CN109323975A - A kind of OPC counting bearing calibration compared based on echo threshold - Google Patents

A kind of OPC counting bearing calibration compared based on echo threshold Download PDF

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Publication number
CN109323975A
CN109323975A CN201811319971.7A CN201811319971A CN109323975A CN 109323975 A CN109323975 A CN 109323975A CN 201811319971 A CN201811319971 A CN 201811319971A CN 109323975 A CN109323975 A CN 109323975A
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threshold
circuit
threshold value
comparison circuit
opc
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CN109323975B (en
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赵欣
王文誉
桂华侨
石磊
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Hefei Institutes of Physical Science of CAS
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Hefei Institutes of Physical Science of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G01N2015/1022

Abstract

A kind of the technical issues of OPC counting bearing calibration compared based on echo threshold, the method that conventional calibration Coincidence phenomenon can be solved, complicated real-time difference and higher cost.It further include threshold circuit based on OPC, the threshold circuit includes amplifying circuit, threshold value comparison circuit, FPGA counting circuit and single chip control module;Amplifying circuit is electrically connected with the photodetector of OPC;Threshold value comparison circuit and FPGA counting circuit ----connect respectively with single chip control module;FPGA counting circuit ----interior setting particle concentration counts value-based algorithm;It is controlled by single chip control module, single-particle or multiparticle is identified by threshold value comparison circuit, measured by the particle concentration counting value-based algorithm in FPGA counting circuit and Particle number concentration is calculated.The present invention increases threshold circuit, the ascending multiple threshold values of setting, how much foundation measurement environmental selections of threshold value on measurement hardware, can real time correction OPC count Particle density value, calibration accuracy is high, in FPGA counting circuit can simple realization, commercial application value with higher.

