CN112524255A - Slicer main shaft and seal structure thereof - Google Patents

Slicer main shaft and seal structure thereof Download PDF

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Publication number
CN112524255A
CN112524255A CN202011538345.4A CN202011538345A CN112524255A CN 112524255 A CN112524255 A CN 112524255A CN 202011538345 A CN202011538345 A CN 202011538345A CN 112524255 A CN112524255 A CN 112524255A
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CN
China
Prior art keywords
main shaft
sealing ring
air
ring
foreign matter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011538345.4A
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Chinese (zh)
Inventor
王海超
仇健
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qingdao Gaoce Technology Co Ltd
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Qingdao Gaoce Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qingdao Gaoce Technology Co Ltd filed Critical Qingdao Gaoce Technology Co Ltd
Priority to CN202011538345.4A priority Critical patent/CN112524255A/en
Publication of CN112524255A publication Critical patent/CN112524255A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/40Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406Sealings between relatively-moving surfaces by means of fluid by at least one pump
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/164Sealings between relatively-moving surfaces the sealing action depending on movements; pressure difference, temperature or presence of leaking fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/44Free-space packings
    • F16J15/447Labyrinth packings
    • F16J15/4472Labyrinth packings with axial path
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/44Free-space packings
    • F16J15/447Labyrinth packings
    • F16J15/4476Labyrinth packings with radial path
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Abstract

The invention discloses a slicer main shaft and a sealing structure thereof, which comprises a movable sealing ring arranged on a main shaft central shaft, a flange plate arranged on the outer side of the main shaft central shaft, a static sealing ring arranged on the flange plate, an oil retainer ring arranged corresponding to a bearing outer ring on the outer side of the main shaft central shaft, and a spacer ring arranged between the main shaft central shaft and the bearing inner ring, an air supply groove for temporarily storing compressed air is formed between the flange plate and the static sealing ring, the dynamic sealing ring and the static sealing ring are arranged adjacently, an air curtain air passage is formed in the space between the dynamic sealing ring and the static sealing ring, the air supply groove is communicated with the air curtain air passage to form a back blowing air curtain to prevent foreign matters from entering, the sealing structure improves the sealing effect by utilizing the centrifugal force of the rotating part, increases the difficulty of foreign matters entering the sealing structure, meanwhile, the foreign matter can be effectively discharged, the foreign matter is prevented from flowing backwards, and the service life of the main shaft is prolonged.

Description

Slicer main shaft and seal structure thereof
Technical Field
The invention belongs to the technical field of silicon wafer processing, and particularly relates to a slicer main shaft and a sealing structure thereof.
Background
Along with the development of photovoltaic trade, require more and more high to the reliability of crystal silicon slicer, wherein the leakproofness problem of crystal silicon slicer headstock directly influences the reliability of crystal silicon slicer.
When the crystal silicon slicing machine works, the working environment of the main shaft box is severe, a large amount of water vapor and silicon powder formed by cutting exist, once the water vapor and the silicon powder enter the main shaft box, the main shaft fails, and the work of the slicing machine is influenced.
Accordingly, further developments and improvements are still needed in the art.
Disclosure of Invention
Aiming at various defects in the prior art, in order to solve the problems, the slicer main shaft and the sealing structure thereof are provided, and the sealing structure is provided with a multi-layer sealing structure, so that foreign matters can be effectively prevented from entering a bearing, and the foreign matters are prevented from flowing backwards into the sealing structure.
In order to achieve the purpose, the invention provides the following technical scheme:
a main shaft sealing structure of a slicing machine comprises a movable sealing ring, a flange plate, a static sealing ring, an oil retainer and a spacer ring, wherein the movable sealing ring is installed on a main shaft central shaft, the flange plate is arranged on the outer side of the main shaft central shaft, the static sealing ring is arranged on the flange plate, the oil retainer corresponds to the outer ring of a bearing on the outer side of the main shaft central shaft, the spacer ring is arranged between the main shaft central shaft and the inner ring of the bearing, an air supply groove for temporarily storing compressed air is formed between the flange plate and the static sealing ring, the movable sealing ring and the static sealing ring are arranged adjacently, an air curtain air passage is formed in the space between the movable.
Preferably, the top of the flange plate is provided with a first air supply channel, the first air supply channel is communicated with the air supply groove to provide compressed air for the air supply groove, and an inlet of the first air supply channel is connected with a second air supply channel arranged on a bearing sleeve outside the bearing.
Preferably, move and still be provided with the foreign matter that is used for holding the dirty chamber of holding of foreign matter and prevents that the foreign matter from getting into between sealing ring and the static sealing ring and end the indent, set up in the air vent on the static sealing ring, hold dirty chamber and pass through air vent and air feed tank intercommunication, hold dirty chamber and foreign matter and end the indent intercommunication, the entry and air curtain air flue intercommunication are ended to the foreign matter, and compressed gas loops through the air feed tank, holds dirty chamber, foreign matter and ends indent and air curtain air flue formation blowback air curtain.
Preferably, the bottom of the flange plate is provided with a sewage draining channel for draining foreign matters in the sewage containing cavity, a sewage draining hole is formed between the sewage containing cavity and the sewage draining channel, and the sewage containing cavity is communicated with the sewage draining channel through the sewage draining hole.
Preferably, the flange plate is provided with a water baffle corresponding to the sewage discharge channel, and the water baffle is arranged on the outer side of the flange plate.
Preferably, hold dirty chamber and set up to a plurality ofly, every holds dirty chamber and corresponds and be provided with a blowdown hole, and the blowdown passageway holds dirty chamber intercommunication through every blowdown hole and every respectively.
Preferably, a first labyrinth seal for preventing foreign matters from entering the main shaft is arranged between the dynamic sealing ring and the flange.
Preferably, a second labyrinth for preventing foreign matters from entering the bearing is provided between the spacer and the slinger.
A slicer spindle including a slicer spindle seal as described above.
Has the advantages that:
the invention provides a slicer main shaft and a sealing structure thereof, the sealing structure improves the sealing effect by utilizing the centrifugal force of a rotating part, increases the difficulty of foreign matters entering the sealing structure, simultaneously ensures that the foreign matters cannot continuously enter the sealing structure along the outline of the rotating part, simultaneously can effectively promote the discharge of the foreign matters, ensures that a back-blowing air curtain formed by compressed gas is more uniform, avoids the phenomenon of pumping of the back-blowing air curtain, can prevent the compressed gas from entering a bearing while preventing the foreign matters from entering the bearing, simultaneously discharges the discharged foreign matters along the non-working end of the main shaft, avoids the backward flow of the foreign matters, and prolongs the service life of the main shaft.
Drawings
Fig. 1 is a schematic structural view of a spindle sealing structure of a microtome according to embodiment 1 of the present invention;
FIG. 2 is an enlarged view of FIG. 1A;
FIG. 3 is an enlarged view of FIG. 1B;
fig. 4 is a schematic structural view of a spindle sealing structure of a microtome according to embodiment 2 of the present invention.
In the drawings: 100 movable sealing rings, 110 sewage containing cavities, 111 sewage discharging holes, 120 foreign matter stopping grooves, 130 first labyrinth seals, 200 flange plates, 210 air supply grooves, 220 first air supply channels, 230 sewage discharging channels, 240 water baffles, 300 static sealing rings, 310 air curtain air channels, 320 vent holes, 400 oil baffles, 410 second labyrinth seals, 500 spacing rings, 600 central shafts, 700 bearings, 800 bearing sleeves and 810 second air supply channels
Detailed Description
In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
Example 1:
as shown in fig. 1-3, the present invention provides a spindle sealing structure for microtome, which includes a movable sealing ring 100 mounted on a spindle center shaft 600, a flange 200 disposed on the outer side of the spindle center shaft 600, a static sealing ring 300 disposed on the flange 200, an oil baffle ring 400 disposed corresponding to the outer ring of a bearing 700 disposed on the outer side of the spindle center shaft 600, and a spacer 500 disposed between the spindle center shaft 600 and the inner ring of the bearing 700, wherein an air supply groove 210 for temporarily storing compressed air is formed between the flange 200 and the static sealing ring 300, the movable sealing ring 100 and the static sealing ring 300 are disposed adjacent to each other, a space between the movable sealing ring 100 and the static sealing ring 300 forms an air curtain air passage 310, and the air supply groove 210 is communicated with the air curtain air passage 310 to form a back.
Specifically, the top of ring flange 200 is provided with first air feed channel 220, first air feed channel 220 and air feed groove 210 intercommunication provide compressed air for air feed groove 210, the entry of first air feed channel 220 is connected with the second air feed channel 810 that sets up on bearing housing 800 outside bearing 700, gaseous second air feed channel 810 and first air feed channel 220 through provide compressed gas in to air feed groove 210, compressed gas in air feed groove 210 carries out the equilibrium, make compressed gas prevent more evenly that the compressed air that gets into air curtain air flue 310 is intermittent, cause the blowback air curtain of formation to appear discontinuously, can not play the effect of good prevention foreign matter entering.
Specifically, move still to be provided with between sealing ring 100 and the static sealing ring 300 and be used for holding the dirty chamber 110 of holding of foreign matter and prevent that the foreign matter got into from ending the inlet groove 120, be provided with air vent 320 on the static sealing ring 300, hold dirty chamber 110 and pass through air vent 320 and air supply tank 210 intercommunication, hold dirty chamber 110 and prevent that the inlet groove 120 intercommunication is ended to the foreign matter, the foreign matter ends inlet groove 120 and air curtain air flue 310 intercommunication, compressed gas loops through air supply tank 210, holds dirty chamber 110, the foreign matter ends inlet groove 120 and air curtain air flue 310 and forms the blowback air curtain, be provided with the recess in holding dirty chamber 110, the foreign matter ends the inlet groove 120 and holds dirty chamber 110 and can intercept the foreign matter that the blowback air curtain got into the main shaft, gets rid of the foreign matter of holding dirty chamber 110 in through centrifugal action.
Specifically, the bottom of the flange 200 is provided with a drainage channel 230 for discharging foreign matters in the dirt containing cavity 110, a drainage hole 111 is arranged between the dirt containing cavity 110 and the drainage channel 230, the dirt containing cavity 110 is communicated with the drainage channel 230 through the drainage hole 111, the foreign matters in the groove of the dirt containing cavity 110 are discharged into the drainage channel 230 through the drainage hole 111, and the phenomenon that the foreign matters in the dirt containing cavity 110 are too much to cause the foreign matters to enter the main shaft through the gap of the dirt containing cavity 110 is prevented.
Specifically, the flange 200 is provided with a water baffle 240 corresponding to the sewage channel 230, the water baffle 240 is arranged outside the flange 200, the water baffle 240 can be detachably arranged, foreign matters on the water baffle 240 can be cleaned by detaching the water baffle 240, and the sewage channel 230 can be inspected and cleaned after detaching the water baffle 240, so that the sewage channel 230 is prevented from being blocked by the foreign matters, and the sewage effect of the whole sewage channel 230 is improved.
Specifically, hold dirty chamber 110 and set up to a plurality ofly, every holds dirty chamber 110 and corresponds and be provided with a blowdown hole 111, and blowdown channel 230 communicates with every dirt chamber 110 of holding through every blowdown hole 111 respectively, and a plurality ofly holds and is provided with the aperture between the dirty chamber 110 and communicate, and a plurality ofly holds the multiplicable quantity that holds the foreign matter in dirty chamber 110, and can increase the degree of difficulty that the foreign matter got into the main shaft through holding dirty chamber 110.
Specifically, a first labyrinth seal 130 for preventing foreign matters from entering the main shaft is disposed between the dynamic seal ring 100 and the flange 200.
Specifically, a second labyrinth 410 for preventing foreign matters from entering the bearing 700 is provided between the spacer 500 and the slinger 400.
A slicer spindle including a slicer spindle seal as described above.
The invention ensures the clean sealing in the main shaft and prevents the main shaft from losing efficacy by preventing foreign matters from entering the main shaft and promoting the foreign matters to be discharged out of the sealing structure, and the method for preventing the foreign matters from entering the main shaft comprises the following steps:
the outline outer diameter of a rotating component of the main shaft sealing structure, which is composed of the space ring 500, the central shaft 600 and the dynamic sealing ring 100, is gradually reduced from outside to inside, and the difficulty of foreign matters entering the sealing structure is increased through the centrifugal effect during rotation;
a foreign matter stopping groove 120 and a dirt containing cavity 110 are arranged between the static sealing ring 300 and the dynamic sealing ring 100, so that foreign matters can be further prevented from entering, and the entered foreign matters can be thrown into a groove of the dirt containing cavity 110, which corresponds to the static sealing ring 300, through centrifugal force;
the first labyrinth seal 130 between the dynamic seal ring 100 and the flange 200 and the second labyrinth seal 410 between the oil retainer 400 and the spacer 500 can prevent compressed gas and foreign matters from entering the bearing 700, and prevent high pressure caused by the compressed gas from damaging the internal seal of the bearing 700;
compressed gas enters the gas supply groove 210 through the second gas supply channel 810 and the first gas supply channel 220, the gas supply groove 210 can preliminarily balance the compressed gas, and then the compressed gas enters the dirt containing cavity 110 through the vent holes 320, so that the compressed gas is further balanced, the compressed gas can be ensured to be continuously output, one part of the compressed gas entering the dirt containing cavity 110 forms a back-blowing gas curtain through the gas curtain gas channel 310 between the movable sealing ring 100 and the static sealing ring 300 to blow out a main shaft sealing structure, and the effect of continuously preventing foreign matters from entering the sealing structure is achieved;
the trapway 230 extends to the non-working end of the spindle to prevent discharged foreign matter from reentering the seal along the working end, while also preventing foreign matter from flowing back into the seal along the trapway 230 at the working end.
The foreign matter discharge promoting sealing structure comprises the following modes:
after the compressed gas enters the dirt containing cavity 110 through the vent hole 320, a part of the gas carries foreign matters thrown into the groove of the dirt containing cavity 110 corresponding to the static sealing ring 300 by centrifugal force and enters the dirt discharge channel 230 through the dirt discharge hole 111, and the foreign matters are blown out of the spindle through the non-working end of the spindle.
Example 2:
the same parts of embodiment 2 and embodiment 1 are not repeated, and the differences from embodiment 1 are shown in fig. 4, a main shaft central shaft 600 and a dynamic sealing ring 100 are combined to form a new main shaft central shaft 600, other parts are all the same as those of embodiment 1, an air curtain air passage 310, a dirt holding cavity 110 and a foreign matter inlet groove 120 are formed between the central shaft 600 and a static sealing ring 300, and a first labyrinth seal 130 is arranged between the central shaft 600 and a flange 200.
Compared with embodiment 1, embodiment 2 is simpler to assemble and reduces the process difficulty, but because the central shaft 600 is combined with the dynamic seal ring 100, the static seal ring 300 and the flange 200 cannot be maintained without dismantling the central shaft 600, and embodiment 1 which is easier to maintain or embodiment 2 which is easier to assemble can be selected according to needs.
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.

Claims (9)

1. A main shaft sealing structure of a slicing machine is characterized by comprising a movable sealing ring arranged on a main shaft central shaft, a flange plate arranged on the outer side of the main shaft central shaft, a static sealing ring arranged on the flange plate, an oil retainer ring arranged corresponding to the outer ring of a bearing on the outer side of the main shaft central shaft, and a spacer ring arranged between the main shaft central shaft and the inner ring of the bearing, wherein an air supply groove for temporarily storing compressed air is formed between the flange plate and the static sealing ring, the movable sealing ring and the static sealing ring are adjacently arranged, an air curtain air passage is formed in the space between the movable sealing ring and the static sealing ring, and the air supply groove is communicated with the air curtain air passage to form.
2. The slicer spindle seal structure of claim 1, wherein the flange top is provided with a first air supply passage communicating with the air supply groove for supplying compressed air to the air supply groove, and an inlet of the first air supply passage is connected to a second air supply passage provided in the bearing housing outside the bearing.
3. The slicer main shaft sealing structure of claim 1, wherein a dirt holding cavity for holding foreign matters and a foreign matter stopping groove for preventing foreign matters from entering are further arranged between the dynamic sealing ring and the static sealing ring, the static sealing ring is provided with a vent hole, the dirt holding cavity is communicated with the gas supply groove through the vent hole, the dirt holding cavity is communicated with the foreign matter stopping groove, the foreign matter stopping groove is communicated with the gas curtain gas passage, and compressed gas sequentially passes through the gas supply groove, the dirt holding cavity, the foreign matter stopping groove and the gas curtain gas passage to form a back blowing gas curtain.
4. The slicer main shaft sealing structure according to claim 3, wherein a sewage draining channel for draining foreign matters in the sewage containing cavity is arranged at the bottom of the flange plate, a sewage draining hole is arranged between the sewage containing cavity and the sewage draining channel, and the sewage containing cavity is communicated with the sewage draining channel through the sewage draining hole.
5. The slicer spindle seal arrangement of claim 4, wherein the flange is provided with a water dam corresponding to the trapway, the water dam being disposed outside of the flange.
6. The slicer main shaft sealing structure according to claim 4, wherein the dirt holding cavity is provided in plurality, each dirt holding cavity is correspondingly provided with a dirt discharging hole, and the dirt discharging channel is communicated with each dirt holding cavity through each dirt discharging hole.
7. The slicer spindle seal arrangement of claim 1, wherein a first labyrinth seal is provided between the dynamic seal ring and the flange to prevent foreign matter from entering the spindle.
8. The slicer spindle seal of claim 1, wherein a second labyrinth seal is provided between the spacer and the slinger to prevent foreign matter from entering the bearing.
9. A microtome spindle comprising the microtome spindle seal of any one of claims 1-8.
CN202011538345.4A 2020-12-23 2020-12-23 Slicer main shaft and seal structure thereof Pending CN112524255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011538345.4A CN112524255A (en) 2020-12-23 2020-12-23 Slicer main shaft and seal structure thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011538345.4A CN112524255A (en) 2020-12-23 2020-12-23 Slicer main shaft and seal structure thereof

Publications (1)

Publication Number Publication Date
CN112524255A true CN112524255A (en) 2021-03-19

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ID=74975889

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011538345.4A Pending CN112524255A (en) 2020-12-23 2020-12-23 Slicer main shaft and seal structure thereof

Country Status (1)

Country Link
CN (1) CN112524255A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114714531A (en) * 2022-05-06 2022-07-08 无锡阳光精机股份有限公司 High-speed and long-life spindle box for high-end equipment
CN115555595A (en) * 2022-12-06 2023-01-03 冈田精机(常州)有限公司 Main shaft with multistage formula air curtain

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114714531A (en) * 2022-05-06 2022-07-08 无锡阳光精机股份有限公司 High-speed and long-life spindle box for high-end equipment
CN115555595A (en) * 2022-12-06 2023-01-03 冈田精机(常州)有限公司 Main shaft with multistage formula air curtain
CN115555595B (en) * 2022-12-06 2023-02-28 冈田精机(常州)有限公司 Main shaft with multistage formula air curtain

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