CN112522678B - Magnetron sputtering winding film coating machine capable of generating patterns - Google Patents

Magnetron sputtering winding film coating machine capable of generating patterns Download PDF

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Publication number
CN112522678B
CN112522678B CN202011383577.7A CN202011383577A CN112522678B CN 112522678 B CN112522678 B CN 112522678B CN 202011383577 A CN202011383577 A CN 202011383577A CN 112522678 B CN112522678 B CN 112522678B
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gear
fixedly connected
wall
magnetron sputtering
shaped
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CN112522678A (en
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袁小红
王衍
刘运娟
曾晨
梁素贞
赵莉
林晓华
殷薇
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Minjiang University
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Minjiang University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a magnetron sputtering winding coating machine capable of generating patterns, which comprises a magnetron sputtering winding coating machine body, wherein the magnetron sputtering winding coating machine body comprises a vacuum chamber, four guide rollers and a template, the four guide rollers are rotatably arranged between the inner wall of the rear side and the inner wall of the front side of the vacuum chamber, the template is wound on the four guide rollers, an L-shaped mounting hole is formed in the lower left corner of the vacuum chamber, an L-shaped clamping block is fixedly connected to the left side of the vacuum chamber, and a circular clamping sleeve with an opening formed in the left side is fixedly connected to the bottom of the vacuum chamber. The device has the advantages of reasonable design, simplicity and convenience in operation, convenience in quickly adjusting the tension of the template according to actual needs, improvement in adjustment efficiency, convenience in quickly disassembling and assembling the detachable tension adjusting device by personnel, convenience in subsequent quick transfer of the detachable tension adjusting device to other vacuum chambers for use by personnel due to a quick disassembling and assembling mode, improvement in utilization rate, satisfaction of use requirements and contribution to use.

Description

Magnetron sputtering winding film coating machine capable of generating patterns
Technical Field
The invention relates to the technical field of magnetron sputtering winding coating machines, in particular to a magnetron sputtering winding coating machine capable of generating patterns.
Background
Vacuum coating is a technique for generating a thin film material, atoms or molecules of the coating material are separated from the surface in a vacuum chamber and hit on the surface of a coated object, and generally, vacuum coating refers to depositing a thin film by a physical method, and mainly comprises evaporation coating, ion coating and sputtering coating; the magnetron sputtering coating in the sputtering coating is widely applied by the advantages of good film-substrate bonding fastness, high efficiency, no pollution and the like, the magnetron sputtering is a method for effectively improving the ionization rate of gas in order to carry out high-speed sputtering under low pressure, the plasma density is improved by introducing a magnetic field on the surface of a target cathode and utilizing the restraint of the magnetic field on charged particles to increase the sputtering efficiency, and the principle is as follows: the substrate and the target material are arranged in a vacuum chamber, positive ions, negative ions and electrons are formed in glow discharge of gas in a low-pressure state (10 < -3 > to 10 < -5 > torr), the positive ions bombard the target material serving as a cathode, target material atoms are sputtered out, and a film is formed on the substrate, so that various functions of the base material are realized.
Through search, the publication number CN204162778U discloses a magnetron sputtering winding film plating machine capable of generating patterns, the vacuum chamber of the film plating machine comprises: the template is pressed down by the coating roller and tightly attached to the inner wall of the target cover, the cloth is enabled to rotate synchronously with the template by controlling the rotating speed of the cloth placing wheel, the cloth collecting wheel, the coating roller and the guide roller, the coating operation of different patterns is realized by replacing different templates, and the template is simple in structure, convenient to use and low in pattern generation cost.
Although the above patent realizes the film coating operation of different patterns by the template transmission and matching with the hollow pattern on the template; however, the method still has some defects, the tension degree of the template is not convenient to adjust according to actual needs, (because the template is disclosed to be any one of materials such as polyimide, polyester, polyethylene, rubber and the like, is thin, tough and slightly elastic, and is easy to loosen and slip in long-time transmission like a conveyor belt, so that the coating operation of different patterns and patterns cannot be stably carried out in a rotating mode).
Disclosure of Invention
Based on the technical problems in the background art, the invention provides a magnetron sputtering winding film plating machine capable of generating patterns.