Description

A kind of OPC counting bearing calibration compared based on echo threshold
Technical field
The present invention relates to all kinds of extraction drilling and sealings of mine fields, and in particular to a kind of OPC compared based on echo threshold Count bearing calibration.
Background technique
Optical particle counter (Optical Particle Counter, OPC) is a kind of for measuring aerosol particle The individual particle counter of Particle density, usually extracted with stable flow when work include particle air, when each aerosol Particle can generate scattering light when passing through the focus of laser beam by nozzle output, scattering light can generate optical telecommunications on the detector Number, signal is the impulse waveform with certain amplitude and pulsewidth by amplifying circuit output waveform, and usual particle passes through laser production Raw waveform is gaussian shape.After continuous pulse generates, accumulated counts are carried out into accumulator and obtain accumulated value, further according to Time of measuring and uninterrupted can get the Particle density of particle in air in unit volume.
The basic object of any counter is to measure the discrete event occurred in given time period as precisely as possible Quantity, for OPC instrument, particle grows into drop by the condensation of working fluid, when drop continues through the optics of instrument Discrete event is generated when detection part, by drop pass through the light source that space limits, and scatter enough light energies to allow Photoelectric detector detection, generates discrete event.The electric signal generated during such event, usually pulse, and with suitably Circuit count, such as high-speed programmable digital device FPGA.Usual producer wishes OPC ideally, when any given In, only one most particle, which will reside in apparent volume, (is mapped to detection by light source, the fluid stream comprising drop and optics The 3D region that the intersection of device limits, the intersection point in these three regions are commonly referred to as apparent volume, sensing volume or measurement volume).So And in given time, the probability for two or more particles occur is constantly present in view volume, more than two or more The electric signal that generates of drop be difficult to distinguish according to size and shape, and go to count as single pulse, this phenomenon quilt Referred to as coincidence (coincidence).Coincidence phenomenon is lower than 10 in Particle density4/cm3It is lower to influence can be ignored, with The increase of medium middle particle concentration, the probability of coincidence is increased particularly evident, is higher than 10 in Particle density5/cm3When, caused by Particle density error is up to 40% or more.
International apparatus manufacture, the calibration such as TSI or GRIM company to Coincidence error, mainly passes through later data The mode of processing, passes through software calibration.Such as R.JAENICKE (The optical particle counter Cross Sensitivity and coincidence, Aerosol Science, 1972, Vol.30, pp.95to 111) it proposes first For Coincidence phenomenon in the case where given flow velocity, the probability of appearance meets Poisson distribution;Aaron M.Collins(A New Coincidence Correction Method for Condensation Particle Counters,Aerosol Science and Technology, 47:177-182,2013) it is based on the above achievement, and Lambert function has been used to go to calculate To reach it is accurately correcting as a result, this method TSI 3760A together in be achieved, in concentration 3 × 104/cm3~8 × 104/cm3Under, error is less than 4% after correction;Nobuyuki Takegawa(Modification and laboratory evaluation of a TSI ultrafine condensation particle counter(Model3776)for Airborne measurements, Aerosol Science and Technology, 2017, VOL.51, NO.2,235- 245) Coincidence phenomenon is calibrated by the method tested, process is the high concentration aerosol by using standard Generator, while measurement data is obtained using AE3068B and UCPC3776, in Particle density 104/cm3~106/cm3Between use Mass data is fitted, and the calibration factor of Coincidence is obtained by being fitted.The companies such as TSI lead on newest instrument It crosses and increases the depressed structure of sheath at mouth with touching in condensation chamber, trapped particle is from radial intermediate by reducing Coincidence phenomenon.
In summary, no matter all more complicated for software or hardware the method for data processing is, higher cost, Real-time is poor, and the method for Nobuyuki is with greater need for carrying out calibration to instrument in advance.Although the increase of the depressed structure of sheath is significantly reduced Coincidence phenomenon, but cost and volume also significantly rise, and pervious old instrument cannot be modified.
Summary of the invention
A kind of OPC compared based on echo threshold proposed by the present invention counts bearing calibration, can solve conventional calibration The technical issues of method of Coincidence phenomenon, complicated real-time difference and higher cost.
To achieve the above object, the invention adopts the following technical scheme:
A kind of OPC counting bearing calibration compared based on echo threshold, comprising:
Based on OPC, the OPC includes photodetector;
Including threshold circuit, the threshold circuit includes amplifying circuit, threshold value comparison circuit, FPGA counting circuit and monolithic Machine control module;
The amplifying circuit is electrically connected with the photodetector of OPC;
The amplifying circuit, threshold value comparison circuit and FPGA counting circuit are sequentially connected electrically;
The threshold value comparison circuit and FPGA counting circuit are connect with single chip control module respectively;
Setting particle concentration counts value-based algorithm in the FPGA counting circuit;
It is controlled by single chip control module, generates pulse number and pulsewidth as particle channel by threshold value comparison circuit, The umber of pulse and pulsewidth enter FPGA counting circuit and carry out calculating output, the particle concentration value that real time correction OPC is counted.
Further, the threshold value comparison circuit includes the threshold value comparison circuit one being connected in parallel with each other, threshold value comparison electricity Road two and threshold value comparison circuit three;
It is as follows that the particle concentration counts value-based algorithm:
Assuming that flow is Q, Δ t is divided between time of measuring, the pulse width that 1 standard condensation particle generates is Cnt_ Width, then
The concentration count value generated through threshold value comparison circuit one (1) are as follows:
The concentration count value generated through threshold value comparison circuit two (2) are as follows:
The concentration count value generated through threshold value comparison circuit three (3) are as follows:
Then particle total concentration value are as follows:
Wherein, for the threshold value channel of threshold value comparison circuit one, threshold value comparison circuit two and threshold value comparison circuit three, enter Count value Cnt1, Cnt2, Cnt3 and pulse width values Cnt1_width1, Cnt2_width2, Cnt3_ are generated after FPGA respectively width3。
Further, described count value Cnt1, Cnt2, Cnt3 are calculated using accumulator.
Further, when described pulse width values Cnt1_width1, Cnt2_width2, Cnt3_width3 use high speed Clock calculates.
Further, Δ t≤0.5 second is divided between the time of measuring.
Further, the threshold value of the threshold value comparison circuit one is that amplifier exports the 1/4 of maximum value.
Further, the threshold value of the threshold value comparison circuit two is that amplifier exports the 2/4 of maximum value.
Further, the threshold value of the threshold value comparison circuit three is that amplifier exports the 3/4 of maximum value.
As shown from the above technical solution, the present invention increases threshold circuit on measurement hardware, and ascending setting is multiple Threshold value, how much foundation measurement environmental selections of threshold value.When different particle echo impulses and threshold value are compared, each threshold value Channel can all generate pulse number and pulsewidth, these umber of pulses and pulsewidth enter FPGA and carry out calculating output, can real time correction OPC The Particle density value of counting.This method calibration accuracy is high, in FPGA counting circuit can simple realization, business application with higher Value.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment of the present invention;
