CN112523656B - Three-dimensional movable intelligent window based on vanadium dioxide film coiled structure and preparation method thereof - Google Patents
Three-dimensional movable intelligent window based on vanadium dioxide film coiled structure and preparation method thereof Download PDFInfo
- Publication number
- CN112523656B CN112523656B CN202011312360.7A CN202011312360A CN112523656B CN 112523656 B CN112523656 B CN 112523656B CN 202011312360 A CN202011312360 A CN 202011312360A CN 112523656 B CN112523656 B CN 112523656B
- Authority
- CN
- China
- Prior art keywords
- vanadium dioxide
- dioxide film
- substrate
- intelligent window
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/67—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light
- E06B3/6715—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light specially adapted for increased thermal insulation or for controlled passage of light
- E06B3/6722—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light specially adapted for increased thermal insulation or for controlled passage of light with adjustable passage of light
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention belongs to the technical field of intelligent windows, and particularly relates to a three-dimensional movable intelligent window based on a vanadium dioxide film curling structure and a preparation method thereof. The intelligent window structure of the invention comprises: the device comprises a quartz glass substrate with a smooth surface, and a tubular structure array formed on the substrate and formed by curling a vanadium dioxide film; each tubular structure can work independently; the vanadium dioxide film has sunlight regulation and control capability before and after phase change. The intelligent light control mode of the intelligent window is as follows: the vanadium dioxide film curled at room temperature enables the curled area to be completely transparent to light through quartz, and light transmittance is improved; and at high temperature, the curvature of the curled vanadium dioxide structure is reduced due to strain change generated by phase change until the curled vanadium dioxide structure is completely flattened on the surface of the quartz and is attached to the substrate again to form a plane vanadium dioxide film. The invention can improve the light transmittance at room temperature and keep the infrared limiting capability at high temperature basically unchanged, thereby improving the sunlight modulation capability of the intelligent window. The preparation method is simple, the cost is low, and the large-scale production can be realized.
Description
Technical Field
The invention belongs to the technical field of intelligent windows, and particularly relates to a three-dimensional movable intelligent window based on a vanadium dioxide film curling structure and a preparation method thereof.
Background
With the increasing global warming trend and the increasing lack of resources, the sustainable and green development, the reduction of energy consumption and the efficient and reasonable utilization of resources become the focus of attention of various countries. According to data, nearly 30% of the current Chinese total energy consumption comes from the energy loss of the building, and in the total energy consumption of the building, the heat dissipation amount of the glass doors and windows accounts for 50% of the total energy consumption. To reduce the waste of energy, researchers have focused on the windows of buildings, modern skyscrapers, which wrap almost all of the surface of the building and take on the energy exchange (including thermal convection, thermal radiation) of the external environment every day. Therefore, the research of developing an intelligent window capable of automatically adjusting the energy absorption and blocking of radiation according to the conditions of illumination, temperature and the like of the external environment is a research hotspot with application prospect at present.
The current intelligent window is mainly limited to a two-dimensional scale and can be divided into four types according to different intelligent light control mechanisms: (1) the working principle of the electrochromic intelligent window is that the film is discolored due to electrification to change the transmittance of sunlight, and the sunlight control wave band is usually 300-1000 nm. (2) Photochromic smart windows, which are typically polymeric materials, undergo a change in the chemical bond between the polymers when light is shone on to these polymers, forming a new structure and thus changing its color. The modulation band of sunlight is also limited to 300-1000nm, but the color changes are abundant. (3) The thermochromism intelligent window mainly adopts vanadium dioxide to change the transmittance of sunlight by responding to temperature. Currently studied vanadium dioxide-based smart windows mainly comprise several methods for enhancing the transmittance, a) doping, wherein different metal ions are doped to reduce the trigger temperature and improve the visible light transmittance; b) the composite structure, with titanium oxide, tungsten oxide and the like forming a multilayer structure, combines different optical characteristics to obtain more purposes; c) porous structures or coatings of vanadium dioxide particles, both of which are effective in enhancing the solar modulation capability. (4) Mechanochromatism, as the name suggests, can affect light transmission by wrinkling certain specialty polymeric materials under external stimuli, generally controlling light in only two states, full transmission and non-transmission. These structures are limited to two-dimensional planes and the modulation rate of sunlight has reached a bottleneck.
Disclosure of Invention
The invention aims to provide a three-dimensional movable intelligent window based on a vanadium dioxide film curled structure and a preparation method thereof, wherein the three-dimensional movable intelligent window has strong solar light modulation capability and breaks through the light control bottleneck of a two-dimensional intelligent window.