The invention provides a magnetron sputtering winding film plating machine capable of generating patterns, which comprises a magnetron sputtering winding film plating machine body, wherein the magnetron sputtering winding film plating machine body comprises a vacuum chamber, four guide rollers and a template, the four guide rollers are rotatably arranged between the inner wall of the rear side and the inner wall of the front side of the vacuum chamber, the template is wound on the four guide rollers, an L-shaped mounting hole is formed in the lower left corner of the vacuum chamber, an L-shaped fixture block is fixedly connected to the left side of the vacuum chamber, a round clamping sleeve with an opening formed in the left side is fixedly connected to the bottom of the vacuum chamber, a detachable tension adjusting device matched with the template is arranged in the lower left corner of the vacuum chamber, and the detachable tension adjusting device comprises a tension quick adjusting mechanism and a quick fixing mechanism which are matched with each other.
Preferably, fast solid mechanism includes the L shape mounting panel with the contact of the lower left corner laminating of real empty room, and the L shape groove has been seted up to the inboard of L shape mounting panel, L shape mounting panel activity draw-in collar is on L shape fixture block, the right side bottom of L shape mounting panel is rotated and is installed and rotate the seat, the circle card post is equipped with to the activity card in the circle card sleeve, and the right side of circle card post establishes to the toper structure, the left side fixedly connected with square bar of circle card post, the left end of square bar runs through L shape groove and extends to the left side and the fixedly connected with carousel of L shape mounting panel, the outside of carousel is four handle bars of annular equidistant fixedly connected with, it overlaps on the square bar to rotate seat slip cover, fixedly connected with spring between the right side of rotation seat and the left end of circle card post, and the spring movable sleeve is established on the square bar.
Preferably, the tension quick adjusting mechanism comprises a screw rod sleeved on the square rod in a sliding manner, a rack is sleeved on the screw rod in a threaded manner, a sliding block which is slidably mounted on the inner wall of the bottom of the L-shaped groove is fixedly connected to the bottom of the rack, two first fixing rods, two second fixing rods and two third fixing rods are fixedly connected to the inner wall of the left side of the L-shaped groove from top to bottom in sequence, a first gear which is positioned in the L-shaped mounting hole is rotatably mounted between the two first fixing rods, a second gear is rotatably mounted between the two second fixing rods, a third gear and a fourth gear are rotatably mounted between the two third fixing rods, the third gear is positioned on the left side of the fourth gear and is meshed with the fourth gear, the top of the second gear is meshed with the bottom of the first gear, the second gear is meshed with the third gear, the bottom of the fourth gear is meshed with the top of the rack, and the third gear and the fourth gear are both positioned below the template, the first gear is located the left side of template, and the deflector roll that is located the lower left corner in four deflector rolls is located between first gear and the fourth gear, and the top welding of first gear has the first branch that the slope set up, and the top of first branch is rotated and is installed the first squeeze roll with the left side rolling contact of template, and the right side welding of fourth gear has the second branch that the slope set up, and the right-hand member of second branch rotates and installs the second squeeze roll with the bottom rolling contact of template.
Preferably, the top of the L-shaped mounting plate is provided with a rectangular clamping groove, the inner wall of the rectangular clamping groove is in movable contact with the outer side of the L-shaped clamping block, and the bottom of the L-shaped clamping block is of a conical structure.
Preferably, the right side of rotating the seat has seted up first square hole, and the outside sliding connection of the inner wall of first square hole and square bar has seted up first round hole on the right side inner wall of L shape mounting panel, and first round hole internal fixation cover is equipped with first bearing, the inner circle of first bearing and the outside welding suit of rotating the seat, seted up the circle on the left side inner wall of L shape mounting panel and perforated the hole, the square bar be located the circle perforation and with the inner wall contactless of circle perforation.
Preferably, the right end of the screw rod is provided with a second square hole, the inner wall of the second square hole is connected with the outer side of the square rod in a sliding mode, the inner wall of the bottom of the L-shaped mounting plate is fixedly connected with two second bearings, the inner ring of each second bearing is sleeved with the outer side of the screw rod in a welding mode, the right end of the rack is provided with a threaded hole, and the threaded hole is in threaded connection with the screw rod.
Preferably, the T-shaped sliding rail is fixedly connected to the inner wall of the bottom of the L-shaped mounting plate, the T-shaped sliding groove with two sides being opened is formed in the bottom of the sliding block, and the T-shaped sliding groove is connected with the T-shaped sliding rail in a sliding mode.
