CN112518231A - Machining process for ultrahigh vacuum CF sealing knife edge - Google Patents
Machining process for ultrahigh vacuum CF sealing knife edge Download PDFInfo
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- CN112518231A CN112518231A CN202011118297.3A CN202011118297A CN112518231A CN 112518231 A CN112518231 A CN 112518231A CN 202011118297 A CN202011118297 A CN 202011118297A CN 112518231 A CN112518231 A CN 112518231A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P13/00—Making metal objects by operations essentially involving machining but not covered by a single other subclass
- B23P13/02—Making metal objects by operations essentially involving machining but not covered by a single other subclass in which only the machining operations are important
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/06—Profile cutting tools, i.e. forming-tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
- B23B29/03—Boring heads
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- Engineering & Computer Science (AREA)
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- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention discloses an ultrahigh vacuum CF sealing knife edge processing technology, which comprises the following steps: a. fixing parts: fixing a part to be processed on a fixed table of a processing center; b. roughly milling parts: all surfaces to be processed of the parts to be processed are processed by a rough milling cutter of a processing center; c. semi-fine boring parts: processing an outer inclined plane of the CF sealing knife edge by using a semi-fine boring knife; processing an inner inclined plane of a CF sealing cutter edge by using a semi-precision end mill; d. finely boring parts: processing an outer inclined plane of the CF sealing knife edge by using a fine boring tool; processing an inner inclined plane of the CF sealing knife edge by using a finish end mill; e. taking out the parts: and taking out the part and inspecting. The invention provides a processing technology of an ultra-high vacuum CF sealing knife edge, which can be arranged on a processing center by one-time clamping, and can finish the processing of the CF sealing knife edge on all the rest surfaces except an installation surface through a semi-fine sleeve boring cutter and a fine sleeve boring cutter, thereby well ensuring the dimensional precision, the surface roughness and the form and position precision of a product.
Description
Technical Field
The invention relates to the technical field of machining, in particular to a processing technology of an ultrahigh vacuum CF sealing knife edge.
Background
The english name for CF flange is Conflat panel. The flange is used for flange connection in ultrahigh vacuum, is a metal static seal, and can bear high-temperature baking. The sealing structure of the ultra-high vacuum cavity is generally sealed by two symmetrical knife edges and a metal gasket, and the knife edges are in the circumferential direction. The sealing structure adopts a standard CF flange to be welded on the cavity, and also has a sealing knife edge directly processed on the cavity according to the knife edge standard of the CF flange. According to the sealing knife edge standard of the ultrahigh vacuum CF flange, the cutting edge can not be processed in a milling mode due to the limitation of the shape of the knife edge, the most suitable processing mode is turning, but the sealing knife edge is directly processed on a vacuum cavity according to the CF flange knife edge standard in different position structures and different space angles, and the processing on a lathe is not suitable. Therefore, an ultrahigh vacuum CF sealing knife edge processing technology needs to be designed, the ultrahigh vacuum CF sealing knife edge processing technology can be arranged on a processing center in a clamping mode, the processing of the CF sealing knife edges on the rest surfaces except the mounting surface can be completed through a semi-fine sleeve boring cutter and a fine sleeve boring cutter, and the size precision, the surface roughness and the shape and position precision of products are well guaranteed. .
Chinese patent application publication No. CN101590537, published as 2019, 12 and 02, entitled "method for machining flange holes of a coupling", discloses a method for machining flange holes of a coupling, which comprises the steps of firstly positioning by using a boring jig, then roughly machining the flange holes, and finally finely machining the flange holes, wherein during rough machining, a guide sleeve with an outer diameter matched with the aperture of the flange jig holes is sleeved on a cutter bar of a roughly machining boring cutter row, the guide sleeve is used for radially positioning the roughly machining boring cutter row in the flange jig holes, the cutter bar of the roughly machining boring cutter row is divided into two sections, and the two sections of cutter bars are connected by adopting a universal joint; the position deviation between the machine tool positioning and the workpiece hole is overcome. And the finish machining adopts a finish machining boring cutter row of a double-edged boring cutter with the distance between two edges equal to the aperture of the flange hole to be machined, and a guide sleeve with the outer diameter matched with the aperture of the flange die hole and the inner diameter equal to the aperture of the flange hole to be machined is arranged in the flange die hole of the boring die during finish machining. However, the processing method cannot process flange holes with different spatial angles, and the problems are still not solved.