The invention provides a three-dimensional movable intelligent window based on a vanadium dioxide film coiled structure, which specifically comprises the following components:
the substrate is quartz glass with a smooth surface;
a tubular structure array formed on the substrate and formed by curling a vanadium dioxide film; each tubular structure can work independently;
the vanadium dioxide film is prepared by a magnetron sputtering method, the thickness of the vanadium dioxide film is 80-120nm, and the vanadium dioxide film has sunlight regulation and control capability before and after phase change.
The invention also provides a preparation method of the three-dimensional movable intelligent window based on the vanadium dioxide film coiled structure, which comprises the following specific steps:
(1) ultrasonically cleaning a quartz substrate by using acetone, ethanol and clear water respectively;
(2) growing a vanadium dioxide film with internal stress on the surface of the quartz substrate by utilizing magnetron sputtering;
(3) photoetching a graphic array on the surface of the vanadium dioxide film; obtaining a vanadium dioxide substrate with a corrosion window pattern;
(4) and selectively corroding the quartz substrate by using hydrofluoric acid to obtain a tubular structure array formed by curling the vanadium dioxide film.
In the step (1), the quartz substrate is polished on both sides, and the surface roughness is lower than 2 nm.
In the step (3), the vanadium dioxide single-component film with internal stress is obtained by adjusting parameters in the magnetron sputtering.
In the invention, because vanadium dioxide reacts with various acids and bases, hydrofluoric acid is selected as corrosive liquid, and the sacrificial layer is made of transparent quartz glass which can react with the hydrofluoric acid, so that the surface of the sacrificial layer is not required to be plated to influence the transmission of sunlight, and the sacrificial layer can also effectively play a role of the sacrificial layer.
The invention provides a three-dimensional movable intelligent window based on a vanadium dioxide film coiled structure, which has the working principle that:
(1) at room temperature, the vanadium dioxide coiled structure of the array is in a coiled state, and the coiled structure of the part can expose the quartz part of the substrate;
(2) under the environment with the temperature higher than the phase transition temperature (generally 68 ℃), the curling curvature of the vanadium dioxide curling structure is reduced due to the influence of the change of phase transition strain, and the vanadium dioxide curling structure is finally completely flattened on a quartz substrate to form a two-dimensional film structure which completely covers the substrate again;
(3) after cooling to room temperature again, the vanadium dioxide coiled structure on the smart window will return to the original curvature.
The invention provides a three-dimensional movable intelligent window based on a vanadium dioxide film coiled structure, the intelligent light control method is that,
(1) the room temperature condition is controlled, so that the curled area of the curled vanadium dioxide film is completely transmitted by quartz, and the light transmittance is better than that of the vanadium dioxide film;
(2) and controlling the temperature to be a high temperature condition, so that the curvature of the vanadium dioxide curled structure is reduced due to strain change generated by phase change until the vanadium dioxide curled structure is completely flattened on the quartz surface and is attached to the substrate again to form a plane vanadium dioxide thin film, thereby realizing the purposes of increasing the sunlight transmittance at room temperature and keeping the low transmittance at high temperature, and further improving the sunlight modulation rate before and after phase change.
(3) And reducing the temperature to room temperature again to enable the vanadium dioxide coiled structure on the intelligent window to return to the initial curvature.
The invention has the beneficial effects that: the method has the basic principle that the light transmittance of the common plane vanadium dioxide film at room temperature is enhanced by utilizing the rolling state, and the light transmittance is kept basically unchanged at high temperature after the phase change and the unrolling, so that the difference value of the front light transmittance and the back light transmittance is improved. And the preparation method of the intelligent window is stable and reliable, has good economical efficiency and can be prepared in a large scale. Each of the coiled structures is an independent body, and can work in a single structure or in a large-area cooperative mode.
The originality of the invention lies in that the volume expansion of the curled film generated in the temperature rising process is utilized to realize the conversion of the curled film from the curled state to the flat state.
According to the invention, strain change generated during phase change of vanadium dioxide is combined with infrared transmission change, so that the light transmittance at room temperature is improved, and meanwhile, the infrared limiting capability at high temperature is kept basically unchanged, thereby improving the sunlight modulation capability of the intelligent window. The preparation method is simple, has low cost, can be used for large-scale production, and obviously improves the modulation capability of sunlight, thereby having good practical application significance.