Preferably, the front side and the rear side of the first gear are fixedly connected with a first pin shaft, the front side of the first fixing rod is provided with a second round hole, a third bearing is fixedly sleeved in the second round hole, an inner ring of the third bearing is fixedly sleeved with the outer side of the corresponding first pin shaft, the front side and the rear side of the second gear are fixedly connected with a second pin shaft, the front side of the second fixing rod is provided with a third round hole, a fourth bearing is fixedly sleeved in the third round hole, an inner ring of the fourth bearing is fixedly sleeved with the outer side of the corresponding second pin shaft, the front side and the rear side of the third gear and the front side and the rear side of the fourth gear are fixedly connected with a third pin shaft, two fourth round holes are formed in the front side of the third fixing rod, a fifth bearing is fixedly sleeved in the fourth round hole, and an inner ring of the fifth bearing is fixedly sleeved with the outer side of the corresponding third pin shaft.
Preferably, the front end and the rear end of the first extrusion roller and the front end and the rear end of the second extrusion roller are fixedly connected with a fourth pin shaft, the top end of the first supporting rod and the right end of the second supporting rod are provided with grooves, the two sides of each groove are arranged for the openings, fifth round holes are formed in the inner wall of the front side and the inner wall of the rear side of each groove, a sixth bearing is fixedly sleeved in each fifth round hole, and the inner ring of each sixth bearing is fixedly sleeved with the outer side of the corresponding fourth pin shaft.
Preferably, the outside of the template is provided with a hollowed pattern.
Compared with the prior art, the invention has the beneficial effects that:
the tensioning degree of the template is adjusted by matching a first gear, a second gear, a third gear, a fourth gear, a first extrusion roller, a first support rod, a second extrusion roller, a screw rod, a rack, a sliding block, a square rod, a rotary disc, a round clamping column and a rotary seat with a T-shaped sliding rail, the rotary disc is driven to rotate in the forward direction by forward pulling of the handle rod, the rotary disc drives the rotary seat, the round clamping column and the screw rod to rotate through the square rod, the rack can be driven to move rightwards by rotation of the screw rod, the rack drives the sliding block to slide rightwards on the T-shaped sliding rail, the rack drives the fourth gear to rotate in the reverse direction, the fourth gear drives the second extrusion roller to extrude the bottom of the template upwards through the second support rod, the fourth gear drives the first gear to rotate in the forward direction through the third gear and the second gear sequentially, the first gear drives the first extrusion roller to extrude the left side of the template rightwards through the first support rod, under the synchronous extrusion force of the two parts, the left lower corner of the template is inwards pressed, bent and tightened, and the purpose of quickly adjusting the tightness of the template is achieved;
through the matching of the L-shaped clamping block, the circular clamping sleeve, the L-shaped mounting plate, the square rod, the rotary disc, the circular clamping column and the spring with the rectangular clamping groove, when the detachable tension adjusting device needs to be disassembled and assembled, the rotary disc is pulled leftwards to drive the square rod to slide leftwards in the first square hole and the second square hole, the square rod drives the round clamping column to be separated from the round clamping sleeve leftwards and compresses the spring leftwards, then the L-shaped mounting plate can be moved downwards to drive the rectangular clamping groove to be separated from the L-shaped clamping block downwards, the disassembly is finished, and during the installation, then the L-shaped mounting panel of upward movement makes its inboard and the laminating of the lower left corner of real empty room, and L-shaped mounting panel drives the upwards cartridge of rectangle draw-in groove on L-shaped fixture block, relaxes the pulling force to the capstan left this moment, and the elasticity of the spring that is in compression state at this moment drives the circle chuck post and blocks into in the circle chuck right, and the installation is accomplished, makes things convenient for personnel to dismouting to removable rate of tension adjusting device fast.
The device has the advantages of reasonable design, simplicity and convenience in operation, convenience in quickly adjusting the tension of the template according to actual needs, improvement in adjustment efficiency, convenience in quickly disassembling and assembling the detachable tension adjusting device by personnel, convenience in subsequent quick transfer of the detachable tension adjusting device to other vacuum chambers for use by personnel due to a quick disassembling and assembling mode, improvement in utilization rate, satisfaction of use requirements and contribution to use.
Drawings
FIG. 1 is a schematic cross-sectional view of a magnetron sputtering winding coater capable of generating patterns according to the present invention;
FIG. 2 is an enlarged view of part A of FIG. 1;
FIG. 3 is an enlarged view of the portion B in FIG. 2;
FIG. 4 is a schematic view of a detachable tension adjusting device of a magnetron sputtering winding coater capable of generating patterns according to the present invention;
FIG. 5 is a schematic perspective view of a square rod, a rotating base and a round clamping column connecting piece of the magnetron sputtering winding film plating machine capable of generating patterns according to the present invention.
In the figure: 100 vacuum chambers, 101 guide rollers, 102 templates, 1L-shaped fixture blocks, 2L-shaped mounting holes, 3 circular clamping sleeves, 4L-shaped mounting plates, 5L-shaped grooves, 6 first fixing rods, 7 first gears, 8 second fixing rods, 9 second gears, 10 third fixing rods, 11 third gears, 12 fourth gears, 13 first extrusion rollers, 14 first supporting rods, 15 second supporting rods, 16 second extrusion rollers, 17 second bearings, 18 screw rods, 19 racks, 20 sliding blocks, 21 square rods, 22 rotating discs, 23 circular clamping columns, 24 rotating seats, 25 springs, 26T-shaped sliding rails and 27 rectangular clamping grooves.
Detailed Description
The present invention will be further illustrated with reference to the following specific examples.
Examples
Referring to fig. 1-5, the present embodiment provides a magnetron sputtering winding coater capable of generating patterns, which comprises a magnetron sputtering winding coater body, the magnetron sputtering winding coater body comprises a vacuum chamber 100, four guide rollers 101 rotatably installed between the rear inner wall and the front inner wall of the vacuum chamber 100, and a template 102 wound on the four guide rollers 101, the lower left corner of the vacuum chamber 100 is provided with an L-shaped installation hole 2, the left side of the vacuum chamber 100 is fixedly connected with an L-shaped fixture block 1, the bottom of the vacuum chamber 100 is fixedly connected with a circular fixture sleeve 3 with an opening at the left side, the lower left corner of the vacuum chamber 100 is provided with a detachable tension adjusting device matched with the template 102, the detachable tension adjusting device comprises a tension quick adjusting mechanism and a quick fixing mechanism which are matched with each other, the magnetron sputtering winding coater body has reasonable design and simple and convenient operation, and is convenient for quickly adjusting the tension of the template 102 according to actual needs, improve adjustment efficiency, and the personnel of being convenient for are quick to removable rate of tension adjusting device dismouting, and quick assembly disassembly's mode also makes things convenient for the follow-up removable rate of tension adjusting device of will transferring to other real empty room 100 fast and uses, improves its utilization ratio, satisfies the user demand, is favorable to the use.
In this embodiment, the fast-fixing mechanism includes an L-shaped mounting plate 4 in contact with the lower left corner of the vacuum chamber 100, an L-shaped groove 5 is formed in the inner side of the L-shaped mounting plate 4, the L-shaped mounting plate 4 is movably clamped on the L-shaped clamping block 1, a rotating base 24 is rotatably mounted at the bottom of the right side of the L-shaped mounting plate 4, a round clamping column 23 is movably clamped in the round clamping sleeve 3, the right side of the round clamping column 23 is provided with a tapered structure, a square rod 21 is fixedly connected to the left side of the round clamping column 23, the left end of the square rod 21 extends to the left side of the L-shaped mounting plate 4 through the L-shaped groove 5 and is fixedly connected with a rotating disc 22, four handle bars are fixedly connected to the outer side of the rotating disc 22 at equal intervals in a ring shape, the rotating base 24 is slidably sleeved on the square rod 21, a spring 25 is fixedly connected between the right side of the rotating base 24 and the left end of the round clamping column 23, the spring 25 is movably sleeved on the square rod 21, the tension fast-adjusting mechanism includes a screw 18 slidably sleeved on the square rod 21, a rack 19 is sleeved on the screw 18 in a threaded manner, a sliding block 20 which is slidably mounted with the inner wall of the bottom of the L-shaped groove 5 is fixedly connected with the bottom of the rack 19, two first fixing rods 6, two second fixing rods 8 and two third fixing rods 10 are fixedly connected with the inner wall of the left side of the L-shaped groove 5 from top to bottom in sequence, a first gear 7 which is positioned in the L-shaped mounting hole 2 is rotatably mounted between the two first fixing rods 6, a second gear 9 is rotatably mounted between the two second fixing rods 8, a third gear 11 and a fourth gear 12 are rotatably mounted between the two third fixing rods 10, the third gear 11 is positioned on the left side of the fourth gear 12 and is meshed with the fourth gear 12, the top of the second gear 9 is