field direction vertical to the height direction of the air chamber inner cavity is formed in the space between the two electrodes on the upper part 101 of the air chamber inner cavity, and the two electrodes 104 and 105 can cover the width range of the air chamber inner cavity within the width range of the electric field; the two electrodes can be arranged in the inner cavity of the air chamber or positioned outside the inner cavity of the air chamber, and the arrangement in the inner cavity of the air chamber is optimal, so that the effects of the electrodes can be fully exerted, and the inner cavity of the air chamber is sealed and isolated relative to the outside, so that the electrodes avoid the pollution loss of the outside environment;
the whole separation air chamber is assembled into a whole by an upper cavity wall body and a lower cavity wall body in a sealing way, the upper cavity wall body encloses an upper part 101 of an air chamber inner cavity, the lower cavity wall body encloses a lower part 108 of the air chamber inner cavity, and the upper cavity wall body and the lower cavity wall body are in sealing connection through an insulating connecting part 106.
The two electrodes 104, 105 are insulated from the upper chamber wall, or the upper chamber wall is made of an insulating material, so as to ensure that the upper chamber wall does not generate any interference to the particles in the inner cavity of the gas chamber;
the lower chamber wall is made of stainless steel and is grounded so that the air flowing through the lower portion 108 of the chamber is discharged through the chamber outlet 1109.
The lower part 108 of the inner cavity of the air chamber is provided with an optical path component 5; the light path component 5 is used for measuring particle size spectrum of the particulate matter;
the clean gas inlet 103 is positioned at the center of the top wall of the gas chamber cavity in the height direction, the gas chamber gas outlet 109 is positioned at the center of the bottom wall of the gas chamber cavity in the height direction, the gas chamber particle inlet 102 is positioned at the side wall of the top wall of the gas chamber cavity close to the width direction, or the joint corner of the top wall and the side wall, and the gas injection direction of the gas chamber particle inlet 102 is set to be an angle inclined towards the inner center of the gas chamber cavity instead of being directly injected towards the vertical direction right below; still further, the cross-section of the chamber particulate inlet 102 is flat rectangular to allow for the distribution of injected particles to take full advantage of the thickness of the chamber interior.
Preferably, in order to avoid the formation of a vortex due to excessive abrupt diffusion and contraction of the air flow below the clean air inlet 103 and above the air outlet 109 of the air chamber, as shown in fig. 1, two sections of arc-shaped curved surfaces with gradually reduced height are formed on the top wall of the inner cavity of the air chamber from the clean air inlet 103 to the side walls at both sides, or two sections of inclined planes (not shown) extending downwards from the clean air inlet 103 to the side walls at both sides; the bottom wall of the inner cavity of the air chamber forms two sections of arc-shaped curved surfaces with gradually reduced height from the side walls at two sides to the air chamber air outlet 109, or forms two sections of inclined planes extending downwards in an inclined manner from the side walls at two sides to the air chamber air outlet 109;
after the particles enter the upper portion 101 of the chamber cavity of the separation chamber at the chamber particle inlet 102, the particles with polarity opposite to that of the electrode 105 will deflect under the influence of attractive forces and the more charged the deflection is greater. After the particles are deflected and separated, the vertical direction passes through the position of the optical path component 5 and is synchronously detected. The two electrodes are turned off at 106, i.e. no electric field attraction is generated in the lower part 108 of the lower chamber cavity;
the position of the optical path component 5 may be a position closer to 106 as shown in fig. 1, or may be disposed near the middle of the lower portion 108 of the inner chamber of the gas chamber in the height direction, when the particles pass through the optical path component 5, since there is no influence of the electric field, the vertical downward direction is maintained, and the direction is perpendicular to the central track direction of the strip-shaped incident light 511 of the optical path component 5, so that different optical detection areas corresponding to different particles are realized.
Specifically, as shown in fig. 3 and 4, the optical path component 5 includes an incident light unit and a scattered light unit, the incident light unit includes a light source 502, a convex lens 503, a first diaphragm 504, a first cylindrical lens 505, a sheet-shaped light diaphragm 506, and an optical trap 515, which are sequentially arranged along the same direction, where the same direction is the central track direction of the strip-shaped incident light 511, and the scattered light collection unit includes a scattered light diaphragm 508, a second cylindrical lens 509, and a linear CCD510, which are sequentially arranged along the same scattered light direction, and the scattered light direction and the incident light direction of the incident light unit are obliquely intersected between the sheet-shaped light diaphragm 506 and the optical trap 515.
