CN112081924A - Main shaft non-contact sealing structure of crystalline silicon slicing machine - Google Patents

Main shaft non-contact sealing structure of crystalline silicon slicing machine Download PDF

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Publication number
CN112081924A
CN112081924A CN202011006436.3A CN202011006436A CN112081924A CN 112081924 A CN112081924 A CN 112081924A CN 202011006436 A CN202011006436 A CN 202011006436A CN 112081924 A CN112081924 A CN 112081924A
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CN
China
Prior art keywords
ring
sealing
sealed
static ring
air curtain
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Pending
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CN202011006436.3A
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Chinese (zh)
Inventor
鹿慧丰
王海超
仇健
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Qingdao Gaoce Technology Co Ltd
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Qingdao Gaoce Technology Co Ltd
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Application filed by Qingdao Gaoce Technology Co Ltd filed Critical Qingdao Gaoce Technology Co Ltd
Priority to CN202011006436.3A priority Critical patent/CN112081924A/en
Publication of CN112081924A publication Critical patent/CN112081924A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
    • F16J15/3464—Mounting of the seal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Abstract

The invention discloses a non-contact sealing structure of a main shaft of a crystal silicon slicer, which relates to the technical field of main shaft sealing and has the technical scheme that the main shaft sealing structure comprises a main shaft outer sleeve; sealing the static ring; the sealing movable ring is fixed on the spindle mandrel; an air curtain gap and a sewage discharge cavity are formed between the sealed static ring and the sealed movable ring, the sewage discharge cavity is positioned on one side of the air curtain gap close to the part installation space, the air curtain gap is communicated with the outside, a static ring air supply hole for supplying air to the air curtain gap is formed in the sealed static ring, and a static ring sewage discharge hole for discharging polluted impurities in the sewage discharge cavity is formed in the sealed static ring; let in quiet ring air supply hole in the middle of with high-pressure gas, during the air curtain clearance is sent into with gas in the air supply hole, partly gaseous forms the air curtain that outwards blows in the air curtain clearance, and partly enters into the blowdown chamber, and the air curtain can block between the contaminated product gets into sealed quiet ring and the sealed rotating ring, to the gas that blows in the blowdown intracavity, can blow out through quiet ring blowdown hole with the impurity that gets into and break through in the air curtain entering blowdown chamber.