Fig. 2 (a) be 1 particle of the embodiment of the present invention generate pulse by three road threshold circuits relatively after generate square wave letter Number;
Fig. 2 (b) be 2 and 3 particles of the embodiment of the present invention by three road threshold circuits relatively after generate square-wave signal.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is A part of the embodiment of the present invention, instead of all the embodiments.
Newer business OPC on the market reduces nozzle diameter, and in nozzle to reduce Coincidence phenomenon Place increases sheath gas, and this method is more effective, but when measuring high concentrations of particles, still cannot completely eliminate Coincidence Phenomenon.Statistics-Based Method can correct measurement data, but real-time is poor, be not suitable for the normal occasion of on-line measurement.Therefore originally Inventive embodiments propose after amplifier output signal, increase threshold value comparison circuit, and different threshold circuits export counting more afterwards Pulse signal and pulse width.According to the pulsewidth by different threshold triggers and generation, the quantity of particle can be derived, thus right Coincidence phenomenon is calibrated.
As shown in Figure 1, counting bearing calibration based on the OPC that echo threshold compares described in the present embodiment, including it is based on OPC, the OPC include photodetector;
It further include threshold circuit, the threshold circuit includes amplifying circuit, threshold value comparison circuit, FPGA counting circuit and list Piece machine control module;
The amplifying circuit is electrically connected with photodetector;
The amplifying circuit, threshold value comparison circuit and FPGA counting circuit are sequentially connected electrically;
The threshold value comparison circuit and FPGA counting circuit are connect with single chip control module respectively;
Setting particle concentration counts value-based algorithm in the FPGA counting circuit;
It is controlled by single chip control module, generates pulse number and pulsewidth as particle channel by threshold value comparison circuit, The umber of pulse and pulsewidth enter FPGA counting circuit and carry out calculating output, the Particle density value that real time correction OPC is counted.
The functional block diagram for detecting particle in Fig. 1 in the box of the left side for OPC, after particle passes through measured zone, laser irradiation On particle, the light scattering signal of generation is concentrated on photodetector, is generated pulse electrical signal and is entered in the block diagram of the right Amplifying circuit.Amplifying circuit exports amplified signal, that is, pulse signal, into multichannel threshold value comparison circuit, every road threshold value ratio Compared with the square-wave signal that device generates different in width, FPGA digital circuit summation pulse number and recording impulse width are triggered.
It is to allow for that the embodiment of the present invention, which takes three tunnel threshold value comparison circuits: (1) circuit design simple degree is higher, debugging It is easy;(2) more than three tunnel threshold values, it is lower to improve weight after calculating for the calibration figure of acquisition.Therefore threshold value number It chooses, can be according to Instrument measuring precision demand and cost consideration, most of demand can be met by usually choosing three tunnels.This certain hair Bright embodiment is not limited to the case where tri- tunnel threshold value of Zhi Qu.
Working principle of the embodiment of the present invention and process are specifically described below.Groundwork of the present invention is present in the right side Fig. 1 It mainly include threshold value comparison circuit and FPGA digital circuit in block diagram.Assuming that only one particle passes through apparent volume measurement every time Area, then the pulse generated such as is all at the discrete Gaussian waveform of amplitudes, equal in width, FPGA need to only add up quantity, so that it may accurate To Particle number concentration.But it, can because the presence of Coincidence phenomenon, exists while multiple particles pass through apparent volume measurement zone Can then there be following waveform, as shown in Fig. 2, that is, Fig. 2 (a) and Fig. 2 (b) (Fig. 2 is only given to the case where three Particle Clusters pass through, due to The constraint of OPC jet size, half bore is at 1 centimetre or so, and the condensed size of particle does not have too big in 10um or so Particle Cluster pass through, Fig. 2 is merely illustrative, is not limited to 4 or more particles and passes through situation).
It is listed in Fig. 2 from 1 particle to 3 particles by different arrangements, generates different pulse width and pulse The waveform of height generates square-wave signal after three tunnel threshold value comparisons.For different threshold value channels, into FPGA after produce respectively Livelihood numerical value Cnt1, Cnt2, Cnt3 and pulse width values Cnt1_width1, Cnt2_width2, Cnt3_width3.Assuming that stream Amount is Q, and Δ t is divided between time of measuring, and the pulse width that 1 standard condensation particle (diameter about 10um) generates is Cnt_width, The then concentration count value that threshold value 1 generates are as follows:
The concentration count value that threshold value 2 generates are as follows:
The concentration count value that threshold value 3 generates are as follows:
Particle total concentration value are as follows:
The above calculation procedure and particle concentration count value-based algorithm and realize in FPGA, and Cnt1, Cnt2, Cnt3 use accumulator It realizes, Cnt1_width1, Cnt2_width2, Cnt3_width3 count pulse width, standard condensation particle using high-frequency clock Pulse width Cnt_width is fixed numbers, is stored in FPGA, and flow Q is by structure controls such as gas circuit pump and pressure ports, usually Also it is fixed value, also equally is stored in FPGA.In view of the accumulator inside instrument response time and FPGA counting circuit holds Size is measured, time of measuring interval of delta t is no more than 0.5 second.
Threshold circuit can be realized by comparator in Fig. 2, and threshold size exports amplitude peak according to amplifier and is arranged, threshold value 1 is mainly used for identifying simple grain subpulse, is usually arranged as at the 1/4 of amplifier output maximum value, threshold value 2 and threshold value 3 are mainly used In identifying multiparticle pulse, it is usually arranged as at the 2/4 of amplifier output maximum value and at 3/4.Here it is merely given as major part The empirical value of instrument threshold value, it is rigorous for, threshold value setting here needs the response according to detectors and amplifying circuit, Simple grain subpulse and the shape of multiparticle pulse adjust, to reach optimal identification efficiency.For convenience of adjusting thresholds, the present invention Threshold value is generated using single-chip microcontroller control D/A (digital analog converter).
To sum up, when the embodiment of the present invention thinks that Coincidence phenomenon occurs, although count value only adds 1, pulsewidth Variation is produced with impulse amplitude, the impulse amplitude and pulsewidth and the quantity for passing through apparent volume measurement particle have direct relation. Then after detector amplifying circuit, increase a multi-threshold comparison circuit, and the echo impulse generated is compared, and is generated not With the dispersion square wave of pulsewidth, which enters FPGA digital circuit, count and pulsewidth timing.By different threshold triggers and The pulsewidth of generation can derive the quantity of particle, to calibrate to Coincidence phenomenon.
The embodiment of the present invention counts bearing calibration based on the OPC that echo threshold compares and is not necessarily to carry out commercialization OPC structure Change, it is only necessary to increase part comparison circuit and FPGA internal code, scheme realizes simplicity, and at low cost, business with higher is answered With value.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations;Although with reference to the foregoing embodiments Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation Technical solution documented by example is modified or equivalent replacement of some of the technical features;And these modification or Replacement, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.