The light from the light source 502 is collimated by the convex lens 503 into parallel light, and then the light spot is intercepted by the first diaphragm 504, leaving a relatively uniform strip-shaped middle portion. Then passes through the first cylindrical lens 505 to become a thin light plane, and the plate-like light stop 506 is to further reduce stray light. Light passes through the lower portion 108 of the chamber cavity and intersects the gas stream, and light that does not contact particles in the gas stream enters the light trap 515 and is no longer reflected back. And the light impinges on the particles passing in the gas stream, producing scattered light. The scattered light collection unit confines the scattered light 512 collected over a range of angles, with scattered light and stray light outside the range of angles being blocked by the scattered light diaphragm 508; the scattered light 512 passing through the scattered light diaphragm 508 is irradiated onto the line CCD510 through the second cylindrical lens 509.
Referring to fig. 5, the gas flow in the separation chamber travels from top to bottom along the plane indicated at 3. in the upper part 101 of the chamber, the particles will deflect and fly under the action of the electric field and the gas flow, as shown by the particle travel path 110 in fig. 5. The particles with different sizes can deflect with different amplitudes under the action of electric field force because of different charged charges. Eventually will be dispersed and ordered according to size and diameter. Particles of the same size, flying past the intersection with the central trajectory plane of incident ribbon light 511, will be at the same position on the intersection. The intersection of the particle with 511 will produce scattered light. The scattered light 512 in a specific angular direction is collected by the cylindrical lens 509 and finally detected by the line CCD 510. Scattered light of particles with different particle sizes is detected by the photosensitive cells at different positions on the line CCD510, respectively. Thus, the scattered light of the particles according to the size distribution is directly projected on the line CCD 510. The waveform and amplitude of the photosensitive information on the linear array CCD510 are read out, and the corresponding particle size can be obtained equivalently.
As shown in fig. 6, particles of different sizes scatter light differently, but because the particles are dispersed in order of size, a particular location on the line CCD510 will correspond to a scattered light of a particular size.
As shown in fig. 7 to 9, the method of the present invention further includes determining whether the waveform is a true particle waveform rather than a noise-caused one, and also can identify overlapping particles.
1) True particle identification
As shown in fig. 7, the normal single particle waveform is shown as a. The amplitude of the normal waveform corresponding to the specific photosensitive position of the linear array CCD has a limited range, the detection in the range is normal particles, and the particle size count is increased by one. If not, the particles are judged to be not true particles, and no counting is performed.
2) Particle overlay recognition
Level1+ and Level 1-are the upper and lower ranges of the single particle amplitude, respectively. level2+ and level 2-are the upper and lower ranges of the superposed waveform of the two particles. And so on, the range is limited when other numbers are superposed. b is the waveform when the two particles completely coincide, c is the waveform when the two particles pass through the optical path next to each other, and d is the waveform when the two particles partially coincide in time. The first interpretation is the coincidence of several particles, which are then counted normally after identification.
Fig. 8 shows the exclusion of particles whose amplitudes and durations do not fit into the ranges, where the peak ranges a and b are not aligned and the durations c are not aligned, so that a, b and c are all abnormal waveforms and are identified as non-particles.
Fig. 9 is an example of a particle size spectrum formed by the present apparatus according to the number of particles corresponding to different particle sizes. And then calculating the particle volume according to the particle size of the particles, the total volume of all the particles in unit time, and calculating the mass according to the particle density of the particulate matters. And (4) dividing the mass by the sampling flow to obtain the real-time mass concentration of the particulate matters.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The separation air chamber is used for a particle size spectrum measuring device and is characterized in that the whole inner cavity of the air chamber inside the separation air chamber is a flat cuboid with the height larger than the width and the width larger than the thickness; the whole separation air chamber is assembled into a whole by an upper cavity wall body and a lower cavity wall body in a sealing way, the upper cavity wall body encloses an upper part (101) of an air chamber inner cavity, the lower cavity wall body encloses a lower part (108) of the air chamber inner cavity, and the upper cavity wall body and the lower cavity wall body are in insulation sealing connection through an insulation connecting part (106); two electrodes (104, 105) which are opposite in polarity and symmetrical in length, width and position are respectively arranged on the upper part (101) of the inner cavity of the air chamber close to two side walls in the width direction of the inner cavity of the air chamber, a stable electric field with the electric field direction vertical to the height direction of the inner cavity of the air chamber is formed in the space between the two electrodes on the upper part (101) of the inner cavity of the air chamber, and the width range of the electric field between the two electrodes (104, 105) can cover the width range of the inner cavity of the air chamber; the two electrodes (104, 105) are insulated from the wall of the upper part (101) of the chamber.