Disclosure of Invention
The invention provides an ultrahigh vacuum CF seal knife edge processing technology for overcoming the problem that the existing processing technology is difficult or impossible to process ultrahigh vacuum CF seal knife edges with different position structures and different space angles on a vacuum cavity, wherein the ultrahigh vacuum CF seal knife edge processing technology can be arranged on a processing center by one-time clamping, the processing of the CF seal knife edges on all the rest surfaces except a mounting surface is completed through a semi-fine sleeve boring cutter and a fine sleeve boring cutter, and the size precision, the surface roughness and the form and position precision of a product are well ensured.
In order to achieve the purpose, the invention adopts the following technical scheme:
an ultrahigh vacuum CF sealing knife edge processing technology comprises the following steps:
a. fixing parts: fixing a part to be processed on a fixed table of a processing center;
b. roughly milling parts: all surfaces to be processed of the parts to be processed are processed by a rough milling cutter of a processing center;
c. semi-fine boring parts: processing an outer inclined plane of the CF sealing knife edge by using a semi-fine boring knife; processing an inner inclined plane of a CF sealing cutter edge by using a semi-precision end mill;
d. finely boring parts: processing an outer inclined plane of the CF sealing knife edge by using a fine boring tool; processing an inner inclined plane of the CF sealing knife edge by using a finish end mill;
e. taking out the parts: and taking out the part and inspecting.
In the technical scheme, after the rough milling is carried out on the part to be processed, a technology similar to a countersink is adopted, a special semi-fine boring cutter and a fine boring cutter are adopted, and the finish machining of the CF seal cutter opening surface is completed in a scraping mode, namely only rotary motion and axial feed motion are carried out after a main shaft is positioned, so that the machining of the conical surface cutter of the cutter edge flange is completed on a machining center. The technical scheme solves the problem that the ultra-high vacuum CF sealing knife edge at different positions and different space angles on a vacuum cavity is difficult to process in the prior art, the processing of the CF sealing knife edge on all the rest surfaces except the mounting surface can be completed on a processing center by using a non-standard semi-fine sleeve boring cutter and a fine sleeve boring cutter through one-time clamping, the size precision, the surface roughness and the form and position precision of a product are well ensured, and the simple, easy-to-use and strong-universality solution is provided.
Preferably, the semi-fine boring tool further comprises a semi-fine boring tool, the semi-fine boring tool comprises a first tool body, a first tool holder and a first blade, the first tool holder is fixed with the first tool body, the first blade is fixed with the first tool holder, a first included angle alpha is formed between the lower end surface of the first blade and the rotation axis of the first tool body, and the degree of the first included angle alpha is 65-70 degrees.
In the technical scheme, the inclination angle of the first blade is matched with the external inclined plane of the CF sealing knife edge at 65 degrees or 70 degrees, the material of the first blade is GCr15, and the heat treatment hardness is as follows: 50-55 HRC. The upper part of the first cutter body is a flattening handle and is connected with a main shaft of a machine tool through a side fixing cutter handle, and the lower part of the first cutter body is provided with a cutter holder mounting seat according to different angles of a cutter edge.
Preferably, the first tool body is provided with a guide sinking groove, the side wall of the first tool holder is contacted with the side wall of the guide sinking groove, and the bottom surface of the first tool holder is contacted with the bottom surface of the guide sinking groove. The structure can accurately position the position of the first tool holder, and the accuracy of the installation angle of the tool is ensured.
Preferably, the first cutter holder is provided with a positioning groove and a waist-shaped hole, one end of the first blade is arranged in the positioning groove, the first blade and the first cutter holder are fixed through a clamping bolt, a fixing bolt penetrates through the waist-shaped hole and fixes the first cutter holder on the first cutter body, the first cutter body is provided with a supporting block, an adjusting bolt is arranged on the end face of the first cutter holder, one end of the adjusting bolt is in contact with the supporting block, and the length direction of the waist-shaped hole is parallel to the axis of the adjusting bolt. The size of the knife edge can be finely adjusted through the adjusting bolt behind the first knife holder, and the fine machining allowance of the knife edge is adjusted. The first tool holder adopts an ISO standard tool holder, the middle part of the first tool holder is provided with a bolt hole with an angle, the bottom surface and the side surface of the first tool holder are simultaneously positioned and fastened by tightening a fixing bolt, and an adjusting bolt is arranged behind the first tool holder and used for adjusting the diameter size of the boring tool.