Drawings
Fig. 1 is a schematic single structure diagram of a transparent curled vanadium dioxide thin film array-based smart window of the present invention. Wherein, (a) a low temperature state, and (b) a high temperature state.
Fig. 2 is a comparison of solar light transmittance before and after phase transition of a 1x1cm array curled vanadium dioxide thin film smart window and a planar vanadium dioxide thin film. The intelligent window comprises (a) a coiled vanadium dioxide film intelligent window and (b) a plane vanadium dioxide film intelligent window.
Reference numbers in the figures: 1 is a pure vanadium dioxide film with internal stress; and 2 is a quartz glass substrate.
Detailed Description
The following will explain the preparation method and effect of the intelligent window with single-layer vanadium dioxide coiled structure in detail with reference to the accompanying drawings. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Preparation of Intelligent Window based on transparent curled vanadium dioxide film array "
(1) A quartz piece of 1cm × 1cm was taken as a substrate, ultrasonic-cleaned with acetone, ethanol, and deionized water for ten minutes in this order, and dried in a nitrogen stream.
(2) And depositing a vanadium dioxide film on the cleaned quartz plate substrate by magnetron sputtering. The magnetron sputtering apparatus may be a PVD75 type magnetron sputtering apparatus manufactured by Kurt J. The target material is a metal vanadium target, the radio frequency power supply is 200W, the total sputtering time is 1200s, and the oxygen-argon ratio is kept at 40: 60. Growing a first layer of vanadium dioxide film after the temperature is increased to 550 ℃, wherein the growth time is 600s, and continuing to grow for 600s after the temperature is reduced to 450 ℃; after cooling to room temperature, the sample was taken out.
(3) And (4) spinning a layer of photoresist on the surface of the vanadium dioxide film by using a spin coater. The spin coater may be KW-4A type spin coater available from GmbH, Inc., China. The photoresist model is AZ-5214 positive photoresist. Controlling the low rotating speed to be 600 rpm and the rotating time to be 6 s; the high speed was 4000 rpm and the spin time was 30 s. Then placed on a hot plate and pre-baked at 90 ℃ for 90 s. An ultraviolet lithography machine was used to lithographically form an array of squares having a total dimension of 9 mm by 9 mm, each square having a length of 100 μm and an inter-pattern spacing of 100 μm. The photolithography machine used was a MA6 UV photolithography machine from SUSS, Germany. Immersing the photoetching substrate in positive photoresist developing solution for 35 s, then washing with deionized water, and drying with nitrogen flow to obtain the photoetching substrate; the positive photoresist developing solution can adopt a positive photoresist developing solution of RZX-3038 of Suzhou Rehong electronic chemical company Limited. Then, the reaction ion etching instrumentIn the middle is introduced with CF4And etching off the vanadium dioxide part in the photoetching pattern by 30 sccm, ultrasonically cleaning for 30s by using ethanol, and then removing the photoresist to obtain the vanadium dioxide substrate with the corrosion window pattern.
(4) The vanadium dioxide substrate prepared by etching with hydrofluoric acid was placed in a chamber of a supercritical desiccator (model B Autosamdri-815B Series, Tousimis, usa) into which ethanol was poured. And taking out the sample after the drying procedure is finished to obtain the single-layer vanadium dioxide curled film.
Thus, the preparation of the smart window based on the vanadium dioxide coiled structure is completed.
The solar transmittance test of the smart window based on the curled vanadium dioxide thin film shows the result as shown in fig. 2 (a). The light source is a simulated sunlight light source with the wave band of 350-2500nm, and the curled vanadium dioxide film intelligent window is placed in the middle of the copper plate with the hole at room temperature to completely cover the hole. And testing the transmittance of the curled vanadium dioxide intelligent window at room temperature in the wave band. And then, heating the copper plate to 80 ℃, and testing the transmittance of the coiled vanadium dioxide intelligent window at the waveband again after the temperature is stable. In the obtained optical transmittance map, a solid line is the transmittance of the coiled vanadium dioxide intelligent window at room temperature, and a dotted line is the light transmittance curve of the intelligent window at 80 ℃.
The solar transmittance test of the intelligent window based on the planar vanadium dioxide thin film shows that the result is shown in fig. 2 (b). The light source is a simulated sunlight light source with the wave band of 350-2500nm, and the planar vanadium dioxide film intelligent window is placed in the middle of the copper plate with the hole at room temperature to completely cover the hole. And testing the transmittance of the plane vanadium dioxide intelligent window at the room temperature in the wave band. And then, heating the copper plate to 80 ℃, and testing the transmittance of the planar vanadium dioxide intelligent window in the wave band again after the temperature is stable. In the obtained optical transmittance spectrum, a solid line is the transmittance of the planar vanadium dioxide intelligent window at room temperature, and a dotted line is the light transmittance curve of the intelligent window at 80 ℃.