Description

Main shaft non-contact sealing structure of crystalline silicon slicing machine
Technical Field
The invention relates to the technical field of spindle sealing, in particular to a spindle non-contact sealing structure of a crystalline silicon slicer.
Background
Along with the development of photovoltaic trade, the reliability requirement to crystal silicon slicer is higher and higher, and wherein, the leakproofness problem of crystal silicon slicer main shaft directly influences the reliability of crystal silicon slicer. The main shaft in the crystal silicon slicing machine has the functions of supporting and rotating; the main shaft comprises a main shaft mandrel, a main shaft outer sleeve sleeved outside the main shaft mandrel and internal parts; the spindle mandrel and the spindle outer sleeve have relative rotary motion, a certain part mounting space exists between the spindle mandrel and the spindle outer sleeve, and internal parts are arranged in the part mounting space; the parts mounting space is usually provided with parts such as a bearing or a space ring and the like to realize the function of the main shaft; the spare part installation space is generally separated with the external world by seal structure, and crystal silicon slicer is at work, and the operational environment of main shaft is abominable usually, has pollution impurity such as a large amount of steam and silica flour, and these impurity pass seal structure easily and enter into the main shaft, in case these pollution impurity enter into the main shaft, will lead to the inefficacy of main shaft. The main shaft of the existing slicer is mostly damaged because of sealing failure, so that contaminated impurities enter the main shaft and internal parts are damaged, and the sealing structure of the main shaft of the crystalline silicon slicer, which is difficult to cause sealing failure, is urgently needed.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a non-contact sealing structure of a main shaft of a crystal silicon slicer, which enables the problem that the main shaft is not easy to have sealing failure.
In order to achieve the purpose, the invention provides the following technical scheme: a main shaft non-contact sealing structure of a crystalline silicon slicer comprises a main shaft outer sleeve, a main shaft inner sleeve and a main shaft outer sleeve, wherein the main shaft outer sleeve is sleeved on the outer side of a main shaft core shaft and used for supporting the main shaft core shaft;
the sealing static ring is fixed on one side of the spindle outer sleeve, which is close to the end part of the spindle mandrel;
the sealing movable ring is fixed on the spindle mandrel;
form air curtain clearance and blowdown chamber between sealed quiet ring and the sealed rotating ring, the blowdown chamber is located the air curtain clearance and is close to spare part installation space one side, and air curtain clearance and external intercommunication offer the quiet ring air feed hole that is used for air curtain clearance air feed on the sealed quiet ring, offer the quiet ring blowoff hole that is arranged in with the pollution discharge chamber of pollution impurity exhaust on the sealed quiet ring.
Through adopting above-mentioned technical scheme, let in quiet ring air feed hole in the middle of, the air feed hole sends into gas curtain clearance with gas, partly gas forms the gas curtain of outwards blowing in the gas curtain clearance, partly enters into the blowdown chamber, the gas curtain can block between the contaminated product entering sealed quiet ring and the sealed rotating ring, to the gas that blows in the blowdown intracavity, can blow out through quiet ring blowdown hole the impurity that gets into and break through in the gas curtain entering blowdown chamber, thereby make contaminated product be difficult to enter into spare part installation space department, thereby make the main shaft be difficult to the problem that sealed inefficacy appears.
The invention is further configured to: a first sealing gap used for limiting gas entering the sewage discharging cavity is arranged between the air curtain gap and the sewage discharging cavity.
Through adopting above-mentioned technical scheme, through setting up sealed clearance, improve gaseous air-lock from air curtain clearance flow direction blowdown chamber to make high-pressure air outwards flow in the middle of the air curtain clearance more easily and form the air curtain, thereby better prevention pollution impurity gets into in the middle of the air curtain clearance.
The invention is further configured to: an annular air outlet gap is arranged between the first sealing gap and the air curtain gap and is directly communicated with the static ring air supply hole.
Through adopting above-mentioned technical scheme, high-pressure gas enters into the clearance of giving vent to anger through quiet ring gas supply hole in the middle of, high-pressure gas enters into the clearance of giving vent to anger after, can the equipartition in the middle of the clearance of giving vent to anger to make the air curtain that forms in the air curtain clearance can be more even on the circumferential direction of sealed rotating ring.