meshed with the bottom of the first gear 7, the second gear 9 is meshed with the third gear 11, the bottom of the fourth gear 12 is meshed with the top of the rack 19, and the third gear 11 and the fourth gear 12 are both positioned below the template 102, the first gear 7 is positioned on the left side of the template 102, the guide roller 101 positioned on the lower left corner of the four guide rollers 101 is positioned between the first gear 7 and the fourth gear 12, the top of the first gear 7 is welded with a first support rod 14 which is obliquely arranged, the top end of the first support rod 14 is rotatably provided with a first extrusion roller 13 which is in rolling contact with the left side of the template 102, the right side of the fourth gear 12 is welded with a second support rod 15 which is obliquely arranged, the right end of the second support rod 15 is rotatably provided with a second extrusion roller 16 which is in rolling contact with the bottom of the template 102, the top of the L-shaped mounting plate 4 is provided with a rectangular clamping groove 27, the inner wall of the rectangular clamping groove 27 is movably contacted with the outer side of the L-shaped clamping block 1, the bottom of the L-shaped clamping block 1 is provided with a conical structure, the right side of the rotating seat 24 is provided with a first square hole, the inner wall of the first square hole is slidably connected with the outer side of the square rod 21, the right inner wall of the L-shaped mounting plate 4 is provided with a first round hole, a first bearing is fixedly sleeved in the first round hole, the inner ring of the first bearing is welded and sleeved with the outer side of the rotating seat 24, the inner wall of the left side of the L-shaped mounting plate 4 is provided with a round through hole, the square rod 21 is positioned in the round through hole and is not contacted with the inner wall of the round through hole, the right end of the screw rod 18 is provided with a second square hole, the inner wall of the second square hole is in sliding connection with the outer side of the square rod 21, the inner wall of the bottom of the L-shaped mounting plate 4 is fixedly connected with two second bearings 17, the inner ring of the second bearings 17 is welded and sleeved with the outer side of the screw rod 18, the right end of the rack 19 is provided with a threaded hole which is in threaded connection with the screw rod 18, the inner wall of the bottom of the L-shaped mounting plate 4 is fixedly connected with a T-shaped sliding rail 26, the bottom of the sliding block 20 is provided with a T-shaped sliding groove with openings, the T-shaped sliding groove is in sliding connection with the T-shaped sliding rail 26, and the front side and the rear side of the first gear 7 are both fixedly connected with a first pin shaft, a second round hole is arranged at the front side of the first fixed rod 6, a third bearing is fixedly sleeved in the second round hole, the inner ring of the third bearing is fixedly sleeved outside the corresponding first pin shaft, the front side and the rear side of the second gear 9 are fixedly connected with a second pin shaft, a third round hole is arranged at the front side of the second fixed rod 8, a fourth bearing is fixedly sleeved in the third round hole, the inner ring of the fourth bearing is fixedly sleeved outside the corresponding second pin shaft, the front side and the rear side of the third gear 11 and the front side and the rear side of the fourth gear 12 are fixedly connected with a third pin shaft, two fourth round holes are arranged at the front side of the third fixed rod 10, a fifth bearing is fixedly sleeved in the fourth round hole, the inner ring of the fifth bearing is fixedly sleeved outside the corresponding third pin shaft, the front end and the rear end of the first extrusion rod 13 and the front end and the rear end of the second extrusion roller 16 are fixedly connected with a fourth pin, the top end of the first supporting rod 14 and the right end of the second supporting rod 15 are both provided with grooves with openings at two sides, the front inner wall and the rear inner wall of each groove are both provided with fifth round holes, a sixth bearing is fixedly sleeved in each fifth round hole, the inner ring of each sixth bearing is fixedly sleeved with the outer side of the corresponding fourth pin shaft, the outer side of the template 102 is provided with a hollowed pattern, the template 102 is any one of polyimide, polyester, polyethylene, rubber and other materials, is thin, tough and slightly elastic, the invention has reasonable design and simple and convenient operation, is convenient to rapidly adjust the tension of the template 102 according to actual needs, improves the adjustment efficiency, is convenient for personnel to rapidly disassemble and assemble the detachable tension adjusting device, and also facilitates the personnel to rapidly transfer the detachable tension adjusting device onto other vacuum chambers 100 for use subsequently in a rapid disassembling and assembling mode, improves the utilization rate of the detachable tension adjusting device, and meets the use requirements, is beneficial to use.
In this embodiment, when the form 102 is loosened and slipped and the tension of the form needs to be adjusted, the handle rod is pulled forward to drive the rotary plate 22 to rotate forward, the rotary plate 22 drives the square rod 21 to rotate, the square rod 21 drives the rotary seat 24 to rotate, the square rod 21 drives the circular clamping column 23 to rotate in the circular clamping sleeve 3, meanwhile, the square rod 21 drives the screw rod 18 to rotate through the second square hole, under the action of the threaded hole formed in the rack 19, the screw rod 18 rotates to drive the rack 19 to move rightward, the rack 19 drives the slider 20 to slide rightward on the T-shaped slide rail 26, the rack 19 drives the fourth gear 12 engaged with the rack 19 to rotate in the reverse direction, the fourth gear 12 drives the second extrusion roller 16 to extrude the bottom of the form 102 upward through the second support rod 15, the fourth gear 12 also drives the third gear 11 engaged with the rack to rotate in the forward direction, the third gear 11 drives the second gear 9 engaged with the third gear to rotate in the reverse direction, the second gear 9 drives the first gear 7 engaged with the second gear to rotate forward, the first gear 7 drives the first squeeze roller 13 to squeeze the left side of the template 102 to the right through the first support rod 14, and under the squeezing force of the first squeeze roller 13 and the second squeeze roller 16, the lower left corner of the template 102 is bent inwards at the guide roller 101 at the lower left corner, so that the template 102 is gradually bent and tightened, and the purpose of quickly adjusting the tension degree of the template 102 is achieved;
when the detachable tension adjusting device needs to be detached, the rotating disc 22 is pulled leftwards to drive the square rod 21 to move leftwards, the square rod 21 slides leftwards in the first square hole on the rotating seat 24 and the second square hole on the screw 18, meanwhile, the square rod 21 drives the circular clamping column 23 to separate leftwards from the circular clamping sleeve 3, the circular clamping column 23 compresses the spring 25 leftwards, the L-shaped mounting plate 4 can be moved downwards at the moment, the L-shaped mounting plate 4 drives the rectangular clamping groove 27 to separate downwards from the L-shaped clamping block 1, meanwhile, the L-shaped mounting plate 4 drives the first gear 7, the second gear 9, the third gear 11 and the fourth gear 12 to move downwards from the L-shaped mounting hole 2, the detachment is completed, when the detachable tension adjusting device is installed, the L-shaped mounting plate 4 is moved upwards to enable the inner side of the L-shaped mounting plate 4 to be attached to the lower left corner of the vacuum chamber 100, the L-shaped mounting plate 4 drives the rectangular clamping groove 27 to be clamped upwards on the L-shaped clamping block 1, and the left pulling force of the rotating disc 22 is released, spring 25's that this moment is in compression state elasticity drives circle card post 23 and goes into in the circle cutting ferrule 3 right card, circle cutting ferrule 3 loops through circle card post 23 this moment, square pole 21 and rotation seat 24 are to the restriction of L shape mounting panel 4 upper and lower direction, L shape fixture block 1 passes through the restriction of rectangle draw-in groove 27 all around left and right sides direction, the realization is fixed to L shape mounting panel 4, the installation is accomplished, make and be convenient for quick to removable rate of tension adjusting device dismouting, make things convenient for personnel follow-up to use on other real empty room 100 with removable rate of tension adjusting device fast transfer through the quick firm mode of quick detach, improve its utilization ratio.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered as the technical solutions and the inventive concepts of the present invention within the technical scope of the present invention.

Claims (9)

1. A magnetron sputtering winding film plating machine capable of generating patterns comprises a magnetron sputtering winding film plating machine body, the magnetron sputtering winding coating machine body comprises a vacuum chamber (100), four guide rollers (101) rotatably arranged between the inner wall of the rear side and the inner wall of the front side of the vacuum chamber (100), and a template (102) wound on the four guide rollers (101), it is characterized in that an L-shaped mounting hole (2) is arranged at the lower left corner of the vacuum chamber (100), an L-shaped clamping block (1) is fixedly connected at the left side of the vacuum chamber (100), a round clamping sleeve (3) with an opening at the left side is fixedly connected at the bottom of the vacuum chamber (100), the left lower corner of the vacuum chamber (100) is provided with a detachable tension adjusting device matched with the template (102), the detachable tension adjusting device comprises a tension quick adjusting mechanism and a quick fixing mechanism which are matched with each other;
the quick fixing mechanism comprises an L-shaped mounting plate (4) which is in contact with the lower left corner of the vacuum chamber (100) in a laminating manner, an L-shaped groove (5) is formed in the inner side of the L-shaped mounting plate (4), the L-shaped mounting plate (4) is movably clamped on an L-shaped clamping block (1), a rotating seat (24) is rotatably mounted at the bottom of the right side of the L-shaped mounting plate (4), a circular clamping column (23) is movably clamped in the circular clamping sleeve (3), the right side of the circular clamping column (23) is of a conical structure, a square rod (21) is fixedly connected to the left side of the circular clamping column (23), the left end of the square rod (21) penetrates through the L-shaped groove (5) to extend to the left side of the L-shaped mounting plate (4) and is fixedly connected with a rotating disc (22), four handle rods are fixedly connected to the outer side of the rotating disc (22) at equal intervals in an annular manner, the rotating seat (24) is slidably sleeved on the square rod (21), a spring (25) is fixedly connected between the right side of the rotating seat (24) and the left end of the circular clamping column (23), and the spring (25) is movably sleeved on the square rod (21).
2. The magnetron sputtering winding coating machine capable of generating patterns according to claim 1, wherein the tension quick adjusting mechanism comprises a screw rod (18) slidably sleeved on a square rod (21), a rack (19) is threadedly sleeved on the screw rod (18), a sliding block (20) slidably mounted on the inner wall of the bottom of the L-shaped groove (5) is fixedly connected to the bottom of the rack (19), two first fixing rods (6), two second fixing rods (8) and two third fixing rods (10) are fixedly connected to the inner wall of the left side of the L-shaped groove (5) from top to bottom in sequence, a first gear (7) positioned in the L-shaped mounting hole (2) is rotatably mounted between the two first fixing rods (6), a second gear (9) is rotatably mounted between the two second fixing rods (8), and a third gear (11) and a fourth gear (12) are rotatably mounted between the two third fixing rods (10), the third gear (11) is positioned on the left side of the fourth gear (12) and meshed with the fourth gear (12), the top of the second gear (9) is meshed with the bottom of the first gear (7), the second gear (9) is meshed with the third gear (11), the bottom of the fourth gear (12) is meshed with the top of the rack (19), the third gear (11) and the fourth gear (12) are both positioned below the template (102), the first gear (7) is positioned on the left side of the template (102), guide rollers (101) positioned on the lower left corner of the four guide rollers (101) are positioned between the first gear (7) and the fourth gear (12), a first support rod (14) arranged obliquely is welded on the top of the first gear (7), a first extrusion roller (13) in rolling contact with the left side of the template (102) is rotatably arranged at the top end of the first support rod (14), and a second support rod (15) arranged obliquely on the right side of the fourth gear (12) is welded, and a second extrusion roller (16) which is in rolling contact with the bottom of the template (102) is rotatably arranged at the right end of the second supporting rod (15).
3. The magnetron sputtering winding coating machine capable of generating patterns according to claim 1, wherein a rectangular clamping groove (27) is formed in the top of the L-shaped mounting plate (4), the inner wall of the rectangular clamping groove (27) is movably contacted with the outer side of the L-shaped clamping block (1), and the bottom of the L-shaped clamping block (1) is of a conical structure.
4. The magnetron sputtering winding coater capable of generating patterns according to claim 1, wherein a first square hole is formed in the right side of the rotating seat (24), the inner wall of the first square hole is slidably connected with the outer side of the square rod (21), a first round hole is formed in the right inner wall of the L-shaped mounting plate (4), a first bearing is fixedly sleeved in the first round hole, the inner ring of the first bearing is welded and sleeved with the outer side of the rotating seat (24), a round through hole is formed in the left inner wall of the L-shaped mounting plate (4), and the square rod (21) is located in the round through hole and is not in contact with the inner wall of the round through hole.
5. The magnetron sputtering winding coating machine capable of generating patterns according to claim 2, characterized in that a second square hole is formed at the right end of the screw rod (18), the inner wall of the second square hole is in sliding connection with the outer side of the square rod (21), two second bearings (17) are fixedly connected to the inner wall of the bottom of the L-shaped mounting plate (4), the inner ring of each second bearing (17) is welded and sleeved with the outer side of the screw rod (18), and a threaded hole is formed at the right end of the rack (19) and is in threaded connection with the screw rod (18).
6. The magnetron sputtering winding coating machine capable of generating patterns according to claim 1, characterized in that a T-shaped slide rail (26) is fixedly connected to the inner wall of the bottom of the L-shaped mounting plate (4), a T-shaped chute with openings at both sides is arranged at the bottom of the slide block (20), and the T-shaped chute is connected with the T-shaped slide rail (26) in a sliding manner.
7. The magnetron sputtering coil coater capable of generating patterns according to claim 2, wherein the front side and the rear side of the first gear (7) are fixedly connected with a first pin, the front side of the first fixing rod (6) is provided with a second round hole, a third bearing is fixedly sleeved in the second round hole, an inner ring of the third bearing is fixedly sleeved with the outer side of the corresponding first pin, the front side and the rear side of the second gear (9) are fixedly connected with a second pin, the front side of the second fixing rod (8) is provided with a third round hole, a fourth bearing is fixedly sleeved in the third round hole, an inner ring of the fourth bearing is fixedly sleeved with the outer side of the corresponding second pin, the front side and the rear side of the third gear (11) and the front side and the rear side of the fourth gear (12) are fixedly connected with a third pin, and the front side of the third fixing rod (10) is provided with two fourth round holes, and a fifth bearing is fixedly sleeved in the fourth round hole, and the inner ring of the fifth bearing is fixedly sleeved with the outer side of the corresponding third pin shaft.
8. The magnetron sputtering winding coater capable of generating patterns according to claim 2, wherein the front end and the rear end of the first extrusion roll (13) and the front end and the rear end of the second extrusion roll (16) are both fixedly connected with a fourth pin shaft, the top end of the first support rod (14) and the right end of the second support rod (15) are both provided with grooves with two sides provided with openings, the inner wall of the front side and the inner wall of the rear side of each groove are both provided with a fifth round hole, a sixth bearing is fixedly sleeved in each fifth round hole, and the inner ring of each sixth bearing is fixedly sleeved with the outer side of the corresponding fourth pin shaft.
9. A magnetron sputtering coil coater for producing patterns according to claim 1, characterized in that the outside of said template (102) is provided with a hollowed pattern.
CN202011383577.7A 2020-12-01 2020-12-01 Magnetron sputtering winding film coating machine capable of generating patterns Active CN112522678B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204162778U (en) * 2014-10-09 2015-02-18 香港纺织及成衣研发中心有限公司 A kind of can the magnetic-control sputtering coiling film coating machine of pattern generation
KR20180024412A (en) * 2016-08-30 2018-03-08 임성기 method for sputtering using roll to roll deposition system
CN210619741U (en) * 2019-08-24 2020-05-26 江苏万邦特种纺织发展有限公司 Tensioning mechanism of winding device for spinning
CN211198063U (en) * 2019-12-12 2020-08-07 江西福懋新材料科技有限公司 Shaft combining machine with tensioning adjusting device
CN211496277U (en) * 2019-12-26 2020-09-15 杭州洲风纺织有限公司 Tensioning mechanism of winding device for textile processing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204162778U (en) * 2014-10-09 2015-02-18 香港纺织及成衣研发中心有限公司 A kind of can the magnetic-control sputtering coiling film coating machine of pattern generation
KR20180024412A (en) * 2016-08-30 2018-03-08 임성기 method for sputtering using roll to roll deposition system
CN210619741U (en) * 2019-08-24 2020-05-26 江苏万邦特种纺织发展有限公司 Tensioning mechanism of winding device for spinning
CN211198063U (en) * 2019-12-12 2020-08-07 江西福懋新材料科技有限公司 Shaft combining machine with tensioning adjusting device
CN211496277U (en) * 2019-12-26 2020-09-15 杭州洲风纺织有限公司 Tensioning mechanism of winding device for textile processing

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