Claims (5)
1. A three-dimensional movable intelligent window based on a vanadium dioxide film coiled structure is characterized by specifically comprising:
the substrate is quartz glass with a smooth surface;
a tubular structure array formed on the substrate and formed by curling a vanadium dioxide film; each tubular structure can work independently;
the vanadium dioxide film is prepared by a magnetron sputtering method, the thickness of the vanadium dioxide film is 80-120nm, and the vanadium dioxide film has sunlight regulation and control capability before and after phase change;
the vanadium dioxide film is prepared by a magnetron sputtering method, and the method comprises the following specific steps:
(1) ultrasonically cleaning a quartz glass substrate by using acetone, ethanol and clear water respectively;
(2) growing a vanadium dioxide film with internal stress on the surface of the quartz glass substrate by utilizing magnetron sputtering;
(3) photoetching a graphic array on the surface of the vanadium dioxide film; obtaining a vanadium dioxide substrate with a corrosion window pattern;
(4) selectively corroding the quartz substrate by using hydrofluoric acid to obtain a tubular structure array formed by curling a vanadium dioxide film;
the sunlight regulation and control capability before and after the phase change is specifically as follows:
(1) controlling the temperature to be room temperature, so that the curled area of the curled vanadium dioxide film is completely transparent to light by quartz;
(2) the temperature is controlled to be higher than the phase transition temperature, so that the curvature of the vanadium dioxide curling structure is reduced due to the strain change generated by phase transition until the vanadium dioxide curling structure is completely flattened on the quartz surface and is attached to the substrate again to form a plane vanadium dioxide thin film, thereby realizing the purposes of increasing the sunlight transmittance at room temperature and keeping the high-temperature low transmittance, and further improving the sunlight modulation rate before and after phase transition;
(3) and reducing the temperature to room temperature again to enable the vanadium dioxide coiled structure on the intelligent window to return to the initial curvature.
2. The method for preparing the three-dimensional movable intelligent window based on the vanadium dioxide film coiled structure according to claim 1, which comprises the following specific steps:
(1) ultrasonically cleaning a quartz substrate by using acetone, ethanol and clear water respectively;
(2) growing a vanadium dioxide film with internal stress on the surface of the quartz substrate by utilizing magnetron sputtering;
(3) photoetching a graphic array on the surface of the vanadium dioxide film; obtaining a vanadium dioxide substrate with a corrosion window pattern;
(4) and selectively corroding the quartz substrate by using hydrofluoric acid to obtain a tubular structure array formed by curling the vanadium dioxide film.
3. The method for preparing the three-dimensional movable intelligent window based on the vanadium dioxide film coiled structure according to claim 2, wherein in the step (1), the quartz substrate is polished on two sides, and the surface roughness is lower than 2 nm.
4. The method for preparing the three-dimensional movable intelligent window based on the vanadium dioxide film coiled structure according to the claim 2, wherein in the step (3), the vanadium dioxide single-component film with internal stress is obtained by adjusting parameters in magnetron sputtering.