The invention is further configured to: be provided with the flange between sealed quiet ring and the main shaft overcoat, sealed quiet ring is provided with the air feed annular with one side that the flange laminated each other, sets up the flange air feed hole for air feed annular air feed on the flange, and quiet ring air feed hole is provided with a plurality of and encircles sealed quiet ring setting on sealed quiet ring.
Through adopting above-mentioned technical scheme, the air feed ring groove carries out the air feed to a plurality of flange air feed holes simultaneously, and a plurality of flange air feed holes carry out the air feed to the clearance of giving vent to anger simultaneously for gas distribution in the middle of the clearance of giving vent to anger is more even, thereby makes the air curtain that forms in the air curtain clearance can be more even on the circumferential direction of sealed rotating ring.
The invention is further configured to: one side of the sewage discharge cavity, which is close to the part installation space, is provided with a grease containing cavity between the sealed static ring and the sealed movable ring, and the grease containing cavity is used for containing grease.
Through adopting above-mentioned technical scheme, when contaminated product breaks through the air curtain clearance and the blowdown chamber enters into holding the fat chamber, contaminated product can be adsorbed by the grease.
The invention is further configured to: and a second sealing gap between the sealing static ring and the sealing moving ring is arranged between the sewage discharging cavity and the grease containing cavity.
Through adopting above-mentioned technical scheme, because blowdown chamber and external atmosphere intercommunication, through the sealed clearance of second, increase the blowdown chamber and hold the air-resistor between the fat chamber for outside air is difficult to enter into and holds in the middle of the fat chamber.
The invention is further configured to: the first sealing gap and the second sealing gap are both labyrinth gaps, and the labyrinth gaps are gaps with at least one change in the extending direction.
Through adopting above-mentioned technical scheme, the extension that changes the labyrinth clearance is reverse, can improve the air lock for the flow of gas in the middle of the labyrinth clearance to the effectual effect that reaches the improvement air lock that the sealed clearance will reach.
The invention is further configured to: the sealing static ring comprises a sealing static ring I and a sealing static ring II, an air curtain gap is formed between the sealing static ring II and the sealing dynamic ring, the sealing static ring I and the sealing static ring II are integrated or separated, and when the sealing static ring I and the sealing static ring II are separated, the relative positions of the sealing static ring I and the sealing static ring II are fixed.
The invention is further configured to: the flange is arranged between the main shaft outer sleeve and the first sealing static ring, the flange is fixedly connected to the main shaft outer sleeve, the first sealing static ring and the flange are integrated or separated, and when the first sealing static ring and the flange are separated, the relative position of the first sealing static ring and the flange is fixed.
The invention is further configured to: along the direction of deviating from spare part installation space, the diameter that seals movable ring and be close to sealed quiet ring one side is crescent.
Through adopting above-mentioned technical scheme, the orientation deviates from the direction of spare part installation space, the diameter in the sealed rotating ring outside crescent for contaminated material moves along the orientation of the clearance orientation between sealed rotating ring and the sealed quiet ring and deviates from the direction of spare part installation space under the effect of the centrifugal force that sealed rotating ring provided easily, finally discharges in the air curtain clearance, and along with the increase of diameter, the centrifugal force that can provide is just bigger, makes contaminated material discharge that can be more smooth and easy.
In summary, compared with the prior art, the invention has the following beneficial effects: according to the invention, high-pressure gas is introduced into the gas supply hole of the static ring, the gas is sent into the gas curtain gap by the gas supply hole, a part of the gas forms an outward blown gas curtain in the gas curtain gap, a part of the gas enters the sewage discharging cavity, the gas curtain can prevent the pollution impurities from entering between the sealed static ring and the sealed movable ring, and the gas blown into the sewage discharging cavity can blow out the impurities entering the sewage discharging cavity through the static ring sewage discharging hole, so that the pollution impurities are not easy to enter the part mounting space, and the problem of sealing failure of the main shaft is not easy to occur.
Drawings
FIG. 1 is a cross-sectional view of an embodiment embodying an air curtain gap;
FIG. 2 is an enlarged view of portion A of FIG. 1;
FIG. 3 is a cross-sectional view of an embodiment embodying a flange air supply hole;
FIG. 4 is an enlarged view of the portion B of FIG. 1;
fig. 5 is an enlarged schematic view of the portion C of fig. 3.
In the figure: 1. a spindle core shaft; 2. a component mounting space; 3. a spindle jacket; 31. an air supply hole is sleeved outside the main shaft; 32. a sewage draining hole is sleeved outside the main shaft; 4. a flange; 41. a flange air supply hole; 42. a flange sewage draining hole; 5. sealing a first static ring; 51. a stationary ring air supply hole; 52. a static ring sewage draining hole; 6. a second sealing static ring; 7. sealing the movable ring; 8. a gasket; 9. an air supply ring groove; 91. an air outlet gap; 92. an air curtain gap; 93. a blowdown chamber; 94. a fat containing cavity; 95. a first seal gap; 96. a second seal gap; 97. a third seal gap.
Detailed Description
In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
The invention is further described with reference to the drawings and the preferred embodiments.
Example (b): a non-contact sealing structure of a main shaft of a crystalline silicon slicer is disclosed, referring to attached drawings 1 and 2, a main shaft outer sleeve 3 which is sleeved on the outer side of a main shaft core shaft 1 and used for supporting the main shaft core shaft 1, a flange 4 which is fixedly connected to one side, close to the main shaft core shaft 1, of the main shaft outer sleeve 3, a sealing static ring which is fixedly connected to one side, far away from the main shaft outer sleeve 3, of the flange 4, and a sealing movable ring 7 which is sleeved on the outer side of the main shaft core. A part installation space is reserved between the spindle mandrel 1 and the spindle outer sleeve 3, and in some embodiments, a bearing and the like are arranged in the part installation space to support the spindle mandrel 1; the sealing movable ring 7 is positioned at one side of the part installation space 2 close to the end part of the spindle mandrel 1; the sealing static ring comprises a first sealing static ring 5 and a second sealing static ring 6, the first sealing static ring 5 is fixedly connected to the flange 4, and the second sealing static ring 6 is fixedly connected to the first sealing static ring 5. The first sealing static ring 5 and the second sealing static ring 6 can be designed in a split mode or an integrated mode, and when the first sealing static ring 5 and the second sealing static ring 6 are designed in a split mode, the relative positions of the first sealing static ring 5 and the second sealing static ring 6 are fixed; the first sealing static ring 5 and the flange 4 can be designed integrally or in a split mode, when the first sealing static ring 5 and the flange 4 are designed in a split mode, the relative position of the first sealing static ring 5 and the flange 4 is fixed, and the arrangement modes of the first sealing static ring 5, the second sealing static ring 6 and the flange 4 include but are not limited to the above modes.
Preferably, in this embodiment, the first sealing stationary ring 5 and the flange 4 are designed to be separated, the second sealing stationary ring 6 and the first sealing stationary ring 5 are designed to be separated, the first sealing stationary ring 5 is fixedly connected to the flange 4 through a bolt, the second sealing stationary ring 6 is fixedly connected to the first sealing stationary ring 5 through a bolt, and the movable sealing ring 7 is fixedly connected to the spindle mandrel 1 through a bolt.
With reference to fig. 3 and fig. 4, an air curtain gap 92 is formed between the second stationary seal ring 6 and the movable seal ring 7, the air curtain gap 92 is located on one side of the first stationary seal ring 5, which is away from the flange 4, an air outlet gap 91 is formed between the first stationary seal ring 5 and the movable seal ring 7, the air curtain gap 92 and the air outlet gap 91 are both annular gaps, the air curtain gap 92 is communicated with the air outlet gap 91, and preferably, the distance between two sides of the air outlet gap 91 is greater than the distance between two sides of the air curtain gap 92. One side of the air outlet gap 91 departing from the air curtain gap 92 is provided with a sewage discharging cavity 93 formed between the first sealing static ring 5 and the second sealing dynamic ring 7, and the sewage discharging cavity 93 is an annular cavity. A grease containing cavity 94 formed between the first sealing static ring 5 and the movable sealing ring 7 is arranged on one side of the blowdown cavity 93, which is away from the air outlet gap 91, the grease containing cavity 94 is an annular cavity, grease is contained in the grease containing cavity 94, and preferably, in the embodiment, high-viscosity grease is contained in the grease containing cavity 94; the first sealed stationary ring 5 is provided with a stationary ring air supply hole 51 communicated with the air outlet gap 91, and the stationary ring is also provided with a stationary ring sewage discharge hole 52 communicated with the sewage discharge cavity 93.
High-pressure gas enters the air outlet gap 91 through the static ring air supply hole 51, then a part of high-pressure gas enters the air curtain gap 92, an outward blowing air curtain is formed in the air curtain gap 92, external pollution impurities are prevented from entering the air curtain gap 92 through the air curtain, a part of gas enters the sewage discharge cavity 93, impurities which break through the air curtain gap 92 and enter the sewage discharge cavity 93 through the air curtain are discharged through the static ring sewage discharge hole 52, even if the pollution impurities break through the sewage discharge cavity 93 and enter the sewage discharge cavity 94, the pollution impurities are also adsorbed by high-viscosity grease in the grease discharge cavity 94, and the pollution impurities are prevented from entering the part installation space 2. Through the buffering of air outlet gap 91, make high-pressure gas equipartition in air outlet gap 91 to make the air curtain that forms in air curtain gap 92 along the circumferential direction of sealed rotating ring 7 more even.
The flange 4 is provided with a flange sewage discharge hole 42 mutually communicated with the static ring sewage discharge hole 52, and the spindle outer sleeve 3 is provided with a spindle outer sleeve sewage discharge hole 32 mutually communicated with the flange sewage discharge hole 42; the fixed ring blowdown hole 52 is arranged under the blowdown cavity 93, and the pollution impurities entering the blowdown cavity 93 fall into the fixed ring blowdown hole 52 when moving to the top of the fixed ring blowdown hole 52 along with the sealing movable ring 7 under the action of wind power, centrifugal force and self gravity, and then are sent out through the flange blowdown hole 42 and the main shaft outer sleeve blowdown hole 32.
With reference to fig. 5, one side of the first sealed static ring 5, which is close to the flange 4, is provided with a gas supply ring groove 9, the gas supply ring groove 9 is arranged around the spindle mandrel 1, a plurality of static ring gas supply holes 51 are opened in the first sealed static ring 5, the static ring gas supply holes 51 are uniformly distributed around the spindle mandrel 1, and the static ring gas supply holes 51 are communicated with the gas supply ring groove 9. Offer the flange air feed hole 41 with air feed ring groove 9 intercommunication each other on the flange 4, offer the main shaft overcoat air feed hole 31 with flange air feed hole 41 intercommunication on the main shaft overcoat 3, high-pressure gas enters into in the middle of the flange air feed hole 41 through main shaft overcoat air feed hole 31, then enter into in the middle of the air feed ring groove 9 through flange air feed hole 41, high-pressure gas evenly distributed in the middle of air feed ring groove 9, then enter into in the middle of the clearance 91 of giving vent to anger through a plurality of quiet ring air feed holes 51, provide the air through a plurality of quiet ring air feed holes 51 around 1 evenly distributed of main shaft dabber, make the distribution of the highly-compressed air in the middle of the clearance 91.
A first sealing gap 95 formed between the first sealing static ring 5 and the first sealing moving ring 7 is arranged between the air outlet gap 91 and the sewage discharging cavity 93, and a second sealing gap 96 formed between the first sealing static ring 5 and the first sealing moving ring 7 is arranged between the sewage discharging cavity 93 and the grease accommodating cavity 94. The first sealing gap 95 can increase the air resistance between the blowdown cavity 93 and the air outlet gap 91, so that high-pressure air in the air outlet gap 91 can flow to the air curtain gap 92 more, and the effect of an air curtain formed in the air curtain gap 92 is improved; the second sealing gap 96 can increase the air resistance between the sewage cavity 93 and the grease containing cavity 94, so that the outside air is not easy to enter the grease containing cavity 94 through the sewage cavity 93.
The first seal gap 95 and the second seal gap 96 are both labyrinth gaps, which are gaps in which the gap extension direction changes at least once. The labyrinth gap can be achieved in several ways:
firstly, the side, close to each other, of each of the movable sealing ring 7 and the first stationary sealing ring 5 is fixedly connected with a bulge with a step-shaped section, and a labyrinth gap is formed between the step-shaped bulges of the movable sealing ring 7 and the first stationary sealing ring 5;
secondly, at least one bulge is arranged on each of two sides of the labyrinth gap, the bulges on the two sides of the labyrinth gap are fixedly connected to the movable sealing ring 7 and the first stationary sealing ring 5 respectively, the bulges on the movable sealing ring 7 and the first stationary sealing ring 5 are arranged in a staggered mode, and the sealing gap is formed between the bulges of the movable sealing ring 7 and the bulges of the first stationary sealing ring 5;
thirdly, the first and second modes are adopted simultaneously;
preferably, in this embodiment, the labyrinth gaps are formed in a second manner, that is, the labyrinth gaps are formed by the protrusions distributed on the movable sealing ring 7 and the first stationary sealing ring 5 in a staggered manner, in this embodiment, two sides of each labyrinth gap are all disposed on the plurality of protrusions, and the plurality of protrusions on the first stationary sealing ring 5 and the movable sealing ring 7 are arranged in a staggered manner along the axial direction of the spindle shaft 1.
Along the direction departing from the part installation space 2, the diameter of the first sealing static ring 5 side of the movable sealing ring 7 is gradually increased, namely along the direction departing from the part installation space 2, the distance between the grease containing cavity 94, the second sealing gap 96, the sewage discharging cavity 93, the first sealing gap 95, the air outlet gap 91 and the air curtain gap 92 and the spindle mandrel 1 is gradually increased; towards the direction of deviating from spare part installation space 2, the diameter in sealed rotating ring 7 outside increases gradually for contaminated material moves along the clearance orientation between sealed rotating ring 7 and the sealed quiet ring and deviates from spare part installation space 2's direction under the effect of the centrifugal force that sealed rotating ring 7 provided easily, finally discharges from air curtain clearance 92, and along with the increase of diameter, the centrifugal force that can provide is just bigger, makes contaminated material discharge more smoothly.
An annular gasket 8 is arranged between the spindle outer sleeve 3 and the spindle mandrel 1, the gasket 8 is positioned on one side, close to the static sealing ring I5, of the part mounting space 2, and the static sealing ring I5 and the movable sealing ring 7 are mutually attached to one side, away from the part mounting space 2, of the gasket 8; when the contaminating impurities break through the grease containing chamber 94, the spacer 8 can continue to block the contaminating impurities so that they do not easily enter the component mounting space 2.
Be formed with third seal clearance 97 between gasket 8 and the main shaft dabber 1, third seal clearance 97 also is labyrinth clearance, at least one ring channel has been seted up to one side that gasket 8 is close to main shaft dabber 1, it is protruding to be provided with integrated into one piece at the epaxial annular of main shaft dabber 1 in the ring channel, third seal clearance 97 passes through ring channel and protruding formation, preferably, gasket 8 has seted up a plurality of ring channel near main shaft dabber 1 one side in this embodiment, all be provided with integrated into one piece at the epaxial annular of main shaft dabber 1 protruding in every ring channel, a plurality of ring channels are evenly arranged along the axis direction of main shaft dabber 1. The third seal gap 97 serves as a final defense line against contaminating impurities, and blocks the contaminating impurities from entering the component mounting space 2.
The working principle of the non-contact sealing structure of the main shaft of the crystal silicon slicing machine when in use is as follows: high-pressure gas passes through main shaft overcoat air supply hole 31, flange air supply hole 41, air feed ring groove 9 and quiet ring air supply hole 51 enter into in the middle of the clearance 91 of giving vent to anger, the gas in the clearance 91 of giving vent to anger mostly enters into in the middle of the air curtain clearance 92, form the air curtain of outwards blowing, block that contaminated impurities enters into air curtain clearance 92, the sub-portion enters into in the middle of blowdown chamber 93, promote to break through air curtain clearance 92 and give vent to anger the contaminated impurities that clearance 91 entered into in the middle of the blowdown chamber 93 and pass quiet ring blowdown hole 52 in proper order, flange blowdown hole 42 and main shaft overcoat blowdown hole 32, finally discharge in the middle of main shaft overcoat blowdown hole 32. The contaminated impurities which break through the pollution discharge cavity 93 enter the grease containing cavity 94 and are adsorbed by high-viscosity grease in the grease containing cavity 94, and if the contaminated impurities break through the grease containing cavity 94, the contaminated impurities are blocked by the gasket 8 and the third sealing gap 97, so that the contaminated impurities are prevented from entering the part mounting space 2 easily.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.

Claims (10)

1. The utility model provides a crystal silicon slicer main shaft non-contact seal structure which characterized in that: the spindle outer sleeve is sleeved outside the spindle mandrel and used for supporting the spindle mandrel;
the sealing static ring is fixed on one side of the spindle outer sleeve, which is close to the end part of the spindle mandrel;
the sealing movable ring is fixed on the spindle mandrel;
form air curtain clearance and blowdown chamber between sealed quiet ring and the sealed rotating ring, the blowdown chamber is located the air curtain clearance and is close to spare part installation space one side, and air curtain clearance and external intercommunication offer the quiet ring air feed hole that is used for air curtain clearance air feed on the sealed quiet ring, offer the quiet ring blowoff hole that is arranged in with the pollution discharge chamber of pollution impurity exhaust on the sealed quiet ring.
2. The non-contact sealing structure for the spindle of a crystal silicon slicer according to claim 1, wherein: a first sealing gap used for limiting gas entering the sewage discharging cavity is arranged between the air curtain gap and the sewage discharging cavity.
3. The non-contact sealing structure of the spindle of the crystal silicon slicer as claimed in claim 2, wherein: an annular air outlet gap is arranged between the first sealing gap and the air curtain gap and is directly communicated with the static ring air supply hole.
4. The non-contact sealing structure of the spindle of the crystal silicon slicer of claim 3, wherein: be provided with the flange between sealed quiet ring and the main shaft overcoat, sealed quiet ring is provided with the air feed annular with one side that the flange laminated each other, sets up the flange air feed hole for air feed annular air feed on the flange, and quiet ring air feed hole is provided with a plurality of and encircles sealed quiet ring setting on sealed quiet ring.
5. The non-contact sealing structure of the spindle of the crystal silicon slicer as claimed in claim 2, wherein: one side of the sewage discharge cavity, which is close to the part installation space, is provided with a grease containing cavity between the sealed static ring and the sealed movable ring, and the grease containing cavity is used for containing grease.
6. The non-contact sealing structure of the spindle of the crystal silicon slicer as claimed in claim 5, wherein: and a second sealing gap between the sealing static ring and the sealing moving ring is arranged between the sewage discharging cavity and the grease containing cavity.
7. The non-contact sealing structure of the spindle of the crystal silicon slicer of claim 6, wherein: the first sealing gap and the second sealing gap are both labyrinth gaps, and the labyrinth gaps are gaps with at least one change in the extending direction.
8. The non-contact sealing structure for the spindle of a crystal silicon slicer according to claim 1, wherein: the sealing static ring comprises a sealing static ring I and a sealing static ring II, an air curtain gap is formed between the sealing static ring II and the sealing dynamic ring, the sealing static ring I and the sealing static ring II are integrated or separated, and when the sealing static ring I and the sealing static ring II are separated, the relative positions of the sealing static ring I and the sealing static ring II are fixed.
9. The non-contact sealing structure for the spindle of a crystal silicon slicer of claim 8, wherein: the flange is arranged between the main shaft outer sleeve and the first sealing static ring, the flange is fixedly connected to the main shaft outer sleeve, the first sealing static ring and the flange are integrated or separated, and when the first sealing static ring and the flange are separated, the relative position of the first sealing static ring and the flange is fixed.
10. The non-contact sealing structure for the spindle of a crystal silicon slicer according to claim 1, wherein: along the direction of deviating from spare part installation space, the diameter that seals movable ring and be close to sealed quiet ring one side is crescent.
CN202011006436.3A 2020-09-23 2020-09-23 Main shaft non-contact sealing structure of crystalline silicon slicing machine Pending CN112081924A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011006436.3A CN112081924A (en) 2020-09-23 2020-09-23 Main shaft non-contact sealing structure of crystalline silicon slicing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011006436.3A CN112081924A (en) 2020-09-23 2020-09-23 Main shaft non-contact sealing structure of crystalline silicon slicing machine

Publications (1)

Publication Number Publication Date
CN112081924A true CN112081924A (en) 2020-12-15

Family

ID=73739554

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011006436.3A Pending CN112081924A (en) 2020-09-23 2020-09-23 Main shaft non-contact sealing structure of crystalline silicon slicing machine

Country Status (1)

Country Link
CN (1) CN112081924A (en)

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