CN112517309B - Mesh microstructure for high-viscosity liquid atomization and manufacturing method thereof - Google Patents
Mesh microstructure for high-viscosity liquid atomization and manufacturing method thereof Download PDFInfo
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- CN112517309B CN112517309B CN201910875322.3A CN201910875322A CN112517309B CN 112517309 B CN112517309 B CN 112517309B CN 201910875322 A CN201910875322 A CN 201910875322A CN 112517309 B CN112517309 B CN 112517309B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
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Abstract
The invention discloses a mesh microstructure for atomizing high-viscosity liquid and a manufacturing method thereof. The manufacturing method comprises the following steps: making a mesh template, wherein the mesh template has an array of posts; forming a mesh material layer on a substrate; imprinting the mesh template into the layer of mesh material, wherein the array of posts is fully recessed within the layer of mesh material, and solidifying the layer of mesh material; and removing the mesh template and the substrate to obtain a vibrating membrane, wherein the mesh is formed at the position of the vibrating membrane, which is just opposite to the convex column array. The mesh microstructure can realize normal-temperature atomization of liquid from low viscosity to high viscosity, the atomization is sufficient, the atomized liquid drop volume is small, the flow is large, the mesh surface is smooth, firm and easy to clean, and meanwhile, the manufacturing method has a stable process and is easy to repeat.
Description
Technical Field
The invention belongs to the technical field of liquid atomization, and particularly relates to a mesh microstructure for high-viscosity liquid atomization and a manufacturing method thereof.
Background
The mesh microstructure for atomizing high-viscosity liquid is a spraying device which drives a mesh sheet to vibrate through vibration of a piezoelectric sheet, contacts the liquid and drives the liquid to spray. The diameter of the mesh of the liquid outlet surface on the vibrating mesh plate is a key factor for determining the diameter of atomized liquid drops, and the microstructure of the mesh is one of factors for determining the viscosity of atomized liquid. At present, the mode for realizing the vibrating mesh microstructure in the industry is mainly laser ablation, chemical etching or electroforming technology, the requirements on the aperture and the appearance of the atomizing mesh, the selection of materials and the like are greatly limited by the manufacturing technology, and the atomizing requirement of small aperture, particularly the aperture with the diameter of 1-2 mu m or high-viscosity liquid at normal temperature is difficult to meet.
Disclosure of Invention
(I) technical problems to be solved by the invention
The technical problem solved by the invention is as follows: how to make a mesh microstructure for atomization of a high viscosity liquid that forms a spray of the high viscosity liquid.
(II) the technical scheme adopted by the invention
In order to solve the technical problems, the invention adopts the following technical scheme:
a method of making a mesh microstructure for atomization of a high viscosity liquid, the method comprising:
making a mesh template, wherein the mesh template is provided with a convex column array;
manufacturing and forming a mesh material layer on a substrate;
imprinting the mesh template into the layer of mesh material, wherein the array of posts is fully recessed within the layer of mesh material, and solidifying the layer of mesh material;
and removing the mesh template and the substrate to obtain a vibrating membrane, wherein the mesh is formed at the position of the vibrating membrane, which is just opposite to the convex column array.
Preferably, the mesh template is manufactured as follows:
making a silicon stamp, wherein the silicon stamp has an array of silicon cylinders thereon;
forming an imprint layer on a substrate and imprinting the fabricated silicon stamp into the imprint layer, wherein the array of silicon cylinders is completely recessed within the imprint layer;
solidifying the imprinting layer and demolding, wherein a groove array is formed at the position, opposite to the silicon cylinder array, of the imprinting layer;
manufacturing and forming a metal layer on the imprinting layer, wherein the metal layer covers the groove array;
and removing the imprinting layer and the substrate to obtain a mesh template, wherein a convex column array is formed at the position of the mesh template, which is just opposite to the groove array.
Preferably, the radius of the convex columns of the convex column array increases progressively from one end far away from the mesh template body to one end close to the mesh template body, and the side surfaces of the convex columns are concave arc surfaces.
Preferably, the manufacturing method further comprises removing residual stamping glue films in the meshes.
Preferably, the material of the mesh material layer is polyimide or epoxy resin.
Preferably, the method of fabricating a silicon stamp includes:
forming a mask pattern layer on the silicon substrate;
etching the silicon substrate to form a silicon cylinder array;
and removing the mask pattern layer to obtain the silicon stamp.
Preferably, the radius of the mesh decreases progressively along the direction from the first surface to the second surface of the vibrating diaphragm, and the inner wall surface of the mesh is an arc surface, wherein the first surface and the second surface are arranged oppositely.
Preferably, the radius R of the mesh and the height H of the mesh satisfy the following relationship:
R＝a-Hwherein H represents a distance between the inner wall surface of the mesh and the first surface, a represents a design constant and a>1。
Or the radius R of the mesh hole and the height H of the mesh hole satisfy the following relation:
R＝H-bwhere H represents a distance between the inner wall surface of the mesh and the first surface, b represents a design constant and b>1。
The invention also discloses a mesh microstructure for atomizing the high-viscosity liquid, which is prepared by any one of the preparation methods.
(III) advantageous effects
The invention discloses a mesh microstructure for atomizing high-viscosity liquid and a manufacturing method thereof, and compared with the prior art, the mesh microstructure has the following advantages and beneficial effects: the mesh microstructure for atomizing high-viscosity liquid, which is manufactured by the manufacturing method, can realize normal-temperature atomization of the liquid from low viscosity to high viscosity, and has the advantages of sufficient atomization, small atomized liquid drop volume, large flow, smooth and firm mesh surface, easy cleaning, stable process and easy repetition.
Drawings
FIG. 1 is a flow chart of a method of making a mesh microstructure for atomization of a high viscosity liquid according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a silicon stamp of an embodiment of the invention;
FIG. 3 is a schematic cross-sectional view of a mesh template of an embodiment of the invention;
FIG. 4 is a schematic cross-sectional view of a layer of mesh material and a substrate of an embodiment of the invention;
FIG. 5 is a schematic view of a mesh template imprinting mesh material layer of an embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view of a mesh microstructure for atomization of a high viscosity liquid according to an embodiment of the present invention;
FIG. 7 is a top view of a mesh microstructure for atomization of a high viscosity liquid according to an embodiment of the present invention;
FIG. 8 is an exponential function a of a function A with acceleration as a function of height H for an embodiment of the present inventionHA change curve;
FIG. 9 is a graph H of a function A with acceleration as a function of height H for an embodiment of the present inventionbA power function profile.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In order to solve the problem that the existing vibrating mesh sheet cannot effectively atomize high-viscosity liquid, the application provides a manufacturing method of a mesh microstructure for high-viscosity liquid atomization. As shown in the flowchart of fig. 1, the method for manufacturing a mesh microstructure for atomizing a high-viscosity liquid according to the present embodiment includes the following steps:
step S10: a mesh template 30 is made, wherein the mesh template 30 has an array of posts 31.
Specifically, the mesh pattern plate 30 is preferably a metal pattern plate, and the specific manufacturing method of the mesh pattern plate 30 is as follows:
step S11: a silicon stamp 100 is made, wherein the silicon stamp 100 has an array of silicon cylinders 101 thereon.
As shown in fig. 2, specifically, the step S11 includes the following steps:
step S111: a mask pattern layer is formed on a silicon substrate. Specifically, a silicon substrate is cleaned, a dielectric film is deposited on the silicon substrate by a Plasma Enhanced Chemical Vapor Deposition (PECVD) method, the material of the dielectric film can be silicon oxide or silicon nitride, and finally the dielectric film is subjected to photoetching and dry etching to form a mask pattern layer.
Step S112: and etching the silicon substrate to form a silicon cylinder array. Specifically, a silicon substrate is etched by Reactive Ion Etching (RIE) using the mask pattern layer as a hard mask to form a silicon cylinder array, wherein the height of the cylinders 101 on different silicon substrates ranges from 10 μm to 50 μm.
Step S113: the mask pattern layer is removed to obtain the silicon stamp 100. Specifically, after the silicon cylindrical array 101 is formed, all the dielectric films covering the silicon cylindrical array 101 are removed by a wet process, so as to obtain the silicon stamp 100 with different cylindrical arrays, wherein the diameters of the cylinders of the silicon cylindrical array 101 are gradually increased from one end far away from the silicon substrate body to one end close to the silicon substrate body. As a preferred embodiment, the diameter of the cylinder ranges from 0.5 μm to 5 μm from the end away from the silicon substrate body to the end close to the silicon substrate body, and the outer surface of the cylinder is a concave arc surface.
Step S12: an imprint layer is formed on a substrate and the silicon stamp 100 is imprinted into the imprint layer, wherein the array of silicon cylinders 101 is completely recessed within the imprint layer. The material of the imprinting layer can be PMMA.
Step S13: and solidifying the imprinting layer and demolding, wherein the groove array is formed on the position, opposite to the silicon cylinder array 101, of the imprinting layer.
Step S14: and manufacturing and forming a metal layer on the imprinting layer, wherein the metal layer covers the groove array.
Specifically, the material of the metal layer is preferably nickel. Firstly, a layer of nickel film is deposited on the surface of the stamping layer after demoulding, the nickel film covers the groove array, then the nickel film is used as a seed layer, a nickel metal layer is formed on the surface of the stamping layer by adopting an electroplating process, and the groove array is filled with the nickel metal layer.
Step S15: removing the imprinting layer and the substrate to obtain a mesh template 30, wherein an array of pillars 31 is formed on the mesh template 30 at positions directly opposite to the array of grooves.
Specifically, as shown in fig. 3, the radius of the convex columns of the convex column array 31 increases from the end far away from the mesh template body to the end close to the mesh template body, and the side surfaces of the convex columns are concave arc surfaces.
Step S20: a layer of mesh material 50 is formed over substrate 40.
Specifically, as shown in fig. 4, a transparent substrate such as quartz glass is used as the substrate 40, and a mesh material is coated on the substrate 40 to form a mesh material layer, wherein the mesh material may be polyimide or epoxy resin.
Step S30: imprinting the mesh template 30 into the mesh material layer 50, wherein the array of posts 31 are fully recessed within the mesh material layer 50, and curing the mesh material layer 50, as shown in fig. 5.
Step S40: removing the mesh template 30 and the substrate 40 to obtain the vibrating membrane 10, wherein the mesh 20 is formed at the position of the vibrating membrane 10 opposite to the convex column array 31, as shown in fig. 6.
Further, the manufacturing method further comprises the following steps: and removing residual stamping glue films in the meshes 20.
Specifically, as shown in fig. 6 and 7, the vibrating diaphragm 10 has a first surface 11 and a second surface 12 which are arranged oppositely, a plurality of meshes 20 are arranged in an array and penetrate through the first surface 11 and the second surface 12, the radius of the meshes 20 decreases progressively along the direction from the first surface 11 to the second surface 12, and the inner wall surface of the meshes 20 is an arc surface. As a preferred embodiment, the inner wall surface of the mesh 20 is a convex arc surface facing the first surface 11.
Further, as a preferred embodiment, the radius R of the mesh 20 and the height H of the mesh 20 satisfy the following relationship:
(1)R＝a-Hwhere H represents a distance between the inner wall surface of the mesh 20 and the first surface 11, a represents a design constant and a>1。
Of course, in other embodiments, the radius R of the mesh 20 and the height H of the mesh 20 satisfy the following relationship:
(2)R＝H-bwhere H represents a distance between the inner wall surface of the mesh 20 and the first surface 11, b represents a design constant and b>1。
When the radius R of the mesh 20 and the height H of the radius satisfy the above-mentioned relationship (1) or (2), the mesh 20 can efficiently atomize a liquid having a high viscosity, as specifically demonstrated below:
capillary force pressure formula (1):
the surface tension sigma and the contact angle theta are determined by the type of liquid and the hydrophilic and hydrophobic characteristics of the material surface of the vibrating plate, namely, the larger the surface tension is, the larger the capillary force is, the larger the contact angle is under the condition that the contact angle is less than 90 degrees, and the larger the contact angle is, the smaller the capillary force is; in the case where the contact angle is greater than 90 degrees, the capillary force direction is reversed. Wherein the surface tension σ and the contact angle θ are quantities related to the liquid and the mesh material. Radius R is a quantity related to the design of the mesh structure, the smaller R, the capillary force PcapThe larger; and the larger the variation of R, the higher the capillary pressure PcapThe larger the gradient, the faster the liquid replenishment rate by capillary force.
Further, assume that the radius R of the mesh 20 and the height H of the mesh 20 satisfy the following exponential function:
R＝a-H (2)
to ensure that the exponential function is monotonically decreasing, a >1 needs to be satisfied, a being a design constant.
By substituting formula (2) into formula (1), the capillary pressure function can be obtained as:
the mesh is subdivided into segments of Δ H in the height direction according to Newton's second law
F＝ma1， (4)
Wherein, a1For acceleration, Δ m is the mass of the liquid within Δ H height, ρ is the density, v is the velocity, and t is the time. The acceleration a of the microfluid in the mesh is seen1And capillary pressure PcapIs in direct proportion. Further, the acceleration a of the micro-fluid in the cell1Can be expressed as:
according to the equation (7), the acceleration a of the micro-fluid in the mesh is calculated1And also increases exponentially as the height H of the mesh increases. To further more intuitively see the relationship between microfluidic acceleration and mesh height, assume
A is a function containing acceleration, and assuming that the design constant a is 2, a variation curve of the acceleration function a and the mesh height H can be obtained by computer simulation, as shown in fig. 8.
Because the acceleration driven by capillary force in the mesh is continuously lifted along with the height under the condition, the flow resistance which is increased along with the reduction of the aperture is favorably overcome; the larger the acceleration increment change driven by capillary force is, the more beneficial to overcoming the flow resistance is, the timely supplement of the liquid in the meshes is realized, and the viscosity of the sprayable liquid is improved. Thereby meeting the requirement of spraying a large amount of small liquid drops on the high-frequency vibration mesh sheet.
When further, assume that the radius R of the mesh 20 and the height H of the mesh 20 satisfy the following power function relationship:
R＝H-b (8)
to ensure that the exponential function is monotonically decreasing, b >1 needs to be satisfied, b being a design constant.
Similarly, according to the calculation of the expressions (3), (4), (5), (6) and (8),
according to the formula (9), the acceleration a of the micro-fluid in the mesh is determined1And also increases exponentially as the height H of the mesh increases. Suppose that
And b is 2, and a change curve of the acceleration function A and the mesh height H can be obtained by computer simulation, as shown in figure 9.
In summary, when the radius R of the mesh 20 and the height H of the mesh 20 satisfy the relations (1) and (2), the corresponding mesh microstructures for atomizing a high-viscosity liquid spray a high-viscosity liquid.
The mesh microstructure for atomizing high-viscosity liquid, which is manufactured by the manufacturing method, can realize normal-temperature atomization of the liquid from low viscosity to high viscosity, and has the advantages of sufficient atomization, small atomized liquid drop volume, large flow, smooth and firm mesh surface, easy cleaning, stable process and easy repetition.
Although a few embodiments of the present invention have been shown and described, it would be appreciated by those skilled in the art that changes may be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents, and that such changes and modifications are intended to be within the scope of the invention.
Claims (7)
1. A method for making a mesh microstructure for atomization of a high viscosity liquid, the method comprising:
making a mesh template (30), wherein the mesh template (30) has an array of posts (31);
forming a mesh material layer (50) on a substrate (40);
imprinting the mesh template (30) into the layer of mesh material (50), wherein the array of posts (31) are fully embedded within the layer of mesh material (50), and solidifying the layer of mesh material (50);
removing the mesh template (30) and the substrate (40) to obtain a vibrating membrane (10), wherein a mesh (20) is formed at a position of the vibrating membrane (10) opposite to the convex column array (31);
the vibrating diaphragm (10) is provided with a first surface (11) and a second surface (12) which are oppositely arranged, a plurality of meshes (20) are arrayed and penetrate through the first surface (11) and the second surface (12), the radius of each mesh (20) is gradually reduced along the direction from the first surface (11) to the second surface (12), the inner wall surfaces of the meshes (20) are cambered surfaces, and the first surface (11) and the second surface (12) are oppositely arranged;
the radius R of the mesh (20) and the height H of the mesh (20) satisfy the following relationship:
R＝a-Hwherein H represents a distance between an inner wall surface of the mesh (20) and the first surface (11), a represents a design constant and a>1；
Or, the radius R of the mesh (20) and the height H of the mesh (20) satisfy the following relation:
R＝H-bwherein H represents a distance between an inner wall surface of the mesh (20) and the first surface (11), b represents a design constant and b>1。
2. The method of manufacturing according to claim 1, wherein the mesh template (30) is manufactured as follows:
making a silicon stamp (100), wherein the silicon stamp (100) has an array of silicon cylinders (101) thereon;
forming an imprint layer on a substrate and imprinting said fabricated silicon stamp (100) into said imprint layer, wherein an array of silicon cylinders (101) is completely recessed within said imprint layer;
solidifying the imprinting layer and demolding, wherein a groove array is formed on the position, opposite to the silicon cylinder array (101), of the imprinting layer;
manufacturing and forming a metal layer on the imprinting layer, wherein the metal layer covers the groove array;
removing the imprinting layer and the substrate to obtain a mesh template (30), wherein an array of pillars (31) is formed on the mesh template (30) at positions directly opposite to the array of grooves.
3. The manufacturing method according to claim 1, wherein the radius of the convex columns of the convex column array (31) increases from one end far away from the mesh template body to one end close to the mesh template body, and the side surfaces of the convex columns are concave arc surfaces.
4. The method of claim 1, further comprising removing residual imprint resist within the mesh (20).
5. Method of manufacturing according to claim 1, characterized in that the material of the mesh material layer (50) is polyimide or epoxy.
6. A method of fabricating a silicon stamp (100) as claimed in claim 2, characterized in that the method of fabricating a silicon stamp (100) comprises:
forming a mask pattern layer on the silicon substrate;
etching the silicon substrate to form a silicon cylinder array (101);
the mask pattern layer is removed to obtain a fabricated silicon stamp (100).
7. A mesh microstructure for atomization of high viscosity liquids made by the method of any one of claims 1 to 6.
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