5. The intelligent light control method of the three-dimensional movable intelligent window based on the vanadium dioxide film coiled structure, according to claim 1, is characterized in that:
(1) controlling the temperature to be room temperature, so that the curled area of the curled vanadium dioxide film is completely transparent to light by quartz;
(2) the temperature is controlled to be higher than the phase transition temperature, so that the curvature of the vanadium dioxide curling structure is reduced due to the strain change generated by phase transition until the vanadium dioxide curling structure is completely flattened on the quartz surface and is attached to the substrate again to form a plane vanadium dioxide thin film, thereby realizing the purposes of increasing the sunlight transmittance at room temperature and keeping the high-temperature low transmittance, and further improving the sunlight modulation rate before and after phase transition;
(3) and reducing the temperature to room temperature again to enable the vanadium dioxide coiled structure on the intelligent window to return to the initial curvature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011312360.7A CN112523656B (en) | 2020-11-20 | 2020-11-20 | Three-dimensional movable intelligent window based on vanadium dioxide film coiled structure and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011312360.7A CN112523656B (en) | 2020-11-20 | 2020-11-20 | Three-dimensional movable intelligent window based on vanadium dioxide film coiled structure and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112523656A CN112523656A (en) | 2021-03-19 |
| CN112523656B true CN112523656B (en) | 2022-03-18 |
Family
ID=74982018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011312360.7A Active CN112523656B (en) | 2020-11-20 | 2020-11-20 | Three-dimensional movable intelligent window based on vanadium dioxide film coiled structure and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112523656B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113497323B (en) * | 2021-07-27 | 2022-03-18 | 合肥工业大学 | Circular waveguide based on film self-curling technology |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102785416A (en) * | 2012-07-26 | 2012-11-21 | 中国科学技术大学 | Vanadium dioxide-group laminated film, as well as light-transmitting structure and application thereof |
| CN104733562A (en) * | 2014-12-09 | 2015-06-24 | 中国科学院上海技术物理研究所 | Infrared detector for micro-tube resonant cavity quantum well |
| CN106050071A (en) * | 2016-08-03 | 2016-10-26 | 易修强 | Intelligent energy-saving sunshading window |
| CN111704691A (en) * | 2020-05-22 | 2020-09-25 | 江苏省农业科学院 | Photo-thermal shape memory functional material, preparation method and application thereof |
-
2020
- 2020-11-20 CN CN202011312360.7A patent/CN112523656B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102785416A (en) * | 2012-07-26 | 2012-11-21 | 中国科学技术大学 | Vanadium dioxide-group laminated film, as well as light-transmitting structure and application thereof |
| CN104733562A (en) * | 2014-12-09 | 2015-06-24 | 中国科学院上海技术物理研究所 | Infrared detector for micro-tube resonant cavity quantum well |
| CN106050071A (en) * | 2016-08-03 | 2016-10-26 | 易修强 | Intelligent energy-saving sunshading window |
| CN111704691A (en) * | 2020-05-22 | 2020-09-25 | 江苏省农业科学院 | Photo-thermal shape memory functional material, preparation method and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112523656A (en) | 2021-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104961354B (en) | A kind of preparation method of high visible light transmissivity vanadium dioxide base film | |
| CN103242821B (en) | Thermochromic composite powder with core-shell structure and preparation method of powder | |
| CN103022267B (en) | The preparation method of the spherical hollow shell structure nano-grain array of a kind of ZnO | |
| CN112523656B (en) | Three-dimensional movable intelligent window based on vanadium dioxide film coiled structure and preparation method thereof | |
| CN109457228A (en) | A kind of temperature automatically controlled smart membranes and preparation method thereof | |
| CN104724951B (en) | Dimming glass thin-film material and preparation method thereof | |
| CN103172273A (en) | Method for preparing nickel oxide electrochromic film by hydrothermal method | |
| CN102584024A (en) | Preparation method of efficient increased-transmission and antireflection glass | |
| CN103173208A (en) | Thermochromic composite nanometer powder as well as preparation method and use thereof | |
| CN106025075A (en) | Method for manufacturing high-performance perovskite solar energy cell in humid air | |
| CN105152545A (en) | Preparation method for nanocrystal-doped tungsten oxide electrochromic film pattern | |
| CN111925788A (en) | Iron-doped nickel oxide electrochromic material and preparation method thereof | |
| CN111704370A (en) | Antireflection coated glass and manufacturing method thereof | |
| CN104928641B (en) | A kind of preparation method of silica infrared anti-reflection vanadium oxide film | |
| CN110699670B (en) | Preparation method of vanadium dioxide film | |
| CN104724757A (en) | Method for directly synthesizing rutile phase vanadium dioxide nano powder based on solvothermal reaction at low temperature | |
| CN103320776B (en) | A kind of antivacuum middle high temperature solar energy selective absorption coating compound antireflective film and preparation method thereof | |
| CN108946809A (en) | The method that template method prepares witch culture porous silica vanadium powder body and film is sacrificed using cotton | |
| CN106865997B (en) | A method of growing tungsten oxide film directly on electro-conductive glass | |
| CN110627370B (en) | Preparation method of high-durability vanadium dioxide film | |
| CN102603205B (en) | Forming process of anti-reflecting coating for hood glass tube of solar heat collector tube | |
| CN105449011B (en) | A kind of solar cell microlens array film and preparation method thereof | |
| CN109103301B (en) | Preparation method of polycrystalline silicon surface micro-nano composite structure | |
| CN106981500A (en) | The solar cell and LED of all-perovskite show integrated system and preparation method thereof | |
| CN108439821B (en) | High-performance dual-frequency independent modulation electrochromic film and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |