CN112525344A - Installation and adjustment device of dispersion type imaging spectrometer - Google Patents

Installation and adjustment device of dispersion type imaging spectrometer Download PDF

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CN112525344A
CN112525344A CN202011255094.9A CN202011255094A CN112525344A CN 112525344 A CN112525344 A CN 112525344A CN 202011255094 A CN202011255094 A CN 202011255094A CN 112525344 A CN112525344 A CN 112525344A
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detector
slit
light source
target
imaging spectrometer
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CN112525344B (en
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李雅灿
周锦松
何晓英
冯蕾
杨雷
徐丽
聂博洋
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Aerospace Information Research Institute of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems

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Abstract

The invention discloses an assembling and adjusting device of a dispersion type imaging spectrometer, which comprises a light source, an integrating sphere, an internal focusing collimator and a reading microscope, wherein the light source adopts a monochromatic light source, a mercury lamp or a polychromatic light source; the internal focusing collimator adopts a transmission type, total reflection type or refraction and reflection type structure and consists of a target, a collimating objective and an internal focusing mechanism. The device does not need to design and process redundant auxiliary assembly and debugging components, and is fixed by assembling and debugging the components of the instrument in the assembly and debugging process, so that the device is low in cost, less in assembly and debugging steps, high in speed and high in precision, and is favorable for assembling and debugging the imaging spectrometers in batch production.

Description

Installation and adjustment device of dispersion type imaging spectrometer
Technical Field
The invention relates to the technical field of imaging spectrometers, in particular to an installation and adjustment device of a dispersion type imaging spectrometer.
Background
The imaging spectrometer can acquire two-dimensional geometric information and spectral information of a detected target, is widely applied to the fields of remote sensing and scientific research, generally comprises a telescopic objective and a spectrometer, and a light splitting element comprises a grating, a prism or a prism-grating assembly. The assembling and adjusting method of the imaging spectrometer is different according to instrument design and assembling and adjusting personnel, some slits are installed on a front telescopic system, some slits are installed on an object surface of the spectrometer, the common assembling and adjusting method comprises the steps of installing the slits on an image surface of the front telescopic system through a collimator, then installing an auxiliary assembling and adjusting component on the object surface of the spectrometer, installing a detector on the image surface of the spectrometer, illuminating the auxiliary assembling and adjusting component through a mercury lamp, adjusting the relative position of the detector and the spectrometer, finally illuminating a polychromatic point light source through the collimator, and installing the front telescopic system on the spectrometer to complete assembling and adjusting of the whole spectrometer.
The main problems of the prior art are as follows: different auxiliary assembly and debugging components need to be designed and processed in the assembly and debugging process of the dispersive imaging spectrometer with different parameters, the universality of the auxiliary assembly and debugging components is lower, the cost is higher, the components of the auxiliary assembly and debugging components and the instrument are still different, when the components of the instrument are reinstalled after the auxiliary assembly and debugging components are disassembled, the reinstallation possibly influences the precision of the instrument, and the whole assembly and debugging precision is to be improved.
Disclosure of Invention
The invention aims to provide an assembling and adjusting device of a dispersion type imaging spectrometer, which does not need to design and process redundant auxiliary assembling and adjusting components, is assembled, adjusted and fixed by all components of an instrument in the assembling and adjusting process, has low cost, less assembling and adjusting steps, high speed and high precision, and is beneficial to the assembling and adjusting of the imaging spectrometer in batch production.
The purpose of the invention is realized by the following technical scheme:
an assembly and adjustment device of a dispersion type imaging spectrometer, the device comprising a light source, an integrating sphere, an internally focusing collimator and a reading microscope, wherein:
the light source adopts a monochromatic light source, a mercury lamp or a polychromatic light source;
the internal focusing collimator adopts a transmission type, total reflection type or catadioptric type structure and consists of a target, a collimating objective and an internal focusing mechanism;
aiming at an imaging spectrometer with a slit arranged on a front telescope system, firstly, fine adjustment is carried out on the slit, a target of an inner focusing collimator is selected as a fringe plate, the target is adjusted to be positioned at a focal plane, after polychromatic light of a light source is turned on and passes through an integrating sphere, light beams enter the inner focusing collimator, and the target is illuminated; then, parallel light is output after passing through the collimating objective lens; the parallel light is converged by a front telescope of an imaging spectrometer to be adjusted and then imaged on a focal plane of a front telescope system; reading the distance between the image of the target of the fringe plate and the image of the slit by using the reading microscope, trimming the slit and a trimming pad of the front telescopic system according to the distance until the edges of the image of the target and the image of the slit on the reading microscope are sharp and clearly visible at the same time, and fixing the slit to realize fine adjustment of the slit;
then, the front telescope system after slit fine adjustment is installed on an imaging spectrometer, the light source is replaced by a monochromatic light source or a mercury lamp, the target in the inner focusing collimator is replaced by a star point plate, after star points are imaged by the front telescope system, the diameter of a star point image is smaller than the width of the slit, and the star point image is imaged on a detector through the spectrometer; adjusting the position of the target, observing the size of a light spot of a star point image on the detector, and recording the defocusing distance of the inner focusing collimator when the light spot is brightest and minimum; calculating the trimming amount of a trimming pad of the detector according to the relation between the focal length of the internal focusing collimator and the focal length of the imaging spectrometer, trimming the trimming pad, and stopping trimming the trimming pad until the star point plate is positioned at the focal plane of the internal focusing collimator; then, the light source is changed into a complex color light source, the relative angle between the detector and the dispersion element is adjusted, so that the point view field complex color image of the light source is sharp and aligned with the detector row, and the detector is fixed at the moment to realize the adjustment of the detector of the imaging spectrometer;
changing the light source to be monochromatic light, adjusting the relative angle between the front telescope system and a spectrometer in the imaging spectrometer to ensure that the slit monochromatic image is sharp and aligned with the detector row, fixing the front telescope system at the moment and realizing the fine adjustment of the front telescope system;
the whole machine of the imaging spectrometer is adjusted after the fine adjustment of the device to the slit, the adjustment of the detector of the imaging spectrometer and the fine adjustment of the front telescope system.
According to the technical scheme provided by the invention, the device does not need to design and process redundant auxiliary assembly and debugging components, and is assembled, debugged and fixed by using the components of the instrument in the assembling and debugging process, so that the device is low in cost, less in assembly and debugging steps, high in speed and high in precision, and is beneficial to the assembly and debugging of mass production imaging spectrometers.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an adjusting device of a dispersive imaging spectrometer according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a fine adjustment process of a slit when the slit is mounted on a front mirror according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an adjustment process of a detector of an imaging spectrometer when a slit is mounted on a front mirror according to an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating a fine adjustment process of the front telescope system when the slit is mounted on the front mirror according to the embodiment of the present invention;
FIG. 5 is a schematic diagram of a detector adjustment process when the slit is mounted on a spectrometer according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a fine adjustment process of a slit when the slit is mounted on a spectrometer according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a fine adjustment process of a front telescope when the slit is mounted on a spectrometer according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of an optical path of an exemplary setup process according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The following will describe the embodiments of the present invention in further detail with reference to the accompanying drawings, and as shown in fig. 1, is a schematic structural diagram of an adjusting device of a dispersive imaging spectrometer provided in the embodiments of the present invention, the device 1 mainly includes a light source 2, an integrating sphere 3, and an internally focusing collimator 4, wherein:
the light source 2 adopts a monochromatic light source, a mercury lamp or a polychromatic light source;
the internal focusing collimator 4 adopts a transmission type, total reflection type or refraction and reflection type structure and consists of a target 5, a collimating objective 7 and an internal focusing mechanism 6, wherein:
the target 5 comprises a star point plate and a fringe plate, the star point plate and the fringe plate can be manufactured in a series at one time, and the size of a star point hole and the line width of the fringe plate are selected according to the focal length of the internal focusing collimator 4, the focal length of a front lens and the size of a detector pixel;
some slits of a common imaging spectrometer are installed on a focal plane of a front telescope system, some slits are installed on an object plane of the spectrometer, as shown in fig. 2, the slit fine adjustment process is schematically illustrated when the slits are installed on a front lens in the embodiment of the present invention, for the imaging spectrometer with the slits installed on the front telescope system, the slits are firstly fine adjusted, a target 5 of an inner focusing collimator 4 is selected as a fringe plate, the target 5 is adjusted to be located at the focal plane, and after the polychromatic light of a light source 2 is turned on and passes through an integrating sphere 3, the light beam enters the inner focusing collimator 4 to illuminate the target 5; then, the parallel light is output after passing through the collimating objective 7; the parallel light is converged by a front telescope of an imaging spectrometer to be adjusted and then imaged on a focal plane of a front telescope system; reading the distance between the image of the target 5 of the fringe plate and the image of the slit by using the reading microscope 8, trimming the slit and a trimming pad of the front telescopic system according to the distance until the edges of the image of the target 5 and the image of the slit on the reading microscope 8 are sharp and clearly visible at the same time, and fixing the slit to realize fine adjustment of the slit;
as shown in fig. 3, which is a schematic diagram of an adjustment process of a detector of an imaging spectrometer when a slit is installed on a front mirror according to an embodiment of the present invention, a front telescope system after fine adjustment of the slit is installed on the imaging spectrometer, the light source 2 is replaced by a monochromatic light source or a mercury lamp, the target 5 in the inner focusing collimator 4 is replaced by a star point plate, and after a star point is imaged by the front telescope system, the diameter of a star point image is smaller than the width of the slit, and the star point image is imaged on the detector by the spectrometer; adjusting the position of the target 5, observing the size of a light spot of a star point image on the detector, and recording the defocusing distance of the inner focusing collimator 4 when the light spot is the brightest and minimum; calculating the trimming amount of a trimming pad of the detector according to the relation between the focal length of the inner focusing collimator 4 and the focal length of the imaging spectrometer, trimming the trimming pad until the star point plate is positioned at the focal plane of the inner focusing collimator 4, wherein the star point image observed on the detector is brightest and sharpest, and stopping trimming the trimming pad; then, the light source 2 is replaced by a complex color light source, the relative angle between the detector and the dispersion element is adjusted, so that the point view field complex color image of the light source 2 is sharp and aligned with the detector row, and the detector is fixed at the moment to realize the adjustment of the detector of the imaging spectrometer;
as shown in fig. 4, which is a schematic diagram of a fine adjustment process of a front telescope system when a slit is installed on a front mirror according to an embodiment of the present invention, the light source 2 is replaced with monochromatic light, and a relative angle between the front telescope system and a spectrometer in an imaging spectrometer is adjusted, so that the monochromatic light of the slit is sharp and aligned with the detector, and the front telescope system is fixed to realize the fine adjustment of the front telescope system;
the whole machine of the imaging spectrometer is adjusted after the fine adjustment of the device to the slit, the adjustment of the detector of the imaging spectrometer and the fine adjustment of the front telescope system.
Further, for an imaging spectrometer with a slit installed on the spectrometer, the process of using the device for adjustment specifically comprises:
as shown in fig. 5, which is a schematic diagram of a process of adjusting a detector when a slit is installed on a spectrometer according to an embodiment of the present invention, the detector is installed at the rear end of an imaging spectrometer, a front telescope is installed at the front end of the imaging spectrometer, a target 5 of an inner focusing collimator 4 is a star point plate, the target 5 is first adjusted to be located at a focal plane, a light source 2 is turned on, the light source illuminates the star point plate target 5 after passing through an integrating sphere 3, and then parallel light is output after passing through a collimator lens 7 of the inner focusing collimator 4; images formed by the star point plate are focused by the front telescope and then imaged on a focal plane, and then imaged on the detector through the spectrometer; adjusting the position of the target 5, observing the size of a light spot of a star point plate on the detector, and recording the defocusing distance of the inner focusing collimator 4 when the size of the light spot is the smallest, the sharpest and the brightest; calculating the trimming amount of a trimming pad of the detector according to the relation between the focal length of the inner focusing collimator 4 and the focal length of the imaging spectrometer, trimming the trimming pad until the target 5 is positioned at the focal plane of the inner focusing collimator 4, and stopping trimming the trimming pad when the star point plate image seen on the detector is brightest and sharpest; then, the light source 2 is replaced by a polychromatic light source, the relative angle between the detector and a spectrometer in the imaging spectrometer is adjusted, so that the polychromatic image of the point view field of the light source 2 is sharp and is aligned with the detector row, and the detector is fixed at the moment to realize the adjustment of the detector of the imaging spectrometer;
as shown in fig. 6, which is a schematic diagram of a fine adjustment process of a slit when the slit is installed on a spectrometer according to an embodiment of the present invention, the front telescope is detached, the slit is installed at the front end of an imaging spectrometer, and the light source 2 is replaced by a monochromatic light source; the monochromatic light source 2 uniformly irradiates the slit after passing through the integrating sphere 3, and then images on the detector after passing through the spectrometer; the slit monochromatic image edge is sharp by adjusting the front-back distance between the slit and the front end face of the spectrograph, then the slit is rotated to enable the monochromatic image of the slit on the detector to be sharp and to be aligned with the detector row, and the slit is fixed at the moment to realize fine adjustment of the slit;
fig. 7 is a schematic diagram illustrating a fine adjustment process of a front telescope when a slit is installed on a spectrometer according to an embodiment of the present invention, in which the front telescope is installed at the front end of the spectrometer, the target 5 is replaced by a fringe plate, and the light source 2 is replaced by polychromatic light; firstly, adjusting a target 5 to be positioned at a focal plane, turning on the light source 2 to illuminate the target 5 after passing through an integrating sphere 3, and outputting parallel light after passing through a collimating mirror 7 of the inner focusing collimator 4; the image formed by the target 5 is focused by the front telescope and then imaged on a focal plane, and then imaged on the detector through the slit and the spectrometer; adjusting the position of the target 5, observing the stripe contrast of a stripe plate image, and recording the defocusing distance of the inner focusing collimator 4 when the stripe is sharpest; calculating the trimming amount of a trimming pad of the front telescope according to the relation between the focal length of the inner focusing collimator 4 and the focal length of the imaging spectrometer, trimming until the target 5 is positioned at the focal plane of the inner focusing collimator 4, and stopping trimming of the trimming pad if the streak plate image observed on the detector is brightest and sharpest, and fixing the front telescope to realize fine adjustment of the front telescope;
the whole machine of the imaging spectrometer is adjusted by adjusting the detector of the imaging spectrometer, finely adjusting the slit and finely adjusting the front telescope through the device.
In a specific implementation, the imaging spectrometer is a dispersion system based on an area array detector; the internally focusing collimator 4 can be realized by modifying a collimator commonly used in a laboratory.
The following will explain the assembling process of the above device in detail by using a specific example, in this example, a visible near infrared imaging spectrometer with a slit installed on the spectrometer is assembled, the detector scale is 2048 × 2048, the detector pixel size is 11um × 11um, and the technical indexes are as shown in table 1:
TABLE 1 System index requirements
Figure BDA0002772874310000051
Figure BDA0002772874310000061
According to the indexes of the imaging spectrometer to be adjusted, the adjusting process by using the device specifically comprises the following steps:
1. internal focusing collimator focal length f1600mm, focal plane adjustable range + -50 mm. According to the focal length of the inner focusing collimator, the focal length of the front lens and the size width of the detector pixel, a star point plate with the diameter smaller than (11um multiplied by 600mm)/100mm which is 66um and a stripe plate with the stripe interval larger than 66um are selected. In this embodiment, a star point board with a diameter of 50um and a stripe board with a stripe interval of 100um are selected for adjustment.
2. As shown in fig. 8, which is a schematic diagram of an optical path during the installation and adjustment process of the embodiment of the present invention, the initial adjustment of the detector is performed first, the detector is installed at the rear end of the spectrometer, and the front telescope is installed at the front end of the spectrometer. The target of the inner focusing collimator is selected as a star point plate, the target of the inner focusing collimator is adjusted to be positioned at the focal plane, a laser light source with the wavelength of 632.8nm is turned on to illuminate the star point target of the inner focusing collimator after passing through an integrating sphere, parallel light is output through a collimating lens of the inner focusing collimator, and an image formed by the star point plate is prepositionedAfter the telescope converges, imaging is carried out on a focal plane of a front telescope system, and a star point plate image is imaged on a detector through a spectrometer; adjusting the position of a target of the inner focusing collimator, observing the size of a light spot of a star point plate of an imaging spectrometer, recording the defocusing distance d of the inner focusing collimator as-18 mm when the light spot is the sharpest and brightest and smallest, and focusing according to the focal length f of the inner focusing collimator1And focal length f of imaging spectrometer2The trimming amount of the trimming pad of the detector is calculated according to the relationship between the two
Figure BDA0002772874310000062
And trimming the trimming pad until the star point plate of the inner focusing collimator is positioned at the focal plane of the inner focusing collimator, the star point plate image seen on the detector is brightest and sharpest, and the trimming of the trimming pad is stopped at the moment, so that the initial adjustment of the detector is realized.
3. The light source is replaced by a double-color light source tungsten lamp, the relative angle between the detector and the spectrometer is adjusted, so that the point view field double-color image of the light source is sharp and is aligned with the detector row, the detector is fixed, and the detector is accurately adjusted.
4. The front telescope is detached, the slit is arranged at the front end of the spectral imaging system, the light source is replaced by a laser with a monochromatic light source of 632.8nm, the monochromatic light source is uniformly irradiated on the slit after passing through the integrating sphere, and the slit is imaged on the detector after passing through the spectrometer; the slit monochromatic image edge is sharp by adjusting the front-back distance delta x between the slit and the front end face of the spectrograph, then the slit is rotated, the monochromatic image of the slit on the detector is sharp and aligned with the detector row, the slit is fixed, and the fine adjustment of the slit is realized.
5. The method comprises the steps that a front telescope is arranged at the front end of a spectrograph, a replacement target is a fringe plate, a replacement light source is a polychromatic light tungsten lamp, the target of an inner focusing collimator is adjusted to be located at the focal plane of the inner focusing collimator, a polychromatic light source 2 is turned on and illuminates a fringe plate target 5 after passing through an integrating sphere 3, parallel light is output after passing through a collimating lens 7, an image formed by the fringe plate is focused by the front telescope of an imaging spectrograph and then is imaged on the focal plane of a front telescope system, and then the image is imaged on a detector after passing through a slit and the spectrograph; adjusting the position of the target 5, observing the imaging lightThe fringe contrast of the spectrometer fringe plate image is recorded when the fringe is the sharpest, the defocusing distance d of the inner focusing collimator 5 is recorded as-3 mm, and the relationship between the focal length of the inner focusing collimator and the focal length of the imaging spectrometer is determined according to the relationship
Figure BDA0002772874310000071
And calculating the trimming amount of the front-mounted lens trimming pad, trimming until the fringe plate is positioned at the focal plane of the inner focusing collimator, and stopping trimming of the trimming pad when the fringe plate image seen on the detector is brightest and sharpest, and fixing the front-mounted telescope to realize fine adjustment of the front-mounted telescope.
After the adjustment, the whole machine of the imaging spectrometer can be adjusted.
It is noted that those skilled in the art will recognize that embodiments of the present invention are not described in detail herein.
In conclusion, the assembling and adjusting device disclosed by the invention does not need to design and process redundant auxiliary assembling and adjusting components, such as a common auxiliary diaphragm process slit, and is completely assembled, adjusted and fixed by the components of the instrument in the assembling and adjusting process, so that the condition that the components of the instrument are reinstalled after the auxiliary assembling and adjusting components are removed does not exist, the cost is low, the assembling and adjusting steps are few, the speed is high, the precision is high, and the assembling and adjusting device is beneficial to the assembling and adjusting of the imaging spectrometers in batch production.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (4)

1. An installation and adjustment device of a dispersion type imaging spectrometer, which is characterized by comprising a light source, an integrating sphere, an inner focusing collimator and a reading microscope, wherein:
the light source adopts a monochromatic light source, a mercury lamp or a polychromatic light source;
the internal focusing collimator adopts a transmission type, total reflection type or catadioptric type structure and consists of a target, a collimating objective and an internal focusing mechanism;
aiming at an imaging spectrometer with a slit arranged on a front telescope system, firstly, fine adjustment is carried out on the slit, a target of an inner focusing collimator is selected as a fringe plate, the target is adjusted to be positioned at a focal plane, after polychromatic light of a light source is turned on and passes through an integrating sphere, light beams enter the inner focusing collimator, and the target is illuminated; then, parallel light is output after passing through the collimating objective lens; the parallel light is converged by a front telescope of an imaging spectrometer to be adjusted and then imaged on a focal plane of a front telescope system; reading the distance between the image of the target of the fringe plate and the image of the slit by using the reading microscope, trimming the slit and a trimming pad of the front telescopic system according to the distance until the edges of the image of the target and the image of the slit on the reading microscope are sharp and clearly visible at the same time, and fixing the slit to realize fine adjustment of the slit;
then, the front telescope system after slit fine adjustment is installed on an imaging spectrometer, the light source is replaced by a monochromatic light source or a mercury lamp, the target in the inner focusing collimator is replaced by a star point plate, after star points are imaged by the front telescope system, the diameter of a star point image is smaller than the width of the slit, and the star point image is imaged on a detector through the spectrometer; adjusting the position of the target, observing the size of a light spot of a star point image on the detector, and recording the defocusing distance of the inner focusing collimator when the light spot is brightest and minimum; calculating the trimming amount of a trimming pad of the detector according to the relation between the focal length of the internal focusing collimator and the focal length of the imaging spectrometer, trimming the trimming pad, and stopping trimming the trimming pad until the star point plate is positioned at the focal plane of the internal focusing collimator; then, the light source is changed into a complex color light source, the relative angle between the detector and the dispersion element is adjusted, so that the point view field complex color image of the light source is sharp and aligned with the detector row, and the detector is fixed at the moment to realize the adjustment of the detector of the imaging spectrometer;
changing the light source to be monochromatic light, adjusting the relative angle between the front telescope system and a spectrometer in the imaging spectrometer to ensure that the slit monochromatic image is sharp and aligned with the detector row, fixing the front telescope system at the moment and realizing the fine adjustment of the front telescope system;
the whole machine of the imaging spectrometer is adjusted after the fine adjustment of the device to the slit, the adjustment of the detector of the imaging spectrometer and the fine adjustment of the front telescope system.
2. The tuning device of the dispersive imaging spectrometer according to claim 1, wherein for an imaging spectrometer with a slit mounted on the spectrometer, the tuning process using the device is specifically:
the detector is arranged at the rear end of the imaging spectrometer, the front telescope is arranged at the front end of the imaging spectrometer, the target of the internal focusing collimator tube adopts a star point plate, the target is firstly adjusted to be positioned at the focal plane, the light source is turned on to illuminate the star point plate target after passing through the integrating sphere, and then parallel light is output after passing through the collimating mirror of the internal focusing collimator tube; images formed by the star point plate are focused by the front telescope and then imaged on a focal plane, and then imaged on the detector through the spectrometer; adjusting the position of the target, observing the size of a light spot of a star point plate on the detector, and recording the defocusing distance of the inner focusing collimator when the size of the light spot is the smallest, the sharpest and the brightest; calculating the trimming amount of a trimming pad of the detector according to the relation between the focal length of the inner focusing collimator and the focal length of the imaging spectrometer, trimming the trimming pad until the target is positioned at the focal plane of the inner focusing collimator, and stopping trimming the trimming pad when the star point plate image seen on the detector is brightest and sharpest; then, the light source is changed into a polychromatic light source, the relative angle between the detector and a spectrometer in the imaging spectrometer is adjusted, so that the polychromatic image of the point view field of the light source is sharp and aligned with the detector row, and the detector is fixed at the moment to realize the adjustment of the detector of the imaging spectrometer;
the front telescope is detached, the slit is arranged at the front end of the imaging spectrometer, and the light source is replaced by a monochromatic light source; the monochromatic light source is uniformly irradiated on the slit after passing through the integrating sphere, and then is imaged on the detector after passing through the spectrometer; the slit monochromatic image edge is sharp by adjusting the front-back distance between the slit and the front end face of the spectrograph, then the slit is rotated to enable the monochromatic image of the slit on the detector to be sharp and to be aligned with the detector row, and the slit is fixed at the moment to realize fine adjustment of the slit;
mounting a front telescope at the front end of a spectrometer, replacing the target with a fringe plate, and replacing the light source with polychromatic light; firstly, adjusting a target to be positioned at a focal plane, turning on the light source to illuminate the target after passing through an integrating sphere, and outputting parallel light after passing through a collimating mirror of the internal focusing collimator; the image formed by the target is focused by the front telescope and then imaged on a focal plane, and then imaged on the detector through the slit and the spectrometer; adjusting the position of the target, observing the stripe contrast of a stripe plate image, and recording the defocusing distance of the inner focusing collimator when the stripe is sharpest; calculating the trimming amount of a trimming pad of the front telescope according to the relation between the focal length of the internal focusing collimator and the focal length of the imaging spectrometer, trimming until the target is positioned at the focal plane of the internal focusing collimator, stopping trimming of the trimming pad, fixing the front telescope, and realizing fine adjustment of the front telescope;
the whole machine of the imaging spectrometer is adjusted by adjusting the detector of the imaging spectrometer, finely adjusting the slit and finely adjusting the front telescope through the device.
3. The setup device of the dispersive imaging spectrometer according to claim 1,
the sizes of star point holes and the line widths of the star point plate and the fringe plate are selected according to the focal length of the internal focusing collimator, the focal length of the front lens and the size of the detector pixel.
4. The setup device of the dispersive imaging spectrometer according to claim 1,
the imaging spectrometer is a dispersion system based on an area array detector;
the internal focusing collimator is realized by modifying a collimator commonly used in a laboratory.
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