2. The separation gas cell of claim 1, wherein two electrodes are disposed within the gas cell chamber.
3. The separation chamber according to claim 1, characterized in that the chamber wall body of the lower part (108) of the chamber inner chamber is made of stainless steel and is grounded.
4. The separation chamber according to claim 1, wherein the clean gas inlet (103) is located at the center of the top wall in the height direction of the chamber inner cavity, the chamber gas outlet (109) is located at the center of the bottom wall in the height direction of the chamber inner cavity, the chamber particle inlet (102) is located at the position of the top wall of the chamber inner cavity adjacent to one side wall in the width direction or at the joint corner of the top wall and one side wall, and the gas injection direction of the chamber particle inlet (102) is set to be inclined toward the center of the inside of the chamber inner cavity.
5. A separation chamber according to claim 4, characterized in that the chamber particle inlet (102) has a flat rectangular cross-section.
6. The separation gas chamber according to claim 4, wherein the top wall of the inner chamber of the gas chamber is formed with two sections of arc-shaped curved surfaces with gradually reduced height from the clean gas inlet (103) to the side walls at both sides, or is formed with two sections of inclined planes extending obliquely downwards from the clean gas inlet (103) to the side walls at both sides; the bottom wall of the inner cavity of the air chamber forms two sections of arc-shaped curved surfaces with gradually reduced height from the side walls at two sides to the air outlet (109) of the air chamber, or forms two sections of inclined planes which are inclined and extend downwards from the side walls at two sides to the air outlet (109) of the air chamber.
7. The separation gas cell according to claim 1, characterized in that the lower part (108) of the gas cell cavity is provided with a light path component (5); the light path component (5) comprises an incident light unit and a scattered light unit, the incident light unit comprises a light source (502), a convex lens (503), a first diaphragm (504), a first cylindrical lens (505), a sheet-shaped light diaphragm (506) and a light trap (515) which are sequentially arranged along the same direction, the scattered light collection unit comprises a scattered light diaphragm (508), a second cylindrical lens (509) and a linear array CCD (510) which are sequentially arranged along the same scattered light direction, the scattered light direction and the incident light direction of the incident light unit are obliquely intersected between the sheet-shaped light diaphragm (506) and the light trap (515), and the incident light direction of the incident light unit is vertically intersected with the height of the inner cavity of the air chamber.
8. The particle size spectrum measuring device is characterized by comprising the separation gas chamber according to claim 1 and further comprising a vacuum pump (201), wherein a gas inlet of the vacuum pump (201) is connected with a gas chamber gas outlet (109) of the separation gas chamber through a pipeline and a filter I (202), the gas outlet of the vacuum pump (201) is connected with two branches in parallel through the pipeline, one branch is connected with a clean gas inlet (103) of the separation gas chamber after sequentially passing through a filter II (203) and a clean gas flow controller (204), and the other branch is communicated with the outside atmosphere through a filter III (205) and a sampling flow controller (206); the external air flow to be measured enters through the sampling inlet (301), sequentially flows through the heating pipe (302) and the ionization module (303), and then enters into the air chamber inner cavity of the separation air chamber through the air chamber particle inlet (102).
9. The light path component is used for a particle size spectrum measuring device and is characterized by comprising an incident light unit and a scattered light unit, wherein the incident light unit comprises a light source (502), a convex lens (503), a first diaphragm (504), a first cylindrical lens (505), a sheet-shaped light diaphragm (506) and a light trap (515) which are sequentially arranged along the same direction, the scattered light collection unit comprises a scattered light diaphragm (508), a second cylindrical lens (509) and a linear array CCD (510) which are sequentially arranged along the same scattered light direction, and the scattered light direction and the incident light direction of the incident light unit are obliquely intersected between the sheet-shaped light diaphragm (506) and the light trap (515).
10. A method for measuring particle size spectrum of particulate matter, characterized in that, the device for measuring particle size spectrum of particulate matter according to claim 8 is adopted, particles are classified according to particle size by electric field between two electrodes at the upper part of the inner cavity of the air chamber, then the scattered light of the particles is measured in parallel by the linear array CCD (510), the quantity of the particles with corresponding particle size is equivalent by the photosensitive information obtained by the photosensitive unit at the corresponding photosensitive position on the linear array CCD (510), the single standard amplitude range and the standard duration range of the waveform corresponding to a single normal particle are set, when the waveform amplitude of the photosensitive information is in the integral multiple range of the single standard amplitude range, if the duration time is within the standard duration time range, the corresponding waveform is identified as a normal particle waveform, and the number of particles represented by the corresponding waveform is identified as an integral multiple number; otherwise, the corresponding waveform is identified as an abnormal waveform, and the particle number represented by the corresponding waveform is zero.
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