Claims (8)

1. a kind of OPC compared based on echo threshold counts bearing calibration, it is characterised in that:
Based on OPC, the OPC includes photodetector;
It further include threshold circuit, the threshold circuit includes amplifying circuit, threshold value comparison circuit, FPGA counting circuit and single-chip microcontroller Control module;
The amplifying circuit is electrically connected with photodetector;
The amplifying circuit, threshold value comparison circuit and FPGA counting circuit are sequentially connected electrically;
The threshold value comparison circuit and FPGA counting circuit are connect with single chip control module respectively;
Setting particle concentration counts value-based algorithm in the FPGA counting circuit;
It is controlled by single chip control module, generates pulse number and pulsewidth as particle channel by threshold value comparison circuit, it is described Umber of pulse and pulsewidth enter FPGA counting circuit and carry out calculating output, the particle concentration value that real time correction OPC is counted.
2. the OPC according to claim 1 compared based on echo threshold counts bearing calibration, it is characterised in that: the threshold Value comparison circuit includes the threshold value comparison circuit one (1), threshold value comparison circuit two (2) and threshold value comparison circuit being connected in parallel with each other Three (3);
It is as follows that the particle concentration counts value-based algorithm:
Assuming that flow is Q, Δ t is divided between time of measuring, the pulse width that 1 standard condensation particle generates is Cnt_width, then
The concentration count value generated through threshold value comparison circuit one (1) are as follows:
The concentration count value generated through threshold value comparison circuit two (2) are as follows:
The concentration count value generated through threshold value comparison circuit three (3) are as follows:
Then particle total concentration value are as follows:
Wherein, logical for the threshold value of threshold value comparison circuit one (1), threshold value comparison circuit two (2) and threshold value comparison circuit three (3) Road, into FPGA after generate respectively count value Cnt1, Cnt2, Cnt3 and pulse width values Cnt1_width1, Cnt2_width2, Cnt3_width3。
3. the OPC according to claim 2 compared based on echo threshold counts bearing calibration, it is characterised in that: the meter Numerical value Cnt1, Cnt2, Cnt3 are calculated using accumulator.
4. the OPC according to claim 2 compared based on echo threshold counts bearing calibration, it is characterised in that: the arteries and veins Width value Cnt1_width1, Cnt2_width2, Cnt3_width3 are rushed using high-frequency clock to calculate.
5. the OPC according to claim 2 compared based on echo threshold counts bearing calibration, it is characterised in that: the survey Amount time interval is Δ t≤0.5 second.
6. the OPC according to claim 2 compared based on echo threshold counts bearing calibration, it is characterised in that: the threshold The threshold value for being worth comparison circuit one (1) is that amplifier exports the 1/4 of maximum value.
7. the OPC according to claim 2 compared based on echo threshold counts bearing calibration, it is characterised in that: the threshold The threshold value for being worth comparison circuit two (2) is that amplifier exports the 2/4 of maximum value.
8. the OPC according to claim 2 compared based on echo threshold counts bearing calibration, it is characterised in that: the threshold The threshold value for being worth comparison circuit three (3) is that amplifier exports the 3/4 of maximum value.
CN201811319971.7A 2018-11-07 2018-11-07 OPC (optical proximity correction) counting correction method based on echo threshold comparison Active CN109323975B (en)

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