Preferably, the supporting block is provided with a positioning counter bore, and one end of the adjusting bolt is in contact with the bottom surface of the positioning counter bore. The structure can enable the contact position of the adjusting bolt and the supporting block to be more accurate, so that the first knife clamp can be ensured to be accurate after the position is adjusted.
Preferably, the side wall of the head of the adjusting bolt is provided with a plurality of side wall adjusting holes which are uniformly distributed. The structure is convenient to insert into the adjusting hole through the adjusting rod, and the adjusting bolt is rotated, so that the screwing length of the adjusting bolt is adjusted.
Preferably, the fine boring tool comprises a second tool body, a second tool holder and a second blade, the second tool holder is fixed with the second tool body, the second blade is fixed with the second tool holder, a second included angle beta is formed between the lower end surface of the second blade and the rotation axis of the second tool body, and the degree of the second included angle beta is 65-70 degrees.
In the above technical solution, the material of the second cutter body: GCr15, heat treatment hardness: 50-55 HRC. The upper part of the second cutter body is a flattening handle and is connected with a machine tool spindle through a side-fixed cutter handle, the lower part of the second cutter body is provided with a fine-tuning fine boring head mounting seat according to different angles of a cutter edge, the fine-tuning fine boring head adopts a sandvik standard fine-tuning fine boring head, the flange part of the fine-tuning boring head is provided with 3 bolt holes, the fine-tuning fine boring head is positioned and fastened through tightening a mounting screw, the flange surface of the fine-tuning boring head is provided with scale marks, and the diameter size of the boring cutter can be finely tuned; the front part of the fine adjustment boring head is provided with a second blade capable of rotating and cutting, and the second blade can rotate for 3 times.
Preferably, the second cutter body is provided with a positioning step hole, one end of the second cutter holder is matched with the positioning step hole, and the second cutter holder is fixed with the second cutter body through a second bolt. The structure may secure the second toolholder to the second tool body.
The invention has the beneficial effects that: (1) the processing method has simple process, well solves the processing problem of the ultra-high vacuum CF sealing knife edge at different positions and different space angles on the vacuum cavity, and has certain universality; (2) the processing method has high precision, stability, high efficiency and reduced cost; (3) the method is suitable for processing the ultrahigh vacuum CF cutter edges of all specifications.
Drawings
FIG. 1 is a front view of a semi-fine boring tool according to the present invention;
FIG. 2 is an isometric view of a semi-fine boring tool of the present invention;
FIG. 3 is a schematic view of the construction of the fine boring tool of the present invention;
FIG. 4 is a schematic view of the structure of a part to be machined according to the present invention.
In the figure: the semi-finish boring tool comprises a semi-finish boring tool 1, a first tool body 1.1, a guide sink groove 1.1.1, a supporting block 1.1.2, a first tool holder 1.2, a positioning groove 1.2.1, an adjusting bolt 1.2.2, an adjusting hole 1.2.3, a first blade 1.3, a finish boring tool 2, a second tool body 2.1, a second tool holder 2.2, a second blade 2.3 and a part 3 to be machined.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
Example 1:
an ultrahigh vacuum CF sealing knife edge processing technology comprises the following steps:
a. fixing parts: fixing a part 3 to be processed on a fixed table of a processing center;
b. roughly milling parts: all surfaces to be processed of the parts 3 to be processed are processed by a rough milling cutter of a processing center;
c. semi-fine boring parts: processing an outer inclined plane of a CF sealing knife edge by using a semi-fine boring knife 1; processing an inner inclined plane of a CF sealing cutter edge by using a semi-precision end mill;
d. finely boring parts: processing an outer inclined plane of the CF sealing knife edge by using a fine boring tool 2; processing an inner inclined plane of the CF sealing knife edge by using a finish end mill;
e. taking out the parts: and taking out the part and inspecting.
In the technical scheme, after the part 3 to be machined is roughly milled, a spot facing cutter process method is adopted, a special semi-fine boring cutter 1 and a fine boring cutter 2 are adopted, and finish machining of the CF seal cutter opening surface is completed in a scraping mode, namely only rotary motion and axial feed motion are performed after a main shaft is positioned, so that machining of the conical surface of the cutter edge flange is completed on a machining center. The technical scheme solves the problem that the ultra-high vacuum CF sealing knife edge at different positions and different space angles on a vacuum cavity is difficult to process in the prior art, the processing of the CF sealing knife edge on all the rest surfaces except the mounting surface can be completed on a processing center by using a non-standard semi-fine sleeve boring cutter and a fine sleeve boring cutter through one-time clamping, the size precision, the surface roughness and the form and position precision of a product are well ensured, and the simple, easy-to-use and strong-universality solution is provided.
Example 2:
as shown in fig. 1 and 2, the semi-fine boring tool 1 comprises a first tool body 1.1, a first tool holder 1.2 and a first blade 1.3, wherein a guide sinking groove 1.1.1 is formed in the first tool body 1.1, a side wall of the first tool holder 1.2 is in contact with a side wall of the guide sinking groove 1.1.1, and a bottom surface of the first tool holder 1.2 is in contact with a bottom surface of the guide sinking groove 1.1.1. The first tool holder 1.2 is provided with a positioning groove 1.2.1 and a kidney-shaped hole, one end of the first blade 1.3 is arranged in the positioning groove 1.2.1, the first blade 1.3 and the first tool holder 1.2 are fixed through a clamping bolt, a fixing bolt penetrates through the kidney-shaped hole and fixes the first tool holder 1.2 on the first tool body 1.1, a first included angle alpha is formed between the lower end face of the first blade 1.3 and the rotation axis of the first tool body 1.1, and the degree of the first included angle alpha is 65-70 degrees. The first cutter body 1.1 is provided with a supporting block 1.1.2, the end face of the first cutter holder 1.2 is provided with an adjusting bolt 1.2.2, one end of the adjusting bolt 1.2.2 is in contact with the supporting block 1.1.2, and the length direction of the waist-shaped hole is parallel to the axis of the adjusting bolt 1.2.2. And a positioning counter bore is arranged on the supporting block 1.1.2, and one end of the adjusting bolt 1.2.2 is in contact with the bottom surface of the positioning counter bore. The side wall of the head of the adjusting bolt 1.2.2 is provided with a plurality of side wall adjusting holes 1.2.3 which are uniformly distributed.
In the technical scheme, the inclination angle of the first blade 1.3 is matched with the external inclined plane of the CF seal knife edge at 65 degrees or 70 degrees, the first cutter body 1.1 is made of GCr15, and the heat treatment hardness is as follows: 50-55 HRC. The upper part of the first tool body 1.1 is a flattening handle and is connected with a main shaft of a machine tool through a side fixing tool handle, and the lower part of the first tool body 1.1 is provided with a tool holder mounting seat according to different angles of a tool edge. The size of the knife edge can be finely adjusted through the adjusting bolt 1.2.2 behind the first knife holder 1.2, and the fine machining allowance of the knife edge is adjusted. The first tool holder 1.2 adopts an ISO standard turning tool holder, the middle part of the first tool holder 1.2 is provided with a bolt hole with an angle, the bottom surface and the side surface of the first tool holder 1.2 are simultaneously positioned and fastened by tightening a fixing bolt, and an adjusting bolt 1.2.2 is arranged behind the first tool holder 1.2 and used for adjusting the diameter size of the boring tool.
Example 3:
as shown in fig. 3, a fine boring tool 2, the fine boring tool 2 includes a second tool body 2.1, a second tool holder 2.2 and a second insert 2.3, the second tool holder 2.2 is fixed to the second tool body 2.1, the second insert 2.3 is fixed to the second tool holder 2.2, a second included angle β is formed between the lower end surface of the second insert 2.3 and the rotation axis of the second tool body 2.1, and the second included angle β is 65 ° -70 °. The second cutter body 2.1 is provided with a positioning step hole, one end of the second cutter holder 2.2 is matched with the positioning step hole, and the second cutter holder 2.2 is fixed with the second cutter body 2.1 through a second bolt.
In the above technical solution, the material of the second blade body 2.1: GCr15, heat treatment hardness: 50-55 HRC. The upper part of the second cutter body 2.1 is a flattening handle and is connected with a machine tool spindle through a side-fixed cutter handle, the lower part of the second cutter body 2.1 is provided with a fine-tuning fine boring head mounting seat according to different angles of a cutter edge, the fine-tuning fine boring head adopts a sandvik standard fine-tuning fine boring head, the flange part of the fine-tuning boring head is provided with 3 bolt holes, the fine-tuning fine boring head is positioned and fastened through tightening a mounting screw, the flange surface of the fine-tuning boring head is provided with scale marks, and the diameter size of the boring cutter can be finely tuned; the front part of the fine adjustment boring head is provided with a second blade 2.3 capable of being turned and cut, and the second blade 2.3 can be turned for 3 times.
The invention has the beneficial effects that: (1) the processing method has simple process, well solves the processing problem of the ultra-high vacuum CF sealing knife edge at different positions and different space angles on the vacuum cavity, and has certain universality; (2) the processing method has high precision, stability, high efficiency and reduced cost; (3) the method is suitable for processing the ultrahigh vacuum CF cutter edges of all specifications.
Claims (8)
1. A processing technology of an ultra-high vacuum CF sealing knife edge is characterized by comprising the following steps:
a. fixing parts: fixing a part to be processed on a fixed table of a processing center;
b. roughly milling parts: all surfaces to be processed of the parts to be processed are processed by a rough milling cutter of a processing center;
c. semi-fine boring parts: processing an outer inclined plane of the CF sealing knife edge by using a semi-fine boring knife; processing an inner inclined plane of a CF sealing cutter edge by using a semi-precision end mill;
d. finely boring parts: processing an outer inclined plane of the CF sealing knife edge by using a fine boring tool; processing an inner inclined plane of the CF sealing knife edge by using a finish end mill;
e. taking out the parts: and taking out the part and inspecting.
2. The ultra-high vacuum CF seal blade processing technique as claimed in claim 1, further comprising a semi-finishing boring tool, wherein the semi-finishing boring tool comprises a first tool body, a first tool holder and a first blade, the first tool holder is fixed with the first tool body, the first blade is fixed with the first tool holder, the lower end surface of the first blade forms a first included angle alpha with the rotation axis of the first tool body, and the degree of the first included angle alpha is 65-70 degrees.
3. The ultra-high vacuum CF seal cutting edge processing technique as claimed in claim 2, wherein said first cutting body is provided with a guiding sinking groove, the side wall of the first tool holder contacts with the side wall of the guiding sinking groove, and the bottom surface of the first tool holder contacts with the bottom surface of the guiding sinking groove.
4. The ultra-high vacuum CF seal cutter edge processing technology as claimed in claim 2 or 3, wherein a positioning groove and a waist-shaped hole are arranged on the first cutter holder, one end of the first blade is arranged in the positioning groove, the first blade and the first cutter holder are fixed through a clamping bolt, a fixing bolt penetrates through the waist-shaped hole and fixes the first cutter holder on the first cutter body, a supporting block is arranged on the first cutter body, an adjusting bolt is arranged on the end face of the first cutter holder, one end of the adjusting bolt is in contact with the supporting block, and the length direction of the waist-shaped hole is parallel to the axis of the adjusting bolt.
5. The ultrahigh vacuum CF sealing knife edge processing technology as claimed in claim 4, wherein a positioning counter bore is arranged on said supporting block, and one end of the adjusting bolt is in contact with the bottom surface of the positioning counter bore.
6. The ultrahigh vacuum CF seal edge processing technique of claim 4 wherein said adjusting bolt head has a plurality of evenly distributed side wall adjusting holes on its side wall.
7. The ultrahigh vacuum CF sealing blade machining process as claimed in claim 1, comprising a fine boring tool, wherein the fine boring tool comprises a second tool body, a second tool holder and a second blade, the second tool holder is fixed with the second tool body, the second blade is fixed with the second tool holder, the lower end surface of the second blade forms a second included angle β with the rotation axis of the second tool body, and the second included angle β is 65-70 °.
8. The ultrahigh vacuum CF seal cutting edge processing technology as claimed in claim 7, wherein a positioning step hole is arranged on said second cutter body, one end of said second cutter holder is adapted to said positioning step hole, and said second cutter holder is fixed with said second cutter body by a second bolt.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011118297.3A CN112518231A (en) | 2020-10-19 | 2020-10-19 | Machining process for ultrahigh vacuum CF sealing knife edge |
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|---|---|---|---|
| CN202011118297.3A CN112518231A (en) | 2020-10-19 | 2020-10-19 | Machining process for ultrahigh vacuum CF sealing knife edge |
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Application publication date: 20210319 |